Abstract: A dry developing method for drawing a resist formed on a processed body by leading processing gas between parallel flat electrodes installed in a vacuum processing container and forming the plasma of the processing gas by applying a high frequency power to the electrodes, comprising the step of plasma-processing the resist on an etched layer having an already developed upper layer resist containing silicon and a lower layer resist installed in contact with the lower layer of the upper layer resist, wherein the lower layer resist is processed by a first process for plasma-processing by using the mixed gas of carbon monoxide gas and oxygen gas and a second step for plasma-processing by using the mixed gas of nitrogen gas and hydrogen gas, whereby an accurate drawing can be applied efficiently to the resist.

Abstract: A vehicle camera system for obtaining picture data of a runaway vehicle is provided in a toll road system. A vehicle passing a tollgate (4) is picked up by a camera (6). As a license plate of a vehicle is detected, picture data are cyclically and subsequently stored in a pluarlity of fram memories (20). When the vehicle dishonestly leaves without paying a toll, a tollbooth attendant (m) depresses a push button (3) to generate an instruction signal so that one or a plurality of picture data just before the timing of such depression can be read out from the frame memory (20) to be transmitted to a central unit for separate storage. The instruction signal may also be generated automatically based on detection of the vehicle.