Patents by Inventor Meir Aloni
Meir Aloni has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Patent number: 10591406Abstract: Metrology methods, systems and targets are provided, which implement a side by side paradigm. Adjacent cells with periodic structures are used to extract the overlay error, e.g., by introducing controllable phase shifts or image shifts which enable algorithmic computation of the overlay. The periodic structures are designed to exhibit a rotational symmetry to support the computation and reduce errors.Type: GrantFiled: April 6, 2016Date of Patent: March 17, 2020Assignee: KLA-Tencor CorporationInventors: Barak Bringoltz, Daniel Kandel, Yoel Feler, Noam Sapiens, Paykin Irina, Alexander Svizher, Meir Aloni, Guy Ben Dov, Hadar Shalmoni, Vladimir Levinski
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Patent number: 9739702Abstract: Metrology methods, systems and targets are provided, which implement a side by side paradigm. Adjacent cells with periodic structures are used to extract the overlay error, e.g., by introducing controllable phase shifts or image shifts which enable algorithmic computation of the overlay. The periodic structures are designed to exhibit a rotational symmetry to support the computation and reduce errors.Type: GrantFiled: January 22, 2014Date of Patent: August 22, 2017Assignee: KLA-Tencor CorporationInventors: Barak Bringoltz, Daniel Kandel, Yoel Feler, Noam Sapiens, Irina Paykin, Alexander Svizher, Meir Aloni, Guy Ben Dov, Hadar Shalmoni, Vladimir Levinski
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Patent number: 9581430Abstract: Systems and methods are provided which derive target characteristics from interferometry images taken at multiple phase differences between target beams and reference beams yielding the interferometry images. The illumination of the target and the reference has a coherence length of less than 30 microns to enable scanning the phase through the coherence length of the illumination. The interferometry images are taken at the pupil plane and/or in the field plane to combine angular and spectroscopic scatterometry data that characterize and correct target topography and enhance the performance of metrology systems.Type: GrantFiled: October 18, 2013Date of Patent: February 28, 2017Assignee: KLA-Tencor CorporationInventors: Amnon Manassen, Ohad Bachar, Daria Negri, Boris Golovanevsky, Barak Bringoltz, Daniel Kandel, Yoel Feler, Noam Sapiens, Paykin Irina, Alexander Svizher, Meir Aloni, Guy Ben Dov, Hadar Shalmoni, Vladimir Levinski
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Publication number: 20160216197Abstract: Metrology methods, systems and targets are provided, which implement a side by side paradigm. Adjacent cells with periodic structures are used to extract the overlay error, e.g., by introducing controllable phase shifts or image shifts which enable algorithmic computation of the overlay. The periodic structures are designed to exhibit a rotational symmetry to support the computation and reduce errors.Type: ApplicationFiled: April 6, 2016Publication date: July 28, 2016Inventors: Barak Bringoltz, Daniel Kandel, Yoel Feler, Noam Sapiens, Paykin Irina, Alexander Svizher, Meir Aloni, Guy Ben Dov, Hadar Shalmoni, Vladimir Levinski
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Publication number: 20150204664Abstract: Metrology methods, systems and targets are provided, which implement a side by side paradigm. Adjacent cells with periodic structures are used to extract the overlay error, e.g., by introducing controllable phase shifts or image shifts which enable algorithmic computation of the overlay. The periodic structures are designed to exhibit a rotational symmetry to support the computation and reduce errors.Type: ApplicationFiled: January 22, 2014Publication date: July 23, 2015Applicant: KLA-Tencor CorporationInventors: Barak Bringoltz, Daniel Kandel, Yoel Feler, Noam Sapiens, Irina Paykin, Alexander Svizher, Meir Aloni, Guy BEN DOV, Hadar Shalmoni, Vladimir Levinski
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Publication number: 20140111791Abstract: Systems and methods are provided which derive target characteristics from interferometry images taken at multiple phase differences between target beams and reference beams yielding the interferometry images. The illumination of the target and the reference has a coherence length of less than 30 microns to enable scanning the phase through the coherence length of the illumination. The interferometry images are taken at the pupil plane and/or in the field plane to combine angular and spectroscopic scatterometry data that characterize and correct target topography and enhance the performance of metrology systems.Type: ApplicationFiled: October 18, 2013Publication date: April 24, 2014Inventors: Amnon Manassen, Ohad Bachar, Daria Negri, Boris Golovanevsky, Barak Bringoltz, Daniel Kandel, Yoel Feler, Noam Sapiens, Paykin Irina, Alexander Svizher, Meir Aloni, Guy Ben Dov, Hadar Shalmoni, Vladimir Levinski
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Publication number: 20110134947Abstract: A laser assembly and a method for controlling light output thereof are presented. The laser assembly comprises a semiconductor laser diode having an active region and its associated electric current driver. The electric current driver is controllably operated to excite said active region to induce a certain electric current profile therethrough. The electric current profile corresponds to a desired emission profile from the laser assembly and a desired over heating profile of the active region of the laser diode, while maintaining predetermined temperature range of said active region of the semiconductor laser diode.Type: ApplicationFiled: August 11, 2009Publication date: June 9, 2011Applicant: X.D.M. LTD.Inventors: Uzi Rahum, Meir Aloni, Eran Brand, Gil Shpak
