Abstract: An extreme ultraviolet light generation apparatus includes a droplet target generation device and a solid target replenishment device. The droplet target generation device includes a tank configured to melt a solid target substance to generate a liquid target substance, and a nozzle configured to continuously generate a droplet target from the liquid target substance in the tank and output the droplet target toward a plasma generation region to which pulse laser light is concentrated, and is configured to apply a velocity difference between a plurality of droplet targets including the droplet target so that the plurality of droplet targets coalesce. The solid target replenishment device is configured to replenish the tank with a one-time replenishment amount of the solid target substance such that the coalescence of the plurality of droplet targets is completed before the plurality of droplet targets reach the plasma generation region.

Abstract: In order to facilitate fixed-point monitoring over a wide area and for a long time, this water area monitoring device comprises: a detection unit for information, such as water area intrusion, which detects, from sound data that is acquired by means of optical fibers installed in the water or the water bottom and is data pertaining to a sound or a vibration at the respective positions of the optical fibers, at least any one among sounds of water area intrusion or the like that indicate intrusion into a target water area or water area intrusion or the like, which is a prescribed behavior in the target water area, at a time at which sound data is acquired, and changes in sounds or vibrations not caused by the water area intrusion or the like; and an output unit which outputs information indicating the sound such as water area intrusion.

Abstract: A target supply device according to an aspect of the present disclosure includes a tank in which a target substance in a liquid form is housed, a vibration element configured to generate a droplet of the target substance by providing, through a vibration propagation path, vibration to the target substance output through the nozzle, a first temperature adjustment mechanism configured to adjust a temperature of a refrigerant to be supplied to the vibration propagation path component to a first temperature, a temperature sensor configured to detect a temperature of the vibration propagation path, a second temperature adjustment mechanism configured to adjust, to a second temperature, the temperature of the vibration propagation path to which the refrigerant is supplied, and a control unit configured to control the second temperature adjustment mechanism based on an output from the temperature sensor.

Abstract: A target supply device according to an aspect of the present disclosure includes a nozzle through which a liquid target substance is output, and a vibration unit configured to vibrate the target substance supplied to the nozzle, and the vibration unit includes a vibration element configured to vibrate in accordance with applied drive voltage from outside, a vibration transfer unit contacting the nozzle and configured to transfer vibration of the vibration element to the nozzle, a load application member configured to apply a pressing load for pressing the vibration transfer unit against the nozzle, and a load adjustment device configured to adjust the pressing load in accordance with a signal from outside.

Abstract: The present invention provides a rare earth thin film magnet having Nd, Fe, and B as essential components, wherein the rare earth thin film magnet has a texture in which an ?-Fe phase and a Nd2Fe14B phase are alternately arranged three-dimensionally, and each phase has an average crystal grain size of 10 to 30 nm. An object of this invention is to provide a rare earth thin film magnet having superior mass productivity and reproducibility and favorable magnetic properties, as well as to provide the production method thereof and a target for producing the thin film.

Abstract: A rare-earth thin film magnet is provided which includes Nd, Fe and B as essential components, characterized by including a Si substrate having an oxide film present on a surface thereof, a Nd base film formed as a first layer over the Si substrate, and a Nd—Fe—B film formed as a second layer on the first layer. The rare earth thin film magnet and a production process therefor provides a rare earth thin film magnet suffering neither film separation nor substrate breakage and having satisfactory magnetic properties even when the second layer has composition in the range of 0.120 ?Nd/(Nd+Fe)<0.150, which corresponds to a compositional range in the vicinity of a stoichiometric composition.

Abstract: Provided is a rare earth thin film magnet having Nd, Fe and B as essential components, which is characterized in that a Nd—Fe—B base film is formed on a Si substrate having an oxide film formed on a surface thereof and has a composition in which the Nd content is higher than that of a stoichiometric composition and that a film (nano composite film) is formed on the base film and has a texture in which an ?-Fe phase and Nd2Fe14B are alternately arranged and three-dimensionally dispersed. The rare earth thin film magnet provided is less susceptible to the occurrence of film separation and substrate breakage and exhibits favorable magnetic properties.

