Patents by Inventor Masahide Hayashi

Masahide Hayashi has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20170191830
    Abstract: An inertial sensor having a simple configuration by vacuum sealing a resonator which detects acceleration and exploits a resonance vibration using a high Q value MEMS device. The sensor includes: a detecting proof mass and beam which detects acceleration; a driving electrode which excites the detecting proof mass and beam; a resonant frequency tuning electrode which changes the resonant frequency of the detecting proof mass and beam; and a detecting circuit which applies voltage to the resonant frequency tuning electrode for changing the resonant frequency to cancel a change of the resonant frequency of the detecting proof mass and beam when the acceleration is applied to the detecting proof mass and beam during the vibration of the detecting proof mass and beam by the voltage applied to the detecting proof mass and beam, and outputs the acceleration based on a value of the voltage applied to resonant frequency tuning electrode.
    Type: Application
    Filed: April 8, 2015
    Publication date: July 6, 2017
    Applicant: HITACHI AUTOMOTIVE SYSTEMS, LTD.
    Inventors: Daisuke MAEDA, Heewon JEONG, Masahide HAYASHI
  • Patent number: 9678101
    Abstract: Provided is a sensor signal output apparatus that outputs a sensor signal at times of the sensor being in steady operation and outputs the operational status of the sensor instead of the sensor signal when the sensor is at fault or in non-steady operation in order to thereby to have a receiver machine obtain a correct sensor signal. The sensor signal output apparatus includes a sensor detecting a physical quantity, a diagnosis part diagnosing the operating state of the sensor, and a communication part transmitting the result of detection by the sensor and the result of diagnosis by the diagnosis part. When the sensor is determined to be normally operating, the communication part selectively outputs the result of detection by the sensor. When the sensor is not determined to be normally operating, the communication part selectively outputs a signal indicative of the operating state of the sensor.
    Type: Grant
    Filed: December 3, 2012
    Date of Patent: June 13, 2017
    Assignee: Hitachi Automotive Systems, Ltd.
    Inventors: Toshiaki Nakamura, Masahide Hayashi, Masaru Yamashita
  • Publication number: 20170138981
    Abstract: Provided is a highly reliable acceleration sensor that keeps production costs low and has low zero point drift initially and over time even when used in a poor installation environment. In this acceleration sensor, a weight that rotates when acceleration is applied in the z-direction is disposed in a cavity surrounded by a support substrate and a cap layer. The cap layer is formed such that both sides thereof across the axis of rotation of the weight have different masses per unit area.
    Type: Application
    Filed: March 25, 2015
    Publication date: May 18, 2017
    Inventors: Masahide HAYASHI, Heewon JEONG
  • Patent number: 9651408
    Abstract: To suppress variations of a vacuum pressure atmosphere in a physical sensor, a physical sensor in which a sensing part that measures a physical quantity is provided in a vacuum space, includes a sensor part in which a plurality of substrates are stacked, and a cavity substrate 9 having a space and provided on an upper surface side or a lower surface side of the sensor part by bonding, wherein the sensing part communicates with a space of the cavity substrate via a ventilation passage 11a provided in the sensor part.
    Type: Grant
    Filed: December 20, 2013
    Date of Patent: May 16, 2017
    Assignee: Hitachi Automotive Systems, Ltd.
    Inventors: Masatoshi Kanamaru, Takanori Aono, Masahide Hayashi, Heewon Jeong
  • Publication number: 20170045360
    Abstract: The purpose of the present invention is to provide an inertial force detection device that can more accurately detect faults in a temperature sensor. Provided is an inertial force detection device configured so that in a state where an oscillating body is made to oscillate in a first direction, the amount of displacement when the oscillating body is displaced in a second direction due to the generation of angular velocity is detected as angular velocity, wherein the inertial force detection device has a means for performing control so that the oscillating body enters a state of resonance in the first direction, a temperature detection means for detecting temperature, and a means for detecting faults in the temperature detection means, and outputs a plurality of signals, which indicate the fault detection results of the three means, continuously from a single signal wire.
    Type: Application
    Filed: April 8, 2015
    Publication date: February 16, 2017
    Applicant: HITACHI AUTOMOTIVE SYSTEMS, LTD.
