Abstract: The present invention relates to a reflective mask blank for EUV lithography, including: a substrate, a multilayer reflective film reflecting EUV light, and a phase shift film shifting a phase of the EUV light, in which the substrate, the multilayer reflective film, and the phase shift film are formed in this order, the phase shift film includes a layer 1 including ruthenium (Ru) and nitrogen (N), and the layer 1 has an absolute value of a film stress of 1,000 MPa or less.

Abstract: The present invention relates to a reflective mask blank for EUV lithography, including: a substrate, a multilayer reflective film reflecting EUV light, and a phase shift film shifting a phase of the EUV light, in which the substrate, the multilayer reflective film, and the phase shift film are formed in this order, the phase shift film includes a layer 1 including ruthenium (Ru) and nitrogen (N), and the layer 1 has an absolute value of a film stress of 1,000 MPa or less.

Abstract: The purpose of the present invention is to provide a chemically-strengthened glass exhibiting both surface strength and abrasion-resistant anti-fingerprint (AFP) properties. The present invention relates to a plate-shaped chemically-strengthened glass which has a compressive stress layer provided to a glass surface layer, a glass surface hydrogen concentration profile in a specific range, and a surface strength and abrasion-resistant anti-fingerprint (AFP) properties which are in specific ranges.

Abstract: The purpose of the present invention is to provide a chemically strengthened glass in which reduction in glass surface strength is effectively suppressed even without performing a polishing treatment after a prolonged chemical strengthening treatment has been conducted at a high temperature. The present invention relates to a chemically strengthened glass having a specific glass composition, wherein: the surface roughness (Ra) is a specific value or greater; the compressive stress layer depth of a surface layer is a specific value or greater; by setting the hydrogen concentration in the glass surface layer to be within a specific range, the surface strength of the glass is dramatically improved even without performing an etching treatment using hydrofluoric acid or polishing the glass surface after a prolonged chemical strengthening treatment has been conducted at a high temperature.

Abstract: The purpose of the present invention is to provide a chemically-strengthened glass exhibiting both surface strength and abrasion-resistant anti-fingerprint (AFP) properties. The present invention relates to a plate-shaped chemically-strengthened glass which has a compressive stress layer provided to a glass surface layer, a glass surface hydrogen concentration profile in a specific range, and a surface strength and abrasion-resistant anti-fingerprint (AFP) properties which are in specific ranges.

Abstract: The purpose of the present invention is to provide a chemically strengthened glass in which reduction in glass surface strength is effectively suppressed even without performing a polishing treatment after a prolonged chemical strengthening treatment has been conducted at a high temperature. The present invention relates to a chemically strengthened glass having a specific glass composition, wherein: the surface roughness (Ra) is a specific value or greater; the compressive stress layer depth of a surface layer is a specific value or greater; by setting the hydrogen concentration in the glass surface layer to be within a specific range, the surface strength of the glass is dramatically improved even without performing an etching treatment using hydrofluoric acid or polishing the glass surface after a prolonged chemical strengthening treatment has been conducted at a high temperature.

Abstract: The purpose of the present invention is to provide a chemically strengthened glass in which reduction in glass surface strength is effectively suppressed even without performing a polishing treatment after a prolonged chemical strengthening treatment has been conducted at a high temperature. The present invention relates to a chemically strengthened glass having a specific glass composition, wherein: the surface roughness (Ra) is a specific value or greater; the compressive stress layer depth of a surface layer is a specific value or greater; by setting the hydrogen concentration in the glass surface layer to be within a specific range, the surface strength of the glass is dramatically improved even without performing an etching treatment using hydrofluoric acid or polishing the glass surface after a prolonged chemical strengthening treatment has been conducted at a high temperature.

Abstract: The purpose of the present invention is to provide a chemically-strengthened glass exhibiting both surface strength and abrasion-resistant anti-fingerprint (AFP) properties. The present invention relates to a plate-shaped chemically-strengthened glass which has a compressive stress layer provided to a glass surface layer, a glass surface hydrogen concentration profile in a specific range, and a surface strength and abrasion-resistant anti-fingerprint (AFP) properties which are in specific ranges.

Abstract: A glass substrate with an antifouling layer includes: a glass substrate which has a pair of principal surfaces facing to each other; a cohesive layer provided on the side of one principal surface of the glass substrate; and an antifouling layer provided on a surface of the cohesive layer, wherein the cohesive layer has a layer, the layer is in contact with the antifouling layer, contains mainly a silicon oxide, and contains carbon atoms at a concentration of 5×1018 atoms/cm3 to 5×1019 atoms/cm3.

Abstract: A glass laminate includes a glass substrate including a first main surface and a second main surface, and a functional layer at least on the first main surface. The functional layer includes at least two layers having a refractive index different from each other and the at least two layers are alternately laminated. The functional layer includes an outermost layer farthest from the glass substrate and a second layer that is adjacent to the outermost layer and lies closer to the glass substrate than the outermost layer. The outermost layer includes SiO2 as a main component. The second layer has a carbon concentration of 3×1018 atoms/cm3 or more and 5×1019 atoms/cm3 or less, and the carbon concentration of the second layer is lower than that of the outermost layer.

