Patents by Inventor Matthew Russell King

Matthew Russell King has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 10854600
    Abstract: A method of forming an integrated circuit can include forming a heterostructure over a substrate structure, wherein the given substrate structure comprises a given semiconductor material. The method can include etching a castellated channel region in an e-mode device area of the heterostructure that defines a plurality of ridge channels interleaved between a plurality of trenches, the ridge channels comprising another semiconductor material. The method can also include forming an isolation region on the heterostructure to electrically isolate the e-mode device area from a d-mode device area of the heterostructure. The method can further include forming a mask with an opening that defines a castellated gate opening overlying the castellated channel region and the mask defines an opening overlaying a single planar gate overlying the d-mode device area of the heterostructure. The method can also include performing a contact fill with conductive material to form a castellated gate contact.
    Type: Grant
    Filed: September 20, 2019
    Date of Patent: December 1, 2020
    Assignee: NORTHROP GRUMMAN SYSTEMS CORPORATION
    Inventors: Justin Andrew Parke, Eric J. Stewart, Robert S. Howell, Howell George Henry, Bettina Nechay, Harlan Carl Cramer, Matthew Russell King, Shalini Gupta, Ronald G. Freitag, Karen Marie Renaldo
  • Publication number: 20200013775
    Abstract: A method of forming an integrated circuit can include forming a heterostructure over a substrate structure, wherein the given substrate structure comprises a given semiconductor material. The method can include etching a castellated channel region in an e-mode device area of the heterostructure that defines a plurality of ridge channels interleaved between a plurality of trenches, the ridge channels comprising another semiconductor material. The method can also include forming an isolation region on the heterostructure to electrically isolate the e-mode device area from a d-mode device area of the heterostructure. The method can further include forming a mask with an opening that defines a castellated gate opening overlying the castellated channel region and the mask defines an opening overlaying a single planar gate overlying the d-mode device area of the heterostructure. The method can also include performing a contact fill with conductive material to form a castellated gate contact.
    Type: Application
    Filed: September 20, 2019
    Publication date: January 9, 2020
    Applicant: NORTHROP GRUMMAN SYSTEMS CORPORATION
    Inventors: JUSTIN ANDREW PARKE, ERIC J. STEWART, ROBERT S. HOWELL, HOWELL GEORGE HENRY, BETTINA NECHAY, HARLAN CARL CRAMER, MATTHEW RUSSELL KING, SHALINI GUPTA, RONALD G. FREITAG, KAREN MARIE RENALDO
  • Patent number: 10490374
    Abstract: One embodiment of the invention includes a phase-change material switch. The switch includes a first terminal that receives an input signal and a second terminal. The switch includes an actuation portion that receives a control signal in one of a first state to emit a first heat profile and a second state to emit a second heat profile. The switch further includes a switch portion comprising a phase-change material arranged as a plurality of longitudinal strips that each interconnect the first terminal and the second terminal and that are each in proximity with the actuation portion. The phase-change material can be selectable between a conducting state in response to the first heat profile to conduct an input signal from the first terminal to the second terminal and a blocking state in response to the second heat profile to block the input signal from the first terminal to the second terminal.
    Type: Grant
    Filed: September 12, 2014
    Date of Patent: November 26, 2019
    Assignee: NORTHROP GRUMMAN SYSTEMS CORPORATION
    Inventors: Pavel Borodulin, Nabil Abdel-Meguid El-Hinnawy, Robert Miles Young, Matthew Russell King, Michael J. Lee
  • Patent number: 10468406
    Abstract: A circuit is provided that includes a castellated channel device that comprises a heterostructure overlying a substrate structure, a castellated channel device area formed in the heterostructure that defines a plurality of ridge channels interleaved between a plurality of trenches, and a three-sided castellated conductive gate contact that extends across the castellated channel device area. The three-sided gate contact substantially surrounds each ridge channel around their tops and their sides to overlap a channel interface of heterostructure of each of the plurality of ridge channels. The three-sided castellated conductive gate contact extends along at least a portion of a length of each ridge channel.
