Abstract: A universal material tester with two or more consecutively arranges test units has a test tool supporting carriage, which is provided with a removable partition that allows conversion of the test-unit installation socket from a multiple test unit holder into a single test-unit holder, or vice versa. An advantage of the tester is a possibility of expanding dynamic range of measurements by using two or more test units, which are installed in series at one setting and can be used in sequential tests without replacement but with different measurement ranges. This broadens the dynamic measurement ranges and allows revealing material properties otherwise unattainable. The test units may be combined with an imaging device installed in series with the test tools that engage the sample physically.

Abstract: A method for determining hardness of a material by implementing 3D imaging is proposed. The imaging provides database of points on the 3D imprint in an orthogonal X-Y-Z coordinate system. An imaginary image of the imprint is formed by finding a plurality of intersection points obtained by intersecting the imprint image in X-Y plane with the X-Z plane movable in the Y-axis direction for obtaining a plurality of points of intersection that lay in the X-Y plane. Statistical processing of the plurality of the points of intersection makes it possible to form imaginary image of the imprint in the X-Y plane and to use the reference dimension of the obtained imaginary image as a parameter for insertion into the hardness calculation formula.

Abstract: Proposed are a method and apparatus for maintaining constancy of force in contact between a test probe and test object, which are in a state of relative motion, e.g., in a material testing machine. This is achieved by providing the material testing machine with a leveling stage that includes an adjustable leveling mechanism for eliminating deviations of the support surface of the test sample table from flatness and parallelism to a reference plane that passes through the point of contact of the probe with the object perpendicular to the test probe. The mechanism includes springing elements and thrust elements that pass through the carrier member and rest against the springing elements for adjusting thrust forces applied to the springing elements for adjusting a position of the sample supporting surface relative to a virtual reference plane, which passes through the contact point perpendicular to the longitudinal axis of the probe.

Abstract: A universal material tester with two or more consecutively arranges test units has a test tool supporting carriage, which is provided with a removable partition that allows conversion of the test-unit installation socket from a multiple test unit holder into a single test-unit holder, or vice versa. An advantage of the tester is a possibility of expanding dynamic range of measurements by using two or more test units, which are installed in series at one setting and can be used in sequential tests without replacement but with different measurement ranges. This broadens the dynamic measurement ranges and allows revealing material properties otherwise unattainable. The test units may be combined with an imaging device installed in series with the test tools that engage the sample physically.

Abstract: Proposed is a universal mechanical tester for measuring friction and wear characteristics of materials. The tester allows performing multiple test protocols with a single machine. The tester consists of a frame that supports a carriage moveable in a vertical direction, a force sensor assembly attached to the carriage, a positioning stage with a slide and a platform, and a plurality of modular sample stages interchangeably installable on the platform for executing linear and rotary motions of the lower sample relative to the upper sample in various directions and planes. The tester is provided with a set of electronic identification devices for identifying a modular sample stage installed on the platform and the force sensor assembly attached to the carriage.

Abstract: A multi-component force-torque sensing device contains force- and torque-sensitive elements mounted on a common base so that the axis of rotation of the measured torque coincides with the direction of action of the force being measured. The force and the torque are applied to a test specimen holder simultaneously. For reducing cross-talk between the sensitive elements installed on the base the test specimen holder is connected to the sensitive elements via a cross-talk reducing member with respective adapters which translate the force and the torque to the sensitive elements independently, without affecting or disturbing each other measurements.

Abstract: Proposed is a universal mechanical tester for measuring friction and wear characteristics of materials. The tester allows performing multiple test protocols with a single machine. The tester consists of a frame that supports a carriage moveable in a vertical direction, a force sensor assembly attached to the carriage, a positioning stage with a slide and a platform, and a plurality of modular sample stages interchangeably installable on the platform for executing linear and rotary motions of the lower sample relative to the upper sample in various directions and planes. The tester is provided with a set of identification units for identifying a modular sample stage installed on the platform and the force sensor assembly attached to the carriage.

Abstract: The invention provides a method and a bi-directional force sensing device with reduced cross-talk between the sensitive elements. The device contains an L-shaped mounting base, which supports force sensitive elements positioned on mutually perpendicular mounting legs of the mounting base. These force sensitive elements are interconnected by a sensor cross-talk reducing member via respective adapters in such a way that one force is translated to the one force sensitive element without affecting or disturbing another force sensitive element, thus reducing the cross-talk between the first and the second force measurements.

Abstract: The invention provides a method and a multi-component force-torque sensing device with reduced cross-talk between the sensitive elements. The device contains a mounting base, which supports force sensitive unit and torque sensitive unit. These sensitive units are interconnected by a sensor cross-talk reducing member via respective adapters in such a way that the force is translated to the force sensitive unit without affecting or disturbing the torque sensitive unit, and the torque is translated to the torque sensitive unit without affecting or disturbing the force sensitive unit, thus reducing the cross-talk between the force and the torque measurements.

Abstract: The invention provides a method and a bi-directional force sensing device with reduced cross-talk between the sensitive elements. The device contains an L-shaped mounting base, which supports force sensitive elements positioned on mutually perpendicular mounting legs of the mounting base. These force sensitive elements are interconnected by a sensor cross-talk reducing member via respective adapters in such a way that one force is translated to the one force sensitive element without affecting or disturbing another force sensitive element, thus reducing the cross-talk between the first and the second force measurements.

Abstract: A method and apparatus of the invention are intended for determining characteristics of thin films, layers and coatings on under-layers and substrates when the films, layers and coatings have electrical characteristics measurably different from those of the under-layers and substrates.

