Patents by Inventor Mitsuhito Mase

Mitsuhito Mase has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 11942506
    Abstract: The photosensitive region includes a first impurity region and a second impurity region having a higher impurity concentration than that of the first impurity region. The photosensitive region includes one end positioned away from the transfer section in the second direction and another end positioned closer to the transfer section in the second direction. A shape of the second impurity region in plan view is line-symmetric with respect to a center line of the photosensitive region along the second direction. A width of the second impurity region in the first direction increases in a transfer direction from the one end to the other end. An increase rate of the width of the second impurity region in each of sections, obtained by dividing the photosensitive region into n sections in the second direction, becomes gradually higher in the transfer direction. Here, n is an integer of two or more.
    Type: Grant
    Filed: July 19, 2018
    Date of Patent: March 26, 2024
    Assignee: HAMAMATSU PHOTONICS K.K.
    Inventors: Shin-ichiro Takagi, Mitsuhito Mase, Jun Hiramitsu, Yasuhito Yoneta, Masaharu Muramatsu
  • Publication number: 20230387149
    Abstract: Provided is an optical sensor including: a charge generation region that generates charges in response to incident light; a charge collection region to which charges generated in the charge generation region are transferred; and at least one transfer gate electrode disposed on a transfer region between the charge generation region and the charge collection region. The charge generation region includes an avalanche multiplication region that causes avalanche multiplication, and a gradient potential energy formation region that forms gradient potential energy that is gradient so that potential energy becomes lower as approaching the transfer region in the charge generation region.
    Type: Application
    Filed: October 8, 2021
    Publication date: November 30, 2023
    Applicant: HAMAMATSU PHOTONICS K.K.
    Inventors: Mitsuhito MASE, Ryo TAKIGUCHI, Hiroaki ISHII, Masaru NAKANO, Shin-ichiro TAKAGI
  • Publication number: 20230283866
    Abstract: An imaging device includes a first optical sensor, and a second optical sensor disposed on the side opposite to the light incidence side with respect to the first optical sensor and bonded to the first optical sensor. The first optical sensor includes a plurality of first pixels disposed two-dimensionally. The second optical sensor includes a plurality of second pixels disposed two-dimensionally. Each of the plurality of first pixels includes an embedded photodiode that generates charge in response to incidence of light in a first wavelength band. Each of the plurality of second pixels includes a charge generation region that generates charge in response to incidence of the light in a second wavelength band, a charge collection region to which the charge is transferred, a photogate electrode that attracts the charge, and a transfer gate electrode that transfers the charge to the charge collection region.
    Type: Application
    Filed: July 7, 2021
    Publication date: September 7, 2023
    Applicant: HAMAMATSU PHOTONICS K.K.
    Inventor: Mitsuhito MASE
  • Publication number: 20230236296
    Abstract: A distance image acquisition device includes a distance measurement sensor that detects a measurement light by transferring charges generated in a charge generation region in response to incidence of a measurement light reflected by a target object, to a charge accumulation region by using a transfer gate electrode. The charge generation region includes an avalanche multiplication region that causes avalanche multiplication. The control unit divides an entire distance range of a measurement target into the plurality of sections, controls the distance measurement sensor so as to perform measurements about a plurality of sections while varying a time difference between an emission timing of the measurement light by the light source and a transferring timing of the charges by the transfer gate electrode among the plurality of sections, and generates a distance image of the entire distance range based on the results of the measurements about the plurality of sections.
    Type: Application
    Filed: May 20, 2021
    Publication date: July 27, 2023
    Applicant: HAMAMATSU PHOTONICS K.K.
    Inventors: Mitsuhito MASE, Jun HIRAMITSU, Akihiro SHIMADA
  • Publication number: 20230223418
    Abstract: An optical sensor includes an avalanche multiplication region including a first multiplication region having a first conductive type and a second multiplication region having a second conductive type, each of the first multiplication region and the second multiplication region being formed in a layer shape, a charge collection region having the second conductive type disposed on a first side of the second multiplication region, and a first conductive region having the first conductive type disposed on the first side of the second multiplication region. The second multiplication region has a first portion overlapping the charge collection region in a thickness direction of the first multiplication region and the second multiplication region and a second portion overlapping the first conductive region in the thickness direction. A concentration of impurities in the first portion is higher than a concentration of impurities in the second portion.
    Type: Application
    Filed: January 12, 2021
    Publication date: July 13, 2023
    Applicant: HAMAMATSU PHOTONICS K.K.
