Abstract: In a method for removing a boron film formed on a substrate by CVD, heat treatment is performed on a part or all boron film in an oxidizing atmosphere and oxidizing a heat-treated portion. Then, an oxidized portion of the boron film is removed by water or aqueous solution containing electrolyte ions.

Abstract: There is provided a method of forming a boron film on a substrate on which a semiconductor device is formed, by plasmarizing a reaction gas containing a boron-containing gas under a process atmosphere regulated to a pressure which falls within a range of 0.67 to 33.3 Pa (5 to 250 mTorr). The boron film is formed on a substrate on which a semiconductor device is formed, by plasmarizing a reaction gas containing a boron-containing gas under a process atmosphere regulated to a pressure which falls within a range of 0.67 to 33.3 Pa (5 to 250 mTorr).

Abstract: An operation control apparatus of air-conditioning apparatus having an outdoor unit and an indoor unit includes a controller programmed to execute energy conservation control of the air conditioning apparatus. The controller includes at least one required temperature calculation part calculating a required evaporation temperature or a required condensation temperature based on either a current amount of heat exchanged in a usage-side heat exchanger of the indoor unit and a greater amount of heat exchanged in the usage-side heat exchanger than the current amount, or an operating state amount that yields the current amount of heat exchanged in the usage-side heat exchanger and an operating state amount that yields the greater amount of heat exchanged in the usage-side heat exchanger than the current amount.

Abstract: A refrigeration apparatus uses R32 as a refrigerant, and includes a compressor, a condenser, an expansion mechanism, an evaporator, an intermediate injection channel and a suction injection channel. The intermediate injection channel guides a part of the refrigerant flowing from the condenser toward the evaporator to the compressor, causing the refrigerant to merge with intermediate-pressure refrigerant of the compressor. The suction injection channel guides a part of the refrigerant flowing from the condenser toward the evaporator to the suction passage, causing the refrigerant to merge with low-pressure refrigerant sucked into the compressor.

Abstract: In a refrigeration apparatus, in a first operation mode, a comparison is made between a first liquid pipe temperature, which is a temperature of a refrigerant on a side of a liquid pipe heat exchanger that is near usage-side heat exchangers, and a second liquid pipe temperature, which is a temperature of the refrigerant on a side of the liquid pipe heat exchanger that is near a plurality of heat-source-side heat exchangers, the liquid pipe heat exchanger performing heat exchange with the refrigerant flowing through liquid sides of the heat-source-side heat exchangers. When an evaporation-switch liquid pipe temperature condition is satisfied, the heat-source-side heat exchanger functioning as a radiator of the refrigerant is switched to an evaporator of the refrigerant, and the first operation mode is switched to a second operation mode in which the plurality of heat-source-side heat exchangers are caused to function as evaporators of the refrigerant.

Abstract: A refrigeration apparatus uses R32 as refrigerant, and includes a compressor, a condenser, an expansion mechanism, an evaporator, a branch flow channel branching from a main refrigerant channel joining the condenser and the evaporator, a first opening adjustable valve disposed along the branch flow channel, an injection heat exchanger, a first injection channel, a refrigerant storage tank disposed along the main refrigerant channel, and a second injection channel. The injection heat exchanger exchanges heat between refrigerant in the main refrigerant channel and refrigerant passing through the first opening adjustable valve. The first injection channel guides refrigerant that flows in the branch flow channel and that exits from the injection heat exchanger to the compressor or the suction passage. The second injection channel guides a gas component of refrigerant accumulated inside the refrigerant storage tank to the compressor or the suction passage.

Abstract: Provided is a doping method for doping by injecting a dopant into a processing target substrate. According to this doping method, a value of bias electric power supplied during a plasma doping processing is set to a predetermined value on premise of a washing processing to be performed after a plasma doping, and plasma is generated within a processing vessel using microwaves so as to perform the plasma doping processing on the processing target substrate hold on a holding pedestal in the processing vessel.

