Patents by Inventor Michael Birk Binnard

Michael Birk Binnard has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20240227024
    Abstract: A processing machine (10) for building an object (11) from powder (12) includes a build platform (26A); a powder supply assembly (18) that deposits the powder (12) onto the build platform (26A) to form a powder layer (13); and an energy system (22) that directs an energy beam (22D) at a portion of the powder (12) on the build platform (26A) to form a portion of the object (11). The powder supply assembly (18) can include (i) a powder container (640A) that retains the powder (12); (ii) a supply outlet (639) positioned over the build platform (26A); and (ii) a flow control assembly (642) that selectively controls the flow of the powder (12) from the supply outlet (639).
    Type: Application
    Filed: July 1, 2020
    Publication date: July 11, 2024
    Inventors: Alton Hugh Phillips, Joseph P. Rossi, Johnathan Agustin Marquez, Yoon Jung Jeong, Lexian Guo, Patrick Shih Chang, Eric Peter Goodwin, Michael Birk Binnard, Brett William Herr, Matthew Parker-McCormick Bjork, Paul Derek Coon, Motofusa Ishikawa
  • Publication number: 20240157641
    Abstract: Directed energy beam deflections are compensated by mapping pixel coordinates of an image of a patterning field to patterning field spatial coordinates. For example, electron beam scanning is compensated by imaging calibration features defined on a reticle to produce a mapping between pixel and physical coordinates. An electron beam is scanned to produce cathodoluminescence at a plurality of scan locations in a patterning field. With the pixel coordinate mapping, an image of the cathodoluminescence is used to determine compensated scan drive values. Other directed energy beam deflections can be similarly compensated.
    Type: Application
    Filed: March 4, 2022
    Publication date: May 16, 2024
    Applicant: NIKON CORPORATION
    Inventors: Jacek Kazimierz TYMINSKI, Michael Birk BINNARD
  • Publication number: 20240131595
    Abstract: A processing machine (10) for building an object (11) from powder (12) includes a build platform (26A); a powder supply assembly (18) that deposits the powder (12) onto the build platform (26A) to form a powder layer (13); and an energy system (22) that directs an energy beam (22D) at a portion of the powder (12) on the build platform (26A) to form a portion of the object (11). The powder supply assembly (18) can include (i) a powder container (640A) that retains the powder (12); (ii) a supply outlet (639) positioned over the build platform (26A); and (ii) a flow control assembly (642) that selectively controls the flow of the powder (12) from the supply outlet (639).
    Type: Application
    Filed: June 30, 2020
    Publication date: April 25, 2024
    Inventors: Alton Hugh Phillips, Joseph P. Rossi, Johnathan Agustin Marquez, Yoon Jung Jeong, Lexian Guo, Patrick Shih Chang, Eric Peter Goodwin, Michael Birk Binnard, Brett William Herr, Matthew Parker-McCormick Bjork, Paul Derek Coon, Motofusa Ishikawa
  • Publication number: 20230381978
    Abstract: A machine (10) for positioning an object (12) includes a movable part (16C) and a vibration reduction assembly (24) that couples the object (12) to the movable part (16C). Further, the vibration reduction assembly (24) reduces a magnitude of a vibration being transferred from the movable part (16C) to the object (12). The vibration reduction assembly (24) can include an actively controlled support system (30) and an actively controlled actuator system (32).
    Type: Application
    Filed: September 28, 2021
    Publication date: November 30, 2023
    Applicant: NIKON CORPORATION
    Inventors: Michael Birk BINNARD, Matthew Parker-McCormick BJORK, Yoon Jung JEONG
  • Publication number: 20230264266
    Abstract: A processing system includes: an irradiation system that irradiates an object with an energy beam; a material supply member that supplies a build material irradiated with the energy beam; a measurement apparatus that obtains information related to a height of a surface of the object; and a distance change apparatus that changes a distance between the material supply member and the surface based on a measured result by the measurement apparatus.
