Abstract: The present invention relates to a method of controlling the output of laser pulses where laser pulses are continuously emitted while performing charging for each pulse. This method comprises: a pre-charging step for commencing charging for a next pulse with a previously set first charging voltage value as a target; a voltage computation step for computing a second charging voltage value required for the next pulse during the pre-charging step; and a fine charging step for continuing charging for the next pulse with the second charging voltage value as the target instead of the first charging voltage value, when the second charging voltage value is computed in the voltage computation step.

Abstract: A pulsed light source irradiation control method that irradiates a pulsed beam on an illumination subject includes the steps of measuring the energy of a pulsed beam having a predetermined oscillation frequency emitted from the pulsed light source, determining the actual oscillation frequency of the emitted pulsed beam in accordance with the number of pulses of the pulsed beam, and adjusting the energy of the pulsed beam when the actual oscillation frequency differs from the predetermined oscillation frequency.

Abstract: The present invention relates to a method of controlling the output of laser pulses where laser pulses are continuously emitted while performing charging for each pulse. This method comprises: a pre-charging step for commencing charging for a next pulse with a previously set first charging voltage value as a target; a voltage computation step for computing a second charging voltage value required for the next pulse during the pre-charging step; and a fine charging step for continuing charging for the next pulse with the second charging voltage value as the target instead of the first charging voltage value, when the second charging voltage value is computed in the voltage computation step.

Abstract: A pulsed light source irradiation control method that irradiates a pulsed beam on an illumination subject includes the steps of measuring the energy of a pulsed beam having a predetermined oscillation frequency emitted from the pulsed light source, determining the actual oscillation frequency of the emitted pulsed beam in accordance with the number of pulses of the pulsed beam, and adjusting the energy of the pulsed beam when the actual oscillation frequency differs from the predetermined oscillation frequency.

Abstract: A processing apparatus having a laser light source for oscillating a pulse in response to a predetermined trigger signal and irradiating the beam emitted from the laser light source to an object to process the object comprises a position detection unit for detecting a position of a dimmer removably mounted in a light path of the emitted beam, and trigger control means for generating a trigger pulse train for causing the pulse oscillation type laser light source to emit light and sending out the light emission trigger pulse train to the laser light source when the position of the dimmer is within a predetermined allowable range around a predetermined target set position.

Abstract: A simple illumination control device provides illuminating light with improved uniformity in intensity and without speckle fringes.A speckle pattern, formed with a specific periodicity by the irradiation of a pulse on a first object or a second object, is moved within a predetermined range at least in one direction. The minimum number of pulses required for substantially smoothing the speckle pattern on the second object by irradiation of plural pulses during the movement of the speckle pattern over the predetermined range, is stored. Based on the minimum number of pulses, the number of pulses required for obtaining desired exposure, the amount of light of each pulse, and the number of pulses for moving the speckle pattern substantially by a cycle, are determined.