    Inventors: Toshiaki NAKAMURA, Heewon JEONG, Masahide HAYASHI
  • Patent number: 9568490
    Abstract: Provided is an angular velocity sensor including a plurality of angular velocity detection units each outputting a different detection result, and including a common driving circuit to drive the angular velocity detection units. The angular velocity detection units of the angular velocity sensor of the present invention are configured to have different driving amplitudes when being driven by a driving signal at the same frequency.
    Type: Grant
    Filed: March 19, 2012
    Date of Patent: February 14, 2017
    Assignee: Hitachi Automotive Systems, Ltd.
    Inventors: Heewon Jeong, Masahide Hayashi, Kiyoko Yamanaka
  • Patent number: 9557345
    Abstract: In an inertial sensor, an acceleration sensor element section includes a first movable section configured to respond to acceleration applied thereto and a diagnosis electrode configured to displace the first movable section with an electrostatic force according to voltage application from a control circuit section. An angular velocity sensor element section includes a second movable section configured to respond to an angular velocity applied thereto and a driving electrode configured to displace the second movable section with an electrostatic force according to voltage application from the control circuit section. A voltage signal input to the driving electrode and a voltage signal input to the diagnosis electrode are the same voltage signal. The voltage signal input to the diagnosis electrode is a signal for detecting a mechanical failure. Carrier signal for detecting displacement of the first movable section has frequency higher than frequency of signal applied to the diagnosis electrode.
    Type: Grant
    Filed: June 19, 2013
    Date of Patent: January 31, 2017
    Assignee: Hitachi Automotive Systems, Ltd.
    Inventors: Daisuke Maeda, Heewon Jeong, Masahide Hayashi
  • Publication number: 20160146849
    Abstract: To provide a resin-sealed sensor device in which a sensor element that detects an inertial force such as acceleration or angular velocity is mounted on a pad, and the entire thereof is molded by resin, the resin-sealed sensor device with a high reliability by suppressing or resolving a sensor output error by reducing or resolving inclination or deformation of the sensor element or the pad at the time of resin injection, in a resin-sealed sensor device 100 including: a circuit unit 10 that includes a sensor element 1 for detection of a physical quantity, a semiconductor chip 2, a pad 3 of which shape in a plan view has any shape among a rectangle, a circle and an ellipse, and supported leads 5A to 5D and an outer conductor lead 4 to be connected to the pad 3; and a molded resin body 20 that seals the circuit unit 10, each of the supported leads 5A to 5D is arranged in each divided regions to be formed by dividing the shape into four virtual regions when an intersection point O between two axes L1 and L2, perpe
    Type: Application
    Filed: February 5, 2014
    Publication date: May 26, 2016
    Inventors: Akihiro YAGUCHI, Masahide HAYASHI
  • Publication number: 20160131678
    Abstract: To provide a high-reliable transfer mold type sensor device in which a combined sensor including a plurality of sensors having a function of detecting physical amounts, a substrate processing a signal from the combined sensor and controlling a signal input/output with an external device, a chip pad mounted with the combined sensor and the substrate, and a lead frame are sealed with a mold resin and a package is formed, the combined sensor is configured to be thicker than the substrate and the chip pad, a principal surface side of the combined sensor is covered with the mold resin and a back surface side thereof contacts the substrate by a joint material, and the combined sensor is arranged on a package neutral surface in a cross-section of a thickness direction of the package including the combined sensor, the substrate, and the chip pad.
    Type: Application
    Filed: February 5, 2014
    Publication date: May 12, 2016
    Inventors: Akihiro YAGUCHI, Masahide HAYASHI, Kazunori OHTA, Akihiro OKAMOTO
  • Patent number: 9279827
    Abstract: Reliability and accuracy of a sensor are secured while adjustment cost of a sensor module is suppressed. A signal component analysis part 10 receives a signal output from a signal processing part 7 before passing through a low-pass filter 8, analyzes whether or not application of a fragile frequency with respect to a physical quantity is equal to or more than a threshold level, if the application of the fragile frequency is equal to or more than the threshold level, outputs output stop signals to output signal control parts 9, 16. The output signal control parts 9, 16 receive control signals output from the signal component analysis part 10, and outputs an acceleration signal and a physical quantity signal from which noise has been removed by the low-pass filters 8, 15 through the signal processing parts 7, 14.
    Type: Grant
    Filed: November 24, 2011
    Date of Patent: March 8, 2016
    Assignee: Hitachi Automotive Systems, Ltd.