Abstract: A target supply device includes a vibrating element driven by a square wave electric signal and configured to generate a droplet of a target substance by vibrating the target substance to be output from a nozzle through a vibration propagating path; a temperature adjusting mechanism configured to adjust, to a specified temperature, a temperature of a vibration propagating path member including at least part of the vibration propagating path; a droplet detecting unit configured to output a signal containing information on a droplet detection interval indicating a time interval of droplets continuously generated; and a control unit configured to determine, based on the droplet detection interval, an operation specified temperature that is the specified temperature of the vibration propagating path member and an operation duty value that is a duty value of the electric signal used for driving the vibrating element when the droplet is irradiated with the laser beam.

Abstract: An extreme ultraviolet light generation device includes: a target supply unit including a nozzle through which a target substance in a liquid form is output into a chamber; a piezoelectric element configured to vibrate the nozzle under a droplet connection condition to regularly generate a droplet of the target substance; and a control unit configured to perform search processing of changing a drive condition of the piezoelectric element to search for a drive condition of the piezoelectric element corresponding to the droplet connection condition and configured to set a drive condition of the piezoelectric element used for generation of extreme ultraviolet light based on a result of the search processing. The control unit preliminarily drives the piezoelectric element before performing the search processing and starts the search processing after performing the preliminary drive.

Abstract: A method produces an acrylic fiber bundle that are cleaned in one or more washing baths including an inflow portion and an outflow portion for a cleaning solution; at least one of the washing baths is a counterflow washing bath in which the cleaning solution flows into from the inflow portion located at a lower stream side position of a traveling direction of coagulated thread bundles, and flows out from the outflow portion located at an upper stream side position of the traveling direction of the coagulated thread bundles; and an average of coefficients of variation CV of linear speeds of the cleaning solution in the inflow portion of the counterflow washing bath is 0.30 or less, and an average of coefficients of variation CV of linear speeds of the cleaning solution in the outflow portion of the counterflow washing bath is 0.30 or less.

Abstract: A target supply device according to an aspect of the present disclosure includes a nozzle through which a liquid target substance is output, and a vibration unit configured to vibrate the target substance supplied to the nozzle, and the vibration unit includes a vibration element configured to vibrate in accordance with applied drive voltage from outside, a vibration transfer unit contacting the nozzle and configured to transfer vibration of the vibration element to the nozzle, a load application member configured to apply a pressing load for pressing the vibration transfer unit against the nozzle, and a load adjustment device configured to adjust the pressing load in accordance with a signal from outside.

Abstract: A target supply device according to an aspect of the present disclosure includes a tank in which a target substance in a liquid form is housed, a vibration element configured to generate a droplet of the target substance by providing, through a vibration propagation path, vibration to the target substance output through the nozzle, a first temperature adjustment mechanism configured to adjust a temperature of a refrigerant to be supplied to the vibration propagation path component to a first temperature, a temperature sensor configured to detect a temperature of the vibration propagation path, a second temperature adjustment mechanism configured to adjust, to a second temperature, the temperature of the vibration propagation path to which the refrigerant is supplied, and a control unit configured to control the second temperature adjustment mechanism based on an output from the temperature sensor.

Abstract: A target supply device includes a vibrating element driven by a square wave electric signal and configured to generate a droplet of a target substance by vibrating the target substance to be output from a nozzle through a vibration propagating path; a temperature adjusting mechanism configured to adjust, to a specified temperature, a temperature of a vibration propagating path member including at least part of the vibration propagating path; a droplet detecting unit configured to output a signal containing information on a droplet detection interval indicating a time interval of droplets continuously generated; and a control unit configured to determine, based on the droplet detection interval, an operation specified temperature that is the specified temperature of the vibration propagating path member and an operation duty value that is a duty value of the electric signal used for driving the vibrating element when the droplet is irradiated with the laser beam.

Abstract: An extreme ultraviolet light generation device includes: a target supply unit including a nozzle through which a target substance in a liquid form is output into a chamber; a piezoelectric element configured to vibrate the nozzle under a droplet connection condition to regularly generate a droplet of the target substance; and a control unit configured to perform search processing of changing a drive condition of the piezoelectric element to search for a drive condition of the piezoelectric element corresponding to the droplet connection condition and configured to set a drive condition of the piezoelectric element used for generation of extreme ultraviolet light based on a result of the search processing. The control unit preliminarily drives the piezoelectric element before performing the search processing and starts the search processing after performing the preliminary drive.

