Patents by Inventor Mirko Lohmann

Mirko Lohmann has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Method and apparatus for the treatment of objects, in particular for the cleaning of semiconductor elements
    Patent number: 8088227
    Abstract: The invention relates to the continuous cleaning of objects, in particular of semiconductor elements, using ultrasound, wherein the objects to be cleaned are arranged within a liquid. Furthermore, the present invention relates to an apparatus for carrying out the method according to the invention. A basic idea of the invention is that the surface of an object to be cleaned (2) in a tank (5) filled with liquid passes through at least one oscillation maximum that is emitted by at least one sound source (8a) being present in the tank (5). According to one embodiment, the sound source fields (8) that are positioned within the tank (5) are arranged inclined with respect to the transport direction (4).
    Type: Grant
    Filed: March 15, 2006
    Date of Patent: January 3, 2012
    Assignee: RENA GmbH
    Inventors: Norbert Bürger, Mirko Löhmann, Richard Herter
  • Method and Apparatus for the Treatment of Objects, in Particular for the Cleaning of Semiconductor Elements
    Publication number: 20080276959
    Abstract: The invention relates to the continuous cleaning of objects, in particular of semiconductor elements, using ultrasound, wherein the objects to be cleaned are arranged within a liquid. Furthermore, the present invention relates to an apparatus for carrying out the method according to the invention. A basic idea of the invention is that the surface of an object to be cleaned (2) in a tank (5) filled with liquid passes through at least one oscillation maximum that is emitted by at least one sound source (8a) being present in the tank (5). According to one embodiment, the sound source fields (8) that are positioned within the tank (5) are arranged inclined with respect to the transport direction (4).
    Type: Application
    Filed: March 15, 2006
    Publication date: November 13, 2008
    Inventors: Norbet Burger, Mirko Lohmann, Richard Herter