Patents by Inventor Masaki Tomita

Masaki Tomita has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 11180457
    Abstract: Provided is a fluorine-containing ether compound capable of forming a lubricant layer having excellent wear resistance even when the thickness is thin, and suitable as a material of a lubricant for a magnetic recording medium. The fluorine-containing ether compound is a compound represented by the following formula (1): R1—R2—CH2—R3—CH2—R4—R5; wherein R3 is a perfluoropolyether chain; R1 is a terminal group bonded to R2; R5 is a terminal group bonded to R4; R1 is an alkenyl group or an alkynyl group; R5 is a group containing a heterocyclic ring; R2 is represented by the following formula (2); R4 is represented by the following formula (3); and a in the formula (2) and b in the formula (3) are each independently an integer of 1 to 3.
    Type: Grant
    Filed: August 28, 2018
    Date of Patent: November 23, 2021
    Assignee: SHOWA DENKO K. K.
    Inventors: Tsuyoshi Kato, Daisuke Yagyu, Naoya Fukumoto, Yuta Yamaguchi, Masumi Kuritani, Katsumi Murofushi, Masaki Nanko, Hiroyuki Tomita
  • Publication number: 20210306131
    Abstract: A wireless station includes at least one oscillator to output a reference signal, and an error calculator to calculate a frequency of the reference signal and calculate a frequency error by subtracting a target frequency of the reference signal from the calculated frequency of the reference signal. The wireless station further includes a modulation data generator to generate modulation data by adding a correction value, varying in negative correlation with the frequency error calculated by the error calculator, to data to be transmitted, and a modulator to conduct frequency modulation on the basis of the modulation data and the data to be transmitted.
    Type: Application
    Filed: March 4, 2021
    Publication date: September 30, 2021
    Inventors: Takeo TOMITA, Masaki AKASAKA, Yasuo UENO
  • Publication number: 20210285893
    Abstract: An object is to allow for simple measurement of a bump height. There is provided. a device for measuring a bump height comprising: a light sensor provided with a light source and a light-receiving element and configured to irradiate a substrate including a seed layer, a resist layer formed on the seed layer and a bump formed in an opening of the resist layer, with light emitted from the light source and to detect reflected light that is reflected from the seed layer via the resist layer and reflected light that is reflected from the bump, by the light-receiving element; and a control device configured to calculate a height of the bump relative to the seed layer, based on the reflected light from the seed layer and the reflected light from the bump and to subtract an error caused by a refractive index of the resist layer from the height of the bump calculated based on the reflected lights, so as to correct the height of the bump.
    Type: Application
    Filed: June 27, 2019
    Publication date: September 16, 2021
    Inventors: Takahisa Okuzono, Masaki Tomita, Jumpei Fujikata, Hideki Takayanagi
  • Publication number: 20210277533
    Abstract: A plating device includes: an anode; a substrate holder which holds a substrate; a substrate contact which comes into contact with a peripheral edge portion of the substrate; a resistor which is disposed in a way of facing the substrate holder between the anode and the substrate holder, and is used for adjusting ion movement; and a rotation driving mechanism which causes the resistor and the substrate holder to relatively rotate. The resistor includes: a shielding region which forms an outer frame and shields the ion movement between the anode and the substrate; and a resistance region which is formed on the radially inner side of the shielding region, and has a porous structure allowing the passage of an ion. An outer diameter of the resistance region has an amplitude centering on an imaginary reference circle, and has a wave shape which is periodic and annularly continuous.
    Type: Application
    Filed: February 26, 2021
    Publication date: September 9, 2021
    Applicant: EBARA CORPORATION
    Inventors: MITSUHIRO SHAMOTO, SHAO HUA CHANG, MASAKI TOMITA, MASASHI SHIMOYAMA
  • Patent number: 11008668
    Abstract: There is provided an inspection method of a substrate holder for holding a substrate. This inspection method has a step of providing the substrate holder comprising a first member and a second member between which a substrate is held, an electric contact, and a seal member, the first member having a surface region where intrusion of the liquid is prevented by the seal member, the second member having the seal member, a step of holding the second member by a holding portion of a substrate holder opening/closing unit, and detaching the second member from the first member, and a detection step of detecting that the liquid adheres to the surface region of the first member, by a detector located above the first member and the second member.