Abstract: This air conditioner performs a cooling operation and a heating operation in parallel with each other with an outdoor unit and indoor units connected together through two communication pipes. The air conditioner includes a switching mechanism changing the directions of refrigerants flowing through the communication pipes depending on whether a heating dominant operation is being performed in a first load region where a cooling load is relatively light or a second load region where the cooling load is heavier than in the first load region. In the second load region, the switching mechanism allows a low-pressure refrigerant to flow from the indoor units to the outdoor unit through the second communication pipe thicker than the first communication pipe to reduce a performance deterioration due to the pressure loss involved with the heating dominant operation.

Abstract: An air conditioning apparatus uses R32 as a refrigerant, and includes a compressor, a condenser, an expansion mechanism, an evaporator, an intermediate injection channel, a suction injection channel, a switching mechanism, a branch flow channel, first and second injection opening adjustable valves, an injection heat exchanger, a refrigerant storage tank, a bypass channel, and a control part. The switching mechanism switches between an intermediate injection condition in which refrigerant flows in the intermediate injection channel, and a suction injection condition in which refrigerant flows in the suction injection channel. The branch flow channel branches from a main refrigerant channel which joins the condenser and the evaporator, and guides the refrigerant to the intermediate injection channel and the suction injection channel.

Abstract: Operation switching units, each changing directions of a refrigerant flowing through its associated indoor unit in response to a switch from a cooling operation to a heating operation, or vice versa, are each connected with the associated indoor unit through indoor communication pipes; a gas-liquid separation unit is connected with an outdoor unit through outdoor communication pipes; and the operation switching units are connected with the gas-liquid separation unit through two intermediate communication pipes preinstalled and one intermediate communication pipe newly installed. This provides a simple and cost-effective means for upgrading a preinstalled air conditioner making a switch from cooling to heating, and vice versa, into an air conditioner that can perform a cooling operation and a heating operation in parallel with each other.

Abstract: A refrigeration apparatus includes a compressor, a heat source-side heat exchanger, a receiver, a utilization-side heat exchange, a receiver degassing pipe interconnecting an upper portion of the receiver and a suction side of the compressor, and a receiver liquid level detection pipe connected to the receiver. The receiver liquid level detection pipe detects whether or not liquid level in the receiver has reached a predetermined position on a lower side of a position where the receiver degassing pipe is connected. The receiver liquid level detection pipe merges with the receiver degassing pipe via a capillary tube. The receiver degassing pipe has a refrigerant heater to heat refrigerant flowing through the receiver degassing pipe. Whether or not the liquid level in the receiver has reached the predetermined position is detected using a temperature of refrigerant flowing though the receiver degassing pipe.

Abstract: A refrigeration apparatus includes a compressor, a heat-source-side heat exchanger operable as a refrigerant evaporator or radiator, and a usage-side heat exchanger operable as a refrigerant evaporator or radiator. The heat-source-side heat exchanger is disposed inside a heat source unit having an exhaust port and an outdoor fan in an upper part, and an intake port in a side part. The heat-source-side heat exchanger includes first and second heat-source-side heat exchangers. Adjustable first and second heat-source-side flow rate adjusting valves are connected to liquid sides of the first and second heat-source-side heat exchangers, respectively. In a defrost operation in order to defrost the first and second heat-source-side heat exchangers, the opening degrees of the first and second heat-source-side flow rate adjusting valves are controlled so as to achieve a defrost flow rate ratio at which more refrigerant flows to the second heat-source-side heat exchanger than during an air-cooling operation.

Abstract: In a refrigeration apparatus, in a first operation mode, a comparison is made between a first liquid pipe temperature, which is a temperature of a refrigerant on a side of a liquid pipe heat exchanger that is near usage-side heat exchangers, and a second liquid pipe temperature, which is a temperature of the refrigerant on a side of the liquid pipe heat exchanger that is near a plurality of heat-source-side heat exchangers, the liquid pipe heat exchanger performing heat exchange with the refrigerant flowing through liquid sides of the heat-source-side heat exchangers. When an evaporation-switch liquid pipe temperature condition is satisfied, the heat-source-side heat exchanger functioning as a radiator of the refrigerant is switched to an evaporator of the refrigerant, and the first operation mode is switched to a second operation mode in which the plurality of heat-source-side heat exchangers are caused to function as evaporators of the refrigerant.

