Patents by Inventor Masato Ohnishi

Masato Ohnishi has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20210164770
    Abstract: A wafer is prepared, and a thickness shape of the prepared wafer at each position in a radial direction is measured for each of a predetermined number of angles into which 360 degrees of a circumference around the center of the wafer are divided. The thickness shape obtained by a measuring machine for each angle is approximated with a sixth or higher order polynomial, and a function of the wafer thickness at the position in the radial direction is created. The thickness shape outputted by the measuring machine and a thickness shape outputted by the function are compared with each other, and an error on the entire surface of the wafer is confirmed to be not greater than a predetermined error. After the confirmation, information of the function for each angle is attached to the wafer as data representing the wafer shape and supplied to a user.
    Type: Application
    Filed: August 1, 2019
    Publication date: June 3, 2021
    Inventor: Masato OHNISHI
  • Patent number: 10665460
    Abstract: A vapor phase growth apparatus includes a reactor, a plurality of flow paths, a cap, and an attachment. The reactor has an inlet through which vapor phase growth gas is introduced therein. The plurality of flow paths extend from the inlet to the outside of the inlet 8a. The cap has an introduction passage. The attachment has a branch path connectable to the introduction passage, and is attached to the cap. The branch path is branches in a tournament-tree shape from the introduction passage side toward the downstream side of the material gas, so that the branched paths are connected to the corresponding flow paths. Thus, a vapor phase growth apparatus capable of improving uniformity of the film thickness of an epitaxial layer grown on a substrate with high cost effectiveness, is provided.
    Type: Grant
    Filed: July 6, 2017
    Date of Patent: May 26, 2020
    Assignee: SHIN-ETSU HANDOTAI CO., LTD.
    Inventor: Masato Ohnishi
  • Publication number: 20190206685
    Abstract: A vapor phase growth apparatus includes a reactor, a plurality of flow paths, a cap, and an attachment. The reactor has an inlet through which vapor phase growth gas is introduced therein. The plurality of flow paths extend from the inlet to the outside of the inlet 8a. The cap has an introduction passage. The attachment has a branch path connectable to the introduction passage, and is attached to the cap. The branch path is branches in a tournament-tree shape from the introduction passage side toward the downstream side of the material gas, so that the branched paths are connected to the corresponding flow paths. Thus, a vapor phase growth apparatus capable of improving uniformity of the film thickness of an epitaxial layer grown on a substrate with high cost effectiveness, is provided.
    Type: Application
    Filed: July 6, 2017
    Publication date: July 4, 2019
    Inventor: Masato OHNISHI
  • Patent number: 9797066
    Abstract: A susceptor is disclosed that can increase a heat capacity of a susceptor outer peripheral portion by enlarging the thickness of the susceptor and equalize thermal conditions for an outer peripheral portion and the inner peripheral portion of a wafer and a method for manufacturing an epitaxial wafer that uses this susceptor to perform vapor-phase epitaxy of an epitaxial layer. Back surface depositions have a close relationship with heat transfer that occurs between a wafer and a susceptor, i.e., a wafer outer peripheral portion has a higher temperature than a wafer inner peripheral portion since the wafer is in contact with or close to the susceptor at the wafer outer peripheral portion and hence the back surface depositions are apt to be generated. This is solved by equalizing thermal conditions for the wafer outer peripheral portion and the inner peripheral portion of the wafer back surface.
    Type: Grant
    Filed: November 10, 2011
    Date of Patent: October 24, 2017
    Assignee: SHIN-ETSU HANDOTAI CO., LTD.
    Inventor: Masato Ohnishi
  • Patent number: 9708732
    Abstract: The present invention provides a susceptor for supporting a semiconductor substrate at the time of performing vapor-phase epitaxy of an epitaxial layer, wherein a pocket in which the semiconductor substrate is to be placed is formed on an upper surface of the susceptor, the pocket has a two-stage structure having an upper-stage-pocket portion for supporting an outer peripheral edge portion of the semiconductor substrate and a lower-stage-pocket portion that is formed on a central side of the pocket below the upper-stage-pocket portion, through holes that penetrate to a back surface of the susceptor and are opened at the time of performing the vapor-phase epitaxy are formed in the lower-stage-pocket portion, and a groove is provided on the back surface of the susceptor at a position corresponding to that of the upper-stage-pocket portion.
