Patents by Inventor Mitsutoshi Ochiai

Mitsutoshi Ochiai has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 10727100
    Abstract: A load port provided adjacent to a wafer transport chamber for taking in and out a wafer W between the wafer transport chamber and a FOUP, includes a plate-shaped part that constitutes a part of a wall of the wafer transport chamber, and has an opening for opening the wafer transport chamber; a door part for opening and closing the opening; a mounting table that is configured to mount a wafer storage container so as to oppose a lid part for opening and closing an internal space to the door part, and to move to and from the plate-shaped part; and an elastic part that is provided on the mounting table side of the plate-shaped part along the peripheral edge of the opening, wherein the elastic part elastically contacts the periphery of the lid part in the wafer storage container by moving the mounting table toward the plate-shaped part.
    Type: Grant
    Filed: April 25, 2019
    Date of Patent: July 28, 2020
    Assignee: SINFONIA TECHNOLOGY CO., LTD.
    Inventors: Mitsutoshi Ochiai, Takaaki Nakano
  • Publication number: 20190252228
    Abstract: A load port provided adjacent to a wafer transport chamber for taking in and out a wafer W between the wafer transport chamber and a FOUP, includes a plate-shaped part that constitutes a part of a wall of the wafer transport chamber, and has an opening for opening the wafer transport chamber; a door part for opening and closing the opening; a mounting table that is configured to mount a wafer storage container so as to oppose a lid part for opening and closing an internal space to the door part, and to move to and from the plate-shaped part; and an elastic part that is provided on the mounting table side of the plate-shaped part along the peripheral edge of the opening, wherein the elastic part elastically contacts the periphery of the lid part in the wafer storage container by moving the mounting table toward the plate-shaped part.
    Type: Application
    Filed: April 25, 2019
    Publication date: August 15, 2019
    Applicant: SINFONIA TECHNOLOGY CO., LTD.
    Inventors: Mitsutoshi Ochiai, Takaaki Nakano
  • Patent number: 10340168
    Abstract: A load port provided adjacent to a wafer transport chamber for taking in and out a wafer W between the wafer transport chamber and a FOUP, includes a plate-shaped part that constitutes a part of a wall of the wafer transport chamber, and has an opening for opening the wafer transport chamber; a door part for opening and closing the opening; a mounting table that is configured to mount a wafer storage container so as to oppose a lid part for opening and closing an internal space to the door part, and to move to and from the plate-shaped part; and an elastic part that is provided on the mounting table side of the plate-shaped part along the peripheral edge of the opening, wherein the elastic part elastically contacts the periphery of the lid part in the wafer storage container by moving the mounting table toward the plate-shaped part.
    Type: Grant
    Filed: January 28, 2015
    Date of Patent: July 2, 2019
    Assignee: SINFONIA TECHNOLOGY CO., LTD.
    Inventors: Mitsutoshi Ochiai, Takaaki Nakano
  • Publication number: 20190145641
    Abstract: There is provided a method for manufacturing semiconductor. The method includes providing a semiconductor manufacturing apparatus and providing an EFEM. The EFEM includes a shield gas curtain apparatus 6 that forms a gas curtain capable of shielding an opening 23 when an internal space 5S of a purge container 5, in which the humidity is reduced to a predetermined value by means of a bottom purge apparatus 25 provided in a load port 2, is brought into communication with an internal space 3S of a wafer transport chamber 3, the gas curtain being formed of a shield curtain gas blown immediately downward from a location near the opening 23 of the load port 2 and being closer to the wafer transport chamber 3 than the opening 23 at a higher height than an upper edge of the opening 23.
    Type: Application
    Filed: January 10, 2019
    Publication date: May 16, 2019
    Applicant: SINFONIA TECHNOLOGY CO., LTD.
    Inventors: Yasushi Taniyama, Mitsutoshi Ochiai, Mitsuo Natsume, Atsushi Suzuki
  • Patent number: 9685359
    Abstract: A load port device comprises a link mechanism that has a main moving link whose one end is connected with a door holding member in a rotatable manner, a guide that bends and extends from a horizontal direction to a vertical direction and that guides one end of the main moving link, a main moving block with which the other end of the main moving link is connected in a rotatable manner and a door hoisting shaft that extends in the vertical direction and that moves the main moving block in the extending direction. The link mechanism allows the end of the main moving link to move from the horizontal direction to the vertical direction or from the vertical direction to the horizontal direction along the guide in a state that the other end of the main moving link moves to the vertical direction.
    Type: Grant
    Filed: March 6, 2014
    Date of Patent: June 20, 2017
    Assignee: SINFONIA TECHNOLOGY CO., LTD.
    Inventors: Manabu Funato, Mitsuo Natsume, Mitsutoshi Ochiai
  • Publication number: 20160260628
    Abstract: A door opening and closing apparatus shifts a door part holding a lid part of a storage container between a totally closed position where the inner space of the storage container body is sealed and a totally open position where the inner space of the storage container body is totally opened frontward, for putting in and taking out transfer target objects between the storage container and a transfer room. The door opening and closing apparatus puts the door part on standby at the predetermined halfway stop position every time a single access operation of a transfer robot to the storage container ends and until next access operation of the transfer robot to the storage container is performed.
