Abstract: A densitometer using microwaves, which measures the density value of a to-be-measured substance in a to-be-measured liquid on the basis of a reception signal obtained by transmitting/receiving a microwave in/from the to-be-measured liquid by applicators, includes a clock source for generating a reference signal as a phase reference, an oscillator formed from a PLL circuit for generating a microwave having a frequency f in synchronism with the reference signal from the clock source, an oscillator formed from a PLL circuit for generating a microwave having a frequency f+&Dgr;f in synchronism with the reference signal from the clock source, a mixer for mixing the microwave from the oscillator, i.e.

Abstract: A chemical vapor deposition apparatus has a reactor divided into a reaction space and a purging space by a susceptor for supporting a wafer and a loading chamber communicated through a gate with the reactor. Exhaust units are communicated with the reactor and loading chamber, respectively, so that the pressures in the reactor and loading chamber may be reduced. The susceptor has a plurality of recesses to aid placing or scooping the water. Through a transparent wall on the side of the purging space, the susceptor is heated by a lamp unit disposed outside the transparent wall. The loading chamber includes a wafer transport mechanism for charging a wafer into the reactor or discharging a processed wafer from the reactor. An unprocessed wafer is loaded to the loading chamber from a cassette and the processed wafer is unloaded to the cassette. One or a small number of wafers are processed at one time. A uniform film is deposited with a high reproducibility.

Abstract: Energy storage device characterized in that energy storing body formed of hollow cone of polyurethane is provided between pair of guide members in form of inverted hollow cones. These assemblies are serially arranged one upon another and held in cylinder body under piston pressure. Compressive force developed between pair of guide members deforms energy storing cone and restoring force of body is taken out as hydraulic power.