Patents by Inventor Masato Hirade

Masato Hirade has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 11499989
    Abstract: A surface analysis device is provided with a sample stage for placing a sample thereon, a cantilever to be arranged to face the sample stage, and a cantilever drive unit for driving the cantilever. The drive mechanism is configured, when taking out the sample stage, to shift the sample stage relative to a measurement unit so that the measurement unit and the sample stage separate from each other in a first direction in which the cantilever and the sample stage face each other, and then slidably move the stage in a direction intersecting with the first direction.
    Type: Grant
    Filed: October 11, 2019
    Date of Patent: November 15, 2022
    Assignee: Shimadzu Corporation
    Inventors: Kanji Kobayashi, Masato Hirade
  • Publication number: 20220358636
    Abstract: Provided is a technique that makes a user analyze a sample without stressing the user as much as possible. An analyzer is provided with a display unit and a display control unit for controlling the display unit. The display control unit causes the display unit to display predetermined information in a step in which the user is waiting among steps of analyzing the sample.
    Type: Application
    Filed: March 28, 2022
    Publication date: November 10, 2022
    Inventors: Kazuma WATANABE, Hiroshi ARAI, Keita FUJINO, Masato HIRADE, Yuichiro IKEDA, Hideo NAKAJIMA, Kenji YAMASAKI
  • Publication number: 20220357359
    Abstract: Provided is a technique for making a user analyze a sample while providing convenience to the user. An information providing system is provided with a determination unit configured to determine whether or not the part needs to be replaced, a display unit, and a display control unit configured to control the display unit. The display control unit causes the display unit to display supplier information on a supplier of the part when the part needs to be replaced.
    Type: Application
    Filed: March 28, 2022
    Publication date: November 10, 2022
    Inventors: Kazuma WATANABE, Hiroshi ARAI, Masato HIRADE, Yuichiro IKEDA, Hideo NAKAJIMA, Kenji YAMASAKI, Keita FUJINO
  • Patent number: 11454647
    Abstract: A cantilever has a probe at a tip end. An optical system emits laser light to the cantilever and detects the laser light reflected by the cantilever. A measurement unit measures characteristics of a sample based on a displacement of the cantilever obtained by a change in a position of the laser light detected by the optical system. The laser light adjustment unit adjusts, when adjusting the optical axis of the laser light, a spot diameter of the laser light to be larger than the spot diameter when measuring the characteristics of a sample. The imaging unit captures an image of a range including the position of the probe when adjusting the optical axis of the laser light. The display unit displays the captured image.
    Type: Grant
    Filed: July 27, 2018
    Date of Patent: September 27, 2022
    Assignee: Shimadzu Corporation
    Inventors: Kazuma Watanabe, Keita Fujino, Masato Hirade, Kenji Yamasaki, Hideo Nakajima, Yuichiro Ikeda, Hiroshi Arai
  • Patent number: 11415596
    Abstract: A scanning probe microscope 1 is provided with a control unit 15. The control unit 15 includes a signal acquisition processing unit 151, an image acquisition processing unit 152, a scanning condition change processing unit 154, a scanning processing unit 155, and a noise determination processing unit 156. In the scanning probe microscope 1, when removing noise included in a surface image of a sample, the scanning condition change processing unit 154 changes a scanning condition. And, the signal acquisition processing unit 151 acquires an output signal from a detection unit 12. The image acquisition processing unit 152 acquires a surface image of a sample S based on the output signal. The noise determination processing unit 156 determines whether or not noise is inclined in the output signal contains noise based on the change in the output signal or the change in the surface image of the sample S when the scanning condition is changed by the scanning condition change processing unit 154.
    Type: Grant
    Filed: January 29, 2018
    Date of Patent: August 16, 2022
    Assignee: Shimadzu Corporation
    Inventors: Hiroshi Arai, Masato Hirade
  • Publication number: 20220018873
    Abstract: A scanning probe microscope is provided with a cantilever having a probe at a tip end thereof, an optical system for emitting laser light onto the cantilever and detecting the laser light reflected by the cantilever, an imaging unit for imaging a range including a position of the tip end of the cantilever when adjusting an optical axis of the laser light, an image processing unit for detecting a position of the tip end of the probe and a position of a spot of the laser light from an image generated by the imaging unit, an optical axis adjustment unit for adjusting the optical axis of the laser light based on the detected positions, and a sample holder for holding a sample. The sample holder includes a mirror.