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Publication number: 20110037953Abstract: The present invention provides a projection display comprising an illumination system comprising at least one laser source unit and configured and operable for producing one or more light beams; a spatial light modulating (SLM) system accommodated at output of the illumination system and comprising one or more SLM units for modulating light incident thereon in accordance with image data; and a light projection optics for imaging modulated light onto a projection surface.Type: ApplicationFiled: March 25, 2010Publication date: February 17, 2011Applicant: EXPLAY LTD.Inventors: Zvi NIZANI, Meir ALONI, Shimon YALOV, Uzi RACHUM, Jacob RAND
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Publication number: 20110013095Abstract: A projector and a system comprising a projector and a handheld device are described. In a preferred embodiment, a projector for projecting an image includes a back section and a front section. The back section has a bottom surface for resting on a supporting surface, and the front section has an optical window for projecting light indicative of the image. The front section is tilted with respect to the bottom surface of the back section to define a tilt angle. The system includes a video-output generating handheld device, and a display device controlled by control signals generated by the handheld device. The handheld device and the display device are interconnected with no more than one physical video signal connection.Type: ApplicationFiled: June 17, 2010Publication date: January 20, 2011Applicant: X.D.M. LTD.Inventors: Meir Aloni, Gady Yearim, Elisha-Avraham Tal, Jacob Rand, Eyal Cremer
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Patent number: 7846649Abstract: The invention provides a method and printer for printing an image that comprises at least one group of highly dense shapes, the method including: (i) determining multiple intermediate schemes such as to allow printing corresponding intermediate images on an object; wherein at least one intermediate scheme comprises directing at least one interference pattern toward at least one location corresponding to at least one group of highly dense shapes; (ii) generating an array of light entities in response to an intermediate scheme; (iii) directing the array of light entities towards the object to form the intermediate image; and (iv) moving the object relative to the light entities while repeating the steps of generating and directing to expose the object with the image.Type: GrantFiled: September 13, 2004Date of Patent: December 7, 2010Assignee: Applied Materials Israel, Ltd.Inventors: Ehud Tirosh, Gilad Almogy, Meir Aloni, Doron Meshulach
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Patent number: 7842935Abstract: A method for writing a master image on a substrate includes dividing the master image into a matrix of frames, each frame including an array of pixels defining a respective frame image in a respective frame position within the master image. An electron beam is scanned in a raster pattern over the substrate, while shaping the electron beam responsively to the respective frame image of each of the frames as the electron beam is scanned over the respective frame position, so that in each frame, the electron beam simultaneously writes a multiplicity of the pixels onto the substrate.Type: GrantFiled: July 17, 2006Date of Patent: November 30, 2010Assignee: Applied Materials Israel, Ltd.Inventors: Meir Aloni, Mula Friedman, Jimmy Vishnipolsky, Gilad Almogy, Alon Litman, Yonatan Lehman, Doron Meshulach, Ehud Tirosh
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Patent number: 7521700Abstract: A method for writing a master image on a substrate includes dividing the master image into a matrix of frames, each frame including an array of pixels defining a respective frame image in a respective frame position within the master image. An electron beam is scanned in a raster pattern over the substrate, while shaping the electron beam responsively to the respective frame image of each of the frames as the electron beam is scanned over the respective frame position, so that in each frame, the electron beam simultaneously writes a multiplicity of the pixels onto the substrate.Type: GrantFiled: July 17, 2006Date of Patent: April 21, 2009Assignee: Applied Materials, Israel, Ltd.Inventors: Meir Aloni, Mula Friedman, Jimmy Vishnipolsky, Gilad Almogy, Alon Litman, Yonatan Lehman, Doron Meshulach, Ehud Tirosh
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Patent number: 7379161Abstract: A printer and method for recording a predefined multiple intensity level image on a substrate, the method includes the steps of: converting the predetermined image to multiple intensity level associated images; converting a light beam to multiple light beam arrays; modulating each light beam array to provide modulated light beam arrays, in response to a corresponding intensity level associated image to be recorded on the substrate; directing each modulated light beam array to impinge on the substrate; and repeating the steps of converting, modulating and directing while moving the substrate until the predefined image is imaged on the substrate.Type: GrantFiled: February 24, 2006Date of Patent: May 27, 2008Assignee: Applied Materials, Israel, Ltd.Inventors: Gilad Almogy, Haim Feldman, Meir Aloni
