Abstract: An electrical connection substrate includes a substrate main body in which an electrical connection through port is formed, and connection target members arranged on both sides of the substrate main body, respectively. The connection target members are electrically connected to each other through the electrical connection through port, and the electrical connection through port is filled with a fluidized conductive material. The fluidized conductive material thus filled can satisfactorily keep connection of the connection target members to each other through the electrical connection through port.

Abstract: A liquid droplet ejecting head comprising: a piezoelectric element substrate including an diaphragm and a piezoelectric element; a liquid pool chamber that pools liquid supplied to a pressure chamber and which is provided opposite a pressure chamber filled with liquid with the piezoelectric element substrate placed in between; an upper substrate arranged so as to separate the liquid pool chamber and the piezoelectric element substrate with the piezoelectric element substrate between with a through port for supplying liquid to the pressure chamber from the liquid pool chamber formed therein; a driver that is mounted on the upper substrate and which drives the piezoelectric element; a connecting component arranged between the opposite upper substrate and the piezoelectric element substrate and which electrically connects this upper substrate to the piezoelectric element.

Abstract: A liquid droplet ejecting head comprising: a channel substrate in which a nozzle and a pressure chamber, which is partitioned off by a pressure chamber dividing wall, are formed; a piezoelectric element substrate having a diaphragm that forms a part of the pressure chamber and a piezoelectric element that displaces this diaphragm; a liquid pool chamber that is formed opposite from the pressure chamber with the piezoelectric element substrate being disposed therebetween an upper substrate disposed opposite from the pressure chamber with the piezoelectric element substrate being disposed therebetween so as to be separated from and face the piezoelectric element substrate; and a dividing wall component provided, when viewing the channel substrate in plane view, along a position corresponding to the pressure chamber dividing wall between the piezoelectric element substrate and the upper substrate so as to contact the piezoelectric element substrate and the upper substrate.

Abstract: An ink jet recording head and a process for producing the same, and an ink jet recording apparatus are provided that improve the printing performance and also improve the production efficiency. A conjugated body 73 formed by conjugating silicon wafers 50 and 58 is cut, whereby nozzles 22 are opened, and cutting into head chip units is carried out. At this time, deep grooves 84 are formed on the surface of the silicon wafer 58 by anisotropic etching, and they are penetrated by etching on the opposite side. Grooves 90 are formed on the silicon wafer 50 by using the thus penetrated deep grooves 84 as a mask.

Abstract: An ink jet recording head is formed by laminating a nozzle plate, ink pool plates, a through plate, an ink supply path plate, a pressure chamber plate and a vibrating plate in order. These members of the head are bonded to each other with an adhesive. An inner wall of an ink channel is covered with a channel film for continuously covering the entire inner wall.

Abstract: An inkjet recording head having: a nozzle ejecting ink drops; a pressure chamber which communicates with the nozzle and in which ink is filled; a vibrating plate structuring a portion of the pressure chamber; an ink pooling chamber pooling ink to be supplied to the pressure chamber via an ink flow path; and a piezoelectric element displacing the vibrating plate. The ink pooling chamber is provided at a side of the vibrating plate opposite the side at which the pressure chamber is provided. A driving IC, which applies voltage to the piezoelectric element, is mounted on a piezoelectric element substrate which is formed so as to include the vibrating plate. Accordingly, there is provided the inkjet recording head which realizes a higher density of nozzles and an accompanying formation of wires at a fine pitch to realize higher resolution, and which can be compact.

Abstract: A liquid droplet ejecting head is disclosed which includes: a nozzle that ejects a liquid droplet; a pressure chamber that is communicated with the nozzle and in which a liquid is filled; a vibrating plate that forms a portion of the pressure chamber; an ink pooling chamber that pools a liquid which is supplied to the pressure chamber via a liquid flow path; a piezoelectric element that displaces the vibrating plate; and an isolation chamber that is provided in the liquid pooling chamber and isolates the piezoelectric element from the liquid. The liquid pooling chamber is provided at a side opposite to the pressure chamber, with the vibrating plate disposed between the liquid pooling chamber and the pressure chamber. A liquid droplet ejecting apparatus including this liquid droplet ejecting head is also disclosed.

Abstract: A method of manufacturing a liquid droplet ejection head including nozzles that eject liquid droplets, pressure chambers that are communicated with the nozzles and filled with a liquid, a diaphragm that configures part of the pressure chambers, a pool chamber that pools the liquid supplied to the pressure chambers via flow paths, and piezoelectric elements that cause the diaphragm to be displaced, the method including: disposing the diaphragm on a support substrate; disposing the piezoelectric elements on the diaphragm; disposing a top plate including wirings on the diaphragm; and removing the support substrate from the diaphragm to form a piezoelectric element substrate and joining a flow path substrate, in which the pressure chambers are formed, to the piezoelectric element substrate.

Abstract: An inkjet recording head includes: nozzles that jet ink droplets; pressure chambers that communicate with the nozzles and contain ink; a diaphragm that configures part of the pressure chambers; an ink pool chamber that pools ink to be supplied to the pressure chambers via ink flow paths; and piezoelectric elements that cause the diaphragm to be displaced, wherein the ink pool chamber is disposed opposite from the pressure chambers with the diaphragm being disposed therebetween, and drive ICs that apply a voltage to the piezoelectric elements are mounted on a piezoelectric element substrate formed to include the diaphragm.