    Type: Application
    Filed: July 3, 2019
    Publication date: January 20, 2022
    Inventor: Masato HIRADE
  • Publication number: 20210349125
    Abstract: A surface analysis device (1) is provided with a sample stage (30) for placing a sample thereon, a cantilever to be arranged to face the sample stage (30), and a cantilever drive unit for driving the cantilever. The drive mechanism is configured, when taking out the sample stage (30), to shift the sample stage (30) relative to a measurement unit (20) so that the measurement unit (20) and the sample stage (30) separate from each other in a first direction in which the cantilever and the sample stage (30) face each other, and then slidably move the stage (30) in a direction intersecting with the first direction.
    Type: Application
    Filed: October 11, 2019
    Publication date: November 11, 2021
    Inventors: Kanji KOBAYASHI, Masato HIRADE
  • Patent number: 11162975
    Abstract: Provided is a conversion mechanism that can be applied to a surface analyzer, etc., the mechanism being capable of smoothly converting a movement direction using a ling mechanism. The moving mechanism is composed of: a link mechanism including a first block, a second block, and a link member pivotally supported by the first block and the second block; a slide mechanism configured to reciprocate the first block in a first direction; and a contact member configured to come into contact with the second block or link member to guide a lifting and lowering movement of the second block in a second direction. The link member is pivotally supported by the first block and the second block so that it can be pivoted about a rotation axis in the third direction perpendicular to the first direction and the second direction. The contact member has a circular cross-section when viewed from the third direction.
    Type: Grant
    Filed: January 25, 2021
    Date of Patent: November 2, 2021
    Assignee: Shimadzu Corporation
    Inventor: Masato Hirade
  • Publication number: 20210311091
    Abstract: A cantilever (2) has a probe (7) at a tip end. An optical system (80) emits laser light to the cantilever (2) and detects the laser light reflected by the cantilever (2). A measurement unit (14) measures characteristics of a sample (9) based on a displacement of the cantilever (2) obtained by a change in a position of the laser light detected by the optical system (80). The laser light adjustment unit (20) adjusts, when adjusting the optical axis of the laser light, a spot diameter of the laser light to be larger than the spot diameter when measuring the characteristics of a sample (8). The imaging unit (10) captures an image of a range including the position of the probe (7) when adjusting the optical axis of the laser light. The display unit (12) displays the captured image.
    Type: Application
    Filed: July 27, 2018
    Publication date: October 7, 2021
    Inventors: Kazuma WATANABE, Keita FUJINO, Masato HIRADE, Kenji YAMASAKI, Hideo NAKAJIMA, Yuichiro IKEDA, Hiroshi ARAI
  • Patent number: 11073535
    Abstract: A scanning probe microscope includes a case, an actuator, at least one elastic body, and a probe. The actuator includes a piezoelectric scanner having a cylindrical shape and a sample holder. The piezoelectric scanner is disposed inside the case to be coaxial with the case such that the first end is fixed to the bottom portion. The sample holder is provided at a second end of the piezoelectric scanner. At least one elastic body is disposed so as to be sandwiched between the case and at least one of the piezoelectric scanner and the sample holder.
    Type: Grant
    Filed: December 27, 2019
    Date of Patent: July 27, 2021
    Assignee: Shimadzu Corporation
    Inventor: Masato Hirade
  • Publication number: 20210055326
    Abstract: A scanning probe microscope 1 is provided with a control unit 15. The control unit 15 includes a signal acquisition processing unit 151, an image acquisition processing unit 152, a scanning condition change processing unit 154, a scanning processing unit 155, and a noise determination processing unit 156. In the scanning probe microscope 1, when removing noise included in a surface image of a sample, the scanning condition change processing unit 154 changes a scanning condition. And, the signal acquisition processing unit 151 acquires an output signal from a detection unit 12. The image acquisition processing unit 152 acquires a surface image of a sample S based on the output signal. The noise determination processing unit 156 determines whether or not noise is inclined in the output signal contains noise based on the change in the output signal or the change in the surface image of the sample S when the scanning condition is changed by the scanning condition change processing unit 154.