    Inventors: Jun HIRAMITSU, Mitsuhito MASE, Akihiro SHIMADA, Hiroaki ISHII, Toshinori ITO, Yuma TANAKA
  • Publication number: 20230171522
    Abstract: A light detection device includes a controller that controls electric potentials of a charge collection electrode and a transfer gate electrode so that potential energy in a region immediately below the charge collection electrode is a first level, and potential energy in a region immediately below the transfer gate electrode is higher than the potential energy in the region immediately below the charge collection electrode in a first period, and so that the potential energy in the region immediately below the charge collection electrode is a second level higher than the first level, and the potential energy in the region immediately below the transfer gate electrode is lower than the potential energy in the region immediately below the charge collection electrode in a second period after the first period.
    Type: Application
    Filed: March 17, 2021
    Publication date: June 1, 2023
    Applicant: HAMAMATSU PHOTONICS K.K.
    Inventors: Mitsuhito MASE, Masaru NAKANO, Jun HIRAMITSU, Akihiro SHIMADA, Hiroaki ISHII, Toshinori ITO, Yuma TANAKA
  • Publication number: 20230107985
    Abstract: Provided is a photosensor including a light receiving part generating electric charge according to incident light, a charge transfer gate configured to transfer the electric charge generated in the light receiving part, and a signal generation unit configured to generate a charge transfer signal applied to the charge transfer gate, in which the signal generation unit generates the charge transfer signal so that the charge transfer gate is brought into a charge transfer state in a first time range of a first period belonging to an n-th (n is an integer of 1 or more) frame and the charge transfer gate is brought into a charge transfer state in a second time range of a second period belonging to an m-th (m is an integer of 1 or more different from n) frame.
    Type: Application
    Filed: November 18, 2020
    Publication date: April 6, 2023
    Applicant: HAMAMATSU PHOTONICS K.K.
    Inventors: Mitsuhito MASE, Hiroo YAMAMOTO, Harumichi MORI
  • Publication number: 20230083427
    Abstract: An optical coherence tomography device includes a light source, a mirror device including a movable mirror configured to perform a reciprocating operation, a support part configured to support an object, a beam splitter configured to generate interfering light, an optical sensor configured to detect the interfering light, and a control unit. Each of the plurality of pixels included in the optical sensor includes a light receiving part, a plurality of transfer gates, and a discharge gate. The control unit applies an electric signal to the optical sensor so that the plurality of transfer gates are sequentially brought into a charge transfer state in at least three time ranges separated from each other and the discharge gate is brought into a charge discharge state in a time range other than the at least three time ranges for each period of an interferogram signal of the interfering light.
    Type: Application
    Filed: January 21, 2021
    Publication date: March 16, 2023
    Applicant: HAMAMATSU PHOTONICS K.K.
    Inventors: Mitsuhito MASE, Masatoshi FUJIMOTO, Tomofumi SUZUKI
  • Publication number: 20230048727
    Abstract: In a ranging image sensor, each pixel includes an avalanche multiplication region, a charge distribution region, a pair of first charge transfer regions, a pair of second charge transfer regions, a well region, a photogate electrode, a pair of first transfer gate electrodes, and a pair of second transfer gate electrodes. The first multiplication region of the avalanche multiplication region is formed so as to overlap the charge distribution region and so as not to overlap the well region in the Z direction. The second multiplication region of the avalanche multiplication region is formed so as to overlap the charge distribution region and the well region in the Z direction.
    Type: Application
    Filed: December 7, 2020
    Publication date: February 16, 2023
    Applicant: HAMAMATSU PHOTONICS K.K.
    Inventors: Mitsuhito MASE, Jun HIRAMITSU, Akihiro SHIMADA, Hiroaki ISHII, Toshinori ITO, Yuma TANAKA
  • Publication number: 20230035346
    Abstract: In a light detection device, a control unit performs a first charge transfer process for transferring charge generated in a charge generation region to a charge storage region by applying an electric potential to a transfer gate electrode so that a potential energy of a region immediately below the transfer gate electrode is lower than a potential energy of the charge generation region and a first read process for reading an amount of charge stored in the charge storage region. In the first charge transfer process, the control unit applies an electric potential to an overflow gate electrode so that a potential energy of a region immediately below the overflow gate electrode is lower than the potential energy of the charge generation region.
