Patents by Inventor Michael Specht

Michael Specht has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20090273017
    Abstract: A method for forming trenches on a surface of a semiconductor substrate is described. The method may include: etching a first plurality of trenches into the surface of the semiconductor substrate; filling the first plurality of trenches with at least one material; and etching a second plurality of trenches into every second trench of the first plurality of trenches. Furthermore, a method for forming floating-gate electrodes on a semiconductor substrate and an integrated circuit is described.
    Type: Application
    Filed: April 30, 2008
    Publication date: November 5, 2009
    Applicant: QIMONDA FLASH GMBH
    Inventors: Josef Willer, Michael Specht, Christoph Friederich, Doris Keitel-Schulz
  • Patent number: 7611928
    Abstract: Substrate having a first partial substrate with a carrier layer and a second partial substrate, which is bonded to the first partial substrate. The second partial substrate has an insulator layer, which is applied on the carrier layer and has at least two regions each having a different thickness, thereby forming a stepped surface of the insulator layer, and a semiconductor layer, which is applied to the stepped surface of the insulator layer and is formed at least partially epitaxially, wherein the semiconductor layer has a planar surface which is opposite to the stepped surface of the insulator layer. Transistors are formed on the semiconductor layer.
    Type: Grant
    Filed: October 18, 2004
    Date of Patent: November 3, 2009
    Assignee: Infineon Technologies AG
    Inventors: Franz Hofmann, Richard Johannes Luyken, Wolfgang Roesner, Michael Specht, Martin Stadele
  • Publication number: 20090261397
    Abstract: An integrated circuit is described. The integrated circuit may comprise a multitude of floating-gate electrodes, wherein at least one of the floating-gate electrodes has a lower width and an upper width, the lower width being larger than the upper width, and wherein the at least one of the floating-gate electrodes comprises a transition metal. A corresponding manufacturing method for an integrated circuit is also described.
    Type: Application
    Filed: April 17, 2008
    Publication date: October 22, 2009
    Applicants: QIMONDA FLASH GMBH, QIMONDA AG
    Inventors: Josef Willer, Franz Hofmann, Michael Specht, Christoph Friederich, Doris Keitel-Schulz, Lars Bach, Thomas Melde
  • Patent number: 7598543
    Abstract: A semiconductor memory component comprises at least one memory cell. The memory cell comprises a semiconductor body comprised of a body region, a drain region and a source region, a gate dielectric, and a gate electrode. The body region comprises a first conductivity type and a depression between the source and drain regions, and the source and drain regions comprise a second conductivity type. The gate electrode is arranged at least partly in the depression and is insulated from the body, source, and drain regions by the gate dielectric. The body region further comprises a first continuous region with a first dopant concentration and a second continuous region with a second dopant concentration greater than the first dopant concentration. The first continuous region adjoins the drain region, the depression and the source region, and the second region is arranged below the first region and adjoins the first region.
    Type: Grant
    Filed: May 23, 2006
    Date of Patent: October 6, 2009
    Assignee: Qimonda AG
    Inventors: Franz Hofmann, Richard Johannes Luyken, Wolfgang Roesner, Michael Specht, Martin Staedele
  • Patent number: 7560351
    Abstract: An integrated circuit arrangement and fabrication method is presented. The integrated circuit arrangement contains a semiconductor and a metal electrode. The contact area between a semiconductor and the electrode is increased without increasing the lateral dimensions using partial regions of the semiconductor and/or of the electrode that extend through a transition layer between the semiconductor and electrode.
    Type: Grant
    Filed: January 3, 2006
    Date of Patent: July 14, 2009
    Assignee: Infineon Technologies AG
    Inventors: Franz Hofmann, Richard Johannes Luyken, Wolfgang Roesner, Michael Specht
  • Patent number: 7528425
    Abstract: A semiconductor memory having a multitude of memory cells (21-1), the semiconductor memory having a substrate (1), at least one wordline (5-1), a first (15-1) and a second line (15-2; 16-1), wherein each of the multitude of memory cells (21-1) comprises a first doping region (6) disposed in the substrate (1), a second doping region (7) disposed in the substrate (1), a channel region (22) disposed in the substrate (1) between the first doping region (6) and the second doping region (7), a charge-trapping layer stack (2) disposed on the substrate (1), on the channel region (22), on a portion of the first doping region (6) and on a portion of the second doping region (7). Each memory cell (21-1) further comprises a conductive layer (3) disposed on the charge-trapping layer stack (2), wherein the conductive layer (3) is electrically floating. A dielectric layer (4) is disposed on a top surface of the conductive layer (3) and on sidewalls (23) of the conductive layer (3).