    Type: Grant
    Filed: October 8, 2014
    Date of Patent: November 5, 2019
    Assignee: NORTHROP GRUMMAN SYSTEMS CORPORATION
    Inventors: Justin Andrew Parke, Eric J. Stewart, Robert S. Howell, Howell George Henry, Bettina Nechay, Harlan Carl Cramer, Matthew Russell King, Shalini Gupta, Ronald G. Freitag, Karen Marie Renaldo
  • Patent number: 10084075
    Abstract: A transistor device is provided that comprises a base structure, and a superlattice structure overlying the base structure and comprising a multichannel ridge having sloping sidewalls. The multichannel ridge comprises a plurality of heterostructures that each form a channel of the multichannel ridge, wherein a parameter of at least one of the heterostructures is varied relative to other heterostructures of the plurality of heterostructures. The transistor device further comprises a three-sided gate contact that wraps around and substantially surrounds the top and sides of the multichannel ridge along at least a portion of its depth.
    Type: Grant
    Filed: June 15, 2017
    Date of Patent: September 25, 2018
    Assignee: Northrop Grumman Systems Corporation
    Inventors: Bettina A. Nechay, Shalini Gupta, Matthew Russell King, Eric J. Stewart, Robert S. Howell, Justin Andrew Parke, Harlan Carl Cramer, Howell George Henry, Ronald G. Freitag, Karen Marie Renaldo
  • Publication number: 20170288045
    Abstract: A transistor device is provided that comprises a base structure, and a superlattice structure overlying the base structure and comprising a multichannel ridge having sloping sidewalls. The multichannel ridge comprises a plurality of heterostructures that each form a channel of the multichannel ridge, wherein a parameter of at least one of the heterostructures is varied relative to other heterostructures of the plurality of heterostructures. The transistor device further comprises a three-sided gate contact that wraps around and substantially surrounds the top and sides of the multichannel ridge along at least a portion of its depth.
    Type: Application
    Filed: June 15, 2017
    Publication date: October 5, 2017
    Applicant: NORTHROP GRUMMAN SYSTEMS CORPORATION
    Inventors: BETTINA A. NECHAY, SHALINI GUPTA, MATTHEW RUSSELL KING, ERIC J. STEWART, ROBERT S. HOWELL, JUSTIN ANDREW PARKE, HARLAN CARL CRAMER, HOWELL GEORGE HENRY, RONALD G. FREITAG, KAREN MARIE RENALDO
  • Patent number: 9755021
    Abstract: An integrated circuit is disclosed that includes a single channel device having a first portion of a single shared heterostructure overlying a substrate structure in a single channel device area, and a gate contact that is in contact with the first portion of the single shared heterostructure. The integrated circuit also includes a multichannel device comprising a second portion of the single shared heterostructure overlying the substrate structure in a multichannel device area, a barrier layer overlying the second portion of the single shared heterorstructure, and a superlattice structure overlying the barrier layer, the superlattice structure comprising a plurality of heterostructures. An isolation region in the single shared heterostructure electrical isolates the single channel device from the multichannel device.
    Type: Grant
    Filed: June 17, 2016
    Date of Patent: September 5, 2017
    Assignee: Northrop Grumman Systems Corporation
    Inventors: Karen M. Renaldo, Eric J. Stewart, Robert S. Howell, Howell George Henry, Harlan Carl Cramer, Justin Andrew Parke, Matthew Russell King
  • Patent number: 9711615
    Abstract: A transistor device is provided that comprises a base structure, and a superlattice structure overlying the base structure and comprising a multichannel ridge having sloping sidewalls. The multichannel ridge comprises a plurality of heterostructures that each form a channel of the multichannel ridge, wherein a parameter of at least one of the heterostructures is varied relative to other heterostructures of the plurality of heterostructures. The transistor device further comprises a three-sided gate contact that wraps around and substantially surrounds the top and sides of the multichannel ridge along at least a portion of its depth.
