Patents by Inventor MeiChin Shen

MeiChin Shen has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 9484218
    Abstract: The present invention relates to a substantially water-free photoresist stripping composition. Particularly, the present invention relates to a substantially water-free photoresist stripping composition useful in removing the photoresist after ion-implant process, comprising: (a) an amine, (b) an organic solvent A, and (c) a co-solvent, wherein the composition is substantially water-free (<3 wt % H2O). The present invention also provides a process for post-ion implantation stripping by using the composition of the present invention.
    Type: Grant
    Filed: July 26, 2010
    Date of Patent: November 1, 2016
    Assignee: BASF SE
    Inventors: ChienShin Chen, MeiChin Shen, ChiaHao Chan, Andreas Klipp
  • Patent number: 8901000
    Abstract: An aqueous acidic solution and an aqueous acidic etching solution suitable for texturizing the surface of single crystal and polycrystal silicon substrates, hydrofluoric acid; nitric acid; and at least one anionic polyether, which is surface active; a method for texturizing the surface of single crystal and polycrystal silicon substrates comprising the step of (1) contacting at least one major surface of a substrate with the said aqueous acidic etching solution; (2) etching the at least one major surface of the substrate for a time and at a temperature sufficient to obtain a surface texturization consisting of recesses and protrusions; and (3) removing the at least one major surface of the substrate from the contact with the aqueous acidic etching solution; and a method for manufacturing photovoltaic cells and solar cells using the said solution and the said texturizing method.
    Type: Grant
    Filed: August 25, 2011
    Date of Patent: December 2, 2014
    Assignee: BASF SE
    Inventors: Simon Braun, Andreas Klipp, Cornelia Roeger-Goepfert, Christian Bittner, MeiChin Shen, Chengwei Lin
  • Publication number: 20130171765
    Abstract: An aqueous acidic solution and an aqueous acidic etching solution suitable for texturizing the surface of single crystal and polycrystal silicon substrates, hydrofluoric acid; nitric acid; and at least one anionic polyether, which is surface active; a method for texturizing the surface of single crystal and polycrystal silicon substrates comprising the step of (1) contacting at least one major surface of a substrate with the said aqueous acidic etching solution; (2) etching the at least one major surface of the substrate for a time and at a temperature sufficient to obtain a surface texturization consisting of recesses and protrusions; and (3) removing the at least one major surface of the substrate from the contact with the aqueous acidic etching solution; and a method for manufacturing photovoltaic cells and solar cells using the said solution and the said texturizing method.
    Type: Application
    Filed: August 25, 2011
    Publication date: July 4, 2013
    Applicant: BASF SE
    Inventors: Simon Braun, Andreas Klipp, Cornelia Roeger-Goepfert, Christian Bittner, MeiChin Shen, Chengwei Lin
  • Publication number: 20120129747
    Abstract: The present invention relates to a substantially water-free photoresist stripping composition. Particularly, the present invention relates to a substantially water-free photoresist stripping composition useful in removing the photoresist after ion-implant process, comprising: (a) an amine, (b) an organic solvent A, and (c) a co-solvent, wherein the composition is substantially water-free (<3 wt % H2O). The present invention also provides a process for post-ion implantation stripping by using the composition of the present invention.
    Type: Application
    Filed: July 26, 2010
    Publication date: May 24, 2012
    Applicant: BASF SE
    Inventors: ChienShin Chen, MeiChin Shen, ChiaHao Chan, Andreas Klipp