Patents by Inventor Naoya Aikawa

Naoya Aikawa has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20220155156
    Abstract: A temperature sensor includes a block body, a first thermocouple, and a second thermocouple. The first thermocouple includes a first strand, a second strand, a first insulator surrounding the first strand and the second strand, and a first metal sheath surrounding the first insulator. The second thermocouple includes a third strand, a fourth strand, a second insulator surrounding the third strand and the fourth strand, and a second metal sheath surrounding the second insulator. An end portion of each of the first thermocouple and the second thermocouple is buried in the block body.
    Type: Application
    Filed: February 1, 2022
    Publication date: May 19, 2022
    Inventors: Naoya KIDA, Arata TATSUMI, Kenji SEKIYA, Naoya AIKAWA, Masaya TAKANASHI
  • Publication number: 20220157579
    Abstract: Disclosed is a stage including a shaft, a first supporting plate over the shaft, a heater arranged in a trench formed in the first supporting plate, and a gas-supplying tube arranged in the shaft and configured to blow a gas to the first supporting plate. The first supporting plate may have a disk shape, and a cross section of the gas-supplying tube parallel to a surface of the first supporting plate may overlap a center of the disk shape. The first supporting plate may be configured to block the gas so that the gas is not released to a chamber in which the stage is arranged.
    Type: Application
    Filed: February 4, 2022
    Publication date: May 19, 2022
    Inventors: Naoya Kida, Arata Tatsumi, Kenji Sekiya, Naoya Aikawa, Masaya Takanashi
  • Publication number: 20220151031
    Abstract: A heater includes a folded heater wire, a first insulator provided on the heater wire, a metal sheath provided so as to be in contact with the first insulator, a first insulating member arranged parallel to a first end part of the heater wire taken out from a first end part of the metal sheath, a second insulating member arranged parallel to the first insulating member and parallel to a second end part of the heater wire taken out from the first end part of the metal sheath, a second insulator in contact with the first and the second insulating members and the metal sheath, and a lid member covering the first insulating member, the lid member being in contact with the metal sheath, the first and the second insulating members via the second insulator, and arranged parallel to the first and the second insulating members and the metal sheath.
    Type: Application
    Filed: January 24, 2022
    Publication date: May 12, 2022
    Inventors: Naoya KIDA, Arata TATSUMI, Kenji SEKIYA, Naoya AIKAWA, Masaya TAKANASHI
  • Publication number: 20210235550
    Abstract: A heater comprises a folded heater wire, a first insulator provided on the folded heater wire, a metal sheath in contact with a part of the first insulator, a first insulating member arranged in parallel to a part of a first end of the folded heater wire taken out from a first end of the metal sheath, a second insulating member arranged in parallel to a part of the first insulating member and parallel to a part of a second end of the folded heater wire taken out from the first end of the metal sheath, a third insulating member arranged in parallel to a part of the first insulating member and the second insulating member, and bundle the first insulating member and the second insulating member, and a cylindrical member arranged in parallel to a part of the metal sheath and the third insulating member.
    Type: Application
    Filed: April 16, 2021
    Publication date: July 29, 2021
    Inventors: Toshihiko HANAMACHI, Arata TATSUMI, Kenji SEKIYA, Naoya AIKAWA, Masaya TAKANASHI
  • Publication number: 20210217638
    Abstract: Disclosed is a stage including a first supporting plate, a second supporting plate under the first supporting plate, a shaft under the second supporting plate and overlapping with the first supporting plate and the second supporting plate, and at least one sheath heater passing through the second supporting plate. The at least one sheath heater is arranged so as to extend on a first surface and a second surface which are parallel to an upper surface of the second supporting plate and which are different in distance from the first supporting plate from each other.
    Type: Application
    Filed: March 31, 2021
    Publication date: July 15, 2021
    Inventors: Toshihiko HANAMACHI, Arata TATSUMI, Kenji SEKIYA, Naoya AIKAWA, Masaya TAKANASHI
  • Publication number: 20200043638
    Abstract: A heather unit including a small diameter sheath heater with improved reliability is provided. The heater unit includes a first substrate having a first joint surface and a second substrate having a second joint surface being joined together, a groove arranged on at least one of the first joint surface or the second joint surface, and a sheath heater arranged inside the groove. The sheath heater includes a metal sheath, a heating wire having a band shape, the heating wire arranged with a space within the metal sheath so as to rotate with respect to an axis direction of the metal sheath, an insulating material arranged in the space, and connection terminals arranged at one end of the metal sheath, the connection terminals electrically connected with both ends of the heating wire respectively.