    Type: Grant
    Filed: April 23, 2019
    Date of Patent: May 18, 2021
    Assignee: EBARA CORPORATION
    Inventor: Masaki Tomita
  • Publication number: 20210043344
    Abstract: A permanent magnet including R and T. R are rare earth elements including Sm and at least one selected from Y and Gd. T is Fe alone or Fe and Co. T maybe partly substituted with M, and M is one or more selected from Ti, V, Cr, Mo, W, Zr, Hf, Nb, Ta, Al, Si, Cu, Zn, Ga and Ge. In a total content of R, Sm content is 60 at % or more and 95 at % or less, and a total content of Y and Gd is 5 at % or more and 35 at % or less. The permanent magnet includes main phase crystal grains having a ThMn12 type crystal structure.
    Type: Application
    Filed: January 29, 2019
    Publication date: February 11, 2021
    Applicant: TDK CORPORATION
    Inventors: Masaki TOMITA, Ryuji HASHIMOTO, Takashi WATANABE
  • Patent number: 10910334
    Abstract: A device for inspecting a bump height includes an illumination device, an imaging device, and a control device. The illumination device irradiates a substrate with light. The substrate includes a resist and a bump formed on an opening portion of the resist. The imaging device images a pattern of the resist and the bump. The control device evaluates a height of the bump based on a luminance value of image data of the pattern obtained by the imaging device.
    Type: Grant
    Filed: May 2, 2019
    Date of Patent: February 2, 2021
    Assignee: EBARA CORPORATION
    Inventors: Takahisa Okuzono, Masaki Tomita, Jumpei Fujikata
  • Patent number: 10830834
    Abstract: A current measuring module for measuring a current flowing through the substrate holder using an inspection substrate is provided. The substrate holder includes a plurality of holder electric contacts. The plurality of holder electric contacts contact a substrate to supply the held substrate with a current. The substrate holder holds the inspection substrate for measuring the current flowing through the substrate holder. The plurality of holder electric contacts contact a plurality of respective independent substrate electric contacts disposed on the inspection substrate. The inspection substrate includes a plurality of measurement points connected to the plurality of respective substrate electric contacts with wirings and substrate side connectors electrically connected to the plurality of measurement points. The current measuring module includes a plurality of inspection probes configured to contact the plurality of respective measurement points on the inspection substrate.
    Type: Grant
    Filed: January 10, 2019
    Date of Patent: November 10, 2020
    Assignee: EBARA CORPORATION
    Inventors: Masaki Tomita, Hiroyuki Takenaka, Mitsutoshi Yahagi
  • Publication number: 20200258768
    Abstract: Provided is a substrate holding device that inhibits drop in holding accuracy of a substrate. A Bernoulli chucking pad suctions and holds a front surface or a back surface of a substrate S. A position determiner 54 is capable of pushing the substrate S in contact with a side surface 82 of the substrate S, and positioning the suctioned substrate S. A pin 66 enables the position determiner 54 to come in contact with the side surface 82 of the substrate S. The pin 66 brings the position determiner 54 into contact with the side surface 82 of the substrate S, and the position determiner 54 thereby positions the substrate S.
    Type: Application
    Filed: June 25, 2018
    Publication date: August 13, 2020
    Inventors: Masaki Tomita, Junitsu Yamakawa
  • Publication number: 20200108423
    Abstract: There is provided a cleaning device that cleans a substrate holder including a first holding member and a second holding member having an opening for exposing a substrate. This cleaning device includes a cleaning bath configured to house the substrate holder, an actuator configured to separate the second holding member from the first holding member, and a cleaning nozzle configured to discharge a cleaning liquid to the substrate holder housed in the cleaning bath. The cleaning nozzle is configured to pass through the opening of the second holding member.
    Type: Application
    Filed: October 2, 2019
    Publication date: April 9, 2020
    Inventors: Masaki Tomita, Shao Hua Chang
  • Publication number: 20190348384
    Abstract: A device for inspecting a bump height includes an illumination device, an imaging device, and a control device. The illumination device irradiates a substrate with light. The substrate includes a resist and a bump formed on an opening portion of the resist. The imaging device images a pattern of the resist and the bump. The control device evaluates a height of the bump based on a luminance value of image data of the pattern obtained by the imaging device.
