Abstract: Provided are a silicon nitride film etching composition, a method of etching a silicon nitride film using the same, and a manufacturing method of a semiconductor device. Specifically, a silicon nitride film may be stably etched with a high selection ratio relative to a silicon oxide film, and when the composition is applied to an etching process at a high temperature and a semiconductor manufacturing process, not only no precipitate occurs but also anomalous growth in which the thickness of the silicon oxide film is rather increased does not occur, thereby minimizing defects and reliability reduction.

Abstract: A cleaning composition for removing post-etch or post-ash residues from a semiconductor substrate, and a cleaning method using the same are disclosed. The cleaning composition can comprise water; a fluorine compound; an alkanolamine compound; and a corrosion inhibitor. The corrosion inhibitor is a mixture of a first corrosion inhibitor and a second corrosion inhibitor. When using the cleaning composition, it is possible to efficiently remove the residues of various aspects existing on a surface of the substrate or the semiconductor device without damage to a substrate or a semiconductor device including various metal layers, insulating layers, etc. Accordingly, when a highly integrated and miniaturized semiconductor device is manufactured, it may be advantageously applied to the removal of residues generated on the surface of the substrate or the semiconductor device.

Abstract: A controller may control a memory device including memory blocks. The controller may include a processor configured to generate a command queue in response to a write command, a wear level management block configured to check a wear level of each memory block based on an erase/program pulse count variation, and manage the memory blocks such that each memory block belong to an SLC memory block group or an MLC memory block group, and a memory device control circuit configured to control the memory device to perform a write operation in response to the command queue. The memory device control circuit may select a first memory block belong to the SLC memory block group when the write operation is an operation for important data, and select a second memory block belong to the MLC memory block group when the write operation is an operation for normal data.

Abstract: A controller may control a memory device including memory blocks. The controller may include a processor configured to generate a command queue in response to a write command, a wear level management block configured to check a wear level of each memory block based on an erase/program pulse count variation, and manage the memory blocks such that each memory block belong to an SLC memory block group or an MLC memory block group, and a memory device control circuit configured to control the memory device to perform a write operation in response to the command queue. The memory device control circuit may select a first memory block belong to the SLC memory block group when the write operation is an operation for important data, and select a second memory block belong to the MLC memory block group when the write operation is an operation for normal data.

Abstract: The present invention provides an apparatus for molding gas hydrate pellets that includes: a pulverizer in which dehydrated gas hydrates are pulverized; a cooler having a rotating shaft provided therein, comprising a plurality of agitation blades installed along a height direction of the rotating shaft and configured to cool the gas hydrates to a predetermined temperature; a decompressor configured to decompress the cooled gas hydrates to a predetermined pressure; and a pellet molder configured to mold the decompressed gas hydrates to pellets.

Abstract: Disclosed are a device and a method for manufacturing a natural gas hydrate. Provided is the device for manufacturing a natural gas hydrate comprising: an ice slurry generation unit for preparing ice slurry having 13-20% of ice at normal pressure; a first pipe, having one end connected to the ice slurry generation unit for withdrawing the ice slurry from the ice slurry generation unit, and in which a high-pressure pump for increasing pressure on the ice slurry is interposed; a hydrate preparation reactor, which is connected to the other end of the first pipe so as to receive the pressurized ice slurry, and to which natural gas is supplied and mixed, for generating natural gas hydrate slurry; a second pipe, having one end connected to the hydrate preparation reactor, for withdrawing the natural gas hydrate slurry; and a dehydrating portion, which is connected to the other end of the second pipe, for dehydrating the natural gas hydrate slurry.

Abstract: The present invention provides an apparatus for storing gas hydrate pellets that includes: a storage tank having an inlet formed at a top portion thereof for having gas hydrate pellets injected therein; a transfer part formed at a lower portion of the storage tank so as to transfer the injected gas hydrate pellets to an outside of the storage tank; a rotating shaft vertically formed in the storage tank; a plurality of division plates coupled to the rotating shaft to partition an internal space of the storage tank, each having a bottom portion thereof formed above a top portion of the transfer part; an extension plate coupled to a lower portion of each of the division plates in such a way that the extension plate is movable up and down; and a guide formed at an upper portion of the transfer part and configured to guide the extension plate so as to allow the extension plate to be revolved by rotation of the rotating shaft without an interruption with the transfer part.

Abstract: The present invention provides an apparatus for regasifying gas hydrate pellets that includes: a cylinder; a piston coupled to an inside of the cylinder and configured to reciprocate up and down; a pellet providing part coupled to an one side of the cylinder in such a way that supply of gas hydrate pellets to the cylinder is adjusted by having one end thereof opened and closed by reciprocation of the piston; a pressure adjusting space having one end thereof coupled to a lower portion of the cylinder; a door formed in the pressure adjusting space and configured to define the pressure adjusting space; a transfer part having one end thereof coupled to the other end of the pressure adjusting space and configured to transfer the gas hydrate pellets; and a regasification part coupled to the other end of the transfer part and having heating water therein to allow regasification of the transferred gas hydrate pellets.

