Patents by Inventor Moritz von Rauch

Moritz von Rauch has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Three wafer semiconductor pressure-difference sensor and method for manufacture separating middle wafer into conducting diaphragm and web
    Patent number: 5623102
    Abstract: A pressure difference sensor having a semiconductor measuring diaphragm clamped between two bearing parts of insulating material thereby forming two inner chambers is described. Each of the bearing parts holds a flat electrode on its inside. An internal, pressurized, equalization chamber is provided in the clamping region of the pressure difference sensor and extends into both bearing parts around the inner chambers. The equalization chamber compensates for static pressure influences on the accuracy of the measurement of the sensor. A method for producing the sensor is also described.
    Type: Grant
    Filed: December 13, 1994
    Date of Patent: April 22, 1997
    Assignee: Siemens Aktiengesellschaft
    Inventors: Frank Arndt, Detlef Houdeau, Moritz von Rauch, Helmut Schlaak