    Type: Application
    Filed: May 2, 2019
    Publication date: November 14, 2019
    Applicant: EBARA CORPORATION
    Inventors: Takahisa OKUZONO, Masaki TOMITA, Jumpei FUJIKATA
  • Publication number: 20190330758
    Abstract: There is provided an inspection method of a substrate holder for holding a substrate. This inspection method has a step of providing the substrate holder comprising a first member and a second member between which a substrate is held, an electric contact, and a seal member, the first member having a surface region where intrusion of the liquid is prevented by the seal member, the second member having the seal member, a step of holding the second member by a holding portion of a substrate holder opening/closing unit, and detaching the second member from the first member, and a detection step of detecting that the liquid adheres to the surface region of the first member, by a detector located above the first member and the second member.
    Type: Application
    Filed: April 23, 2019
    Publication date: October 31, 2019
    Applicant: EBARA CORPORATION
    Inventor: Masaki TOMITA
  • Patent number: 10366814
    Abstract: The present invention provides a permanent magnet with a composition ratio of RXT(100-X-Y)CY having a main phase with Nd5Fe17 type crystal structure, wherein: R is one or more rare earth elements including Sm as a necessary element, and the rare earth elements are Sm, Y, La, Pr, Ce, Nd, Eu, Gd, Tb, Dy, Ho, Er, Tm, Yb and Lu; and T is one or more transition metal elements including Fe or a combination of Fe and Co as necessary elements; and 15<X<40, 5<Y<15, 1.5<(100-X-Y)/X<4.
    Type: Grant
    Filed: March 18, 2016
    Date of Patent: July 30, 2019
    Assignee: TDK CORPORATION
    Inventors: Masashi Ito, Tomoko Kitamura, Masaki Tomita
  • Publication number: 20190219627
    Abstract: A current measuring module for measuring a current flowing through the substrate holder using an inspection substrate is provided. The substrate holder includes a plurality of holder electric contacts. The plurality of holder electric contacts contact a substrate to supply the held substrate with a current. The substrate holder holds the inspection substrate for measuring the current flowing through the substrate holder. The plurality of holder electric contacts contact a plurality of respective independent substrate electric contacts disposed on the inspection substrate. The inspection substrate includes a plurality of measurement points connected to the plurality of respective substrate electric contacts with wirings and substrate side connectors electrically connected to the plurality of measurement points. The current measuring module includes a plurality of inspection probes configured to contact the plurality of respective measurement points on the inspection substrate.
    Type: Application
    Filed: January 10, 2019
    Publication date: July 18, 2019
    Inventors: Masaki TOMITA, Hiroyuki TAKENAKA, Mitsutoshi YAHAGI
  • Publication number: 20160276075
    Abstract: The present invention provides a permanent magnet with a composition ratio of RXT(100-X-Y)CY having a main phase with Nd5Fe17 type crystal structure, wherein: R is one or more rare earth elements including Sm as a necessary element, and the rare earth elements are Sm, Y, La, Pr, Ce, Nd, Eu, Gd, Tb, Dy, Ho, Er, Tm, Yb and Lu; and T is one or more transition metal elements including Fe or a combination of Fe and Co as necessary elements; and 15<X<40, 5<Y<15, 1.5<(100-X-Y)/X<4.
    Type: Application
    Filed: March 18, 2016
    Publication date: September 22, 2016
    Applicant: TDK CORPORATION
    Inventors: Masashi ITO, Tomoko KITAMURA, Masaki TOMITA
  • Patent number: 6115153
    Abstract: A holographic grating 12 is formed on one surface of a scale substrate 11 in such a manner that a light source is disposed over the other surface of the scale substrate 11. The scale substrate 11 is formed of a transparent material. A reflection film 13 is directly deposited on the grating surface. A protection substrate 15 is adhered to the reflection film 13 on the scale substrate 11 with adhesive agent 14. Thus, a reflection-type hologram scale 1 is accomplished.
    Type: Grant
    Filed: October 8, 1999
    Date of Patent: September 5, 2000
    Assignee: Mitutoyo Corporation
    Inventors: Masaki Tomita, Motohiro Osaki, Kuniaki Obata, Masaaki Miyashita