    Type: Grant
    Filed: February 13, 2012
    Date of Patent: July 18, 2017
    Assignee: SHIN-ETSU HANDOTAI CO., LTD.
    Inventor: Masato Ohnishi
  • Patent number: 9019334
    Abstract: An optical device is provided with an optical unit for forming an optical path of a laser beam, and a housing defining an internal space for accommodating the optical unit. The housing includes a partition for dividing the internal space into a first space and a second space. The optical unit includes a sensor arranged in the first space to detect the laser beam in the second space, a mirror arranged in the second space to define a direction of the optical path, a drive source arranged in the second space to operate the mirror to adjust the direction of the optical path, a power line for supplying power to the drive source, and a signal line for transmitting an output signal of the sensor. The signal line extends in the first space and the power line extends in the second space.
    Type: Grant
    Filed: March 2, 2011
    Date of Patent: April 28, 2015
    Assignee: Kyocera Mita Corporation
    Inventors: Masato Ohnishi, Kousuke Uchida
  • Patent number: 8948775
    Abstract: A mobile communication system includes a traffic monitoring apparatus arranged between predetermined nodes in a mobile network for monitoring a traffic amount between the nodes; and a traffic control apparatus that outputs control information to the predetermined nodes based on a report from the traffic monitoring apparatus wherein the control information instructs the predetermined nodes to level the traffic amount.
    Type: Grant
    Filed: December 17, 2010
    Date of Patent: February 3, 2015
    Assignee: NEC Corporation
    Inventor: Masato Ohnishi
  • Patent number: 8760484
    Abstract: An attachment mechanism of an optical scanner includes a supporting structure with an opening and a fixing member. The fixing member positions and fixes the optical scanner with a positioning boss held by the opening. The fixing member includes an annular part having an outer circumference face fitted in the opening and an internal circumference face fitted on the positioning boss. One of the internal circumference face and an outer circumference face of the positioning boss includes a projection and another includes a depression for insertion of the projection. A top face of the projection and/or a bottom face of the depression slope(s) slanted from the circumference. By inserting the positioning boss in the opening, fitting the annular part in the opening, and turning the fixing member to narrow a gap between the top face and bottom face, the optical scanner is fixed to the supporting structure.
    Type: Grant
    Filed: May 21, 2013
    Date of Patent: June 24, 2014
    Assignee: KYOCERA Document Solutions Inc.
    Inventor: Masato Ohnishi
  • Publication number: 20130319319
    Abstract: The present invention provides a susceptor for supporting a semiconductor substrate at the time of performing vapor-phase epitaxy of an epitaxial layer, wherein a pocket in which the semiconductor substrate is to be placed is formed on an upper surface of the susceptor, the pocket has a two-stage structure having an upper-stage-pocket portion for supporting an outer peripheral edge portion of the semiconductor substrate and a lower-stage-pocket portion that is formed on a central side of the pocket below the upper-stage-pocket portion, through holes that penetrate to a back surface of the susceptor and are opened at the time of performing the vapor-phase epitaxy are formed in the lower-stage-pocket portion, and a groove is provided on the back surface of the susceptor at a position corresponding to that of the upper-stage-pocket portion.
    Type: Application
    Filed: February 13, 2012
    Publication date: December 5, 2013
    Applicant: SHIN-ETSU HANDOTAI CO., LTD.
    Inventor: Masato Ohnishi
  • Publication number: 20130314485
    Abstract: An attachment mechanism of an optical scanner includes a supporting structure with an opening and a fixing member. The fixing member positions and fixes the optical scanner with a positioning boss held by the opening. The fixing member includes an annular part having an outer circumference face fitted in the opening and an internal circumference face fitted on the positioning boss. One of the internal circumference face and an outer circumference face of the positioning boss includes a projection and another includes a depression for insertion of the projection. A top face of the projection and/or a bottom face of the depression slope(s) slanted from the circumference. By inserting the positioning boss in the opening, fitting the annular part in the opening, and turning the fixing member to narrow a gap between the top face and bottom face, the optical scanner is fixed to the supporting structure.