Abstract: Disclosed are a device and a method for manufacturing a natural gas hydrate. Provided is the device for manufacturing a natural gas hydrate comprising: an ice slurry generation unit for preparing ice slurry having 13-20% of ice at normal pressure; a first pipe, having one end connected to the ice slurry generation unit for withdrawing the ice slurry from the ice slurry generation unit, and in which a high-pressure pump for increasing pressure on the ice slurry is interposed; a hydrate preparation reactor, which is connected to the other end of the first pipe so as to receive the pressurized ice slurry, and to which natural gas is supplied and mixed, for generating natural gas hydrate slurry; a second pipe, having one end connected to the hydrate preparation reactor, for withdrawing the natural gas hydrate slurry; and a dehydrating portion, which is connected to the other end of the second pipe, for dehydrating the natural gas hydrate slurry.

Abstract: Disclosed is a device for revaporizing natural gas. Provided is a device for revaporizing natural gas hydrate pellets, comprising: a pellet charging portion for charging pellets which is formed with an upper valve and a lower valve so as to divide space for adjusting pressure; a storing portion, which communicates with the lower portion of the pellet charging portion, for receiving pellets when the lower valve is opened; a transfer screw, one end of which couples to the lower portion of the storing portion, for transferring the pellets in the storing portion; and a dissolving reaction tub, which is coupled to the other end of the transfer screw, receives pellets from the lower portion of the dissolving reaction tub, and which accommodates heating water.

Abstract: Disclosed are a device and a method for manufacturing a natural gas hydrate. Provided is the device for manufacturing a natural gas hydrate comprising: an ice slurry generation unit for preparing ice slurry having 13-20% of ice at normal pressure; a first pipe, having one end connected to the ice slurry generation unit for withdrawing the ice slurry from the ice slurry generation unit, and in which a high-pressure pump for increasing pressure on the ice slurry is interposed; a hydrate preparation reactor, which is connected to the other end of the first pipe so as to receive the pressurized ice slurry, and to which natural gas is supplied and mixed, for generating natural gas hydrate slurry; a second pipe, having one end connected to the hydrate preparation reactor, for withdrawing the natural gas hydrate slurry; and a dehydrating portion, which is connected to the other end of the second pipe, for dehydrating the natural gas hydrate slurry.

Abstract: The present invention provides an apparatus for regasifying gas hydrate pellets that includes: a cylinder; a piston coupled to an inside of the cylinder and configured to reciprocate up and down; a pellet providing part coupled to an one side of the cylinder in such a way that supply of gas hydrate pellets to the cylinder is adjusted by having one end thereof opened and closed by reciprocation of the piston; a pressure adjusting space having one end thereof coupled to a lower portion of the cylinder; a door formed in the pressure adjusting space and configured to define the pressure adjusting space; a transfer part having one end thereof coupled to the other end of the pressure adjusting space and configured to transfer the gas hydrate pellets; and a regasification part coupled to the other end of the transfer part and having heating water therein to allow regasification of the transferred gas hydrate pellets.

Abstract: The present invention provides an apparatus for storing gas hydrate pellets that includes: a storage tank having an inlet formed at a top portion thereof for having gas hydrate pellets injected therein; a transfer part formed at a lower portion of the storage tank so as to transfer the injected gas hydrate pellets to an outside of the storage tank; a rotating shaft vertically formed in the storage tank; a plurality of division plates coupled to the rotating shaft to partition an internal space of the storage tank, each having a bottom portion thereof formed above a top portion of the transfer part; an extension plate coupled to a lower portion of each of the division plates in such a way that the extension plate is movable up and down; and a guide formed at an upper portion of the transfer part and configured to guide the extension plate so as to allow the extension plate to be revolved by rotation of the rotating shaft without an interruption with the transfer part.

Abstract: The present invention provides an apparatus for molding gas hydrate pellets that includes: a pulverizer in which dehydrated gas hydrates are pulverized; a cooler having a rotating shaft provided therein, comprising a plurality of agitation blades installed along a height direction of the rotating shaft and configured to cool the gas hydrates to a predetermined temperature; a decompressor configured to decompress the cooled gas hydrates to a predetermined pressure; and a pellet molder configured to mold the decompressed gas hydrates to pellets.

Abstract: Disclosed are a device and a method for manufacturing a natural gas hydrate. Provided is the device for manufacturing a natural gas hydrate comprising: an ice slurry generation unit for preparing ice slurry having 13-20% of ice at normal pressure; a first pipe, having one end connected to the ice slurry generation unit for withdrawing the ice slurry from the ice slurry generation unit, and in which a high-pressure pump for increasing pressure on the ice slurry is interposed; a hydrate preparation reactor, which is connected to the other end of the first pipe so as to receive the pressurized ice slurry, and to which natural gas is supplied and mixed, for generating natural gas hydrate slurry; a second pipe, having one end connected to the hydrate preparation reactor, for withdrawing the natural gas hydrate slurry; and a dehydrating portion, which is connected to the other end of the second pipe, for dehydrating the natural gas hydrate slurry.

Abstract: Disclosed is a device for revaporizing natural gas. Provided is a device for revaporizing natural gas hydrate pellets, comprising: a pellet charging portion for charging pellets which is formed with an upper valve and a lower valve so as to divide space for adjusting pressure; a storing portion, which communicates with the lower portion of the pellet charging portion, for receiving pellets when the lower valve is opened; a transfer screw, one end of which couples to the lower portion of the storing portion, for transferring the pellets in the storing portion; and a dissolving reaction tub, which is coupled to the other end of the transfer screw, receives pellets from the lower portion of the dissolving reaction tub, and which accommodates heating water.