Patents by Inventor Naoya Fujimoto
Naoya Fujimoto has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Patent number: 11967750Abstract: A low-cost, small-size Wilkinson-type combiner that suppresses the risk of damaging an isolation resistor due to combination loss is provided. The combiner comprises first and second input terminals to which RF signals are input; an output terminal; a wiring line that combines the RF signals input to the first and second input terminals, and outputs the combined signal to the output terminal; an isolation unit provided between the first and second input terminals and formed by a first isolation resistor, a transformer, and a second isolation resistor connected in series; a detection circuit connected to a secondary coil of the transformer and configured to detect a current flowing in the secondary coil; and a determination circuit that outputs a control signal to block input of RF signals to the first and second input terminals if the current flowing in the isolation unit and detected by the detection circuit is higher than or equal to a prescribed value.Type: GrantFiled: February 6, 2020Date of Patent: April 23, 2024Assignee: HITACHI KOKUSAI ELECTRIC INC.Inventors: Sunao Egashira, Kenji Nasu, Yuichiro Suenaga, Naoya Fujimoto
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Patent number: 11901159Abstract: A radio frequency (RF) generator device for supplying RF powers of different frequencies to multiple antennas disposed in a chamber is provided. The RF generator device includes a plurality of RF generators configured to supply the RF powers of the different frequencies to the multiple antennas, and a plurality of RF controllers configured to control the RF generators, respectively. Each of the RF controllers includes a fast Fourier transformer, and a filter. The fast Fourier transformer performs fast Fourier transform on a signal introduced as a reflected wave to decompose the signal into frequency components, and the filter removes waves having frequency components that are not outputted from the corresponding RF generator.Type: GrantFiled: September 13, 2018Date of Patent: February 13, 2024Assignee: HITACHI KOKUSAI ELECTRIC INC.Inventors: Naoto Takahashi, Naoya Fujimoto, Sunao Egashira, Yoshiyuki Oshida
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Patent number: 11810759Abstract: The RF generator is provided with a first RF power source and a second RF power source that generate RF waves of different frequencies from each other, and respectively supply RF power to a first antenna and a second antenna that are installed in a plasma reactor.Type: GrantFiled: February 14, 2019Date of Patent: November 7, 2023Assignee: HITACHI KOKUSAI ELECTRIC INC.Inventors: Yoshiyuki Oshida, Naoya Fujimoto, Norikazu Kato, Sunao Egashira
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Publication number: 20230072008Abstract: There is provided a terminal device for displaying status information of a plurality of RF generators. On a display screen, numerical values of a specific item of the status information are displayed as figures having different lengths, and values of another item different from the specific item are displayed in at least one of color tones, patterns, or shapes of the figures, and when the specific item is a frequency and the another item is a phase, output powers of the plurality of RF generators are displayed as figures of bar graphs over the frequency, and phases of the RF generators are displayed in at least one of color tones, patterns, or shapes of the corresponding figures.Type: ApplicationFiled: January 7, 2021Publication date: March 9, 2023Inventors: Naoto TAKAHASHI, Yoshiyuki OSHIDA, Naoya FUJIMOTO
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Publication number: 20220122806Abstract: The RF generator is provided with a first RF power source and a second RF power source that generate RF waves of different frequencies from each other, and respectively supply RF power to a first antenna and a second antenna that are installed in a plasma reactor.Type: ApplicationFiled: February 14, 2019Publication date: April 21, 2022Inventors: Yoshiyuki OSHIDA, Naoya FUJIMOTO, Norikazu KATO, Sunao EGASHIRA
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Publication number: 20220115210Abstract: A radio frequency (RF) generator device for supplying RF powers of different frequencies to multiple antennas disposed in a chamber is provided. The RF generator device includes a plurality of RF generators configured to supply the RF powers of the different frequencies to the multiple antennas, and a plurality of RF controllers configured to control the RF generators, respectively. Each of the RF controllers includes a fast Fourier transformer, and a filter. The fast Fourier transformer performs fast Fourier transform on a signal introduced as a reflected wave to decompose the signal into frequency components, and the filter removes waves having frequency components that are not outputted from the corresponding RF generator.Type: ApplicationFiled: September 13, 2018Publication date: April 14, 2022Inventors: NAOTO TAKAHASHI, NAOYA FUJIMOTO, SUNAO EGASHIRA, YOSHIYUKI OSHIDA