    Type: Grant
    Filed: July 28, 2016
    Date of Patent: July 18, 2017
    Assignee: Northrop Grumman Systems Corporation
    Inventors: Bettina A. Nechay, Shalini Gupta, Matthew Russell King, Eric J. Stewart, Robert S. Howell, Justin Andrew Parke, Harlan Carl Cramer, Howell George Henry, Ronald G. Freitag, Karen Marie Renaldo
  • Publication number: 20160336425
    Abstract: A transistor device is provided that comprises a base structure, and a superlattice structure overlying the base structure and comprising a multichannel ridge having sloping sidewalls. The multichannel ridge comprises a plurality of heterostructures that each form a channel of the multichannel ridge, wherein a parameter of at least one of the heterostructures is varied relative to other heterostructures of the plurality of heterostructures. The transistor device further comprises a three-sided gate contact that wraps around and substantially surrounds the top and sides of the multichannel ridge along at least a portion of its depth.
    Type: Application
    Filed: July 28, 2016
    Publication date: November 17, 2016
    Applicant: NORTHROP GRUMMAN SYSTEMS CORPORATION
    Inventors: BETTINA A. NECHAY, SHALINI GUPTA, MATTHEW RUSSELL KING, ERIC J. STEWART, ROBERT S. HOWELL, JUSTIN ANDREW PARKE, HARLAN CARL CRAMER, HOWELL GEORGE HENRY, RONALD G. FREITAG, KAREN MARIE RENALDO
  • Publication number: 20160315152
    Abstract: An integrated circuit is disclosed that includes a single channel device having a first portion of a single shared heterostructure overlying a substrate structure in a single channel device area, and a gate contact that is in contact with the first portion of the single shared heterostructure. The integrated circuit also includes a multichannel device comprising a second portion of the single shared heterostructure overlying the substrate structure in a multichannel device area, a barrier layer overlying the second portion of the single shared heterorstructure, and a superlattice structure overlying the barrier layer, the superlattice structure comprising a plurality of heterostructures. An isolation region in the single shared heterostructure electrical isolates the single channel device from the multichannel device.
    Type: Application
    Filed: June 17, 2016
    Publication date: October 27, 2016
    Applicant: NORTHROP GRUMMAN SYSTEMS CORPORATION
    Inventors: KAREN M. RENALDO, ERIC J. STEWART, ROBERT S. HOWELL, HOWELL GEORGE HENRY, HARLAN CARL CRAMER, JUSTIN ANDREW PARKE, MATTHEW RUSSELL KING
  • Patent number: 9472634
    Abstract: A device is provided that comprises a first pillar disposed in a first region and overlying a base structure, and a second pillar disposed in a second region and overlying the base structure and being spaced apart from the first pillar by a device region. A bridge is disposed in the device region with a first end connected to the first pillar and a second end connected to the second pillar. The bridge includes a top, sides, and a bottom. The bridge is formed from one or more heterostructures with an undercut opening extending from the bottom to an underlying structure. A four-sided conductive contact wraps around and substantially surrounds the bridge around its top, its sides, and its bottom along at least a portion of its length between the first and second end.
    Type: Grant
    Filed: March 9, 2016
    Date of Patent: October 18, 2016
    Assignee: Northrop Grumman Systems Corporation
    Inventors: Eric J Stewart, Howell George Henry, Robert S. Howell, Matthew Russell King, Justin Andrew Parke, Bettina Nechay, Harlan Carl Cramer, Ronald G Freitag, Karen Marie Renaldo
  • Patent number: 9466679
    Abstract: A device is provided that comprises a first pillar disposed in a first region and overlying a base structure, and a second pillar disposed in a second region and overlying the base structure and being spaced apart from the first pillar by a device region. A bridge is disposed in the device region with a first end connected to the first pillar and a second end connected to the second pillar. The bridge includes a top, sides, and a bottom. The bridge is formed from one or more heterostructures with an undercut opening extending from the bottom to an underlying structure. A four-sided conductive contact wraps around and substantially surrounds the bridge around its top, its sides, and its bottom along at least a portion of its length between the first and second end.
