Patents by Inventor Mikio Suzuki

Mikio Suzuki has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 10886170
    Abstract: A method of forming a tungsten film having low resistance is provided. The method includes forming a discontinuous film containing a metal on a substrate; and forming the tungsten film on the substrate on which the discontinuous film is formed. In the forming of the discontinuous film, a first source gas and a nitriding gas are supplied onto the substrate alternately along with, for example, a carrier gas. In the forming of the tungsten film, a second source gas and a reducing gas are supplied onto the substrate alternately along with, for example, a carrier gas.
    Type: Grant
    Filed: April 24, 2018
    Date of Patent: January 5, 2021
    Assignee: TOKYO ELECTRON LIMITED
    Inventors: Koji Maekawa, Takashi Sameshima, Shintaro Aoyama, Mikio Suzuki, Susumu Arima, Atsushi Matsumoto, Naoki Shibata
  • Patent number: 10634208
    Abstract: An object of the present invention is to provide a vibration damping device including a bearing member capable of achieving simplification of configuration in the vibration damping device, reducing frictional force during operation, and having an excellent wear resistance. A vibration damping device of the present invention includes a bearing structure, in which a metal bush (bearing member) has a resin layer on a side defined as a friction sliding surface of a base member, the resin layer includes polytetrafluoroethylene and a tetrafluoroethylene-perfluoroalkyl vinyl ether copolymer resin, and the metal bush is lubricated by a magneto-rheological fluid composition.
    Type: Grant
    Filed: September 15, 2016
    Date of Patent: April 28, 2020
    Assignees: Honda Motors Co., Ltd., Daldo Metal Company Ltd.
    Inventors: Kentaro Komori, Daijiro Endo, Masato Kushiya, Mikio Suzuki
  • Publication number: 20200111675
    Abstract: There is provided a method of performing a surface processing on a substrate having a metal layer formed on a bottom portion of a recess formed in an insulating film, the method including: supplying a halogen-containing gas into a processing chamber in which the substrate is loaded; and removing a metal oxide from the bottom portion of the recess using the halogen-containing gas.
    Type: Application
    Filed: September 30, 2019
    Publication date: April 9, 2020
    Inventors: Koichi TAKATSUKI, Tadahiro ISHIZAKA, Mikio SUZUKI, Toshio HASEGAWA
  • Patent number: 10612139
    Abstract: There is provided a tungsten film forming method which includes: forming a first tungsten film on a substrate; and forming a second tungsten film on the first tungsten film. The forming a first tungsten film includes alternately supplying a first raw material gas containing tungsten and a diborane gas together with a first carrier gas to the substrate. The forming a second tungsten film includes alternately supplying a second raw material gas containing tungsten and a hydrogen gas together with a second carrier gas to the substrate on which the first tungsten film is formed. The first carrier gas is a nitrogen gas. The second carrier gas includes at least one kind of nobel gas and has the noble gas at a flow rate of 70% or more with respect to a total flow rate of the second carrier gas.
    Type: Grant
    Filed: April 25, 2018
    Date of Patent: April 7, 2020
    Assignee: TOKYO ELECTRON LIMITED
    Inventors: Koji Maekawa, Takashi Sameshima, Shintaro Aoyama, Mikio Suzuki, Susumu Arima, Atsushi Matsumoto, Naoki Shibata
  • Publication number: 20190161853
    Abstract: Provided is a method for forming a tungsten film in which a tungsten film is formed on the surface of a substrate, the method including: disposing a substrate having an amorphous layer on the surface thereof inside a treatment container under a depressurized atmosphere; heating the substrate inside the treatment container; and supplying, into the treatment container, WF6 gas which is a tungsten raw material and H2 gas which is a reducing gas, and forming a main tungsten film on the amorphous layer.