    Type: Application
    Filed: May 21, 2013
    Publication date: November 28, 2013
    Applicant: KYOCERA DOCUMENT SOLUTIONS INC.
    Inventor: Masato OHNISHI
  • Publication number: 20130246600
    Abstract: Provided is a communication service providing system capable of providing the same level of services independently of a location where a user's terminal exists and capable of providing a service to a user via a network appropriate to the service. Location information collection means 71 collects location information on a terminal of a user receiving a service from any one of the data centers. User data and the like transfer instruction means 72 determines a data center closest to a location indicated by the location information and, in the case where the data center differs from the data center currently providing the service to the user, instructs the data center currently providing the service to the user to transfer the user data and the user area of the user to the data center closest to the location indicated by the location information.
    Type: Application
    Filed: November 30, 2011
    Publication date: September 19, 2013
    Applicant: NEC CORPORATION
    Inventor: Masato Ohnishi
  • Patent number: 8520049
    Abstract: A fixing mechanism of an optical scanning device, the optical scanning device emitting a light beam and performing a scanning, the optical scanning device further being fixed to a frame at an external part, the optical scanning device further including a housing, and the fixing mechanism including: a penetration hole provided in the frame; and a protruding pin provided at both ends of the housing thereby forming a plurality of protruding pins, wherein at least one of the plurality of protruding pins is insertable to the penetration hole formed in the frame; and a biasing member biasing the housing in a direction.
    Type: Grant
    Filed: March 29, 2011
    Date of Patent: August 27, 2013
    Assignee: Kyocera Document Solutions Inc.
    Inventors: Hiroki Takahashi, Masato Ohnishi, Kousuke Uchida
  • Publication number: 20130180447
    Abstract: A susceptor is disclosed that can increase a heat capacity of a susceptor outer peripheral portion by enlarging the thickness of the susceptor and equalize thermal conditions for an outer peripheral portion and the inner peripheral portion of a wafer and a method for manufacturing an epitaxial wafer that uses this susceptor to perform vapor-phase epitaxy of an epitaxial layer. Back surface depositions have a close relationship with heat transfer that occurs between a wafer and a susceptor, i.e., a wafer outer peripheral portion has a higher temperature than a wafer inner peripheral portion since the wafer is in contact with or close to the susceptor at the wafer outer peripheral portion and hence the back surface depositions are apt to be generated. This is solved by equalizing thermal conditions for the wafer outer peripheral portion and the inner peripheral portion of the wafer back surface.
    Type: Application
    Filed: November 10, 2011
    Publication date: July 18, 2013
    Applicant: SHIN-ETSU HANDOTAI CO., LTD.
    Inventor: Masato Ohnishi
  • Publication number: 20120252458
    Abstract: A mobile communication system includes a traffic monitoring apparatus arranged between predetermined nodes in a mobile network for monitoring a traffic amount between the nodes; and a traffic control apparatus that outputs control information to the predetermined nodes based on a report from the traffic monitoring apparatus wherein the control information instructs the predetermined nodes to level the traffic amount.
    Type: Application
    Filed: December 17, 2010
    Publication date: October 4, 2012
    Inventor: Masato Ohnishi
  • Patent number: 8101701
    Abstract: Fumaric acid derivatives and ophthalmic lenses using them are disclosed. More specifically, a fumaric acid derivative having a hydrophilic group and a silicon-containing alkyl group within a molecule, and contact lenses or intraocular lenses using the same are disclosed. The fumaric acid derivatives of the present invention provide, on one hand, superior oxygen permeability by having a silicon-containing alkyl group within the molecular structure, and on the other hand, improved compatibility with other hydrophilic monomers by having a hydrophilic group within the same molecule. When ophthalmic lenses obtained by polymerizing monomer compositions containing the fumaric acid derivative are constructed as, for example, water content lenses, lenses with high oxygen permeability independent from the water content may be obtained, wherein the fumaric acid derivatives is superior in compatibility with the hydrophilic monomer used in combination and allows the combination in various mixing ratios.