    Inventors: Daisuke Maeda, Heewon Jeong, Masahide Hayashi
  • Publication number: 20160011254
    Abstract: The present invention provides a technology capable of suppressing a fault which has occurred in a certain detection element from affecting other detection units in which no fault has occurred in a compound sensor. The compound sensor includes: a plurality of detection units made up of C/V conversion circuits 321a and 321b, amplifier circuits 322a and 322b, ADCs 323a and 323b, diagnosis voltage outputting DACs 327a and 327b, carrier signal generating DACs 328a and 328b and substrate voltage generating DACs 329a and 329b which are signal detection circuits provided for each of a plurality of detection elements; a power source voltage input unit 331 and a GND voltage input unit 332 shared among each of the plurality of detection units; and overcurrent switch circuits 101a and 101b which are fault detection circuits provided for each of the plurality of detection units for detecting a fault of each detection element and stopping power supply to the detection unit in which the fault has occurred.
    Type: Application
    Filed: November 19, 2013
    Publication date: January 14, 2016
    Inventors: Daisuke MAEDA, Ichiroh OHSAKA, Masahide HAYASHI
  • Publication number: 20160003650
    Abstract: To suppress variations of a vacuum pressure atmosphere in a physical sensor, a physical sensor in which a sensing part that measures a physical quantity is provided in a vacuum space, includes a sensor part in which a plurality of substrates are stacked, and a cavity substrate 9 having a space and provided on an upper surface side or a lower surface side of the sensor part by bonding, wherein the sensing part communicates with a space of the cavity substrate via a ventilation passage 11a provided in the sensor part.
    Type: Application
    Filed: December 20, 2013
    Publication date: January 7, 2016
    Inventors: Masatoshi KANAMARU, Takanori AONO, Masahide HAYASHI, Heewon JEONG
  • Patent number: 9229025
    Abstract: In order to provide an inertial sensor capable of suppressing a wrong diagnosis even in an adverse environment such that sudden noise occurs, an inertial sensor is provided with a movable part (105), a first detection unit (C1, C2) for detecting the amount of displacement of the movable part (105), a forced vibration means (503, C3, C4) for forcedly vibrating the movable part (105) by applying a diagnosis signal, a physical quantity calculation unit (502) for calculating the physical quantity from a detection signal from the first detection unit (C1, C2), and an abnormality determination unit (504) for determining the presence or absence of the abnormality for the physical quantity using the diagnosis signal obtained via the first detection unit (C1, C2), and is used within a vehicle, the inertial sensor further comprising a second sensor (510) mounted in the same vehicle and connected to the abnormality determination unit (504).
    Type: Grant
    Filed: August 8, 2011
    Date of Patent: January 5, 2016
    Assignee: Hitachi Automotive Systems, Ltd.
    Inventors: Kiyoko Yamanaka, Heewon Jeong, Toshiaki Nakamura, Masahide Hayashi
  • Publication number: 20150369603
    Abstract: In order to provide an inertial force detection device with improved reliability, an inertial force detection device that has a vibrating body displaceable in a first direction and a second direction perpendicular to each other and detects, as angular velocity, the amount of displacement when the vibrating body is displaced in the second direction due to the occurrence of angular velocity in a state where the vibrating body is made to vibrate in the first direction includes, for example, digital signal processing means, means for detecting a failure in a register unit and a calculation unit of the digital signal processing means, and means for outputting a failure detection result to the outside.
    Type: Application
    Filed: December 13, 2013
    Publication date: December 24, 2015
    Applicant: HITACHI AUTOMOTIVE SYSTEMS, LTD.
    Inventors: Toshiaki NAKAMURA, Masahide HAYASHI, Ichiro OHSAKA, Yasutaka TSURU, Daisuke MAEDA
  • Publication number: 20150355218
    Abstract: An inertial sensor not susceptible to temperature change and vibration disturbance in an implementation environment of the inertial sensor is provided. In the present invention, for example, as illustrated in FIG. 9, an extending portion EXU is provided so as to connect to a fixing portion FU3, this extending portion EXU and a third region P3 which configures part of a mass body MS are connected via a support beam BM3 and a support beam BM4, and the support beam BM3 and the support beam BM4 are disposed oppositely with respect to a virtual line IL1. With this, natural frequency of an unwanted mode due to rotation and torsion of the mass body MS can be shifted to a high frequency band.
