Patents by Inventor Michael Zabka
Michael Zabka has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Publication number: 20170294327Abstract: A front opening wafer container with a forward and rearward sets of stacked V-shaped wafer edge receiving portions, the rearward set part of a wafer shelf component and comprising a thin film of PBT preformed and overmolded with a polycarbonate. The sets of stacked V-shaped wafer edge receiving portions providing between-shelf seating positions above on-shelf seating positions. The PBT providing a low friction sliding engagement surface for the wafer edges thereby providing uniform and consistent dropping of wafers from the between shelf position to the on-shelf position when the door of the wafer container is removed.Type: ApplicationFiled: August 28, 2015Publication date: October 12, 2017Inventors: Barry GREGERSON, Christian ANDERSEN, Russ V. RASCHKE, Michael ZABKA
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Patent number: 7347329Abstract: A carrier for transporting silicon semiconductor wafers during semiconductor wafer processing operations including an enclosure, a door and a flange structured to interface with a machine so that the carrier can be lifted by the machine. A lift saddle connects the flange to the container so that the load on the flange is transferred to a part of the enclosure other than the top of the enclosure to prevent distortion of the enclosure to maintaining seal integrity between the enclosure and the door.Type: GrantFiled: October 22, 2004Date of Patent: March 25, 2008Assignee: Entegris, Inc.Inventors: John Burns, Matthew A. Fuller, Jeffery J. King, Martin L. Forbes, Mark V. Smith, Michael Zabka
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Publication number: 20060201847Abstract: A protective shipper comprises a cover and a base that are held together by a latching member. The base is configurable to retain and protect semiconductor wafers or film frames with wafers within a storage pocket. The base comprises latching member and a support wall that defines a storage pocket. The cover encloses the storage pocket. One or both of the cover may receive recesses for gripability. The cover may receive one or more latching apertures configured to minimize unintended unlatching. The shipper of the present invention may be manufactured in a mold capable of producing film frame or wafer containing configurations of the shipper by using an interchangeable mold insert.Type: ApplicationFiled: May 9, 2006Publication date: September 14, 2006Inventors: Michael Zabka, James Nigg
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Patent number: 7040487Abstract: A protective shipper comprises a cover and a base that are held together by a latching member. The base is configurable to retain and protect semiconductor wafers or film frames with wafers within a storage pocket. The base comprises latching member and a support wall that defines a storage pocket. The cover encloses the storage pocket. One or both of the cover may receive recesses for gripability. The cover may receive one or more latching apertures configured to minimize unintended unlatching. The shipper of the present invention may be manufactured in a mold capable of producing film frame or wafer containing configurations of the shipper by using an interchangeable mold insert.Type: GrantFiled: July 12, 2002Date of Patent: May 9, 2006Assignee: Entegris, Inc.Inventors: Michael Zabka, James Nigg
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Publication number: 20050109668Abstract: A carrier for transporting silicon semiconductor wafers during semiconductor wafer processing operations including an enclosure, a door and a flange structured to interface with a machine so that the carrier can be lifted by the machine. A lift saddle connects the flange to the container so that the load on the flange is transferred to a part of the enclosure other than the top of the enclosure to prevent distortion of the enclosure to maintaining seal integrity between the enclosure and the door.Type: ApplicationFiled: October 22, 2004Publication date: May 26, 2005Inventors: John Burns, Matthew Fuller, Jeffery King, Martin Forbes, Mark Smith, Michael Zabka
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Patent number: 6837374Abstract: An interlockable film frame carrier has central and peripheral portions for securely storing a film frame, the film frame supporting a film, a semiconductor wafer disposed on the film. The central portion has structure for supporting the semiconductor wafer and for allowing access to a lower surface of the stored film frame. The peripheral portion of the film frame carrier includes structure for supporting a peripheral portion of the film frame and matable stacking members. When the film frame is stored, two film frame carriers are interlocked by mating the stacking members. It is emphasized that this abstract is provided to comply with the rules requiring an abstract that will allow a searcher or other reader to quickly ascertain the subject matter of the technical disclosure. It is submitted with the understanding that it will not be used to interpret or limit the scope or meaning of the claims. 37 CFR ยง1.72 (b).Type: GrantFiled: July 12, 2002Date of Patent: January 4, 2005Assignee: Entegris, Inc.Inventors: James Nigg, Michael Zabka
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Patent number: 6644477Abstract: A wafer container having a container portion with an open front for receiving and removal of wafers includes a door with a cushion system that utilizes a unique wafer restraint system and structural features to provide maximum protection for the wafers and preventing rotation of said wafers. A feature of the door is that the front of the door covers have a pair of latch cavities on the outwardly facing side of the door. The latch cavities for receiving two latch mechanisms with latch members that extend out the upper and lower peripheral edge of the door. The latch mechanisms are covered by a pair of door panels that utilize hooks that attach to the peripheral edge of the door and further attach with posts near the vertical midsection. The latch cover at the peripheral side edge and at the vertical midsection of the door provides stiffness and resistance to bending of the door.Type: GrantFiled: December 11, 2002Date of Patent: November 11, 2003Assignee: Entegris, Inc.Inventors: Gregory Bores, Michael Zabka, Barry Gregerson
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Publication number: 20030159971Abstract: A wafer container having a container portion with an open front for receiving and removal of wafers includes a door with a cushion system that utilizes a unique wafer restraint system and structural features to provide maximum protection for the wafers and preventing rotation of said wafers. A feature of the door is that the front of the door covers have a pair of latch cavities on the outwardly facing side of the door. The latch cavities for receiving two latch mechanisms with latch members that extend out the upper and lower peripheral edge of the door. The latch mechanisms are covered by a pair of door panels that utilize hooks that attach to the peripheral edge of the door and further attach with posts near the vertical midsection. The latch cover at the peripheral side edge and at the vertical midsection of the door provides stiffness and resistance to bending of the door.Type: ApplicationFiled: December 11, 2002Publication date: August 28, 2003Applicant: Entegris, Inc.Inventors: Gregory Bores, Michael Zabka, Barry Gregerson
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Publication number: 20030012628Abstract: An interlockable film frame carrier has central and peripheral portions for securely storing a film frame, the film frame supporting a film, a semiconductor wafer disposed on the film. The central portion has structure for supporting the semiconductor wafer and for allowing access to a lower surface of the stored film frame. The peripheral portion of the film frame carrier includes structure for supporting a peripheral portion of the film frame and matable stacking members. When the film frame is stored, two film frame carriers are interlocked by mating the stacking members. It is emphasized that this abstract is provided to comply with the rules requiring an abstract that will allow a searcher or other reader to quickly ascertain the subject matter of the technical disclosure. It is submitted with the understanding that it will not be used to interpret or limit the scope or meaning of the claims.Type: ApplicationFiled: July 12, 2002Publication date: January 16, 2003Applicant: Entegris, Inc.Inventors: James Nigg, Michael Zabka
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Publication number: 20030010657Abstract: A protective shipper comprises a cover and a base that are held together by a latching member. The base is configurable to retain and protect semiconductor wafers or film frames with wafers within a storage pocket. The base comprises latching member and a support wall that defines a storage pocket. The cover encloses the storage pocket. One or both of the cover may receive recesses for gripability. The cover may receive one or more latching apertures configured to minimize unintended unlatching. The shipper of the present invention may be manufactured in a mold capable of producing film frame or wafer containing configurations of the shipper by using an interchangeable mold insert.Type: ApplicationFiled: July 12, 2002Publication date: January 16, 2003Inventors: Michael Zabka, James Nigg