    Type: Application
    Filed: November 16, 2020
    Publication date: February 2, 2023
    Applicant: HAMAMATSU PHOTONICS K.K.
    Inventors: Akihiro SHIMADA, Mitsuhito MASE, Jun HIRAMITSU
  • Publication number: 20230022384
    Abstract: A multiplying image sensor includes a semiconductor layer having a first surface and a second surface and a wiring layer provided on the second surface. The semiconductor layer includes a plurality of pixels arranged along the first surface. Each of the plurality of pixels includes a first semiconductor region, a second semiconductor region formed on the second surface side with respect to at least a part of the first semiconductor region and divided for each of the plurality of pixels, and a well region formed in the second semiconductor region so as to be separated from the first semiconductor region and forming a part of a pixel circuit. At least a part of the first semiconductor region and at least a part of the second semiconductor region form an avalanche multiplication region.
    Type: Application
    Filed: November 11, 2020
    Publication date: January 26, 2023
    Applicant: HAMAMATSU PHOTONICS K.K.
    Inventors: Mitsuhito MASE, Jun HIRAMITSU, Hiroaki ISHII, Yuma TANAKA, Toshinori ITO
  • Publication number: 20230027464
    Abstract: In a distance measurement device, a control unit performs a charge distribution process in which in a first period, charge generated in a charge generation region is transferred to a first charge storage region and, in a second period, the charge generated in the charge generation region is transferred to a second charge storage region. The control unit applies an electric potential to a first overflow gate electrode so that a potential energy of a region immediately below the first overflow gate electrode is lower than a potential energy of the charge generation region in the first period, and applies an electric potential to a second overflow gate electrode so that a potential energy of a region immediately below the second overflow gate electrode is lower than a potential energy of the charge generation region in the second period.
    Type: Application
    Filed: November 16, 2020
    Publication date: January 26, 2023
    Applicant: HAMAMATSU PHOTONICS K.K.
    Inventors: Akihiro SHIMADA, Mitsuhito MASE, Jun HIRAMITSU
  • Publication number: 20230026004
    Abstract: A ranging image sensor includes a semiconductor layer and an electrode layer. The semiconductor layer and the electrode layer form a plurality of pixels. Each of the plurality of pixels includes an avalanche multiplication region, a charge distribution region, a first charge transfer region, and a second charge transfer region in the semiconductor layer. Each of the plurality of pixels includes a photogate electrode, a first transfer gate electrode, and a second transfer gate electrode in the electrode layer. The avalanche multiplication region is continuous over the plurality of pixels or reaches a trench formed in the semiconductor layer so as to separate the plurality of pixels from each other.
    Type: Application
    Filed: December 7, 2020
    Publication date: January 26, 2023
    Applicant: HAMAMATSU PHOTONICS K.K.
    Inventors: Mitsuhito MASE, Jun HIRAMITSU, Akihiro SHIMADA, Hiroaki ISHII, Toshinori ITO, Yuma TANAKA
  • Patent number: 11493337
    Abstract: The present embodiment relates to a distance sensor configured to inject an equal amount of current into storage nodes coupled, respectively, to charge collection regions where charges of a photosensitive region is distributed by driving of first and second transfer electrodes and obtain a distance to an object based on difference information on charge amounts of the respective storage nodes. Saturation caused by disturbance light of each storage node is avoided by injecting the equal amount of current to each storage node, and the difference information on the charge amounts of the respective storage nodes, which is not easily affected by the current injection, is obtained by driving the first and second transfer electrodes according to the plurality of frames representing the electrode drive pattern, respectively.
    Type: Grant
    Filed: April 19, 2017
    Date of Patent: November 8, 2022
    Assignee: HAMAMATSU PHOTONICS K.K.
    Inventors: Akihiro Shimada, Mitsuhito Mase, Jun Hiramitsu, Takashi Suzuki
  • Patent number: 11450705
    Abstract: A light detection element includes a semiconductor substrate, a light absorbing layer of a first conductivity type formed on the semiconductor substrate, a cap layer of a first conductivity type formed on the light absorbing layer, and a semiconductor region of a second conductivity type formed within the cap layer and forming a pn junction with the cap layer. A depletion layer formed around the semiconductor region does not reach the light absorbing layer in a case where a reverse bias is not applied to the pn junction, and exceeds a position amounting to 50% of a thickness of the light absorbing layer from the cap layer side in a case where a reverse bias of 20 V is applied to the pn junction.