    Type: Application
    Filed: July 22, 2020
    Publication date: August 24, 2023
    Applicant: NIKON CORPORATION
    Inventors: Toshimitsu KURAMI, Zhi-Wei LIN, Yoon Jung JEONG, Michael Birk BINNARD
  • Publication number: 20230081971
    Abstract: A processing machine (10) for building an object (11) from a material (12) includes a build platform (16), a platform mover assembly (20), a material supply (22), an irradiation device (26), and an analyzer system (30). The platform mover assembly (20) moves the build platform (16) about a platform movement axis (48X) and along the platform movement axis (48X). The material supply (22) supplies material (12) to build the object (11) on the build platform (16). The irradiation device (26) irradiates at least a portion of the material (12) with an energy beam (26A) to form the object (11) from the material (12) on the build platform (16). The analyzer system (30) is configured to monitor the energy beam (26A). The analyzer system (30) includes an alignment component (36) that rotates concurrently with the build platform (16) about the platform movement axis (48X), but that is inhibited from moving concurrently with the build platform (16) along the platform movement axis (48X).
    Type: Application
    Filed: August 23, 2022
    Publication date: March 16, 2023
    Inventor: Michael Birk Binnard
  • Publication number: 20220357666
    Abstract: Collection reflectors with multiple reflector elements defined on a curved surface are used to collect EUV optical radiation from an EUV emitting area. Each of the reflector elements can image the emitting area at or near a corresponding reflective element of a second multi-element reflector that overlaps radiation from each of the multiple reflector element of the collection reflector to illuminate a grating reticle. Systems with such a collection reflector can use fewer optical elements. In addition, grating reticles are defined on a curve substrate an include a plurality of grating phase steps so that the grating reticle provides phase curvature along two axes but with physical curvature along a single axis. Methods of producing varying duty cycle 1D patterns are also disclosed.
    Type: Application
    Filed: May 4, 2022
    Publication date: November 10, 2022
    Applicant: Nikon Corporation
    Inventors: Donis G. Flagello, Daniel Gene Smith, Michael Birk Binnard, Stephen Paul Renwick
  • Publication number: 20220288855
    Abstract: A processing machine (10) for building an object (11) from material (12) includes (i) a material bed assembly (16) that supports the material (12); (ii) a material supply assembly (18) that positions the material (12); (iii) an energy system (22) that directs an energy beam (22A) at the material (12) to build the object (11); (iv) a housing assembly (24) that defines at least a portion of a build chamber (29) for the energy beam (22A), the housing assembly (24) being spaced apart a housing gap (30A) from the material (12); and (v) a seal assembly (26) that creates a housing seal (26A) between the housing assembly (24) and the material (12) to seal the housing gap (30A).
    Type: Application
    Filed: March 3, 2022
    Publication date: September 15, 2022
    Inventors: Alton Hugh Phillips, Michael Birk Binnard, Takakuni Goto, Paul Derek Coon, Motofusa Ishikawa, Daniel Gene Smith
  • Publication number: 20220288694
    Abstract: A processing machine (10) for building a three-dimensional object (11) from material (12) includes a build bed (28); a material supply device (18); and a build area cover assembly (30). The build bed (28) is configured to support the material (12) to provide a build surface (29) at which the three-dimensional object (11) is to be built. The material supply device (18) is configured to deposit material (12) to the build bed (28). The build area cover assembly (30) is configured to variably define a material deposition area (34) of the build surface (29). The build area cover assembly (30) can be movable relative to the build bed (28) and can control a size and shape of the material deposition area (34) of the build surface (29).
    Type: Application
    Filed: March 4, 2022
    Publication date: September 15, 2022
    Inventors: Michael Birk Binnard, Motofusa Ishikawa
  • Publication number: 20220252392
    Abstract: 3D metrology techniques are disclosed for determining a changing topography of a substrate processed in an additive manufacturing system. Techniques include fringe scanning, simultaneous fringe projections, interferometry, and x-ray imaging. The techniques can be applied to 3D printing systems to enable rapid topographical measurements of a 3D printer powder bed, or other rapidly moving, nearly continuous surface to be tested. The techniques act in parallel to the system being measured to provide information about system operation and the topography of the product being processed. A tool is provided for achieving higher precision, increasing throughput, and reducing the cost of operation through early detection and diagnosis of operating problems and printing defects. These techniques work well with any powder bed 3D printing system, providing real-time metrology of the powder bed, the most recently printed layer, or both without reducing throughput.
