Patents by Inventor Megumu Makino

Megumu Makino has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 9395006
    Abstract: To provide a check valve which can be used even under a high temperature condition by overcoming a drawback “valve element sticking to sealing member” associated with high temperature use while enhancing heat resistance. An opening of a fluid path formed in a first body is brought into a closed state by bringing a valve element biased by a biasing member into contact with a sealing member. The sealing member is formed of a post-cured perfluoro elastomer packing. An annular sealing portion which is brought into line contact with the sealing member is formed on the valve element.
    Type: Grant
    Filed: May 31, 2012
    Date of Patent: July 19, 2016
    Assignee: FUJIKIN INCORPORATED
    Inventors: Shunya Ikeda, Mutsunori Koyomogi, Megumu Makino, Toshiyuki Inada
  • Patent number: 9212755
    Abstract: A fluid control device includes two opening and closing valves 2, 3 disposed symmetrical to each other and having an identical shape, two fluid discharge passages 6, 7, 11, 12 having an equal length and provided in parallel with each other in outlets of the opening and closing valves 2, 3, and a connection member 10 attachable to a chamber and having two fluid passages 25, 26 formed in an equal length to and communicating with the two fluid discharge passages 6, 7, 11, 12, the connection member being provided in outlets of the two fluid discharge passages 6, 7, 11, 12.
    Type: Grant
    Filed: August 8, 2012
    Date of Patent: December 15, 2015
    Assignee: FUJIKIN INCORPORATED
    Inventors: Haruhiko Kuriki, Takahiro Matsuda, Mutsunori Koyomogi, Megumu Makino
  • Patent number: 9169940
    Abstract: A purge line changing block joint for enabling supply of different types of purge gas between lines without a significant remodeling of a fluid control apparatus and the fluid control apparatus is provided. A purge line changing block joint is connected to an upper side of a three-way valve channel portion in at least one line of the plurality of lines. The purge line changing block joint includes a process gas inlet channel communicating with a process gas inlet channel of the three-way valve channel portion, an outlet channel communicating the process gas inlet channel and an outlet channel of the three-way valve channel portion, a channel terminal not in communication with a purge gas inlet channel of the three-way valve channel portion but terminating the same, and a new purge gas inlet channel communicating with the outlet channel and opening on the top surface.
    Type: Grant
    Filed: February 20, 2013
    Date of Patent: October 27, 2015
    Assignee: FUJIKIN INCORPORATED
    Inventors: Ryuji Yogo, Izuru Shikata, Mutsunori Koyomogi, Megumu Makino, Takahiro Matsuda
  • Publication number: 20150152969
    Abstract: A purge line changing block joint for enabling supply of different types of purge gas between lines without a significant remodeling of a fluid control apparatus and the fluid control apparatus is provided. A purge line changing block joint is connected to an upper side of a three-way valve channel portion in at least one line of the plurality of lines. The purge line changing block joint includes a process gas inlet channel communicating with a process gas inlet channel of the three-way valve channel portion, an outlet channel communicating the process gas inlet channel and an outlet channel of the three-way valve channel portion, a channel terminal not in communication with a purge gas inlet channel of the three-way valve channel portion but terminating the same, and a new purge gas inlet channel communicating with the outlet channel and opening on the top surface.
    Type: Application
    Filed: February 20, 2013
    Publication date: June 4, 2015
    Applicant: FUJIKIN INCORPORATED
    Inventors: Ryuji Yogo, Izuru Shikata, Mutsunori Koyomogi, Megumu Makino, Takahiro Matsuda
  • Publication number: 20140216575
    Abstract: To provide a check valve which can be used even under a high temperature condition by overcoming a drawback “valve element sticking to sealing member” associated with high temperature use while enhancing heat resistance. An opening of a fluid path formed in a first body is brought into a closed state by bringing a valve element biased by a biasing member into contact with a sealing member. The sealing member is formed of a post-cured perfluoro elastomer packing. An annular sealing portion which is brought into line contact with the sealing member is formed on the valve element.
