Abstract: Disclosed is a ceramic heater and a ceramic plate for a ceramic heater, wherein, in order to prevent crack development at a ceramic surface around an electrode part and thereby improve durability, the end of a support part for an electrode rod is spaced apart from the ceramic surface opposite thereto, and a space for placing a filler mass is provided around the end of the support part for the electrode rod, whereby force or stress applied to the ceramic surface due to the expansion of the support part or by the filler mass is removed.

Abstract: Disclosed is a ceramic heater and a ceramic plate for a ceramic heater, wherein, in order to prevent crack development at a ceramic surface around an electrode part and thereby improve durability, the end of a support part for an electrode rod is spaced apart from the ceramic surface opposite thereto, and a space for placing a filler mass is provided around the end of the support part for the electrode rod, whereby force or stress applied to the ceramic surface due to the expansion of the support part or by the filler mass is removed.

Abstract: Disclosed is a water circulating device using sunlight which is installed in a park or a lake and circulates water to improve the quality of water. The water circulating device includes an expandable corrugated tube unit for introducing water within a water area to disperse the water to an upper stratum of the water area, a unit frame for supporting the expandable corrugated tube unit, a plurality of barge units for providing buoyancy to the expandable corrugated tube unit and the unit frame, an impeller for dispersing the water in the expandable corrugated tube unit to outside the expandable corrugated tube unit, and a torque provider for providing torque to the impeller.

Abstract: Disclosed is a water circulating device using sunlight which is installed in a park or a lake and circulates water to improve the quality of water. The water circulating device includes an expandable corrugated tube unit for introducing water within a water area to disperse the water to an upper stratum of the water area, a unit frame for supporting the expandable corrugated tube unit, a plurality of barge units for providing buoyancy to the expandable corrugated tube unit and the unit frame, an impeller for dispersing the water in the expandable corrugated tube unit to outside the expandable corrugated tube unit, and a torque provider for providing torque to the impeller.

Abstract: In a stage for supporting a substrate, a body, a base plate and a buffer are provided in the stage. The body on which the substrate is positioned includes a plate having a heating electrode for generating heat therein and a tube protruded from a bottom surface of the plate. The body is mounted on the base plate. The buffer is interposed between the base plate and the tube and has a thermal expansion ratio higher than that of the tube of the body and lower than that of the base plate. Accordingly, thermal expansion of the base plate may be absorbed by the buffer and may not have direct effect on the body. Therefore, the body may be prevented from being damaged due to the thermal expansion of the base plate.