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Publication number: 20060243918Abstract: A method for writing a master image on a substrate includes dividing the master image into a matrix of frames, each frame including an array of pixels defining a respective frame image in a respective frame position within the master image. An electron beam is scanned in a raster pattern over the substrate, while shaping the electron beam responsively to the respective frame image of each of the frames as the electron beam is scanned over the respective frame position, so that in each frame, the electron beam simultaneously writes a multiplicity of the pixels onto the substrate.Type: ApplicationFiled: July 17, 2006Publication date: November 2, 2006Inventors: Meir Aloni, Mula Friedman, Jimmy Vishnipolsky, Gilad Almogy, Alon Litman, Yonatan Lehman, Doron Meshulach, Ehud Tirosh
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Publication number: 20060243922Abstract: A method for writing a master image on a substrate includes dividing the master image into a matrix of frames, each frame including an array of pixels defining a respective frame image in a respective frame position within the master image. An electron beam is scanned in a raster pattern over the substrate, while shaping the electron beam responsively to the respective frame image of each of the frames as the electron beam is scanned over the respective frame position, so that in each frame, the electron beam simultaneously writes a multiplicity of the pixels onto the substrate.Type: ApplicationFiled: July 17, 2006Publication date: November 2, 2006Inventors: Meir Aloni, Mula Friedman, Jimmy Vishnipolsky, Gilad Almogy, Alon Litman, Yonatan Lehman, Doron Meshulach, Ehud Tirosh
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Publication number: 20060197931Abstract: A printer and method for recording a predefined multiple intensity level image on a substrate, the method includes the steps of: converting the predetermined image to multiple intensity level associated images; converting a light beam to multiple light beam arrays; modulating each light beam array to provide modulated light beam arrays, in response to a corresponding intensity level associated image to be recorded on the substrate; directing each modulated light beam array to impinge on the substrate; and repeating the steps of converting, modulating and directing while moving the substrate until the predefined image is imaged on the substrate.Type: ApplicationFiled: February 24, 2006Publication date: September 7, 2006Inventors: Gilad Almogy, Haim Feldman, Meir Aloni
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Patent number: 7098468Abstract: A method for writing a master image on a substrate includes dividing the master image into a matrix of frames, each frame including an array of pixels defining a respective frame image in a respective frame position within the master image. An electron beam is scanned in a raster pattern over the substrate, while shaping the electron beam responsively to the respective frame image of each of the frames as the electron beam is scanned over the respective frame position, so that in each frame, the electron beam simultaneously writes a multiplicity of the pixels onto the substrate.Type: GrantFiled: September 11, 2003Date of Patent: August 29, 2006Assignee: Applied Materials, Inc.Inventors: Meir Aloni, Mula Friedman, Jimmy Vishnipolsky, Gilad Almogy, Alon Litman, Yonatah Lehman, Doron Meshulach, Ehud Tirosh
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Patent number: 7053985Abstract: A printer and method for recording a predefined multiple intensity level image on a substrate, the method includes the steps of: converting the predetermined image to multiple intensity level associated images; converting a light beam to multiple light beam arrays; modulating each light beam array to provide modulated light beam arrays, in response to a corresponding intensity level associated image to be recorded on the substrate; directing each modulated light beam array to impinge on the substrate; and repeating the steps of converting, modulating and directing while moving the substrate until the predefined image is imaged on the substrate.Type: GrantFiled: July 7, 2003Date of Patent: May 30, 2006Assignee: Applied Materials, Isreal, Ltd.Inventors: Gilad Almogy, Haim Feldman, Meir Aloni
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Publication number: 20060055911Abstract: The invention provides a method and printer for printing an image that comprises at least one group of highly dense shapes, the method includes: (i) determining multiple intermediate schemes such as to allow printing corresponding intermediate images on an object; whereas at least one intermediate scheme comprises directing at least one interference pattern toward at least one location corresponding to at least one group of highly dense shapes; (ii) generating an array of light entities in response to an intermediate scheme; (iii) directing the array of light entities towards the object to form the intermediate image; and (iv) moving the object relative to the light entities while repeating the steps of generating and directing to expose the object with the image.Type: ApplicationFiled: September 13, 2004Publication date: March 16, 2006Inventors: Ehud Tirosh, Gilad Almogy, Meir Aloni, Doron Meshulach
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Publication number: 20050274911Abstract: A method for writing a master image on a substrate includes dividing the master image into a matrix of frames, each frame including an array of pixels defining a respective frame image in a respective frame position within the master image. An electron beam is scanned in a raster pattern over the substrate, while shaping the electron beam responsively to the respective frame image of each of the frames as the electron beam is scanned over the respective frame position, so that in each frame, the electron beam simultaneously writes a multiplicity of the pixels onto the substrate.Type: ApplicationFiled: September 11, 2003Publication date: December 15, 2005Inventors: Meir Aloni, Mula Friedman, Jimmy Vishnipolsky, Gilad Almogy, Alon Litman, Yonatah Lehman, Doron Meshulach, Ehud Tirosh