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Publication number: 20220045417Abstract: A low-cost, small-size Wilkinson-type combiner that suppresses the risk of damaging an isolation resistor due to combination loss is provided. The combiner comprises first and second input terminals to which RF signals are input; an output terminal; a wiring line that combines the RF signals input to the first and second input terminals, and outputs the combined signal to the output terminal; an isolation unit provided between the first and second input terminals and formed by a first isolation resistor, a transformer, and a second isolation resistor connected in series; a detection circuit connected to a secondary coil of the transformer and configured to detect a current flowing in the secondary coil; and a determination circuit that outputs a control signal to block input of RF signals to the first and second input terminals if the current flowing in the isolation unit and detected by the detection circuit is higher than or equal to a prescribed value.Type: ApplicationFiled: February 6, 2020Publication date: February 10, 2022Applicant: HITACHI KOKUSAI ELECTRIC INC.Inventors: Sunao EGASHIRA, Kenji NASU, Yuichiro SUENAGA, Naoya FUJIMOTO
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Patent number: 10896810Abstract: To provide a RF generating apparatus that enables apparatus size to be decreased and the cost reduced thereby while also improving power efficiency by performing a stable matching operation, and to provide a plasma treatment apparatus using said apparatus. This RF generating apparatus comprises a plurality of RF generators and matching units, the matching units being provided with only variable-capacity capacitors connected in parallel, thereby reducing the number of elements in terms of the variable-capacity capacitors. A matching calculation section for the RF generators determines, on the basis of traveling waves and reflection waves detected by a detection circuit, the capacity values of the variable-capacity capacitors for the matching units, while adjusting and determining the oscillation frequencies for oscillation circuits in the RF generators so as to decrease the level of the reflection waves. The plasma treatment apparatus uses this RF generating apparatus.Type: GrantFiled: December 16, 2019Date of Patent: January 19, 2021Assignee: HITACHI KOKUSAI ELECTRIC INC.Inventors: Yoshiyuki Oshida, Naoya Fujimoto, Norikazu Kato, Takeshi Okada, Tsuyoshi Takeda
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Patent number: 10840874Abstract: A matching device includes a directional coupler, a matching circuit including a first variable capacitance capacitor and a second variable capacitance capacitor, and a control unit. The control unit calculates a reflection coefficient on the basis of a forward power and a reflected power that are detected by the directional coupler, changes the capacitance value of the first variable capacitance capacitor and the capacitance value of the second variable capacitance capacitor such that the calculated reflection coefficient becomes smaller, and makes the cycle of calculation of the set values of the capacitance value of the first variable capacitance capacitor and the capacitance value of the second variable capacitance capacitor shorter than the cycle of acquisition of the capacitance value of the first variable capacitance capacitor and the capacitance value of the second variable capacitance capacitor.Type: GrantFiled: February 10, 2017Date of Patent: November 17, 2020Assignee: HITACHI KOKUSAI ELECTRIC INC.Inventors: Yoshiyuki Oshida, Naoya Fujimoto, Norikazu Kato
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Patent number: 10812036Abstract: A matching box comprises a directional coupler that detects forward waves and reflected waves; a matching circuit having a first variable capacitance capacitor, a second variable capacitance capacitor, and inductance; and a control unit that calculates a reflection coefficient on the basis of the forward waves and the reflected waves, and controls a capacitance value VC1 of the first variable capacitance capacitor and a capacitance value VC2 of the second variable capacitance capacitor, wherein the control unit changes VC2 if the distance between a matching circle drawn by the trajectory of the reflection coefficient passing through a matching point on a Smith chart, and the calculated reflection coefficient is greater than a prescribed value, and changes VC1 if such distance is set to be no greater than the prescribed value and when the value of such distance becomes no greater than the prescribed value, thereby reducing the reflection coefficient.Type: GrantFiled: June 30, 2015Date of Patent: October 20, 2020Assignee: HITACHI KOKUSAI ELECTRIC INC.Inventors: Naoya Fujimoto, Norikazu Kato, Yoshiyuki Oshida
