Patents by Inventor Masahiro Inohara

Masahiro Inohara has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 10957641
    Abstract: According to one embodiment, a semiconductor device includes a substrate, a first conductive layer, a second conductive layer, and a contact plug. The first conductive layer is disposed on the substrate and contains a metal silicide. The second conductive layer is disposed on the first conductive layer and contains a metal having bond dissociation energy larger than bond dissociation energy of the metal silicide. The contact plug is disposed on the second conductive layer and includes a main body portion, and a peripheral portion disposed on the surface of the main body portion and containing titanium.
    Type: Grant
    Filed: February 27, 2020
    Date of Patent: March 23, 2021
    Assignee: TOSHIBA MEMORY CORPORATION
    Inventor: Masahiro Inohara
  • Publication number: 20200194369
    Abstract: According to one embodiment, a semiconductor device includes a substrate, a first conductive layer, a second conductive layer, and a contact plug. The first conductive layer is disposed on the substrate and contains a metal silicide. The second conductive layer is disposed on the first conductive layer and contains a metal having bond dissociation energy larger than bond dissociation energy of the metal silicide. The contact plug is disposed on the second conductive layer and includes a main body portion, and a peripheral portion disposed on the surface of the main body portion and containing titanium.
    Type: Application
    Filed: February 27, 2020
    Publication date: June 18, 2020
    Applicant: TOSHIBA MEMORY CORPORATION
    Inventor: Masahiro INOHARA
  • Patent number: 10615115
    Abstract: According to one embodiment, a semiconductor device includes a substrate, a first conductive layer, a second conductive layer, and a contact plug. The first conductive layer is disposed on the substrate and contains a metal silicide. The second conductive layer is disposed on the first conductive layer and contains a metal having bond dissociation energy larger than bond dissociation energy of the metal silicide. The contact plug is disposed on the second conductive layer and includes a main body portion, and a peripheral portion disposed on the surface of the main body portion and containing titanium.
    Type: Grant
    Filed: March 1, 2018
    Date of Patent: April 7, 2020
    Assignee: TOSHIBA MEMORY CORPORATION
    Inventor: Masahiro Inohara
  • Publication number: 20190088592
    Abstract: According to one embodiment, a semiconductor device includes a substrate, a first conductive layer, a second conductive layer, and a contact plug. The first conductive layer is disposed on the substrate and contains a metal silicide. The second conductive layer is disposed on the first conductive layer and contains a metal having bond dissociation energy larger than bond dissociation energy of the metal silicide. The contact plug is disposed on the second conductive layer and includes a main body portion, and a peripheral portion disposed on the surface of the main body portion and containing titanium.
    Type: Application
    Filed: March 1, 2018
    Publication date: March 21, 2019
    Applicant: TOSHIBA MEMORY CORPORATION
    Inventor: Masahiro INOHARA
  • Patent number: 9576948
    Abstract: A semiconductor device includes a first and second transistor. Each of the first and the second transistors includes a well of a first conductivity type, a band-shaped region provided on the well, a drain region of a second conductivity type provided on the well, and a gate electrode. The band-shaped region, the drain region and the gate electrode extend in a first direction. The band-shaped region includes a back gate region of the first conductivity type and a source region of the second conductivity type. The back gate region and the source region are arranged alternately along the first direction in the band-shaped region. A ratio of a length of the source region to a length of the back gate region along the first direction of the first transistor is greater than the ratio of the second transistor.
    Type: Grant
    Filed: June 23, 2015
    Date of Patent: February 21, 2017
    Assignee: Kabushiki Kaisha Toshiba
    Inventors: Kanako Komatsu, Keita Takahashi, Masahiro Inohara
  • Patent number: 9318548
    Abstract: A semiconductor device includes a semiconductor substrate, a semiconductor layer, a first electrode, and a first insulating film. The semiconductor layer is provided on the semiconductor substrate. The semiconductor layer includes first-fifth regions. The first region includes a first portion and a second portion arranged with the first portion. The second region is provided in a surface of the first portion. The third region is provided between the second portion and the second region in the surface of the first portion. The fourth region is provided between the second portion and the third region in the surface of the first portion. The fifth region is provided in a surface of the fourth region. The first electrode is provided between the fifth region and the second portion on the semiconductor layer. The first insulating film is provided between the semiconductor layer and the first electrode.
    Type: Grant
    Filed: March 10, 2015
    Date of Patent: April 19, 2016
    Assignee: Kabushiki Kaisha Toshiba
    Inventors: Yasunori Iwatsu, Masahiro Inohara
  • Publication number: 20160079348
    Abstract: A semiconductor device includes a semiconductor substrate, a semiconductor layer, a first electrode, and a first insulating film. The semiconductor layer is provided on the semiconductor substrate. The semiconductor layer includes first-fifth regions. The first region includes a first portion and a second portion arranged with the first portion. The second region is provided in a surface of the first portion. The third region is provided between the second portion and the second region in the surface of the first portion. The fourth region is provided between the second portion and the third region in the surface of the first portion. The fifth region is provided in a surface of the fourth region. The first electrode is provided between the fifth region and the second portion on the semiconductor layer. The first insulating film is provided between the semiconductor layer and the first electrode.