    Type: Grant
    Filed: January 30, 2020
    Date of Patent: September 20, 2022
    Assignee: HAMAMATSU PHOTONICS K.K.
    Inventors: Mitsuhito Mase, Keiki Taguchi, Hajime Ishihara, Hiroo Yamamoto, Akihiro Shimada
  • Patent number: 11215698
    Abstract: A range sensor includes a silicon substrate and a transfer electrode. The silicon substrate includes a first principal surface and a second principal surface opposing each other. The silicon substrate is provided with a charge generation region configured to generate a charge in response to incident light and a charge collection region configured to collect charges from the charge generation region, on the first principal surface side. The transfer electrode is disposed between the charge generation region and the charge collection region on the first principal surface. A region of the second principal surface corresponding at least to the charge generation region is formed with a plurality of protrusions. The plurality of protrusions includes a slope inclined with respect to a thickness direction of the silicon substrate. A (111) plane of the silicon substrate is exposed as the slope at the protrusion. A height of the protrusion is 200 nm or more.
    Type: Grant
    Filed: May 30, 2017
    Date of Patent: January 4, 2022
    Assignee: HAMAMATSU PHOTONICS K.K.
    Inventors: Mitsuhito Mase, Jun Hiramitsu, Akihiro Shimada
  • Patent number: 11194026
    Abstract: A light detection device includes a first photodiode, a second photodiode connected in series to the first photodiode, a first light source configured to output first pulsed light to which the first photodiode is sensitive, and a signal output unit configured to output a current as a detection signal, the current that flow through the second photodiode.
    Type: Grant
    Filed: April 13, 2020
    Date of Patent: December 7, 2021
    Assignee: HAMAMATSU PHOTONICS K.K.
    Inventors: Mitsuhito Mase, Keiki Taguchi, Hajime Ishihara, Hiroo Yamamoto, Akihiro Shimada
  • Patent number: 11156700
    Abstract: The present embodiment relates to a distance sensor that reduces a difference in amounts of current injected into each of plural charge collection regions prepared for one photosensitive region in order to avoid saturation caused by disturbance light. A current injection circuit injecting current into each charge collection region includes a voltage generation circuit generating a control voltage for adjustment of the injected current amount, and the voltage generation circuit generates the control voltage corresponding to a large amount of charge between the charge amounts of storage nodes coupled, respectively, to the charge collection regions. Meanwhile, a cascode device is disposed between a transistor configured to adjust the amount of current according to the control voltage and the storage node, and a potential of a current output end of the transistor and a potential of the storage node are separated.
    Type: Grant
    Filed: April 19, 2017
    Date of Patent: October 26, 2021
    Assignee: HAMAMATSU PHOTONICS K.K.
    Inventors: Akihiro Shimada, Mitsuhito Mase, Jun Hiramitsu, Takashi Suzuki
  • Publication number: 20210318417
    Abstract: A light detection device includes a first photodiode, a second photodiode connected in series to the first photodiode, a first light source configured to output first pulsed light to which the first photodiode is sensitive, and a signal output unit configured to output a current as a detection signal, the current that flow through the second photodiode.
    Type: Application
    Filed: April 13, 2020
    Publication date: October 14, 2021
    Applicant: HAMAMATSU PHOTONICS K.K.
    Inventors: Mitsuhito MASE, Keiki TAGUCHI, Hajime ISHIHARA, Hiroo YAMAMOTO, Akihiro SHIMADA
  • Patent number: 11054522
    Abstract: In accordance with an irradiation position of pulsed light, a selecting unit outputs a first transfer signal to a first transfer electrodes and outputs a second transfer signal to a second transfer electrodes, to allow signal charges to flow into first and second signal charge-collecting regions of a pixel corresponding to the irradiation position, and outputs a third transfer signal to a third transfer electrodes to allow unnecessary charges to flow into an unnecessary charge-discharging regions of a pixel other than the pixel corresponding to the irradiation position. An arithmetic unit reads out signals corresponding to respective quantities of signal charges collected in the first and second signal charge-collecting regions of the pixel selected by the selecting unit, and calculates a distance to an object based on a ratio between a quantity of signal charges collected in the first signal charge-collecting regions and a quantity of signal charges collected in the second signal charge-collecting regions.
    Type: Grant
    Filed: May 28, 2015
    Date of Patent: July 6, 2021
    Assignee: HAMAMATSU PHOTONICS K.K.
    Inventors: Mitsuhito Mase, Jun Hiramitsu, Akihiro Shimada