Abstract: A plurality of electrode bars are arranged in parallel with each other, and side electrode bars are connected to the corresponding opposite ends of the electrode bars, thereby forming a ladder-like RF discharge electrode. Power supply points are arranged axisymmetrically with respect to a reference line, which is a bisector which bisects one side of the RF discharge electrode, while being spaced a predetermined distance from the reference line, thereby suppressing voltage distribution on the ladder electrode, which has an effect on uniformity of discharge distribution, to a sufficiently low level of nonuniformity. Thus, uniform distribution of film deposition rate can be obtained, thereby enabling uniform deposition even in large-area applications.

Abstract: A coal gasification composite power generation system including a primary combustor (2) for effecting high temperature combustion of coal fuel (8) under a reducing condition by compressed air or oxygen supplied from a compressor (1), a secondary combustor (3) for effecting complete combustion of the resulting product gas of the primary combustor, the secondary combustor (3) being supplied with the primary combustor product gas, air or oxygen for complete burning of the primary combustor product gas and an additive gas for controlling the combustion gas temperature in the secondary combustor consisting either of steam or carbon dioxide, a gas turbine (4) for driving the compressor (1) and driven by a working fluid consisting of the resulting combustion gas from the secondary combustor. Disposed in series downstream of the gas turbine are a waste heat system generator (5, 18) a desulfurizer (6) and a condenser (7) for separating CO.sub.2 and H.sub.2 O from the exhaust gas of the gas turbine (4). Either CO.sub.