    Type: Application
    Filed: March 10, 2015
    Publication date: March 17, 2016
    Inventors: Yasunori Iwatsu, Masahiro Inohara
  • Publication number: 20150380546
    Abstract: A semiconductor device includes a first and second transistor. Each of the first and the second transistors includes a well of a first conductivity type, a band-shaped region provided on the well, a drain region of a second conductivity type provided on the well, and a gate electrode. The band-shaped region, the drain region and the gate electrode extend in a first direction. The band-shaped region includes a back gate region of the first conductivity type and a source region of the second conductivity type. The back gate region and the source region are arranged alternately along the first direction in the band-shaped region. A ratio of a length of the source region to a length of the back gate region along the first direction of the first transistor is greater than the ratio of the second transistor.
    Type: Application
    Filed: June 23, 2015
    Publication date: December 31, 2015
    Inventors: Kanako Komatsu, Keita Takahashi, Masahiro Inohara
  • Publication number: 20150263090
    Abstract: According to one embodiment, a semiconductor device includes a silicon substrate, a first semiconductor element, a first semiconductor layer, and a second semiconductor element. The silicon substrate includes a first portion and a second portion. The first portion has a first face. The second portion has a second face. An angle between the first face and the second face is 125 degrees or more and 126 degrees or less. The first semiconductor element is provided at the first portion. The first semiconductor layer is provided on the second face. The second semiconductor element is provided at the first semiconductor layer.
    Type: Application
    Filed: September 8, 2014
    Publication date: September 17, 2015
    Inventor: Masahiro INOHARA
  • Patent number: 8970048
    Abstract: A higher aspect ratio for upper level metal interconnects is described for use in higher frequency circuits. Because the skin effect reduces the effective cross-sectional area of conductors at higher frequencies, various approaches are described to reduce the effective RC delay in interconnects.
    Type: Grant
    Filed: December 30, 2011
    Date of Patent: March 3, 2015
    Assignee: Kabushiki Kaisha Toshiba
    Inventor: Masahiro Inohara
  • Patent number: 8629437
    Abstract: According to embodiments, there is provided a semiconductor device, including: a logic circuit; an interlayer insulating film formed above the logic circuit; an amorphous silicon layer including: a non-silicide layer formed on the interlayer insulating film; and a silicide layer formed on the non-silicide layer; a TFT formed on the amorphous silicon layer; and a contact plug formed to plug a through hole penetrating the interlayer insulating film, the contact plug being electrically connected to the logic circuit, an upper part of the contact plug being connected to the silicide layer.
    Type: Grant
    Filed: March 18, 2011
    Date of Patent: January 14, 2014
    Assignee: Kabushiki Kaisha Toshiba
    Inventors: Tatsuya Ishida, Masahiro Inohara
  • Patent number: 8546518
    Abstract: A method is provided for producing a polyarylene sulfide by reacting a sulfidizing agent with a dihalogenated aromatic compound in an organic polar solvent in the presence of an alkali metal hydroxide, the method includes <Step 1>: carrying out the reaction in such a manner that the polymerization time in a temperature range of 230° C. to less than 245° C. (T1a) is not less than 30 minutes and less than 3.5 hours and that the conversion ratio of the dihalogenated aromatic compound at the end of the step is 70 to 98 mol. % and <Step 2>: carrying out the reaction in such a manner that the polymerization time in a temperature range of 245° C. to less than 280° C. (T2) is not less than 5 minutes and less than 1 hour.
    Type: Grant
    Filed: August 26, 2010
    Date of Patent: October 1, 2013
    Assignee: Toray Industries, Inc.
    Inventors: Takeshi Unohara, Hiroyuki Isago, Toru Nishimura, Masahiro Inohara
  • Patent number: 8252692
    Abstract: A semiconductor device according to one embodiment includes: a substrate having an element region where a semiconductor element is formed; a via hole formed in a portion of the substrate adjacent to the element region; a conducting portion provided in the via hole via an insulating layer; and a buffer layer provided between the substrate and the insulating layer, wherein the buffer layer is made of a material in which a difference in thermal expansion coefficient between the substrate and the buffer layer is smaller than that between the substrate and the insulating layer.