    Type: Grant
    Filed: July 29, 2005
    Date of Patent: May 5, 2009
    Assignee: Infineon Technologies AG
    Inventors: Michael Specht, Wolfgang Roesner, Franz Hofmann
  • Publication number: 20090072274
    Abstract: An integrated circuit including a first gate stack and a second gate stack and a method of manufacturing is disclosed. One embodiment provides non-volatile memory cells including a first gate stack and a gate dielectric on a first surface section of a main surface of a semiconductor substrate, and a second gate stack including a memory layer stack on a second surface section. A first pattern is transferred into the first gate stack and a second pattern into the second gate stack.
    Type: Application
    Filed: September 14, 2007
    Publication date: March 19, 2009
    Applicants: QIMONDA AG, QIMONDA FLASH GMBH
    Inventors: Roman Knoefler, Michael Specht, Josef Willer
  • Publication number: 20080308856
    Abstract: Embodiments of the invention relate generally to a method for manufacturing an integrated circuit, a method for manufacturing a cell arrangement, an integrated circuit, a cell arrangement, and a memory module. In an embodiment of the invention, a method for manufacturing an integrated circuit having a cell arrangement is provided, including forming at least one semiconductor fin structure having an area for a plurality of fin field effect transistors, wherein the area of each fin field effect transistor includes a first region having a first fin structure width, a second region having a second fin structure width, wherein the second fin structure width is smaller than the first fin structure width. Furthermore, a plurality of charge storage regions are formed on or above the second regions of the semiconductor fin structure.
    Type: Application
    Filed: June 13, 2007
    Publication date: December 18, 2008
    Inventors: Michael Specht, Franz Hofmann, Wolfgang Roesner, Guerkan Ilicali
  • Publication number: 20080285344
    Abstract: Embodiments of the present invention relate generally to integrated circuits, methods for manufacturing an integrated circuit, memory modules, and computing systems.
    Type: Application
    Filed: May 15, 2007
    Publication date: November 20, 2008
    Inventors: Eike Ruttkowski, Detlev Richter, Michael Specht, Joseph Willer, Dirk Manger, Kenny Oisin, Steffen Meyer, Klaus Knobloch, Holger Moeller, Doris Keitel Schulz, Jan Gutsche, Gert Koebernik, Christoph Friederich
  • Publication number: 20080259687
    Abstract: Embodiments of the invention relate to integrated circuits having a memory cell arrangement and methods of manufacturing thereof. In one embodiment of the invention, an integrated circuit has a memory cell arrangement which includes a fin structure extending in its longitudinal direction as a first direction, including a first insulating layer, a first active region disposed above the first insulating layer, a second insulating layer disposed above the first active region, a second active region disposed above the second insulating layer, a charge storage layer structure disposed at least next to at least one sidewall of the fin structure covering at least a portion of the first active region and at least a portion of the second active region, and a control gate disposed next to the charge storage layer structure.
    Type: Application
    Filed: April 19, 2007
    Publication date: October 23, 2008
    Inventors: Michael Specht, Nicolas Nagel, Franz Hofmann, Thomas Mikolajick
  • Publication number: 20080251833
    Abstract: In various embodiments of the invention, integrated circuits and methods of manufacturing integrated circuits are provided. In an embodiment of the invention, an integrated circuit having at least one memory cell is provided. The memory cell includes a dielectric layer disposed above a charge storage region, a word line disposed above the dielectric layer, and a control line disposed at least partially above at least one sidewall of the dielectric layer.
    Type: Application
    Filed: April 12, 2007
    Publication date: October 16, 2008
    Inventors: Michael Specht, Franz Hofmann, Nicolas Nagel
  • Publication number: 20080237684
    Abstract: A method of manufacturing a nanowire transistor includes oxidizing at least a portion of a semiconductor carrier. The semiconductor carrier includes a first carrier portion and a second carrier portion above the first carrier portion. A portion of the oxidized portion is removed, thereby forming an oxide spacer between a portion of the second carrier portion and the first carrier portion. A gate region is formed above at least a portion of the second carrier portion, and a first source/drain region and a second source/drain region are formed.
    Type: Application
    Filed: March 26, 2007
    Publication date: October 2, 2008
    Inventors: Michael Specht, Franz Hofmann, Andreas Kux
  • Publication number: 20080237694
    Abstract: The invention relates to integrated circuits, to a cell, to a cell arrangement, to a method for manufacturing an integrated circuit, to a method for manufacturing a cell, and to a memory module. In an embodiment of the invention, an integrated circuit is provided having a cell, the cell including a low-k dielectric layer, a first high-k dielectric layer disposed above the low-k dielectric layer, a charge trapping layer disposed above the first high-k dielectric layer, and a second high-k dielectric layer disposed above the charge trapping layer.
    Type: Application
    Filed: March 27, 2007
    Publication date: October 2, 2008
    Inventors: Michael Specht, Nicolas Nagel, Josef Willer
  • Publication number: 20080191268
    Abstract: An integrated circuit and method of manufacturing an integrated circuit is disclosed. In one embodiment, the integrated circuit includes a gate structure which includes a polysilicon double layer. The polysilicon double layer having a first polysilicon layer and a second polysilicon layer formed above the first polysilicon layer, the first polysilicon layer being doped with positive ions to a higher concentration than the second polysilicon layer.