    Type: Application
    Filed: July 11, 2017
    Publication date: May 30, 2019
    Inventors: Shintaro Aoyama, Mikio Suzuki, Yumiko Kawano, Kohichi Satoh
  • Publication number: 20190040924
    Abstract: An object of the present invention is to provide a vibration damping device including a bearing member capable of achieving simplification of configuration in the vibration damping device, reducing frictional force during operation, and having an excellent wear resistance. A vibration damping device of the present invention includes a bearing structure, in which a metal bush (bearing member) has a resin layer on a side defined as a friction sliding surface of a base member, the resin layer includes polytetrafluoroethylene (PTFE) and a tetrafluoroethylene-perfluoroalkyl vinyl ether copolymer resin, and the metal bush is lubricated by a magneto-rheological fluid composition.
    Type: Application
    Filed: September 15, 2016
    Publication date: February 7, 2019
    Applicants: Honda Motor Co., Ltd., Daido Metal Company Ltd.
    Inventors: Kentaro KOMORI, Daijiro ENDO, Masato KUSHIYA, Mikio SUZUKI
  • Publication number: 20180312972
    Abstract: There is provided a tungsten film forming method which includes: forming a first tungsten film on a substrate; and forming a second tungsten film on the first tungsten film. The forming a first tungsten film includes alternately supplying a first raw material gas containing tungsten and a diborane gas together with a first carrier gas to the substrate. The forming a second tungsten film includes alternately supplying a second raw material gas containing tungsten and a hydrogen gas together with a second carrier gas to the substrate on which the first tungsten film is formed. The first carrier gas is a nitrogen gas. The second carrier gas includes at least one kind of inert gas and has a noble gas at a flow rate of 70% or more with respect to a total flow rate of the second carrier gas.
    Type: Application
    Filed: April 25, 2018
    Publication date: November 1, 2018
    Inventors: Koji MAEKAWA, Takashi SAMESHIMA, Shintaro AOYAMA, Mikio SUZUKI, Susumu ARIMA, Atsushi MATSUMOTO, Naoki SHIBATA
  • Publication number: 20180315649
    Abstract: A method of forming a tungsten film having low resistance is provided. The method includes forming a discontinuous film containing a metal on a substrate; and forming the tungsten film on the substrate on which the discontinuous film is formed. In the forming of the discontinuous film, a first source gas and a nitriding gas are supplied onto the substrate alternately along with, for example, a carrier gas. In the forming of the tungsten film, a second source gas and a reducing gas are supplied onto the substrate alternately along with, for example, a carrier gas.
    Type: Application
    Filed: April 24, 2018
    Publication date: November 1, 2018
    Inventors: Koji Maekawa, Takashi Sameshima, Shintaro Aoyama, Mikio Suzuki, Susumu Arima, Atsushi Matsumoto, Naoki Shibata
  • Publication number: 20170287727
    Abstract: A metal hard mask for etching an etching target film that is present on a target object to be processed is formed of an amorphous alloy film that is formed by a thin film formation technique. It is preferable to use a physical vapor deposition method as the thin film formation technique, and sputtering is suitable for the use among physical vapor deposition methods. This metal hard mask is obtained by forming an amorphous alloy film on the etching target film by a thin film formation technique and patterning the amorphous alloy film.
    Type: Application
    Filed: July 10, 2015
    Publication date: October 5, 2017
    Inventors: Yuuki KIKUCHI, Hiroyuki NAGAI, Yoshihiro HIROTA, Mikio SUZUKI
  • Patent number: 8960149
    Abstract: A two-cycle engine having a structure in which the shaft center Ccy of the cylinder 3 is offset onto the exhaust port 32 side with respect to the rotational center Ccr of the crankshaft 4, and the offset amount S of the shaft center Ccy with respect to the rotational center Ccr is set greater than 1 mm and less than 6 mm. Furthermore, in this case, the center of gravity of the counterweight 42 of the crankshaft 4 is shifted onto the rear side in the rotational direction with respect to the line passing the rotational center Ccr of the crankshaft 4 and the center Ccp of the crank pin 41.
    Type: Grant
    Filed: September 1, 2009
    Date of Patent: February 24, 2015
    Assignee: Husqvarna Zenoah Co., Ltd
    Inventors: Yuu Sugishita, Mikio Suzuki, Syouta Takeshima
  • Patent number: 8708566
    Abstract: A half bearing for a crankshaft of an internal combustion engine, which includes crush relieves at both circumferential end portions of an inner circumferential surface of the half bearing, is provided. The half bearing further includes an axial groove at least at a position adjacent to a crush relief on a rear side of a relative rotation direction of the crankshaft, and adjacent to the inner circumferential surface of the half bearing. The axial groove extends along an entire width of the inner circumferential surface of the half bearing.