Abstract: A glass laminate includes a glass substrate including a first main surface and a second main surface, an antireflection layer on at least one of the first main surface and the second main surface, and an antifouling layer on the antireflection layer. The antireflection layer includes at least one low refractive index layer and at least one high refractive index layer, and the low refractive index layer and the high refractive index layer being alternately laminated. The antireflection layer includes an outermost layer farthest from the glass substrate and the outermost layer is the low refractive index layer including SiO2 as a main component. A distribution of fluorine concentration in a thickness direction of the outermost layer, measured by secondary ion mass spectrometry, has a peak.

Abstract: A glass laminate includes a glass substrate including a first main surface and a second main surface, and a functional layer at least on the first main surface. The functional layer includes at least two layers having a refractive index different from each other and the at least two layers are alternately laminated. The functional layer includes an outermost layer farthest from the glass substrate and a second layer that is adjacent to the outermost layer and lies closer to the glass substrate than the outermost layer. The outermost layer includes SiO2 as a main component. The second layer has a carbon concentration of 3×1018 atoms/cm3 or more and 5×1019 atoms/cm3 or less, and the carbon concentration of the second layer is lower than that of the outermost layer.

Abstract: A water/oil repellent layer-provided article, containing a substrate, a water/oil repellent layer containing a hydrolyzed condensate of a fluorinated compound having a hydrolyzable silyl group, and a silicon oxide layer containing alkali metal atoms, present between the substrate and the water/oil repellent layer, where in the silicon oxide layer, the average concentration of the alkali metal atoms in a region with a depth from the surface in contact with the water/oil repellent layer of at least 0.1 nm and at most 0.3 nm, is at least 2.0×1019 atoms/cm3.

Abstract: A water/oil repellent layer-provided article, containing a substrate, a water/oil repellent layer containing a hydrolyzed condensate of a fluorinated compound having a hydrolyzable silyl group, and a silicon oxide layer containing alkali metal atoms, present between the substrate and the water/oil repellent layer, where in the silicon oxide layer, the average concentration of the alkali metal atoms in a region with a depth from the surface in contact with the water/oil repellent layer of at least 0.1 nm and at most 0.3 nm, is at least 2.0×1019 atoms/cm3.

Abstract: A glass substrate includes at least one selected from the group consisting of Li, Na, K, Mg, Ca, Sr, Ba and Zn as a reaction factor component, and includes a surface depletion layer at a surface side of the glass substrate. A total molar concentration (mol/cm3) of the reaction factor component in the surface depletion layer is decreased relative to an inside of the glass substrate. A total depletion amount (mol/cm2) of the reaction factor component in the surface depletion layer is 1.00×10?8 or more. The glass substrate has a refractive index (nd) of 1.68 or more.

Abstract: The purpose of the present invention is to provide a chemically-strengthened glass exhibiting both surface strength and abrasion-resistant anti-fingerprint (AFP) properties. The present invention relates to a plate-shaped chemically-strengthened glass which has a compressive stress layer provided to a glass surface layer, a glass surface hydrogen concentration profile in a specific range, and a surface strength and abrasion-resistant anti-fingerprint (AFP) properties which are in specific ranges.

Abstract: A glass laminate includes a glass substrate including a first main surface and a second main surface, and a functional layer at least on the first main surface. The functional layer includes at least two layers having a refractive index different from each other and the at least two layers are alternately laminated. The functional layer includes an outermost layer farthest from the glass substrate and a second layer that is adjacent to the outermost layer and lies closer to the glass substrate than the outermost layer. The outermost layer includes SiO2 as a main component. The second layer has a carbon concentration of 3×1018 atoms/cm3 or more and 5×1019 atoms/cm3 or less, and the carbon concentration of the second layer is lower than that of the outermost layer.

Abstract: A glass substrate includes at least one selected from the group consisting of Li, Na, K, Mg, Ca, Sr, Ba and Zn as a reaction factor component, and includes a surface depletion layer at a surface side of the glass substrate. A total molar concentration (mol/cm3) of the reaction factor component in the surface depletion layer is decreased relative to an inside of the glass substrate. A total depletion amount (mol/cm2) of the reaction factor component in the surface depletion layer is 1.00×10?8 or more. The glass substrate has a refractive index (nd) of 1.68 or more.

Abstract: The purpose of the present invention is to provide a chemically strengthened glass in which reduction in glass surface strength is effectively suppressed even without performing a polishing treatment after a prolonged chemical strengthening treatment has been conducted at a high temperature. The present invention relates to a chemically strengthened glass having a specific glass composition, wherein: the surface roughness (Ra) is a specific value or greater; the compressive stress layer depth of a surface layer is a specific value or greater; by setting the hydrogen concentration in the glass surface layer to be within a specific range, the surface strength of the glass is dramatically improved even without performing an etching treatment using hydrofluoric acid or polishing the glass surface after a prolonged chemical strengthening treatment has been conducted at a high temperature.

Abstract: A glass laminate includes a glass substrate including a first main surface and a second main surface, an antireflection layer on at least one of the first main surface and the second main surface, and an antifouling layer on the antireflection layer. The antireflection layer includes at least one low refractive index layer and at least one high refractive index layer, and the low refractive index layer and the high refractive index layer being alternately laminated. The antireflection layer includes an outermost layer farthest from the glass substrate and the outermost layer is the low refractive index layer including SiO2 as a main component. A distribution of fluorine concentration in a thickness direction of the outermost layer, measured by secondary ion mass spectrometry, has a peak.