Abstract: A rare-earth thin film magnet is provided which includes Nd, Fe and B as essential components, characterized by including a Si substrate having an oxide film present on a surface thereof, a Nd base film formed as a first layer over the Si substrate, and a Nd—Fe—B film formed as a second layer on the first layer. The rare earth thin film magnet and a production process therefor provides a rare earth thin film magnet suffering neither film separation nor substrate breakage and having satisfactory magnetic properties even when the second layer has composition in the range of 0.120 5 Nd/(Nd+Fe)<0.150, which corresponds to a compositional range in the vicinity of a stoichiometric composition.

Abstract: A rare earth thin-film magnet of a Nd—Fe—B film deposited on a Si substrate, wherein, when the film thickness of the rare earth thin film is 70 ?m or less, the Nd content satisfies the conditional expression of 0.15?Nd/(Nd+Fe)?0.25 in terms of an atomic ratio; when the film thickness of the rare earth thin film is 70 ?m to 115 ?m (but excluding 70 ?m), the Nd content satisfies the conditional expression of 0.18?Nd/(Nd+Fe)?0.25 in terms of an atomic ratio; and when the film thickness of the rare earth thin film is 115 ?m to 160 ?m (but excluding 115 ?m), the Nd content satisfies the conditional expression of 0.20?Nd/(Nd+Fe)?0.25 in terms of an atomic ratio. An object of the present invention is to provide a rare earth thin-film magnet having a maximum film thickness of 160 ?m and which is free from film separation and substrate fracture, and a method of producing such a rare earth thin-film magnet by which the thin film can be stably deposited.

Abstract: A target supply apparatus according to one aspect of the present disclosure includes a nozzle configured to output a target, a plurality of vibrators including a first vibrator configured to vibrate the nozzle, a detection unit configured to detect a change in state of the target having been output from the nozzle, a vibrator switching unit configured to perform switching of a vibrator that vibrates the nozzle from the first vibrator to the other vibrator that is included in the vibrators and is different from the first vibrator, and a control unit configured to control the switching of the vibrator that vibrates the nozzle, based on the change in state of the target having been output from the nozzle, detected by the detection unit.

Abstract: A method produces an acrylic fiber bundle that are cleaned in one or more washing baths including an inflow portion and an outflow portion for a cleaning solution; at least one of the washing baths is a counterflow washing bath in which the cleaning solution flows into from the inflow portion located at a lower stream side position of a traveling direction of coagulated thread bundles, and flows out from the outflow portion located at an upper stream side position of the traveling direction of the coagulated thread bundles; and an average of coefficients of variation CV of linear speeds of the cleaning solution in the inflow portion of the counterflow washing bath is 0.30 or less, and an average of coefficients of variation CV of linear speeds of the cleaning solution in the outflow portion of the counterflow washing bath is 0.30 or less.

Abstract: Provided is a method for manufacturing a combined yarn bundle including the steps of bringing the two or more carbon fiber precursor yarns which travel approximately parallel to one another into contact with a first roller at a wrap angle of 20° or more. Then, the two or more carbon fiber precursor yarns are split into two and brought into contact with a pair of second rollers, so that the carbon fiber precursor yarns are rotated approximately 90° between the first roller and the pair of second rollers. Next, the carbon fiber precursor yarns delivered from one second roller are brought into contact with a third front roller and a third rear roller, and the carbon fiber precursor yarns delivered from the other second roller are brought into contact with the third rear roller without bringing them into contact with the third front roller, so that these carbon fiber precursor yarns are combined on the third rear roller.

Abstract: A target supply apparatus according to one aspect of the present disclosure includes a nozzle configured to output a target, a plurality of vibrators including a first vibrator configured to vibrate the nozzle, a detection unit configured to detect a change in state of the target having been output from the nozzle, a vibrator switching unit configured to perform switching of a vibrator that vibrates the nozzle from the first vibrator to the other vibrator that is included in the vibrators and is different from the first vibrator, and a control unit configured to control the switching of the vibrator that vibrates the nozzle, based on the change in state of the target having been output from the nozzle, detected by the detection unit.