    Type: Grant
    Filed: June 14, 2011
    Date of Patent: April 29, 2014
    Assignee: Daido Metal Company Ltd.
    Inventors: Yuto Otsuki, Mikio Suzuki
  • Patent number: 8434275
    Abstract: A double floor structure capable of being adapted to the conditions of construction and the needs of users at low cost. A double floor structure (K) provided with support legs (1) which are provided on a lower floor and rows of beams which form an upper floor. The support legs (1) are each provided with an upper member (14) which supports a beam from the lower side, an intermediate member (13) which supports the upper member (14) from the lower side, and a lower member (12) which supports the intermediate member (13) from the lower side. The upper member (14), the intermediate member (13), and the lower member (12) consist of metallic, extruded shape material and are disposed in such a manner that the direction of the extrusion is aligned with the top-bottom direction.
    Type: Grant
    Filed: August 3, 2010
    Date of Patent: May 7, 2013
    Assignees: Nippon Light Metal Company, Ltd., Nikkeikin Aluminium Core Technology Company Ltd., NTT Facilities, Inc.
    Inventors: Yakobu Hashimoto, Jun Kondo, Hiroshi Dohi, Mikio Suzuki, Daisuke Chiba, Masahiro Nammoku, Yasutomo Akashi, Kiyofumi Tanaka, Hideyuki Kaji, Takeshi Ono, Yoshiharu Konishi
  • Patent number: 8235596
    Abstract: A halved sliding bearing is provided, two of which are paired into a cylindrical shape. The halved sliding bearing includes a steel back metal, and a bearing alloy layer, which serves as a sliding surface, on the inside of the steel back metal. A coat layer of Bi or a Bi-based alloy is formed on the outside back surface of the steel back metal. Preferably, the coat layer consists of 1 to 30 mass % of one or more of Sn, Pb, In, Ag and Cu and the balance being Bi and inevitable impurities.
    Type: Grant
    Filed: March 20, 2009
    Date of Patent: August 7, 2012
    Assignee: Daido Metal Company Ltd.
    Inventors: Mikio Suzuki, Hideo Nakamura
  • Publication number: 20120183689
    Abstract: A Ni film forming method performs a cycle once or multiple times. The cycle includes: forming a nitrogen-containing Ni film on a substrate by CVD using nickel amidinate as a film formation material and at least one selected from ammonia, hydrazine and derivatives thereof as a reduction gas; and eliminating nitrogen from the nitrogen-containing Ni film by atomic hydrogen which is generated by using as a catalyst Ni produced by supplying hydrogen gas to the nitrogen-containing Ni film.
    Type: Application
    Filed: September 28, 2010
    Publication date: July 19, 2012
    Applicant: TOKYO ELECTRON LIMITED
    Inventors: Mikio Suzuki, Takashi Nishimori, Hideki Yuasa
  • Publication number: 20120180769
    Abstract: A two-cycle engine having a structure in which the shaft center Ccy of the cylinder 3 is offset onto the exhaust port 32 side with respect to the rotational center Ccr of the crankshaft 4, and the offset amount S of the shaft center Ccy with respect to the rotational center Ccr is set greater than 1 mm and less than 6 mm. Furthermore, in this case, the center of gravity of the counterweight 42 of the crankshaft 4 is shifted onto the rear side in the rotational direction with respect to the line passing the rotational center Ccr of the crankshaft 4 and the center Ccp of the crank pin 41.
    Type: Application
    Filed: September 1, 2009
    Publication date: July 19, 2012
    Applicant: HUSQVARNA ZENOAH CO., LTD.