    Type: Grant
    Filed: June 22, 2007
    Date of Patent: January 24, 2012
    Assignees: Menicon Nect Co., Ltd., Mie University
    Inventors: Takahito Itoh, Takahiro Uno, Masato Ohnishi, Yasuyuki Kato, Takashi Otsu
  • Patent number: 8038793
    Abstract: The invention provides an epitaxial growth method which is a single wafer processing epitaxial growth method by which at least a single crystal substrate is placed in a reaction chamber with an upper wall having a downward convexity and an epitaxial layer is deposited on the single crystal substrate by introducing raw material gas and carrier gas into the reaction chamber through a gas feed port, in which, after any one of the radius of curvature of the upper wall of the reaction chamber and a difference between an upper end of the gas feed port and a lower end of the upper wall of the reaction chamber in the height direction or both are adjusted in accordance with the flow rate of the carrier gas which is introduced into the reaction chamber through the gas feed port, an epitaxial layer is deposited on the single crystal substrate.
    Type: Grant
    Filed: November 18, 2008
    Date of Patent: October 18, 2011
    Assignee: Shin-Etsu Handotai Co., Ltd.
    Inventor: Masato Ohnishi
  • Publication number: 20110242265
    Abstract: A fixing mechanism of an optical scanning device, the optical scanning device emitting a light beam and performing a scanning, the optical scanning device further being fixed to a frame at an external part, the optical scanning device further including a housing, and the fixing mechanism including: a penetration hole provided in the frame; and a protruding pin provided at both ends of the housing thereby forming a plurality of protruding pins, wherein at least one of the plurality of protruding pins is insertable to the penetration hole formed in the frame; and a biasing member biasing the housing in a direction.
    Type: Application
    Filed: March 29, 2011
    Publication date: October 6, 2011
    Inventors: Hiroki TAKAHASHI, Masato OHNISHI, Kousuke UCHIDA
  • Publication number: 20110228028
    Abstract: An optical device is provided with an optical unit for forming an optical path of a laser beam, and a housing defining an internal space for accommodating the optical unit. The housing includes a partition for dividing the internal space into a first space and a second space. The optical unit includes a sensor arranged in the first space to detect the laser beam in the second space, a mirror arranged in the second space to define a direction of the optical path, a drive source arranged in the second space to operate the mirror to adjust the direction of the optical path, a power line for supplying power to the drive source, and a signal line for transmitting an output signal of the sensor. The signal line extends in the first space and the power line extends in the second space.
    Type: Application
    Filed: March 2, 2011
    Publication date: September 22, 2011
    Applicant: KYOCERA MITA CORPORATION
    Inventors: Masato Ohnishi, Kousuke Uchida
  • Patent number: 7920864
    Abstract: The present invention provides a mobile communication system including an IP (Internet Protocol) core network, a mobile communication network, a switching center server and a mobile terminal, wherein a plurality of services in each of the IP network and the mobile communication network are provided for the mobile terminal.
    Type: Grant
    Filed: May 7, 2007
    Date of Patent: April 5, 2011
    Assignee: NEC Corporation
    Inventors: Shigeharu Kurita, Masato Ohnishi
  • Publication number: 20110073037
    Abstract: An epitaxial growth susceptor having a pocket that horizontally supports a single-crystal substrate in an epitaxial growth apparatus in which the pocket has an outer peripheral region with which the single-crystal substrate comes into contact to be supported; and a central region that is surrounded by the outer peripheral region and does not come into contact with the single-crystal substrate, one or more through holes that pierce the epitaxial growth susceptor are formed in the central region of the pocket, and the outer peripheral region of the pocket has a tapered shape that is inclined with a tilt angle that is greater than 0° and less than 1° in such a manner that a depth increases toward the central region, and also has a horizontal width that is 3.3% or more of a diameter of the single-crystal substrate to be supported.
    Type: Application
    Filed: December 5, 2008
    Publication date: March 31, 2011
    Applicant: SHIN-ETSU HANDOTAI CO., LTD.
    Inventor: Masato Ohnishi