    Type: Grant
    Filed: June 27, 2011
    Date of Patent: August 28, 2012
    Assignee: Kabushiki Kaisha Toshiba
    Inventor: Masahiro Inohara
  • Publication number: 20120178898
    Abstract: A method is provided for producing a polyarylene sulfide by reacting a sulfidizing agent with a dihalogenated aromatic compound in an organic polar solvent in the presence of an alkali metal hydroxide, the method includes <Step 1>: carrying out the reaction in such a manner that the polymerization time in a temperature range of 230° C. to less than 245° C. (T1a) is not less than 30 minutes and less than 3.5 hours and that the conversion ratio of the dihalogenated aromatic compound at the end of the step is 70 to 98 mol. % and <Step 2>: carrying out the reaction in such a manner that the polymerization time in a temperature range of 245° C. to less than 280° C. (T2) is not less than 5 minutes and less than 1 hour.
    Type: Application
    Filed: August 26, 2010
    Publication date: July 12, 2012
    Applicant: Toray Industries, Inc.
    Inventors: Takeshi Unohara, Hiroyuki Isago, Toru Nishimura, Masahiro Inohara
  • Publication number: 20120104576
    Abstract: A higher aspect ratio for upper level metal interconnects is described for use in higher frequency circuits. Because the skin effect reduces the effective cross-sectional area of conductors at higher frequencies, various approaches are described to reduce the effective RC delay in interconnects.
    Type: Application
    Filed: December 30, 2011
    Publication date: May 3, 2012
    Applicant: KABUSHIKI KAISHA TOSHIBA
    Inventor: Masahiro INOHARA
  • Publication number: 20120068179
    Abstract: According to embodiments, there is provided a semiconductor device, including: a logic circuit; an interlayer insulating film formed above the logic circuit; an amorphous silicon layer including: a non-silicide layer formed on the interlayer insulating film; and a silicide layer formed on the non-silicide layer; a TFT formed on the amorphous silicon layer; and a contact plug formed to plug a through hole penetrating the interlayer insulating film, the contact plug being electrically connected to the logic circuit, an upper part of the contact plug being connected to the silicide layer.
    Type: Application
    Filed: March 18, 2011
    Publication date: March 22, 2012
    Applicant: KABUSHIKI KAISHA TOSHIBA
    Inventors: Tatsuya Ishida, Masahiro Inohara
  • Patent number: 8102059
    Abstract: A higher aspect ratio for upper level metal interconnects is described for use in higher frequency circuits. Because the skin effect reduces the effective cross-sectional area of conductors at higher frequencies, various approaches are described to reduce the effective RC delay in interconnects.
    Type: Grant
    Filed: March 11, 2009
    Date of Patent: January 24, 2012
    Assignee: Kabushiki Kaisha Toshiba
    Inventor: Masahiro Inohara
  • Publication number: 20110256703
    Abstract: A semiconductor device according to one embodiment includes: a substrate having an element region where a semiconductor element is formed; a via hole formed in a portion of the substrate adjacent to the element region; a conducting portion provided in the via hole via an insulating layer; and a buffer layer provided between the substrate and the insulating layer, wherein the buffer layer is made of a material in which a difference in thermal expansion coefficient between the substrate and the buffer layer is smaller than that between the substrate and the insulating layer.
    Type: Application
    Filed: June 27, 2011
    Publication date: October 20, 2011
    Applicant: KABUSHIKI KAISHA TOSHIBA
    Inventor: Masahiro Inohara
  • Patent number: 7994641
    Abstract: A semiconductor device according to one embodiment includes: a substrate having an element region where a semiconductor element is formed; a via hole formed in a portion of the substrate adjacent to the element region; a conducting portion provided in the via hole via an insulating layer; and a buffer layer provided between the substrate and the insulating layer, wherein the buffer layer is made of a material in which a difference in thermal expansion coefficient between the substrate and the buffer layer is smaller than that between the substrate and the insulating layer.
    Type: Grant
    Filed: June 26, 2009
    Date of Patent: August 9, 2011
    Assignee: Kabushiki Kaisha Toshiba
    Inventor: Masahiro Inohara
  • Publication number: 20100317615
    Abstract: A method of enhancing ocular penetration of a drug in an eyedrop by administering to an eye, an eyedrop containing, particulate agar having a weight-average molecular weight of from 5,000 to 1,200,000, the particulate agar being obtained by dissolving agar into an aqueous solution by heating and then cooling the resultant mixture to avoid gelling, while applying a stress by vibration, shearing, stirring, compression or pulverizing, wherein the particulate agar is in an amount of 0.1 to 10 wt %.
    Type: Application
    Filed: August 16, 2010
    Publication date: December 16, 2010
    Applicants: TORAY INDUSTRIES, INC., SANTEN PHARMACEUTICAL CO., LTD.
    Inventors: Masahiro Inohara, Masahito Yoshikawa, Takashi Taniguchi, Mitsuru Yokota, Naoki Shimoyama, Masaki Ue, Miho Araki