    Type: Application
    Filed: February 14, 2007
    Publication date: August 14, 2008
    Applicant: Qimonda AG
    Inventors: Franz Hofmann, Michael Specht, Josef Willer
  • Patent number: 7411822
    Abstract: Memory transistors are arranged in a plurality of rows and columns. A first source/drain terminal of each memory transistor of a first column is connected to an electrically conductive conductor track in a first metallization plane, and a first source/drain terminal of each memory transistor of a second column adjacent to the first column is connected to an electrically conductive conductor track in a second metallization plane.
    Type: Grant
    Filed: November 18, 2005
    Date of Patent: August 12, 2008
    Assignee: Infineon Technologies AG
    Inventors: Michael Specht, Franz Hofmann, Ulrich Dorda, Johannes Kretz, Lars Dreeskornfeld
  • Patent number: 7385243
    Abstract: Floating gate memory cell having a first layer with first and second source/drain regions and a channel region arranged between and next to the first and second source/drain regions, and a floating gate layer arranged on the first layer, wherein the first and second source/drain regions and the floating gate layer are formed of a metallically conductive material, and the channel region is formed of an electrically insulating material.
    Type: Grant
    Filed: August 25, 2004
    Date of Patent: June 10, 2008
    Assignee: Infineon Technologies AG
    Inventors: Andrew Graham, Franz Hofmann, Michael Specht
  • Patent number: 7368752
    Abstract: A DRAM memory cell is provided with a selection transistor, which is arranged horizontally at a semiconductor substrate surface and has a first source/drain electrode, a second source/drain electrode, a channel layer arranged between the first and the second source/drain electrode in the semiconductor substrate, and a gate electrode, which is arranged along the channel layer and is electrically insulated from the channel layer, a storage capacitor, which has a first capacitor electrode and a second capacitor electrode, insulated from the first capacitor electrode, one of the capacitor electrodes of the storage capacitor being electrically conductively connected to one of the source/drain electrodes of the selection transistor, and a semiconductor substrate electrode on the rear side, the gate electrode enclosing the channel layer at at least two opposite sides.
    Type: Grant
    Filed: May 6, 2004
    Date of Patent: May 6, 2008
    Assignee: Infineon Technologies AG
    Inventors: Richard J. Luyken, Franz Hofmann, Lothar Risch, Dirk Manger, Wolfgang Rösner, Till Schlösser, Michael Specht
  • Publication number: 20080080226
    Abstract: A memory system includes a plurality of resistive memory cell fields including at least a first resistive memory cell field and a second resistive memory cell field, the first resistive memory cell field formed with a plurality of resistive memory cells storing data at a first data storage speed, the second resistive memory cell field formed with a plurality of resistive memory cells storing data at a second data storage speed lower than the first data storage speed, and a controller controlling data transfer between the plurality of resistive memory cell fields.
    Type: Application
    Filed: September 25, 2006
    Publication date: April 3, 2008
    Inventors: Thomas Mikolajick, Rainer Spielberg, Nicolas Nagel, Michael Specht, Josef Willer, Detlev Richter, Luca de Ambroggi, Andreas Taeuber
  • Patent number: 7352018
    Abstract: The invention relates to a method for fabricating stacked non-volatile memory cells. Further, the invention relates to stacked non-volatile memory cells. The invention particularly relates to the field of non-volatile NAND memories having non-volatile stacked memory cells. The stacked non-volatile memory cells are formed on a semiconductor wafer, having a bulk semi-conductive substrate and an SOI semi-conductive layer and are arranged as a bulk FinFET transistor and an SOI FinFet transistor being arranged on top of the bulk FinFET transistor. Both the FinFET transistor and the SOI FinFet transistor are attached to a common charge-trapping layer. A word line with sidewalls is arranged on top of said patterned charge-trapping layer and a spacer oxide layer is arranged on the sidewalls of said word line.
    Type: Grant
    Filed: July 22, 2005
    Date of Patent: April 1, 2008
    Assignee: Infineon Technologies AG
    Inventors: Michael Specht, Franz Hofmann, Johannes Luyken
  • Publication number: 20080074927
    Abstract: A memory array includes first, second, third and forth memory cell strings. Each of the first, second, third, and fourth memory cell strings includes a number of serially-coupled memory cells, including a first memory cell and a last memory cell. A first interconnect is coupled to a first bit line and to each of the first, second, third and fourth memory cell strings. The first interconnect includes first, second, third and fourth string input select gates. Each input select gate has a first terminal coupled to the first bit line, and a second terminal coupled to one of the respective first, second, third or fourth memory cell strings.
    Type: Application
    Filed: September 22, 2006
    Publication date: March 27, 2008
    Inventors: Franz Hofmann, Michael Specht, Nicolas Nagel, Josef Willer