    Type: Application
    Filed: November 13, 2013
    Publication date: December 10, 2015
    Inventors: Heewon JEONG, Kiyoko YAMANAKA, Masahide HAYASHI
  • Patent number: 9182421
    Abstract: This invention is directed to provision of high-performance inertial sensor that can sustain SNR even in an environment where vibration disturbance exists. A vibration type inertial sensor comprises: two deadweights (2, 3); means (C1, C2, C3, C4, +vd, ?vd) for displacing the two dead weights in the anti-phase; two sets of electrodes (C5, C6, C7, C8) for detecting, as capacitance changes, the displacements of the two dead weights; and a C/V converting unit (53) for converting the capacitance changes of the electrodes to electric signals. In the vibration type inertial sensor, a set of electrodes (e.g., C5 and C8), which exhibit an increased electrostatic capacitance therebetween in the case where the two dead weights (2, 3) are displaced in the anti-phase, are electrically connected to each other, and a set of electrodes (e.g.
    Type: Grant
    Filed: May 25, 2011
    Date of Patent: November 10, 2015
    Assignee: Hitachi Automotive Systems, Ltd.
    Inventors: Heewon Jeong, Munenori Degawa, Masahide Hayashi
  • Publication number: 20150301075
    Abstract: A technique of preventing the function stop caused by false operation and false output of an inertial sensor by canceling a signal caused by applying of an acceleration other than a measurement signal before input to an LSI circuit is provided.
    Type: Application
    Filed: October 16, 2012
    Publication date: October 22, 2015
    Inventors: Kiyoko Yamanaka, Heewon Jeong, Masahide Hayashi
  • Patent number: 9151776
    Abstract: An object of the invention is to provide a combined sensor capable of suppressing the influence of electrostatic force generated by a potential difference and preventing a reduction in the S/N ratio or a variation in the sensitivity of a sensor. A combined sensor according to the invention includes first and second movable portions and first and second dummy portions provided around the first and second movable portions, which are formed in a layer of a laminated substrate. The first dummy portion and the second dummy portion are electrically separated from each other. A first potential is applied to the first movable portion and the first dummy portion and a second potential is applied to the second movable portion and the second dummy portion (see FIG. 2).
    Type: Grant
    Filed: January 10, 2012
    Date of Patent: October 6, 2015
    Assignee: Hitachi Automotive Systems, Ltd.
    Inventors: Heewon Jeong, Masahide Hayashi
  • Patent number: 9146253
    Abstract: An acceleration sensor and an angular velocity sensor are sealed in respective pressure atmospheres suitable therefor in the process of a series of bonding steps, thereby improving the detection sensibilities of the sensors. A movable member 111 of an acceleration sensor 11 and a vibrator 121 of an angular velocity sensor 12 are fabricated on the same sensor wafer 10 with a wall 16 interposed therebetween. A cap wafer 20 is formed in which gaps 21, 22 corresponding to the movable member 111 of the acceleration sensor 11 and the vibrator 121 of the angular velocity sensor 12 are provided. Bumps 23 are disposed near the gap 22 of the angular velocity sensor 12. The acceleration sensor 11 is sealed at atmospheric pressure. Then, the angular velocity sensor 12 is subjected to high temperature and a high-load and is vacuum-sealed. Thereafter, cutting with a diamond grindstone and mounting of circuit substrates and a wiring substrate are performed to form a combined sensor.
    Type: Grant
    Filed: May 20, 2011
    Date of Patent: September 29, 2015
    Assignee: Hitachi Automotive Systems, Ltd.
    Inventors: Takanori Aono, Kengo Suzuki, Akira Koide, Masahide Hayashi
  • Patent number: 9123188
    Abstract: Provided is an acceleration detection apparatus installed in a vehicle and including a plurality of acceleration sensors having different characteristics, a function to input diagnosis signals in order to diagnose the outputs of the acceleration sensors and diagnose the fault detection functions while the vehicle stops, and a function to compare the outputs of the sensors in order to detect a fault while the vehicle runs.
    Type: Grant
    Filed: August 9, 2013
    Date of Patent: September 1, 2015
    Assignee: Hitachi Automotive Systems, Ltd.
    Inventors: Toshiaki Nakamura, Masahide Hayashi