Abstract: An inkjet recording head is disclosed. In the inkjet recording head, a pressure chamber, in which ink is filled, communicates with a nozzle which ejects ink droplets. An ink pooling chamber communicates, via an ink flow path, with the pressure chamber. Ink is supplied from the ink pooling chamber through the ink flow path to the pressure chamber. A piezoelectric element, and a driving IC which applies voltage to the piezoelectric element, are provided on a same substrate. A vibrating plate, which structures a portion of the pressure chamber, is displaced by the piezoelectric element. A wire, which is for energizing the driving IC, is formed at a top plate of the ink pooling chamber which is provided at a side of the vibrating plate opposite a side at which the pressure chamber is provided. An inkjet recording apparatus equipped with this inkjet recording head also is disclosed.

Abstract: The present invention provides a piezoelectric element including: a piezoelectric body; and two electrodes between which the piezoelectric body is interposed, wherein the piezoelectric element is covered by a low water permeable insulating film serving as a protective film.

Abstract: The present invention provides an ink jet recording head that enables stable high-speed continuous printing, its manufacturing method and an ink jet recording device. A bubble generated in a common liquid chamber is moved to the side of an ink tank via a communicating port formed in a sufficient size and a supply passage. That is, a bubble generated inside a common liquid chamber is exhausted satisfactorily from the common liquid chamber by forming the communicating port in a shape which the bubble can pass, resulting in the supply of ink to the common liquid chamber and an individual passage (nozzle) prevented from being blocked by the bubble. As a result, even if high-speed continuous jetting (printing) is performed, stable printing is enabled.

Abstract: A satisfactory bonding is implemented at low cost. In a step, a resin layer is formed on a bonding surface side of a silicon wafer on which portion are formed electro-thermal transducers. In a later step, the silicon wafer and another silicon wafer are aligned and fixed temporarily, then the atmosphere is set at a pressure of 10−3 mbar or lower and the temperature is set at 300° C. or higher, and voltage is applied across the both wafers while pressure is applied to the wafers. When the value of an electric current flowing across the wafers has reached a level of a certain current value or lower, the application of the voltage is stopped and the atmosphere is opened to the atmospheric pressure while reducing the temperature.

Abstract: The present invention provides an ink jet recording head in which the degree of freedom in the design of the arranged position of an electric signal input-output terminal is enhanced, its manufacturing method and an ink jet recording device, the invention is characterized as follows. The ink jet recording head is formed by laminating a heater element substrate in which a heater element and others are arranged and a passage substrate in which nozzles and others are formed. When the nozzles and others are formed by etching in the passage substrate, a cut-out portion for exposing an electric signal input-output terminal of the heater element substrate is also formed. Therefore, the degree of freedom in the design of the shape and the position of the cut-out portion in the head chip is enhanced.

Abstract: An ink jet recording head and a process for producing the same, and an ink jet recording apparatus are provided that improve the printing performance and also improve the production efficiency. A conjugated body 73 formed by conjugating silicon wafers 50 and 58 is cut, whereby nozzles 22 are opened, and cutting into head chip units is carried out. At this time, deep grooves 84 are formed on the surface of the silicon wafer 58 by anisotropic etching, and they are penetrated by etching on the opposite side. Grooves 90 are formed on the silicon wafer 50 by using the thus penetrated deep grooves 84 as a mask.

Abstract: The present invention provides a liquid jet printing head, a method of manufacturing the same, and a liquid jet printing apparatus, which allow stable, high speed, and continuous printing. A liquid jet printing head provides an inflow of liquid from an inlet to a common chamber, then along with the surface of heating elements of a heating element substrate and with a wall of a housing to separate channels. Liquid drops will be ejected by heating the heating elements. Since liquid may flow linearly from the inlet to the separate channels in accordance with the present invention, smooth flow promotes evacuation of bubbles through a nozzle, while cooling the heating element substrate with liquid flowing along with the substrate. The present invention provides thereby stable printing with high speed, continuous ejection (printing) of liquid drops.

Abstract: The present invention provides an ink jet recording head that enables stable high-speed continuous printing, its manufacturing method and an ink jet recording device. A bubble generated in a common liquid chamber is moved to the side of an ink tank via a communicating port formed in a sufficient size and a supply passage. That is, a bubble generated inside a common liquid chamber is exhausted satisfactorily from the common liquid chamber by forming the communicating port in a shape which the bubble can pass, resulting in the supply of ink to the common liquid chamber and an individual passage (nozzle) prevented from being blocked by the bubble. As a result, even if high-speed continuous jetting (printing) is performed, stable printing is enabled.

Abstract: The present invention provides an ink jet recording head in which the degree of freedom in the design of the arranged position of an electric signal input-output terminal is enhanced, its manufacturing method and an ink jet recording device, the invention is characterized as follows. The ink jet recording head is formed by laminating a heater element substrate in which a heater element and others are arranged and a passage substrate in which nozzles and others are formed. When the nozzles and others are formed by etching in the passage substrate, a cut-out portion for exposing an electric signal input-output terminal of the heater element substrate is also formed. Therefore, the degree of freedom in the design of the shape and the position of the cut-out portion in the head chip is enhanced.

Abstract: Through-holes serving as common liquid chambers 5 are formed in a flow channel substrate 1 by a wet anisotropic etching process. One opened end of each through-hole serves as a liquid inlet 4. Trenches rectangular in cross section, which are used as liquid flow channels 7, are formed in the flow channel substrate by RIE process. Each liquid flow channel 7 includes a front constriction 41 formed near its associated discharge orifice 9 and a rear constriction 42 formed near a connection portion between the channel and the common liquid chamber 5. The common liquid chamber 5 is communicatively connected to the liquid flow channel 7 in a linear fashion, and a portion of the liquid flow channel 7 between the front constriction 41 and the rear constriction 42 may be designed to be broad. Therefore, the flow channel resistance is reduced, the liquid jetting efficiency is improved, and the liquid re-supplying is performed at high speed.