    Type: Application
    Filed: July 2, 2020
    Publication date: August 11, 2022
    Applicant: Nikon Corporation
    Inventors: Eric Peter Goodwin, Heather Lynn Durko, Daniel Gene Smith, Johnathan Agustin Marquez, Michael Birk Binnard, Patrick Shih Chang, Matthew Parker-McCormick Bjork, Paul Derek Coon, Brett William Herr, Motofusa Ishikawa
  • Publication number: 20220212263
    Abstract: To improve the operation of 3D printing systems, techniques are disclosed for a rotary 3D printer comprising: a main rotating support table rotating about a first axis and one or more secondary support tables rotating around a non-coaxial secondary axis; a powder supply assembly for distributing powder onto the tables; and an energy system for directing an energy beam at the powder to form a part. The main support table and secondary support tables can rotate in the same or opposite directions. Disclosed techniques include: grooved support table surfaces for improving stability of applied powder; reciprocating bellows for controlling a differential load on actuators that move the support tables; high temperature bearings or bushings for supporting rotary motion at high temperatures; and a mechanism for counterbalancing a weight of the part being built.
    Type: Application
    Filed: July 1, 2020
    Publication date: July 7, 2022
    Applicant: Nikon Corporation
    Inventors: Alton Hugh Phillips, Patrick Shih Chang, Michael Birk Binnard, Matthew Rosa, Serhad Ketsamanian, Lexian Guo, Brett William Herr, Eric Peter Goodwin, Johnathan Agustin Marquez, Matthew Parker-McCormick Bjork, Paul Derek Coon, Motofusa Ishikawa
  • Publication number: 20220113487
    Abstract: Positioning assemblies for use with a robot include a gimbal assembly having a gimbal's rotational center is positioned directly above a center of gravity of a payload. One or more linear counter masses and/or one or more rotating masses (flywheels) can be provided, and each can include an actuator or brake to control forces acting between the counter masses and/or flywheels and the payload and stabilize the payload during and after movement of the payload with the robot.
    Type: Application
    Filed: October 8, 2021
    Publication date: April 14, 2022
    Applicant: Nikon Corporation
    Inventors: Yoon Jung Jeong, Michael Birk Binnard, Alton Hugh Phillips, Matthew Parker-McCormick Bjork
  • Publication number: 20220112934
    Abstract: Apparatus include a reaction mass and an actuator coupled to the reaction mass. The actuator is configured to couple to a payload and to move the reaction mass in response to a movement error of the payload to reduce the movement error of the payload. Robotic systems using actuated reaction masses, as well as related methods of reducing movement errors, are also disclosed.
    Type: Application
    Filed: October 8, 2021
    Publication date: April 14, 2022
    Applicant: Nikon Corporation
    Inventors: Alton Hugh Phillips, Michael Birk Binnard, Yoon Jung Jeong, Matthew Parker-McCormick Bjork
  • Publication number: 20220111521
    Abstract: A vibration reduction system includes a base, a carrier element, and a plurality of actuator systems extending between the base and the carrier element, the plurality of actuator systems arranged to apply forces to the carrier element in multiple axes to reduce vibration of the carrier element, each actuator system of the plurality of actuator systems including a pneumatic actuator and an electric actuator.
    Type: Application
    Filed: October 7, 2021
    Publication date: April 14, 2022
    Applicant: Nikon Corporation
    Inventors: Michael Birk Binnard, Yoon Jung Jeong, Alton Hugh Phillips
  • Publication number: 20220111540
    Abstract: A vibration reduction assembly (24) for reducing a magnitude of a vibration being transferred from a first component (14) (e.g. a robot assembly) to a second component (12) (e.g. a payload) includes a first vibration reduction system (30) and a second vibration reduction system (32). The first vibration reduction system (30) reducing vibration along a first axis that is oriented parallel with gravity. The second vibration reduction system (32) reducing vibration along a second axis that is orthogonal to the first axis. The first vibration reduction system (30) and the second vibration reduction system (32) are connected in series between the first component (14) and the second component (12).
