Abstract: A method of operating a plasma tool includes executing a plasma process on a wafer. Data associated with the plasma process are measured using a plurality of sensors while the plasma process is executed on the wafer. The plasma process is terminated at an endpoint time. A post-process fault detection is executed by determining whether a post-process wafer state is within a target range. When the post-process wafer state is outside the target range so that a fault is detected, the fault is corrected using the data associated with the plasma process.

Abstract: A transmission source position estimation system includes a sensor and a position estimation apparatus. The sensor is provided with a characteristic vector classification part and an attribute data extraction part. The characteristic vector classification part classifies a set of characteristic vectors obtained from received signal data of a transmitted wave, into subsets in a feature space. The attribute data extraction part extracts attribute data for each of the subsets and outputs the extracted data as an attribute data sequence. The position estimation apparatus is provided with a data combination part and a position estimation part. The data combination part combines attribute data that match or are similar to at least one attribute for a plurality of attribute data sequences. The position estimation part estimates the position of the transmission source from the combined attribute data and the position of the sensor that receives the transmitted wave.

Abstract: Provided is a method for monitoring a plasma-related process in a plasma tool. The method includes measuring data associated with the plasma-related process using a plurality of sensors while executing the plasma-related process on a wafer. Respective data measured by each sensor of the plurality of sensors are input into a respective individual estimation method to output a respective individual wafer state of the wafer, which results in a plurality of individual wafer states. The respective individual estimation method is configured to estimate the respective individual wafer state using at least the respective data. The plurality of individual wafer states is input into an integrated estimation method to output an integrated wafer state of the wafer. The integrated estimation method is configured to estimate the integrated wafer state using at least the plurality of individual wafer states.

Abstract: A terminal number estimating system includes: a plurality of receivers that receive a wireless signal transmitted from a plurality of terminal devices by frequency-division multiple access; a Fourier transform unit that performs a discrete Fourier transform on each wireless signal received by the plurality of reception means and outputs a discrete Fourier coefficient; and a terminal number estimation unit that estimates a position of each terminal device by clustering a resource block of each wireless signal based on each discrete Fourier coefficient.

Abstract: A sensing system including multiple sensor node devices and an analysis device, wherein: each of the multiple sensor node devices has a sensor that measures a measurement target and acquires data values, a learning unit that, based on the data values, learns a model used to estimate the data values at an installation position of the sensor, and a communication unit that transmits learning result data indicating a learning result from the learning unit; and the analysis device has a spatial analysis unit that estimates a spatial distribution of the data values based on the learning result data from each of the multiple sensor node devices and the installation positions of the respective sensor node devices.

Abstract: A wireless terminal detection system provided with user position information acquisition means for measuring a position of a reception-side wireless terminal; pattern classification means for classifying movement patterns extracted from position history information of the reception-side wireless terminal into ordinary patterns and non-ordinary patterns based on classification results in which the movement patterns are classified in accordance with times and positions; and determination means for determining whether a transmission-side wireless terminal, which is a transmission source of radio waves received by the reception-side wireless terminal, is a suspicious terminal based on a reception history of radio waves from the transmission-side wireless terminal in time intervals classified as the non-ordinary patterns.

Abstract: A wireless terminal detection system provided with a radio wave identification unit that extracts identification information in accordance with the wireless terminals that are transmission sources; a radio wave intensity measurement unit that measures radio wave intensities of the radio waves; a distance estimation unit that estimates an attenuation rate of the radio wave intensities with respect to distance based on a number of the wireless terminals, and that estimates distances to the individual wireless terminals based on the estimated attenuation rate; and a notification unit that notifies a user that a suspicious wireless terminal has been detected if, based on the identification information, a wireless terminal among the radio wave transmission sources is determined to be registered as a suspicious wireless terminal, and the estimated distance to the wireless terminal among the radio wave transmission sources is not more than a prescribed distance.

Abstract: The present invention can improve the precision of location estimation of a signal transmitting source. This location estimating apparatus is provided with: a data acquisition unit for acquiring measurement values of sensors which measure radio waves of a signal transmitting source and location information on the sensors; a class classification unit for class-classifying the acquired measurement values by using relative locations and the dissimilarity of the measurement values of each set of the sensors; and a location estimation unit for estimating the location of the signal transmitting source on the basis of the classified measurement values and the location information of the sensors.

Abstract: A position estimation device includes a position estimation unit that estimates a position of a wireless terminal device based on a radio wave reception range of the base station device that has transmitted a response signal in response to a signal from the wireless terminal device.

Abstract: The present invention can improve the precision of location estimation of a signal transmitting source. This location estimating apparatus is provided with: a data acquisition unit for acquiring measurement values of sensors which measure radio waves of a signal transmitting source and location information on the sensors; a class classification unit for class-classifying the acquired measurement values by using relative locations and the dissimilarity of the measurement values of each set of the sensors; and a location estimation unit for estimating the location of the signal transmitting source on the basis of the classified measurement values and the location information of the sensors.

