Abstract: According to one embodiment, a particle inspection system includes a voltage driving circuit which applies a driving voltage for a particle inspection to a particle inspection chip, a current-voltage conversion circuit which converts, into a voltage signal, a current signal output from the particle inspection chip when the driving voltage is applied to the particle inspection chip, a detection circuit which detects, based on the voltage signal, whether the sample liquid is introduced into a detection region of the particle inspection chip, and an analysis circuit which analyzes the fine particle, in the sample liquid based on the voltage signal. The voltage driving circuit varies the driving voltage based on the detection result of the detection circuit.

Abstract: According to one embodiment, a particle inspection system includes an inspection module and a determination module. The inspection module includes a particle inspection chip includes electrodes for detecting existence of particles in a sample liquid by a change in an electrical signal, and a memory element which is provided separately from the electrodes and configured to store whether the inspection chip is a used chip or not. The determination module includes a determination circuit configured to determine the existence of the particles based on a detection signal of the inspection chip, and a control circuit configured to control an operation of the determination circuit from information in the memory element.

Abstract: According to one embodiment, an analysis package, including a board, an analysis chip provided on the board, the chip including a detector for detecting a particle, a flow channel of a sample liquid, and a liquid receiver of the sample liquid, a first mold layer provided on the analysis chip, the first mold layer including an opening above the liquid receiver, and a second mold layer provided on the board and the first mold layer, the second mold layer including an opening above the opening of the first mold layer, wherein the respective openings of the first and second mold layers are connected above the liquid receiver to allow the sample liquid to be introduced into the liquid receiver from outside.

Abstract: According to one embodiment, an analysis package including a board including an electrical terminal, an analysis chip provided at the board, the chip including a detector for detecting a particle, a flow channel of a sample liquid for particle detection to the detector, and a liquid receiver for introducing the sample liquid into the flow channel, a mold provided to cover the board on which the analysis chip is provided, the mold comprising an opening above the liquid receiver, a first shield layer provided on a back surface of the board, and a second shield layer provided to be attachable and detachable on an opposite side to the analysis chip of the mold, the second shield layer being electrically connected to a part of the electrical terminal.

Abstract: According to one embodiment, an analysis package including an analysis chip provided on a main surface of a semiconductor substrate, the chip including a flow channel, both ends of which are open at peripheral parts of the substrate, and a microaperture which is provided in a middle of the flow channel and which allows a particle to pass therethrough, a package board on which the chip is mounted, liquid receivers provided on the package board, the liquid receivers being connected to openings, and electrodes, at least parts of which are provided on parts of bottom surfaces of the liquid receivers, the electrodes being provided at positions corresponding to an upstream side and a downstream side of the microaperture.

Abstract: According to one embodiment, a microanalysis chip includes a substrate, a flow channel in which a sample liquid is allowed to flow, the flow channel being provided on a main surface side of the substrate, a reservoir in which the sample liquid is allowed to be stored, the reservoir being provided on a main surface of the substrate, including a bank having a go-around shape and further including a liquid introduction inlet for connection to an end of the flow channel, the liquid introduction inlet being provided on the main surface of the substrate in the bank, and a filter which is provided between the liquid introduction inlet and the end of the flow channel and includes a first micropore for allowing passage of a fine particle in the sample liquid.

Abstract: A plastic fiber ribbon includes a plastic fiber, a buffer layer formed to surround an outer circumference of the plastic fiber, a spacer arranged substantially in parallel with the plastic fiber, and a cover part covering the plastic fiber, the buffer layer, and the spacer. A diameter L of the spacer is set to be larger than an inner diameter L1 of the buffer layer and smaller than an outer diameter L2 of the buffer layer, so that blades used to cut into the plastic fiber ribbon remain spaced from the plastic fiber by engaging the blades against the spacer.