    Type: Application
    Filed: March 1, 2016
    Publication date: September 8, 2016
    Applicant: SINFONIA TECHNOLOGY CO., LTD.
    Inventor: Mitsutoshi Ochiai
  • Patent number: 9239228
    Abstract: The left-right span between a light projection section 5a and a light receiving section 5b of a mapping sensor 5 having an optical axis L1 extending in a left-right horizontal direction is arranged to be narrower than the span of a front opening of a open cassette 12 which is a smaller one of differently-sized containers conveyed to a load port, and the mapping sensor is attached to a mapping device 4. A first protrusion sensor 6 having an optical axis L2 extending in the left-right horizontal direction is attached to the mapping device 4 to be separated from the mapping sensor 5 in a moving direction of the mapping sensor 5. Furthermore, a second protrusion sensor 7 having an optical axis extending in the up-down moving direction of the mapping sensor 5 is provided.
    Type: Grant
    Filed: April 17, 2015
    Date of Patent: January 19, 2016
    Assignee: SINFONIA TECHNOLOGY CO., LTD.
    Inventors: Mitsuo Natsume, Masahiro Osawa, Toshimitsu Morihana, Mitsutoshi Ochiai
  • Patent number: 9230844
    Abstract: A carrier transfer facilitating device does not require, for example, renewal (replacement) of an existing load port. Specifically, a carrier transfer facilitating device is provided for a load port on which a FOUP is placed. The carrier transfer facilitating device includes a temporary table on which the FOUP is temporarily placed, a carrier transferring carriage that travels above a carrier table of the load port and the temporary table in the horizontal direction and that lifts and transfers the FOUP between the carrier table and the temporary table, a supporting member that supports the temporary table and the carrier transferring carriage, and a controller that controls the movement of the carrier transferring carriage so as to avoid contact of the carrier transferring carriage with the FOUP while the FOUP is transferred between the hoop supporting table or the temporary table and an OHT.
    Type: Grant
    Filed: April 16, 2012
    Date of Patent: January 5, 2016
    Assignee: SINFONIA TECHNOLOGY CO., LTD.
    Inventors: Takumi Mizokawa, Mitsutoshi Ochiai
  • Publication number: 20150308812
    Abstract: The left-right span between a light projection section 5a and a light receiving section 5b of a mapping sensor 5 having an optical axis L1 extending in a left-right horizontal direction is arranged to be narrower than the span of a front opening of a open cassette 12 which is a smaller one of differently-sized containers conveyed to a load port, and the mapping sensor is attached to a mapping device 4. A first protrusion sensor 6 having an optical axis L2 extending in the left-right horizontal direction is attached to the mapping device 4 to be separated from the mapping sensor 5 in a moving direction of the mapping sensor 5. Furthermore, a second protrusion sensor 7 having an optical axis extending in the up-down moving direction of the mapping sensor 5 is provided.
    Type: Application
    Filed: April 17, 2015
    Publication date: October 29, 2015
    Applicant: SINFONIA TECHNOLOGY CO., LTD.
    Inventors: Mitsuo NATSUME, Masahiro Osawa, Toshimitsu Morihana, Mitsutoshi Ochiai
  • Publication number: 20150221538
    Abstract: A load port provided adjacent to a wafer transport chamber for taking in and out a wafer W between the wafer transport chamber and a FOUP, includes a plate-shaped part that constitutes a part of a wall of the wafer transport chamber, and has an opening for opening the wafer transport chamber; a door part for opening and closing the opening; a mounting table that is configured to mount a wafer storage container so as to oppose a lid part for opening and closing an internal space to the door part, and to move to and from the plate-shaped part; and an elastic part that is provided on the mounting table side of the plate-shaped part along the peripheral edge of the opening, wherein the elastic part elastically contacts the periphery of the lid part in the wafer storage container by moving the mounting table toward the plate-shaped part.
    Type: Application
    Filed: January 28, 2015
    Publication date: August 6, 2015
    Applicant: SINFONIA TECHNOLOGY CO., LTD.
    Inventors: Mitsutoshi Ochiai, Takaaki Nakano
  • Publication number: 20150024671
    Abstract: There is provided an EFEM that includes a shield gas curtain apparatus 6 that forms a gas curtain capable of shielding an opening 23 when an internal space 5S of a purge container 5, in which the humidity is reduced to a predetermined value by means of a bottom purge apparatus 25 provided in a load port 2, is brought into communication with an internal space 3S of a wafer transport chamber 3, the gas curtain being formed of a shield curtain gas blown immediately downward from a location near the opening 23 of the load port 2 and being closer to the wafer transport chamber 3 than the opening 23 at a higher height than an upper edge of the opening 23. The EFEM thus configured can prevent and suppress a rapid increase in the humidity in the purge container, in which the humidity in the interior space is reduced by performing the bottom purging, occurring immediately after a lid of the purge container is opened, so that quality degradation due to the moisture adhered on a wafer can be avoided.
