Patents by Inventor Mirela G. Bancu

Mirela G. Bancu has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • METHODS FOR FABRICATING SILICON MEMS GYROSCOPES WITH UPPER AND LOWER SENSE PLATES
    Publication number: 20230076161
    Abstract: Methods for fabricating MEMS tuning fork gyroscope sensor system using silicon wafers. This provides the possibly to avoid glass. The sense plates can be formed in a device layer of a silicon on insulator (SOI) wafer or in a deposited polysilicon layer in a few examples.
    Type: Application
    Filed: November 3, 2022
    Publication date: March 9, 2023
    Inventors: Eugene H. Cook, Jonathan J. Bernstein, Mirela G. Bancu, Marc Steven Weinberg, William Sawyer
  • Methods for fabricating silicon MEMS gyroscopes with upper and lower sense plates
    Patent number: 11530917
    Abstract: Methods for fabricating MEMS tuning fork gyroscope sensor system using silicon wafers. This provides the possibly to avoid glass. The sense plates can be formed in a device layer of a silicon on insulator (SOI) wafer or in a deposited polysilicon layer in a few examples.
    Type: Grant
    Filed: September 24, 2019
    Date of Patent: December 20, 2022
    Assignee: The Charles Stark Draper Laboratory, Inc.
    Inventors: Eugene H. Cook, Jonathan J. Bernstein, Mirela G. Bancu, Marc Steven Weinberg, William Sawyer
  • METHODS FOR FABRICATING SILICON MEMS GYROSCOPES WITH UPPER AND LOWER SENSE PLATES
    Publication number: 20200096336
    Abstract: Methods for fabricating MEMS tuning fork gyroscope sensor system using silicon wafers. This provides the possibly to avoid glass. The sense plates can be formed in a device layer of a silicon on insulator (SOI) wafer or in a deposited polysilicon layer in a few examples.
    Type: Application
    Filed: September 24, 2019
    Publication date: March 26, 2020
    Inventors: Eugene H. Cook, Jonathan J. Bernstein, Mirela G. Bancu, Marc Steven Weinberg, William Sawyer
  • High performance sensors and methods for forming the same
    Patent number: 8187902
    Abstract: A sensor includes a proof mass suspended by a suspension beam, the suspension beam having a thickness less than a thickness of the proof mass.
    Type: Grant
    Filed: July 9, 2008
    Date of Patent: May 29, 2012
    Assignee: The Charles Stark Draper Laboratory, Inc.
    Inventors: Marc S. Weinberg, Mirela G. Bancu, James A. Bickford, Jonathan J. Bernstein, Richard Elliott
  • High Performance Sensors and Methods for Forming the Same
    Publication number: 20100005884
    Abstract: A sensor includes a proof mass suspended by a suspension beam, the suspension beam having a thickness less than a thickness of the proof mass.
    Type: Application
    Filed: July 9, 2008
    Publication date: January 14, 2010
    Inventors: Marc S. Weinberg, Mirela G. Bancu, James A. Bickford, Jonathan J. Bernstein, Richard Elliott