    Inventors: Yuu Sugishita, Mikio Suzuki, Syouta Takeshima
  • Publication number: 20120171863
    Abstract: There is provided a metal silicide film forming method that includes providing a substrate having thereon a silicon part (process 1); forming a metal film on a surface of the silicon part of the substrate by a CVD process using a nitrogen-containing metal compound as a film forming source material (process 2); performing an annealing process on the substrate under a hydrogen gas atmosphere; and forming a metal silicide by a reaction between the metal film and the silicon part (process 3). Here, the nitrogen-containing metal compound as the film forming source material is metal amidinate. Further, the metal film is a nickel (Ni) film. Furthermore, the metal amidinate is nickel amidinate.
    Type: Application
    Filed: March 9, 2012
    Publication date: July 5, 2012
    Applicant: TOKYO ELECTRON LIMITED
    Inventors: Mikio Suzuki, Takashi Nishimori, Hideki Yuasa
  • Publication number: 20120131862
    Abstract: A double floor structure capable of being adapted to the conditions of construction and the needs of users at low cost. A double floor structure (K) provided with support legs (1) which are provided on a lower floor and rows of beams which form an upper floor. The support legs (1) are each provided with an upper member (14) which supports a beam from the lower side, an intermediate member (13) which supports the upper member (14) from the lower side, and a lower member (12) which supports the intermediate member (13) from the lower side. The upper member (14), the intermediate member (13), and the lower member (12) consist of metallic, extruded shape material and are disposed in such a manner that the direction of the extrusion is aligned with the top-bottom direction.
    Type: Application
    Filed: August 3, 2010
    Publication date: May 31, 2012
    Applicants: NIPPON LIGHT METAL COMPANY, LTD., NTT FACILITIES, INC., NIKKEIKIN ALUMINIUM CORE TECHNOLOGY COMPANY LTD.
    Inventors: Yakobu Hashimoto, Jun Kondo, Hiroshi Dohi, Mikio Suzuki, Daisuke Chiba, Masahiro Nammoku, Yasutomo Akashi, Kiyofumi Tanaka, Hideyuki Kaji, Takeshi Ono, Yoshiharu Konishi
  • Patent number: 8136993
    Abstract: A cylindrical sliding bearing having a cylindrical steel back metal, and a bearing alloy layer, serving as a sliding surface, on the inside of the steel back metal is provided. The cylindrical sliding bearing further have a coat layer of Bi or a Bi-based alloy formed on the outer back surface of the steel back metal. Preferably, the coat layer is made from the Bi-based alloy of 1 to 30 mass % of one or more kinds of Sn, Pb, In, Ag and Cu; and the balance being Bi and inevitable impurities.
    Type: Grant
    Filed: March 20, 2009
    Date of Patent: March 20, 2012
    Assignee: Daido Metal Co., Ltd.
    Inventors: Mikio Suzuki, Yuto Otsuki, Hideo Nakamura
  • Publication number: 20110305410
    Abstract: A half bearing for a crankshaft of an internal combustion engine, which includes crush relieves at both circumferential end portions of an inner circumferential surface of the half bearing, is provided. The half bearing further includes an axial groove at least at a position adjacent to a crush relief on a rear side of a relative rotation direction of the crankshaft, and adjacent to the inner circumferential surface of the half bearing. The axial groove extends along an entire width of the inner circumferential surface of the half bearing.
    Type: Application
    Filed: June 14, 2011
    Publication date: December 15, 2011
    Applicant: DAIDO METAL COMPANY LTD.
    Inventors: Yuto Otsuki, Mikio Suzuki
  • Publication number: 20100261880
    Abstract: The invention provides a brain-specific gene useful in treating Alzheimer's disease, for instance, which comprises a nucleotide sequence cording for the amino acid sequence shown in SQ ID NO:1 and fragments thereof; an expression vector comprising the gene; a host cell comprising the expression vector; an expression product of the gene; an antibody against the product; a therapeutic and prophylactic composition for neurodegenerative disease; and the like.
    Type: Application
    Filed: September 30, 2008
    Publication date: October 14, 2010
    Applicant: OTSUKA PHARMACEUTICAL CO., LTD.
    Inventors: MASATO HORIE, KEIICHI OKUTOMI, YOSHIHIRO TANIGUCHI, MIKIO SUZUKI, YUTAKA OHBUCHI