Patents by Inventor Metodi Popov

Metodi Popov has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Preparation of organic layers for oxygen etching
    Patent number: 4470871
    Abstract: An improved method of etching a layer of organic material on a sustrate by oxygen plasma or oxygen reactive ion etching is disclosed. The surface of the layer is flood exposed with a plasma including a fluorine species for a time sufficient to significantly reduce the etch rate thereof in the oxygen etch. A patterned mask is then formed on the layer and the exposed portion etched. The subject method produces vertical walls in the etch profile with substantially no rounding of the top edge.
    Type: Grant
    Filed: December 27, 1983
    Date of Patent: September 11, 1984
    Assignee: RCA Corporation
    Inventors: Lawrence K. White, Metodi Popov
  • Planarization technique
    Patent number: 4427713
    Abstract: A method of planarizing a light sensitive coating on a substrate having topographical features is provided. The coating which comprises a novolak resin and a diazoquinone sensitizer is exposed to actinic radiation to react substantially all of the sensitizer and then heated by applying heat to the surface of the substrate opposite the coating.
    Type: Grant
    Filed: January 17, 1983
    Date of Patent: January 24, 1984
    Assignee: RCA Corporation
    Inventors: Lawrence K. White, Metodi Popov