Abstract: A refrigeration apparatus includes a refrigerant circuit connecting heat-source units in parallel with usage units. First and second heat-source units have first and second compressors, first and second heat-source-side heat exchangers, first and second high-pressure receivers, first and second detecting elements detecting whether the receivers are near flooding, first and second bypass channels returning refrigerant in top parts of the receivers to intake sides of the compressors, and first and second motor-operated valves on the bypass channels, respectively. A controller performs excess refrigerant distribution control in which an opening degree of the first valve is controlled to be greater than an opening degree of the second valve when the second detecting element detects a nearly flooded state, and the opening degree of the second valve is controlled to be greater than the opening degree of the first valve when the first detecting element detects a nearly flooded state.

Abstract: A refrigeration apparatus uses R32 as refrigerant, and includes a compressor, a condenser, an expansion mechanism, an evaporator, a branch flow channel branching from a main refrigerant channel joining the condenser and the evaporator, a first opening adjustable valve disposed along the branch flow channel, an injection heat exchanger, a first injection channel, a refrigerant storage tank disposed along the main refrigerant channel, and a second injection channel. The injection heat exchanger exchanges heat between refrigerant in the main refrigerant channel and refrigerant passing through the first opening adjustable valve. The first injection channel guides refrigerant that flows in the branch flow channel and that exits from the injection heat exchanger to the compressor or the suction passage. The second injection channel guides a gas component of refrigerant accumulated inside the refrigerant storage tank to the compressor or the suction passage.

Abstract: A refrigeration apparatus uses R32 as refrigerant, and includes a compressor, a condenser, an expansion mechanism, an evaporator, a branch flow channel branching from a main refrigerant channel joining the condenser and the evaporator, a first opening adjustable valve disposed along the branch flow channel, an injection heat exchanger, a first injection channel, a refrigerant storage tank disposed along the main refrigerant channel, and a second injection channel. The injection heat exchanger exchanges heat between refrigerant in the main refrigerant channel and refrigerant passing through the first opening adjustable valve. The first injection channel guides refrigerant that flows in the branch flow channel and that exits from the injection heat exchanger to the compressor or the suction passage. The second injection channel guides a gas component of refrigerant accumulated inside the refrigerant storage tank to the compressor or the suction passage.

Abstract: An electronic expansion valve includes a valve body, a valve seat, and a stepping motor. A valve portion is formed at a forward end of the valve body. The valve seat forms a variable throttle portion between the valve portion and the valve seat by allowing the valve body to move in an axial direction. The stepping motor moves the valve portion in accordance with a pulse number. At least one part of a side surface of the valve portion is shaped so that an opening degree ratio becomes constant.

Abstract: Disclosed is a method of manufacturing a semiconductor element by implanting a dopant to a substrate to be processed. High frequency plasma is generated within a processing container by using microwaves. By using the generated high frequency plasma, a plasma doping treatment is performed on a germanium-containing to-be-processed substrate which is held on a holding table within the processing container.

Abstract: A refrigeration apparatus includes a refrigerant circuit connecting heat-source units in parallel with usage units. First and second heat-source units have first and second compressors, first and second heat-source-side heat exchangers, first and second high-pressure receivers, first and second detecting elements detecting whether the receivers are near flooding, first and second bypass channels returning refrigerant in top parts of the receivers to intake sides of the compressors, and first and second motor-operated valves on the bypass channels, respectively. A controller performs excess refrigerant distribution control in which an opening degree of the first valve is controlled to be greater than an opening degree of the second valve when the second detecting element detects a nearly flooded state, and the opening degree of the second valve is controlled to be greater than the opening degree of the first valve when the first detecting element detects a nearly flooded state.

Abstract: A heat source unit includes a compressor, first and second heat exchangers connected in parallel, first and second motor-operated valves regulating amounts of refrigerant that flow to the first and second heat exchangers, first and second temperature sensors measuring temperatures of refrigerant flowing from the first and second motor-operated valve to the first and second heat exchangers, a discharge temperature sensor measuring temperature of refrigerant discharged from the compressor, and a valve opening controller. The controller regulates valve openings of the first and second motor-operated valves based on the discharge temperature, refrigerant temperature detected by the first temperature sensor and refrigerant temperature detected by the second temperature sensor.