Abstract: The present embodiments provide an acceleration sensor, which enables highly accurate detection and has an extremely compact size. The acceleration sensor of the present embodiments is provided with a substrate, a anchor portion formed on the substrate, a support beam, which has one end connected to the anchor portion and extends across a space from the substrate, and a proof mass which is connected to the other end of the support beam and held across a space from the substrate. The acceleration sensor is further provided with first and second piezoelectric bending resonators, a comparison unit, and a calculation unit. The first and second piezoelectric bending resonators have one end connected to the anchor portion and the other end connected to the proof mass or the support beam and have a stack of a first electrode, a first piezoelectric film, and a second electrode.

Abstract: According to one embodiment, an optical module includes an optical fiber, a ferrule which has a guide hole, a planar photonic device which is mounted on the ferrule, and a sleeve which includes a holding part for holding the optical fiber and a bumping part for making contact with one end of the ferrule and to which the optical fiber and the ferrule are fixed. The optical fiber is fixed to the sleeve in such a manner that the optical fiber protrudes from one end of the sleeve and has an end face formed using one end of the sleeve as a reference. The optical fiber with the formed end face is inserted in the guide hole in the ferrule and the ferrule is fixed to the sleeve with one end of the ferrule in contact with the bumping part of the sleeve.

Abstract: A resonator according to the embodiment includes: a substrate; a flat layered body which is formed above the substrate and is formed with at least a lower electrode, a piezoelectric film and an upper electrode; an anchor portion which fixes the layered body above the substrate; a cut-out portion inside the layered body; a tuning fork vibrator which is formed in the cut-out portion, has both ends supported by the layered body and is formed with at least a lower electrode, a piezoelectric film and an upper electrode; and an envelope which envelopes the layered body and the tuning fork vibrator in a noncontact fashion, and prevents an external force from being applied to the layered body and the tuning fork vibrator.

Abstract: According to one embodiment, an optically-coupled device includes a substrate and an optical fiber. The substrate is inclined from a first direction has a first width including a first surface optical device. The optical fiber is arranged in a second direction An end face has a second angle with respect to the first direction and has a radius of a second length. An outer edge of the end face of the optical fiber is it chamfered. A difference between the first angle and the second angle is not smaller than the difference with which the first surface optical device is protected from the end face of the optical fiber.

Abstract: According to one embodiment, an optical coupling element comprises an optical waveguide, a ferrule provided with a holding hole which holds the optical waveguide, electrical read frame formed on the element mounting surface of the ferrule, an optical semiconductor element which is mounted on the element mounting surface of the ferrule and connected to the electrical read frame, and a transparent adhesive which fills the gap between the optical semiconductor element and the optical waveguide. At least one side of the optical semiconductor element partially falls within a region obtained by extending the holding hole in the ferrule toward the optical semiconductor element.

Abstract: A resonator according to the embodiment includes: a substrate; a flat layered body which is formed above the substrate and is formed with at least a lower electrode, a piezoelectric film and an upper electrode; an anchor portion which fixes the layered body above the substrate; a cut-out portion inside the layered body; a tuning fork vibrator which is formed in the cut-out portion, has both ends supported by the layered body and is formed with at least a lower electrode, a piezoelectric film and an upper electrode; and an envelope which envelopes the layered body and the tuning fork vibrator in a noncontact fashion, and prevents an external force from being applied to the layered body and the tuning fork vibrator.

Abstract: A MEMS variable capacitor includes: a first connection beam having one end fixed to a substrate; a first actuation beam connected to the first connection beam; a second actuation beam connected to the first actuation beam and extending in a reverse direction; a second connection beam having one end fixed to the substrate; a third actuation beam connected to the second connection beam; a fourth actuation beam connected to the third actuation beam and extending in a reverse direction; a movable electrode provided between the second and fourth actuation beams; and a fixed electrode provided on the substrate opposed to the movable electrode. The first to fourth actuation beams have a piezoelectric film sandwiched between a lower electrode and an upper electrode, the first and third actuation beams are placed on a line, the second and fourth actuation beams are placed on a line, and the first and second actuation beams and the third and fourth actuation beams are placed symmetrically about a line.