    Type: Application
    Filed: October 10, 2019
    Publication date: February 6, 2020
    Inventors: Toshihiko HANAMACHI, Kenji SEKIYA, Go TAKAHARA, Naoya AIKAWA, Yuta KISARA, Arata TATSUMI
  • Patent number: 10435792
    Abstract: A laminate includes: a substrate; and a metallic coating that is formed from copper powder containing 0.002% to 0.020% by weight of phosphorus and having been subjected to reduction treatment, the metallic coating being deposited on the substrate.
    Type: Grant
    Filed: February 25, 2015
    Date of Patent: October 8, 2019
    Assignee: NHK Spring Co., Ltd.
    Inventors: Masaru Takimoto, Yuichiro Yamauchi, Satoshi Hirano, Naoya Aikawa
  • Publication number: 20190228953
    Abstract: Provided is a stage for precisely controlling a substrate temperature and a manufacturing method thereof. Alternatively, a film-forming apparatus or a film-processing apparatus having the stage is provided. The stage includes a base material and a heater layer over the base material. The heater layer has a first insulating film, a heater wire over the first insulating film, and a second insulating film over the heater wire. The heater wire includes more than one kind of metal selected from tungsten, nickel. chromium cobalt, and molybdenum.
    Type: Application
    Filed: March 28, 2019
    Publication date: July 25, 2019
    Inventors: Toshihiro TACHIKAWA, Naoya AIKAWA, Go TAKAHARA, Kohei SUZUKI, Hiroshi MITSUDA
  • Patent number: 10290529
    Abstract: A heater unit having high in-plane temperature uniformity is provided. A heater unit includes a first heater part, a second heater part controlled independently of the first heater part, a base arranged with a groove in a region between the first heater part and the second heater part, and a cover part arranged at an opening end of the groove and providing a closed space with the groove. In addition, an insulating layer covering the first heater part and the second heater part, and an electrostatic chuck attached to the base via the insulating layer may be further included. In addition, the closed space provided by the cover part and the groove may be a vacuum.
    Type: Grant
    Filed: April 9, 2018
    Date of Patent: May 14, 2019
    Assignee: NHK SPRING CO., LTD.
    Inventors: Toshihiko Hanamachi, Naoya Aikawa
  • Publication number: 20180315680
    Abstract: A laminate includes: an insulating substrate; an intermediate layer formed on a surface of the substrate and containing a metal or an alloy as a main component; and a metal film formed of a copper powder having a hydrogen content of 0.002% by mass or less and laminated on the intermediate layer. An interface between the intermediate layer and the metal film is plastically deformed.
    Type: Application
    Filed: November 10, 2016
    Publication date: November 1, 2018
    Applicant: NHK Spring Co., Ltd.
    Inventors: Naoya Aikawa, Satoshi Hirano, Yuichiro Yamauchi
  • Publication number: 20180226285
    Abstract: A heater unit having high in-plane temperature uniformity is provided. A heater unit includes a first heater part, a second heater part controlled independently of the first heater part, a base arranged with a groove in a region between the first heater part and the second heater part, and a cover part arranged at an opening end of the groove and providing a closed space with the groove. In addition, an insulating layer covering the first heater part and the second heater part, and an electrostatic chuck attached to the base via the insulating layer may be further included. In addition, the closed space provided by the cover part and the groove may be a vacuum.
    Type: Application
    Filed: April 9, 2018
    Publication date: August 9, 2018
    Inventors: Toshihiko HANAMACHI, Naoya AIKAWA
  • Publication number: 20170058406
    Abstract: A laminate includes: a substrate; and a metallic coating that is formed from copper powder containing 0.002% to 0.020% by weight of phosphorus and having been subjected to reduction treatment, the metallic coating being deposited on the substrate.
    Type: Application
    Filed: February 25, 2015
    Publication date: March 2, 2017
    Inventors: Masaru Takimoto, Yuichiro Yamauchi, Satoshi Hirano, Naoya Aikawa