Patents by Inventor Michael Lee SWEARS

Michael Lee SWEARS has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20240412997
    Abstract: Disclosed herein are approaches for in-situ verification and correction of a wafer position. In one approach, a method may include illuminating an underside of a platen positioned within a processing chamber, and detecting a perimeter edge of the platen using an imaging device positioned external to the processing chamber, above the platen. The method may further include determining, via a controller, position data for the platen based on the detected perimeter edge of the platen, and positioning a wafer atop the platen based on the position data of the platen, wherein the wafer comprises a positioning notch.
    Type: Application
    Filed: December 20, 2023
    Publication date: December 12, 2024
    Applicant: Applied Materials, Inc.
    Inventors: Michael Lee SWEARS, Santosh Kumar DHULAPATI, James R. MCLANE