    Type: Application
    Filed: January 29, 2018
    Publication date: February 25, 2021
    Inventors: Hiroshi ARAI, Masato HIRADE
  • Patent number: 10846547
    Abstract: A data correction method for allowing any observer to satisfactorily perform height correction on an image is provided. Specifically, a data correction method for correcting height of a plurality of pieces of measurement data by using image data acquired by a scanning probe microscope is disclosed. In this data correction method, a computer extracts a reference plane region from the image data, selects three pieces of measurement data, from the pieces of measurement data, at three points in the extracted reference plane region as first to third reference point data, and performs height correction on the other pieces of measurement data on the assumption that the first to third reference point data have the same height.
    Type: Grant
    Filed: January 4, 2019
    Date of Patent: November 24, 2020
    Assignee: Shimadzu Corporation
    Inventors: Masato Hirade, Kenji Yamasaki
  • Publication number: 20200341027
    Abstract: A scanning probe microscope includes a case, an actuator, at least one elastic body, and a probe. The actuator includes a piezoelectric scanner having a cylindrical shape and a sample holder. The piezoelectric scanner is disposed inside the case to be coaxial with the case such that the first end is fixed to the bottom portion. The sample holder is provided at a second end of the piezoelectric scanner. At least one elastic body is disposed so as to be sandwiched between the case and at least one of the piezoelectric scanner and the sample holder.
    Type: Application
    Filed: December 27, 2019
    Publication date: October 29, 2020
    Inventor: Masato HIRADE
  • Patent number: 10641790
    Abstract: Provided is a scanning probe microscope being able to shorten an observation time of a minute observation object. Main measurement is performed to acquire a surface image of a sample based on a detection signal in a measurement range of a plurality of lines by repeating, for each line, processing of scanning a cantilever at predetermined second intervals in a Y-direction after acquiring the detection signal at predetermined first intervals while scanning the cantilever on a line having a predetermined length along an X-direction. Preliminary measurement is performed to acquire a surface image of the sample by acquiring the detection signal at intervals wider than the first intervals or scanning the cantilever in the Y-direction at intervals wider than the second intervals before the main measurement, the surface image of the sample being coarser than the surface image in the main measurement.
    Type: Grant
    Filed: March 1, 2019
    Date of Patent: May 5, 2020
    Assignee: Shimadzu Corporation
    Inventors: Kazuma Watanabe, Keita Fujino, Eiji Iida, Masato Hirade, Kenji Yamasaki, Hideo Nakajima, Yuichiro Ikeda, Hiroshi Arai
  • Patent number: 10598691
    Abstract: A scanning probe microscope includes a light source, a detector, a housing, an opening and closing door, an opening and closing sensor, a control unit, and the like. The opening and closing door is provided in the housing. The control unit 16 also functions as the light intensity change processing unit 164. In the scanning probe microscope, when the opening and closing sensor detects opening and closing of the opening and closing door, the light intensity change processing unit automatically changes the intensity of light irradiated from the light source based on a detection result of the opening and closing sensor. Therefore, it is possible to omit light intensity adjustment work performed manually by the user. As a result, the workability of the user when using the scanning probe microscope 1 can be improved.
    Type: Grant
    Filed: March 1, 2019
    Date of Patent: March 24, 2020
    Assignee: Shimadzu Corporation
    Inventors: Kazuma Watanabe, Keita Fujino, Eiji Iida, Masato Hirade, Kenji Yamasaki, Hideo Nakajima, Yuichiro Ikeda, Hiroshi Arai
  • Patent number: 10564180
    Abstract: A scanning probe microscope capable of increasing a relative speed of a probe and making noise unlikely to occur in a measurement result for the surface shape of a sample. When a relative movement direction of the probe is switched at the time of reciprocation in an X direction and a direction opposite to the X direction, the relative speed is gradually decreased and then the direction is switched, and after the switching, the relative speed is gradually increased, to prevent a rapid change in the relative speed. At the time of shifting the probe in a Y direction and a direction opposite to the Y direction, the relative speed of the probe is gradually increased and then the relative speed is gradually decreased, to prevent a rapid change in the relative speed.
