Abstract: A supply path of hydrogen gas in a fuel cell system connects a plurality of fuel cell stacks in series with each other. The supply path includes a downstream supply path configured to supply the fuel cell stack on a downstream side with exhaust gas of hydrogen gas supplied to the fuel cell stack on an upstream side, without circulating the exhaust gas to the fuel cell stack on the upstream side, and a circulating path configured to circulate exhaust gas from the fuel cell stack on the downstream side to the fuel cell stack on the downstream side.

Abstract: It is a power source in which a plurality of fuel cell systems and one boost converter are connected in series and output power according to the required power. Among the plurality of fuel cell systems, the first fuel cell system generates electricity using a power command obtained by dividing the required power by the number of the plurality of fuel cell systems, and the other fuel cell systems except the first fuel cell system Electricity is generated using a current command having the same current value as the output current of the first fuel cell system.

Abstract: A substrate processing apparatus includes a unit block including multiple liquid film forming devices each configured to form a liquid film on a top surface of a substrate, and a drying device configured to replace the liquid film with a supercritical fluid to dry the substrate; and a transfer block provided between the multiple liquid film forming devices and the drying device. The transfer block includes a transfer device configured to transfer the substrate between the multiple liquid film forming devices and the drying device, and a length of a transfer path of the substrate is equal between each of the multiple liquid film forming devices and the drying device.

Abstract: A substrate processing apparatus includes a drying unit configured to replace a liquid film formed on an upper surface of a substrate in a horizontal state with a supercritical fluid to dry the substrate, wherein the drying unit includes a pressure container provided with a drying chamber formed therein to dry the substrate, and a lid configured to close an opening of the pressure container, and the substrate processing apparatus further comprises a support member configured to support the lid so as to be movable in both a first direction parallel to the opening and a second direction opposite to the first direction.