Abstract: A combustion type waste gas treatment method wherein waste gas discharged from an industrial product manufacturing process is introduced into combustion flames to thermally or oxidatively decompose a combustible component in the waste gas. Hydrogen gas and oxygen gas are generated by electrolysis of water and supplied as a gas for combustion to form the combustion flames. A pipe or a hole through which the combustion flames can be viewed directly is formed in a wall of the burner part upstream of the combustion flames. The combustion flames are detected with a UV sensor through the pipe or the hole.

Abstract: A thin-film vapor deposition apparatus has a reaction casing defining a reaction chamber, a stage for supporting a substrate, the stage being disposed in the reaction chamber, and a shower head supported on the reaction casing in confronting relation to the stage for discharging a material gas toward the substrate on the stage for depositing a thin film on the substrate. A plurality of flow path systems are disposed in various regions of the shower head and the reaction casing for passage therethrough a heating medium to control the temperatures of the regions under the control of a temperature controller.

Abstract: A rotor with lobes for use in a turbomachine having a rotation shaft is disclosed. The rotor comprises a rotor shell having a shell member, which is made of a sheet strip metal and having profile curvatures to conform to a required shape of the lobe of the rotor, and a connecting portion for connecting the rotor to the rotation shaft. By making a rotor from a sheet strip metal through bending process to form a rotor shell, a rotor having thin walls can be produced efficiently and economically to provide a light weight rotor of reduced inertial moment so that the startup process or shut down process can be performed quickly.

Abstract: A trap for collecting solid is connected to either an exhaust port or a suction port of a vacuum pump for trapping a solid material separated from a sublimed gas discharged by the vacuum pump. The trap includes a casing, a passage defining member disposed in the casing and defining a gas passage in the casing, and an intermediate member disposed between the casing and the passage defining member. The intermediate member is made of a flat thin sheet which is formed into a tubular member, and the tubular member is capable of being spread when taken out from the casing.

Abstract: A magnetic levitation conveyor apparatus has levitation electromagnets, linear motors, and displacement sensors which are disposed outside of a tunnel, and a carriage of simple structure which is movable in the tunnel. The carriage is of canned structure for preventing gases from being generated. The carriage of canned structure allows the tunnel to have a reduced cross-sectional area and to be filled with a highly purified atmosphere such as of a high vacuum. The tunnel has substantially orthogonal branches at a branched point. In the branched point, the carriage can move, while being lifted out of contact with the tunnel partition, with a directional change from a main conveyor passage into a branched conveyor passage. The magnetic levitation conveyor apparatus is highly practical as it can control the carriage to be lifted and moved as described above.