    Type: Grant
    Filed: April 14, 2015
    Date of Patent: February 18, 2020
    Assignee: Shimadzu Corporation
    Inventor: Masato Hirade
  • Patent number: 10564183
    Abstract: An inclination correcting processor performs an image process for correcting inclination of a surface image to a Z direction intersecting an X direction and a Y direction on the surface image of a sample which has been acquired from scanning by a scanning processor. The inclination correcting processor extracts a plurality of pixels from the surface image on a straight line along a predetermined direction and corrects inclination of the surface image based on luminance of the extracted pixels. In a case where correction is performed on the surface image of the sample having a flat surface at least in the one direction (P direction) intersecting the X direction and the Y direction, the inclination correcting processor performs the image process such that the predetermined direction (a direction of a straight line 28) substantially matches the one direction (P direction).
    Type: Grant
    Filed: November 8, 2018
    Date of Patent: February 18, 2020
    Assignee: Shimadzu Corporation
    Inventor: Masato Hirade
  • Publication number: 20190331711
    Abstract: A scanning probe microscope includes a light source, a detector, a housing, an opening and closing door, an opening and closing sensor, a control unit, and the like. The opening and closing door is provided in the housing. The control unit 16 also functions as the light intensity change processing unit 164. In the scanning probe microscope, when the opening and closing sensor detects opening and closing of the opening and closing door, the light intensity change processing unit automatically changes the intensity of light irradiated from the light source based on a detection result of the opening and closing sensor. Therefore, it is possible to omit light intensity adjustment work performed manually by the user. As a result, the workability of the user when using the scanning probe microscope 1 can be improved.
    Type: Application
    Filed: March 1, 2019
    Publication date: October 31, 2019
    Inventors: Kazuma WATANABE, Keita FUJINO, Eiji IIDA, Masato HIRADE, Kenji YAMASAKI, Hideo NAKAJIMA, Yuichiro IKEDA, Hiroshi ARAI
  • Publication number: 20190324053
    Abstract: Provided is a scanning probe microscope being able to shorten an observation time of a minute observation object. Main measurement is performed to acquire a surface image of a sample based on a detection signal in a measurement range of a plurality of lines by repeating, for each line, processing of scanning a cantilever at predetermined second intervals in a Y-direction after acquiring the detection signal at predetermined first intervals while scanning the cantilever on a line having a predetermined length along an X-direction. Preliminary measurement is performed to acquire a surface image of the sample by acquiring the detection signal at intervals wider than the first intervals or scanning the cantilever in the Y-direction at intervals wider than the second intervals before the main measurement, the surface image of the sample being coarser than the surface image in the main measurement.
    Type: Application
    Filed: March 1, 2019
    Publication date: October 24, 2019
    Inventors: Kazuma WATANABE, Keita FUJINO, Eiji IIDA, Masato HIRADE, Kenji YAMASAKI, Hideo NAKAJIMA, Yuichiro IKEDA, Hiroshi ARAI
  • Publication number: 20190294905
    Abstract: A data correction method for allowing any observer to satisfactorily perform height correction on an image is provided. Specifically, a data correction method for correcting height of a plurality of pieces of measurement data by using image data acquired by a scanning probe microscope is disclosed. In this data correction method, a computer extracts a reference plane region from the image data, selects three pieces of measurement data, from the pieces of measurement data, at three points in the extracted reference plane region as first to third reference point data, and performs height correction on the other pieces of measurement data on the assumption that the first to third reference point data have the same height.
    Type: Application
    Filed: January 4, 2019
    Publication date: September 26, 2019
    Applicant: Shimadzu Corporation
    Inventors: Masato HIRADE, Kenji YAMASAKI