Abstract: An apparatus for monitoring a condition of a polishing plate, in particular for detecting the time for the polishing plate to be reconditioned or replaced, comprising a measuring unit containing at least one sensing unit and a signal-conditioning unit; and a data processing unit. The measuring unit is being in contact with the polishing plate and having a possibility to move relative to it. The sensing unit comprises a probing tip and a set of sensors attached to the back surface of the probing tip, and contains at least one sensor of the group of coefficient of friction sensor, acoustic emission sensor, wear sensor. All sensors work simultaneously and their measurement data is processed and analyzed by a data processing unit for obtaining accurate and reliable results.

Abstract: The apparatus for polishing control with signal peak analysis consists of two major units: a polishing machine and a polishing process control and monitoring system which has sensors for sensing changes on the surface and/or inside the object during polishing. In response to the above changes the sensors generate operating data signals. The control and monitoring system, which also contains a signal conditioning unit and a control unit, amplifies the operating data signals and sends them to a signal analyzer, which determines average values and peaks of the conditioned signals. The analyzer also determines a ratio of the peak signal values to an average signal values and compares the obtained ratio with a preliminarily determined reference value optimized with regard to the specific CMP process carried out on the polishing machine.

Abstract: A method and an indenter for microscratch test of durability properties of the materials, including resistance of coating films to delamination. The blade-like indenter has a prism-like body defined by a front side, a rear side, a first lateral side, and a second lateral side. The first lateral side and the second lateral side converge and form at their intersection an edge that extends from the front side to the rear side. An angle between the edge and the front side is sharp, and an angle between the first lateral side and the second lateral side is rounded with a radius. During the test, the blade-like indenter is installed at selected angles of attack to the surface of the test material; a relative movement is created between the indenter and the test material with simultaneous mechanical, electrical, and acoustical measurements.

Abstract: An apparatus for controlling a polishing process, in particular for detecting an end point of the polishing process, comprising a rotating or orbiting platen with a pad, a rotating head that supports an object to be treated, e.g., a semiconductor wafer, and performs radial movements with respect to the platen, and a polishing process control system comprising a plurality of groups of various sensing devices for detecting an end point of the process. In the illustrated embodiment one group of the sensing devices is a group of high-frequency acoustic emission sensors built on various levels into components of the rotating head. Another group of sensing devices is represented by force/torque sensors connected with various elements of the rotating head and the platen, respectively, and intended for direct measurement of compression force and friction response (force or torque) between the head and the platen and a coefficient of friction between the wafer and the polishing pad.

Abstract: The apparatus for polishing control with signal peak analysis consists of two major units: a polishing machine and a polishing process control and monitoring system which has sensors for sensing changes on the surface and/or inside the object during polishing. In response to the above changes the sensors generate operating data signals. The control and monitoring system, which also contains a signal conditioning unit and a control unit, amplifies the operating data signals and sends them to a signal analyzer, which determines average values and peaks of the conditioned signals. The analyzer also determines a ratio of the peak signal values to an average signal values and compares the obtained ratio with a preliminarily determined reference value optimized with regard to the specific CMP process carried out on the polishing machine.

Abstract: An indenter for microscratch test of durability properties of the materials, including resistance of coating films to delamination. The blade-like indenter has a prism-like body defined by a front side, a rear side, a first lateral side, and a second lateral side. The first lateral side and the second lateral side converge and form at their intersection an edge that extends from the front side to the rear side. An angle between the edge and the front side is sharp, and an angle between the first lateral side and the second lateral side is rounded with a radius. During the test, the blade-like indenter is installed at selected angles of attack to the surface of the test material; a relative movement is created between the indenter and the test material with simultaneous mechanical, electrical, and acoustical measurements.

Abstract: A universal friction tester for testing tribological properties of materials comprises a frame with a carriage sliding in vertical guides and supporting a slide moveable in a horizontal direction. The slide supports a stationary upper specimen, which engages a moveable lower specimen, located in a replaceable module attachable to a base plate of the frame. The modules may be of a rotary, reciprocating, a block-on-ring, or any other type, required for different test conditions. Testing can also be carried out with heating or with the supply of oil in the zone of contact between the specimens.

Abstract: The device of the invention is intended for measuring a loading force and a friction force in a tribological tester. The device consists of two deformation-sensitive sensors for simultaneous equal deformation in two opposite directions for eliminating misbalance created in the measurement system when a single sensor is used. Each sensor is a deformable beam having through longitudinal slots extending in different and non-parallel directions and overlapped within the body of the beam. The sensor deforms in one direction under the effect of a loading force measured by two pairs of strain gauges located on opposite sides of the beam near one end of the beam and in another direction under the effect of a friction force measured by another two pairs of strain gauges located on opposite sides of the beam near the other end of the beam.

Abstract: An apparatus for controlling a polishing process, in particular for detecting an end point of the polishing process, comprising a rotating or orbiting platen with a pad, a rotating head that supports an object to be treated, e.g., a semiconductor wafer, and performs radial movements with respect to the platen, and a polishing process control system comprising a plurality of groups of various sensing devices for detecting an end point of the process. In the illustrated embodiment one group of the sensing devices is a group of high-frequency acoustic emission sensors built on various levels into components of the rotating head. Another group of sensing devices is represented by force/torque sensors connected with various elements of the rotating head and the platen, respectively, and intended for direct measurement of compression force and friction response (force or torque) between the head and the platen and a coefficient of friction between the wafer and the polishing pad.