    Type: Application
    Filed: May 5, 2014
    Publication date: January 22, 2015
    Applicant: SINFONIA TECHNOLOGY CO., LTD.
    Inventors: Yasushi Taniyama, Mitsutoshi Ochiai, Mitsuo Natsume, Atsushi Suzuki
  • Publication number: 20140338288
    Abstract: A load port device comprises a link mechanism that has a main moving link whose one end is connected with a door holding member in a rotatable manner, a guide that bends and extends from a horizontal direction to a vertical direction and that guides one end of the main moving link, a main moving block with which the other end of the main moving link is connected in a rotatable manner and a door hoisting shaft that extends in the vertical direction and that moves the main moving block in the extending direction. The link mechanism allows the end of the main moving link to move from the horizontal direction to the vertical direction or from the vertical direction to the horizontal direction along the guide in a state that the other end of the main moving link moves to the vertical direction.
    Type: Application
    Filed: March 6, 2014
    Publication date: November 20, 2014
    Applicant: SINFONIA TECHNOLOGY CO., LTD.
    Inventors: Manabu Funato, Mitsuo Natsume, Mitsutoshi Ochiai
  • Patent number: 8596312
    Abstract: Disclosed herein is an apparatus including: a table configured to receive a container that stores an object therein, the container including a bottom surface provided with a positioning groove and including a charging inlet through which a gas is charged into the container; a positioning pin projecting from the table and adapted to engage with the positioning groove of the container; a nozzle configured to charge the gas into the container through the charging inlet; and a drive unit configured to move the nozzle into contact with the charging inlet of the container after the positioning pin is engaged with the positioning groove.
    Type: Grant
    Filed: March 2, 2011
    Date of Patent: December 3, 2013
    Assignee: Sinfonia Technology Co., Ltd.
    Inventors: Mitsuo Natsume, Mitsutoshi Ochiai, Takumi Mizokawa
  • Patent number: 8348584
    Abstract: An OHT conveyer vehicle places a FOUP on first and second on platforms. A third platform can move to a position overlapping with the first and second platform by a moving device, and then to a position at which an upper surface of the third platform is above upper surfaces of the first and second platforms by an elevation device. Therefore, the FOUP is placed on the third platform. Subsequently, the third platform can move to a position overlapping with fourth and fifth platforms by the moving device, and then to a position at which the third platform is lower than the fourth and fifth platforms by the elevation device. Therefore, the FOUP is placed on the fourth and fifth platforms.
    Type: Grant
    Filed: November 6, 2007
    Date of Patent: January 8, 2013
    Assignee: Sinfonia Technology Co., Ltd.
    Inventors: Takumi Mizokawa, Mitsutoshi Ochiai
  • Publication number: 20120263562
    Abstract: A carrier transfer facilitating device does not require, for example, renewal (replacement) of an existing load port. Specifically, a carrier transfer facilitating device is provided for a load port on which a FOUP is placed. The carrier transfer facilitating device includes a temporary table on which the FOUP is temporarily placed, a carrier transferring carriage that travels above a carrier table of the load port and the temporary table in the horizontal direction and that lifts and transfers the FOUP between the carrier table and the temporary table, a supporting member that supports the temporary table and the carrier transferring carriage, and a controller that controls the movement of the carrier transferring carriage so as to avoid contact of the carrier transferring carriage with the FOUP while the FOUP is transferred between the hoop supporting table or the temporary table and an OHT.
    Type: Application
    Filed: April 16, 2012
    Publication date: October 18, 2012
    Applicant: SINFONIA TECHNOLOGY CO., LTD.
    Inventors: Takumi MIZOKAWA, Mitsutoshi OCHIAI
  • Publication number: 20110214778
    Abstract: Disclosed herein is an apparatus including: a table configured to receive a container that stores an object therein, the container including a bottom surface provided with a positioning groove and including a charging inlet through which a gas is charged into the container; a positioning pin projecting from the table and adapted to engage with the positioning groove of the container; a nozzle configured to charge the gas into the container through the charging inlet; and a drive unit configured to move the nozzle into contact with the charging inlet of the container after the positioning pin is engaged with the positioning groove.
    Type: Application
    Filed: March 2, 2011
    Publication date: September 8, 2011
    Applicant: SINFONIA TECHNOLOGY CO., LTD.
    Inventors: Mitsuo NATSUME, Mitsutoshi Ochiai, Takumi Mizokawa
  • Publication number: 20100068013
    Abstract: An OHT conveyer vehicle places a FOUP on first and second on platforms. A third platform can move to a position overlapping with the first and second platform by a moving device, and then to a position at which an upper surface of the third platform is above upper surfaces of the first and second platforms by an elevation device. Therefore, the FOUP is placed on the third platform. Subsequently, the third platform can move to a position overlapping with fourth and fifth platforms by the moving device, and then to a position at which the third platform is lower than the fourth and fifth platforms by the elevation device. Therefore, the FOUP is placed on the fourth and fifth platforms.
    Type: Application
    Filed: November 6, 2007
    Publication date: March 18, 2010
    Applicant: SINFONIA TECHNOLOGY CO., LTD
    Inventors: Takumi Mizokawa, Mitsutoshi Ochiai