    Type: Application
    Filed: October 8, 2021
    Publication date: April 14, 2022
    Inventors: Michael Birk Binnard, Matthew Parker-McCormick Bjork, Yoon Jung Jeong
  • Publication number: 20220057017
    Abstract: A valve (10) for selectively opening and closing a flow passageway (12) includes (i) a valve body (14) that defines a body passageway (16); (ii) a first valve surface (18) that defines a first valve opening (18A); (iii) an expandable barrier (22); and (iv) an actuation system (24). The expandable barrier (22) is movable in the body passageway (16) between an open configuration (30) in which the barrier (22) is retracted and does not engage the first valve surface (18); and a closed configuration (28) in which the barrier (22) is expanded, engages the first valve surface (18), and blocks the first valve opening (18A). The actuation system (24) selectively moves the barrier (22) between the configurations (28) (30).
    Type: Application
    Filed: August 18, 2021
    Publication date: February 24, 2022
    Inventors: Alex Ka Tim Poon, Michael Birk Binnard, Gaurav Keswani
  • Publication number: 20200361142
    Abstract: A processing machine (10) for building a built part (11) includes a support device (14), a drive device (16), a powder supply device (20), and an irradiation device (24). The support device (14) includes a support surface (14A). The drive device (16) moves the support surface (14A) so that a specific position on the support surface (14A) is moved in a moving direction (30). The powder supply device (20) supplies a powder (12) to the support device (14) to form a powder layer (13). The irradiation device (24) irradiates at least a portion of the powder layer (13) with an energy beam (232) to form at least a portion of the built part (11) from the powder layer (13). Additionally, the irradiation device (24) changes an irradiation position where the energy beam (232) is irradiated to the powder layer (13) along a circumferential direction about an optical axis (234) of the irradiation device (24).
    Type: Application
    Filed: December 22, 2018
    Publication date: November 19, 2020
    Inventors: Michael Birk Binnard, Motofusa Ishikawa
  • Publication number: 20200346407
    Abstract: A processing machine (10) for building a part (11) includes: a support device (26) including a support surface (26B); a drive device (28) which moves the support device (26) so as a specific position on the support surface (26B) is moved along a moving direction (25); a powder supply device (18) which supplies a powder (12) to the moving support device (26) to form a powder layer (13); an irradiation device (22) which irradiates at least a portion of the powder layer (13) with an energy beam (22D) to form at least a portion of the part (11) from the powder layer (13) during a first period of time; and a measurement device (20) which measures at least portion of the part (11) during a second period of time. The first period in which the irradiation device (22) irradiates the powder layer (13) with the energy beam (22D) and the second period in which the measurement device (22) measures are overlapped.
    Type: Application
    Filed: December 22, 2018
    Publication date: November 5, 2020
    Inventors: Eric Peter Goodwin, Johnathan Agustin Marquez, Michael Birk Binnard, Brett Herr, Matthew Parker-McCormick Bjork, Paul Derek Coon, Patrick Chang, Motofusa Ishikawa
  • Publication number: 20200232786
    Abstract: A method for measuring a spatial distortion of a target surface (110) of a workpiece (110A). Light is transmitted twice through a reference pattern-generator (104) and impinged upon a workpiece pattern-generator (108). Then, with an optical detector (116), first and second beams formed by the light as a result of interaction with two pattern-generators (104) (106) is acquired to produce a signal characterizing geometry of interference fringes formed at the detector (116) by the first and second beams. Indicia representing at least one of a type and a value of spatial distortion of the target surface (110) is generated and recorded. A system embodying the implementation of the method.
    Type: Application
    Filed: February 22, 2018
    Publication date: July 23, 2020
    Inventors: Daniel Gene Smith, Michael Birk Binnard