    Type: Grant
    Filed: August 13, 2014
    Date of Patent: October 11, 2016
    Assignee: Northrop Grumman Systems Corporation
    Inventors: Eric J. Stewart, Howell George Henry, Robert S. Howell, Matthew Russell King, Justin Andrew Parke, Bettina Nechay, Harlan Carl Cramer, Karen Marie Renaldo, Ronald G. Freitag
  • Patent number: 9419120
    Abstract: A transistor device is provided that comprises a base structure, and a superlattice structure overlying the base structure and comprising a multichannel ridge having sloping sidewalls. The multichannel ridge comprises a plurality of heterostructures that each form a channel of the multichannel ridge, wherein a parameter of at least one of the heterostructures is varied relative to other heterostructures of the plurality of heterostructures. The transistor device further comprises a three-sided gate contact that wraps around and substantially surrounds the top and sides of the multichannel ridge along at least a portion of its depth.
    Type: Grant
    Filed: November 5, 2014
    Date of Patent: August 16, 2016
    Assignee: Northrop Grumman Systems Corporation
    Inventors: Bettina A. Nechay, Shalini Gupta, Matthew Russell King, Eric J. Stewart, Robert S. Howell, Justin Andrew Parke, Harlan Carl Cramer, Howell George Henry, Ronald G. Freitag, Karen Marie Renaldo
  • Patent number: 9385224
    Abstract: An integrated circuit is disclosed that includes a single channel device having a first portion of a single shared heterostructure overlying a substrate structure in a single channel device area, and a gate contact that is in contact with the first portion of the single shared heterostructure. The integrated circuit also includes a multichannel device comprising a second portion of the single shared heterostructure overlying the substrate structure in a multichannel device area, a barrier layer overlying the second portion of the single shared heterostructure, and a superlattice structure overlying the barrier layer, the superlattice structure comprising a plurality of heterostructures. An isolation region in the single shared heterostructure electrical isolates the single channel device from the multichannel device.
    Type: Grant
    Filed: August 13, 2014
    Date of Patent: July 5, 2016
    Assignee: Northrop Grumman Systems Corporation
    Inventors: Karen M. Renaldo, Eric J. Stewart, Robert S. Howell, Howell George Henry, Harlan Carl Cramer, Justin Andrew Parke, Matthew Russell King
  • Publication number: 20160190267
    Abstract: A device is provided that comprises a first pillar disposed in a first region and overlying a base structure, and a second pillar disposed in a second region and overlying the base structure and being spaced apart from the first pillar by a device region. A bridge is disposed in the device region with a first end connected to the first pillar and a second end connected to the second pillar. The bridge includes a top, sides, and a bottom. The bridge is formed from one or more heterostructures with an undercut opening extending from the bottom to an underlying structure. A four-sided conductive contact wraps around and substantially surrounds the bridge around its top, its sides, and its bottom along at least a portion of its length between the first and second end.
    Type: Application
    Filed: March 9, 2016
    Publication date: June 30, 2016
    Applicant: NORTHROP GRUMMAN SYSTEMS CORPORATION
    Inventors: ERIC J. STEWART, HOWELL GEORGE HENRY, ROBERT S. HOWELL, MATTHEW RUSSELL KING, JUSTIN ANDREW PARKE, BETTINA NECHAY, HARLAN CARL CRAMER, RONALD G. FREITAG, KAREN MARIE RENALDO
  • Publication number: 20160126340
    Abstract: A transistor device is provided that comprises a base structure, and a superlattice structure overlying the base structure and comprising a multichannel ridge having sloping sidewalls. The multichannel ridge comprises a plurality of heterostructures that each form a channel of the multichannel ridge, wherein a parameter of at least one of the heterostructures is varied relative to other heterostructures of the plurality of heterostructures. The transistor device further comprises a three-sided gate contact that wraps around and substantially surrounds the top and sides of the multichannel ridge along at least a portion of its depth.
    Type: Application
    Filed: November 5, 2014
    Publication date: May 5, 2016
    Applicant: NORTHROP GRUMMAN SYSTEMS CORPORATION
    Inventors: BETTINA A. NECHAY, SHALINI GUPTA, MATTHEW RUSSELL KING, ERIC J. STEWART, ROBERT S. HOWELL, JUSTIN ANDREW PARKE, HARLAN CARL CRAMER, HOWELL GEORGE HENRY, RONALD G. FREITAG, KAREN MARIE RENALDO
  • Publication number: 20160104703
    Abstract: A circuit is provided that includes a castellated channel device that comprises a heterostructure overlying a substrate structure, a castellated channel device area formed in the heterostructure that defines a plurality of ridge channels interleaved between a plurality of trenches, and a three-sided castellated conductive gate contact that extends across the castellated channel device area. The three-sided gate contact substantially surrounds each ridge channel around their tops and their sides to overlap a channel interface of heterostructure of each of the plurality of ridge channels. The three-sided castellated conductive gate contact extends along at least a portion of a length of each ridge channel.