    Type: Application
    Filed: May 31, 2012
    Publication date: August 7, 2014
    Applicant: FUJIKIN INCORPORATED
    Inventors: Shunya Ikeda, Mutsunori Koyomogi, Megumu Makino, Toshiyuki Inada
  • Publication number: 20130037145
    Abstract: A fluid control device includes two opening and closing valves 2, 3 disposed symmetrical to each other and having an identical shape, two fluid discharge passages 6, 7, 11, 12 having an equal length and provided in parallel with each other in outlets of the opening and closing valves 2, 3, and a connection member 10 attachable to a chamber and having two fluid passages 25, 26 formed in an equal length to and communicating with the two fluid discharge passages 6, 7, 11, 12, the connection member being provided in outlets of the two fluid discharge passages 6, 7, 11, 12.
    Type: Application
    Filed: August 8, 2012
    Publication date: February 14, 2013
    Applicant: FUJIKIN INCORPORATED
    Inventors: Haruhiko Kuriki, Takahiro Matsuda, Mutsunori Koyomogi, Megumu Makino
  • Patent number: 7814797
    Abstract: A pressure sensor apparatus which can provide an integrated fluid control apparatus in which a pressure sensor is easily replaced independently, as well as achieving a more compact structure, and a pressure sensor built-in fluid control equipment. A pressure sensor apparatus (21) includes a first passage block (22) in which a predetermined passage (22a) is formed, a second passage block (23) in which a predetermined passage (23a) is formed and which opposes to the first passage block (22) at a predetermined interval, and a pressure sensor (24) which is provided in an opposing surface of any one of the first and second passage blocks (23) and detects a fluid pressure in an inner passage (23b), and is integrated in a pressure regulator (16).
    Type: Grant
    Filed: January 24, 2007
    Date of Patent: October 19, 2010
    Assignee: Fujikin Incorporated
    Inventors: Izuru Shikata, Megumu Makino, Mutsunori Koyomogi, Masamori Tsukada, Jubee Aizawa
  • Publication number: 20090019939
    Abstract: The present invention provides a pressure sensor apparatus which can provide an integrated fluid control apparatus in which a pressure sensor is easily replaced independently, as well as achieving a more compact structure, and a pressure sensor built-in fluid control equipment. A pressure sensor apparatus (21) includes a first passage block (22) in which a predetermined passage (22a) is formed, a second passage block (23) in which a predetermined passage (23a) is formed and which opposes to the first passage block (22) at a predetermined interval, and a pressure sensor (24) which is provided in an opposing surface of any one of the first and second passage blocks (23) and detects a fluid pressure in an inner passage (23b), and is integrated in a pressure regulator (16).
    Type: Application
    Filed: January 24, 2007
    Publication date: January 22, 2009
    Inventors: Izuru Shikata, Megumu Makino, Mutsunori Koyomogi, Masamori Tsukada, Jubee Aizawa
  • Publication number: 20060096533
    Abstract: A body 2 comprises a center channel block 11 and side channel blocks 12, 13. Each of shut-off valves 5, 6 is removably mounted on both the center channel block and one of the side channel blocks. The center channel block has Y-shaped channels 22 identical in number with the number of the subgas inlets 23 and each comprising one common channel 22a and two branched channels 22b, 22c. The common channel 22a of the Y-shaped channel 22 has an opening serving as the subgas inlet 23 and the branched channels 22b, 22c of the Y-shaped channel 22 communicate with the inlet ports of the corresponding pair of shut-off valves 5, 6 to thereby provide the subgas inflow channels. The main gas channel 18 and the main channel communication passageways 19 are formed in one of the side channel blocks 12, and the vent gas channel 20 and the vent channel communication passageways 21 are formed on the other side channel block 13.
    Type: Application
    Filed: October 31, 2003
    Publication date: May 11, 2006
    Applicant: Fujikin Incorporated
    Inventors: Yasunori Mochizuki, Megumu Makino, Mutsunori Koyomogi