Abstract: In a angular rate sensor, a weight and a base are connected directly through piezoelectric bimorph detectors and piezoelectric bimorph exciters each having a bent portion. When acceleration is applied to the weight, the weight is displaced so as to deform the piezoelectric bimorph detectors. Due to this deformation, charges generated in the piezoelectric bimorph detectors are detected so as to detect acceleration. If an angular rate is applied to the weight when the weight is vibrated by the piezoelectric bimorph exciters, Coriolis force is generated in the weight so as to deform the piezoelectric bimorph detectors. Due to this deformation, charges generated in the piezoelectric bimorph detectors are detected so as to detect the angular rate.

Abstract: A multi-axis accelerometer or a multi-axis angular rate sensor which can be made by an easy process and the size of which can be greatly reduced is provided. An inertia sensor has a substrate, a flat proofmass formed on the substrate and a stacked structure including at least a lower electrode, a piezoelectric film, and an upper electrode, an anchor unit formed in a cutout inside of the proofmass and fixed on the substrate, and a plurality of flat piezoelectric beams each having one end connected to the proofmass, the other end connected to the anchor unit, and a stacked structure formed in a cutout inside of the proofmass and including at least a lower electrode, a piezoelectric film, and an upper electrode, wherein the inertia sensor enables to detect an acceleration applied on the proofmass based on charges generated to the electrodes of the piezoelectric beams.

Abstract: A piezoelectric-driven MEMS element includes a substrate, a beam, a fixed portion, a fixed electrode portion and a power source. The beam is provided with a lower electrode film, a lower piezoelectric film, a middle electrode film, an upper piezoelectric film and an upper electrode film. The fixed portion fixes one end of the beam onto the substrate so as to hold the beam with a gap above the substrate. The fixed electrode portion has a capacitive gap between the fixed electrode portion and the other end of the beam. In addition, at least one or two of the lower electrode film, the middle electrode film and the upper electrode film is thicker than the rest thereof.

Abstract: A piezoelectric-driven MEMS device can be fabricated reliably and consistently. The piezoelectric-driven MEMS device includes: a movable flat beam having a piezoelectric film disposed above a substrate with a recessed portion such that the piezoelectric film is bridged over the recessed portion, piezoelectric drive mechanisms disposed at both ends of the piezoelectric film and configured to drive the piezoelectric film, and a first electrode disposed at the center of the substrate-side of the piezoelectric film, and a second electrode disposed on a flat part of the recessed portion of the substrate and facing the first electrode of the movable flat beam.

Abstract: The present embodiments provide an acceleration sensor, which enables highly accurate detection and has an extremely compact size. The acceleration sensor of the present embodiments is provided with a substrate, a anchor portion formed on the substrate, a support beam, which has one end connected to the anchor portion and extends across a space from the substrate, and a proof mass which is connected to the other end of the support beam and held across a space from the substrate. The acceleration sensor is further provided with first and second piezoelectric bending resonators, a comparison unit, and a calculation unit. The first and second piezoelectric bending resonators have one end connected to the anchor portion and the other end connected to the proof mass or the support beam and have a stack of a first electrode, a first piezoelectric film, and a second electrode.

Abstract: An actuator includes: a substrate; a fixed electrode provided on a major surface of the substrate; a first dielectric film provided on the fixed electrode, and made of crystalline material; a movable beam opposed to the major surface, and held above the substrate with a gap thereto; a movable electrode; and a second dielectric film. The movable electrode is provided on a surface of the movable beam facing the fixed electrode, and has an alternate voltage applied between the fixed electrode and the movable electrode. The second dielectric film is provided on a surface of the movable beam facing the fixed electrode, and is made of crystalline material.