    Type: Application
    Filed: October 8, 2014
    Publication date: April 14, 2016
    Applicant: NORTHROP GRUMMAN SYSTEMS CORPORATION
    Inventors: JUSTIN ANDREW PARKE, ERIC J. STEWART, ROBERT S. HOWELL, HOWELL GEORGE HENRY, BETTINA NECHAY, HARLAN CARL CRAMER, MATTHEW RUSSELL KING, SHALINI GUPTA, RONALD G. FREITAG, KAREN MARIE RENALDO
  • Publication number: 20160079019
    Abstract: One embodiment of the invention includes a phase-change material switch. The switch includes a first terminal that receives an input signal and a second terminal. The switch includes an actuation portion that receives a control signal in one of a first state to emit a first heat profile and a second state to emit a second heat profile. The switch further includes a switch portion comprising a phase-change material arranged as a plurality of longitudinal strips that each interconnect the first terminal and the second terminal and that are each in proximity with the actuation portion. The phase-change material can be selectable between a conducting state in response to the first heat profile to conduct an input signal from the first terminal to the second terminal and a blocking state in response to the second heat profile to block the input signal from the first terminal to the second terminal.
    Type: Application
    Filed: September 12, 2014
    Publication date: March 17, 2016
    Applicant: NORTHROP GRUMMAN SYSTEMS CORPORATION
    Inventors: PAVEL BORODULIN, Nabil Abdel-Meguid EL-HINNAWY, Robert Miles YOUNG, Matthew Russell KING, Michael J. LEE
  • Publication number: 20160049504
    Abstract: An integrated circuit is disclosed that includes a single channel device having a first portion of a single shared heterostructure overlying a substrate structure in a single channel device area, and a gate contact that is in contact with the first portion of the single shared heterostructure. The integrated circuit also includes a multichannel device comprising a second portion of the single shared heterostructure overlying the substrate structure in a multichannel device area, a barrier layer overlying the second portion of the single shared heterostructure, and a superlattice structure overlying the barrier layer, the superlattice structure comprising a plurality of heterostructures. An isolation region in the single shared heterostructure electrical isolates the single channel device from the multichannel device.
    Type: Application
    Filed: August 13, 2014
    Publication date: February 18, 2016
    Applicant: NORTHROP GRUMMAN SYSTEMS CORPORATION
    Inventors: KAREN M. RENALDO, ERIC J. STEWART, ROBERT S. HOWELL, HOWELL GEORGE HENRY, HARLAN CARL CRAMER, JUSTIN ANDREW PARKE, MATTHEW RUSSELL KING
  • Publication number: 20160049473
    Abstract: A device is provided that comprises a first pillar disposed in a first region and overlying a base structure, and a second pillar disposed in a second region and overlying the base structure and being spaced apart from the first pillar by a device region. A bridge is disposed in the device region with a first end connected to the first pillar and a second end connected to the second pillar. The bridge includes a top, sides, and a bottom. The bridge is formed from one or more heterostructures with an undercut opening extending from the bottom to an underlying structure. A four-sided conductive contact wraps around and substantially surrounds the bridge around its top, its sides, and its bottom along at least a portion of its length between the first and second end.
    Type: Application
    Filed: August 13, 2014
    Publication date: February 18, 2016
    Applicant: NORTHROP GRUMMAN SYSTEMS CORPORATION
    Inventors: ERIC J. STEWART, HOWELL GEORGE HENRY, ROBERT S. HOWELL, MATTHEW RUSSELL KING, JUSTIN ANDREW PARKE, BETTINA NECHAY, HARLAN CARL CRAMER