Abstract: A terminal number estimating system includes: a plurality of receivers that receive a wireless signal transmitted from a plurality of terminal devices by frequency-division multiple access; a Fourier transform unit that performs a discrete Fourier transform on each wireless signal received by the plurality of reception means and outputs a discrete Fourier coefficient; and a terminal number estimation unit that estimates a position of each terminal device by clustering a resource block of each wireless signal based on each discrete Fourier coefficient.

Abstract: A transmission source position estimation system includes a sensor and a position estimation apparatus. The sensor is provided with a characteristic vector classification part and an attribute data extraction part. The characteristic vector classification part classifies a set of characteristic vectors obtained from received signal data of a transmitted wave, into subsets in a feature space. The attribute data extraction part extracts attribute data for each of the subsets and outputs the extracted data as an attribute data sequence. The position estimation apparatus is provided with a data combination part and a position estimation part. The data combination part combines attribute data that match or are similar to at least one attribute for a plurality of attribute data sequences. The position estimation part estimates the position of the transmission source from the combined attribute data and the position of the sensor that receives the transmitted wave.

Abstract: A sensing system including multiple sensor node devices and an analysis device, wherein: each of the multiple sensor node devices has a sensor that measures a measurement target and acquires data values, a learning unit that, based on the data values, learns a model used to estimate the data values at an installation position of the sensor, and a communication unit that transmits learning result data indicating a learning result from the learning unit; and the analysis device has a spatial analysis unit that estimates a spatial distribution of the data values based on the learning result data from each of the multiple sensor node devices and the installation positions of the respective sensor node devices.

Abstract: A method is presented of assessing a radio wave intensity distribution covering areas and frequencies, and assessing the quality of a communication function provided by a radio wave. An apparatus is apparatus is presented including a radio wave station position detection unit that detects a position of a radio wave station on the basis of a geographic image having position information and of an image of the radio wave station; a radio wave station information integration unit that outputs radio wave station information based on the position of the radio wave station and radio wave station license information on the radio wave station; and a radio wave intensity distribution estimation unit that estimates and outputs a radio wave intensity distribution within a designated range on the basis of the radio wave station information and geographic information on the surroundings of the radio wave station.

Abstract: In order to quickly perform estimation processing while suppressing a deterioration in estimation accuracy caused by the impact of an obstacle present in the vicinity of a sensor, an impact-level assessment unit assesses the level of the impact imparted on an observable at another location by an observable detected by a sensor for detecting observables, which represent the features of an electrical signal obtained by receiving a radio wave. In addition, a weighting factor calculation unit calculates a sensor weighting factor on the basis of the position of the estimation location at which the observable is to be estimated, the position of the sensor, and the assessed impact level from the impact-level assessment unit. Furthermore, a weighted averaging unit estimates the observable at the estimation location by calculating a weighted average of the observable detected by the sensor, by using the sensor weighting factor calculated by the weighting factor calculation unit.

Abstract: The present invention is aimed at making it possible to assess a radio wave intensity distribution widely covering areas and frequencies, and thereby making it possible to assess a distribution, widely covering areas and frequencies, of the quality of a communication function provided by a radio wave.

Abstract: A bandpass filter is provided that prevents clock leakage to the input side of an amplifier circuit and has excellent out-of-passband signal attenuation. It includes an amplifier (102) connected between an input terminal and an output terminal, an impedance frequency conversion circuit (101) that is connected between an output of the amplifier and ground and changes impedance depending on whether or not the frequency of a signal output from the amplifier is within a predetermine passband, and a feedback circuit (103) connected between the output and an input of the amplifier.

Abstract: [Problem] To observe radio wave usage circumstances over a wide area and convert same into a database, at an achievable cost. [Solution] A radio wave observation system comprises: a plurality of wireless networks, further respectively comprising multiple terminal stations (2) and a plurality of base stations (3), which carry out wireless communication between the terminal stations and the base stations; and a central station device (4) which is connected to these base stations. Each of the terminal stations (2) further comprises an observation device (2a) which carries out radio wave observation and returns the results of the observation to the central station device in response to an instruction from the central station device.

Abstract: A power detection circuit according to the present invention includes a variable frequency oscillator 2 for oscillating a local oscillator frequency, a mixer 1 for receiving the local oscillator frequency and a detection signal and converting a frequency of the detection signal using the local oscillator frequency, a complex bandpass filter 3 for limiting a bandwidth of the detection signal whose frequency is converted to a predetermined bandwidth, and an energy detection circuit 4 for detecting power of the predetermined bandwidth based on an output from the complex bandpass filter 3. The local oscillator frequency is set so that the predetermined bandwidth of the detection signal whose frequency is converted is in a frequency range having low 1/f noise. According to the present invention, it is possible to provide a power detection circuit with high speed and high sensitivity.

Abstract: A frequency sweep signal generator in which the frequency error is small even when the control values and the oscillating frequencies have a non-linear relation. The frequency sweep signal generator includes a variable frequency oscillator that changes an oscillating frequency according to a change of an input control value, and a first controller that generates a first control value so that the oscillating frequency within a predetermined frequency sweeping range is output. The first controller controls an increment of the first control value to be output to the variable frequency oscillator per unit time so that, when a change of the oscillating frequency with respect to the increment of the first control value is non-linear, the oscillating frequency is changed linearly with respect to a passage of time.