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Publication number: 20200118797Abstract: To provide a RF generating apparatus that enables apparatus size to be decreased and the cost reduced thereby while also improving power efficiency by performing a stable matching operation, and to provide a plasma treatment apparatus using said apparatus. This RF generating apparatus comprises a plurality of RF generators and matching units, the matching units being provided with only variable-capacity capacitors connected in parallel, thereby reducing the number of elements in terms of the variable-capacity capacitors. A matching calculation section for the RF generators determines, on the basis of traveling waves and reflection waves detected by a detection circuit, the capacity values of the variable-capacity capacitors for the matching units, while adjusting and determining the oscillation frequencies for oscillation circuits in the RF generators so as to decrease the level of the reflection waves. The plasma treatment apparatus uses this RF generating apparatus.Type: ApplicationFiled: December 16, 2019Publication date: April 16, 2020Inventors: Yoshiyuki OSHIDA, Naoya FUJIMOTO, Norikazu KATO, Takeshi OKADA, Tsuyoshi TAKEDA
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Patent number: 10491202Abstract: An RF generator includes: a modulation circuit outputting a pulsed RF signal; a variable attenuation circuit adjusting the level of the pulsed RF signal; an output power detecting unit detecting an output power value of the power output from the device; a first comparative arithmetic circuit outputting a first level control signal for controlling the level of the adjusted pulsed RF signal on the basis of a first detected voltage value and a set voltage value set in advance; a second comparative arithmetic circuit outputting a second level control signal for controlling the level of the adjusted pulsed RF signal on the basis of a second detected voltage value and the set voltage value; and a switching circuit switching between the value of the first level control signal and the value of the second level control signal depending on a switching timing setting value.Type: GrantFiled: September 1, 2017Date of Patent: November 26, 2019Assignee: HITACHI KOKUSAI ELECTRIC INC.Inventors: Yoshiyuki Oshida, Kenji Nasu, Naoya Fujimoto
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Publication number: 20190267978Abstract: An RF generator includes: a modulation circuit outputting a pulsed RF signal; a variable attenuation circuit adjusting the level of the pulsed RF signal; an output power detecting unit detecting an output power value of the power output from the device; a first comparative arithmetic circuit outputting a first level control signal for controlling the level of the adjusted pulsed RF signal on the basis of a first detected voltage value and a set voltage value set in advance; a second comparative arithmetic circuit outputting a second level control signal for controlling the level of the adjusted pulsed RF signal on the basis of a second detected voltage value and the set voltage value; and a switching circuit switching between the value of the first level control signal and the value of the second level control signal depending on a switching timing setting value.Type: ApplicationFiled: September 1, 2017Publication date: August 29, 2019Applicant: HITACHI KOKUSAI ELECTRIC INC.Inventors: YOSHIYUKI OSHIDA, KENJI NASU, NAOYA FUJIMOTO
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Patent number: 10291198Abstract: A matching device includes: a directional coupler that detects a traveling wave and a reflected wave; a matching circuit that has a first variable capacitance capacitor, a second variable capacitance capacitor and an inductance; and a control unit that calculates a reflection coefficient based on the traveling wave and the reflected wave and controls a capacitance value VC1 of the first variable capacitance capacitor and a capacitance value VC2 of the second variable capacitance capacitor. The control unit changes VC2 such that VC2 moves toward a circle drawn by the trajectory of the reflection coefficient passing through a matching point on a Smith chart, fine-tunes VC1 on the basis of a predicted intersection point with the circle, and when the distance between the calculated reflection coefficient and the circle becomes a predetermined value or less, changes VC1 such that the calculated reflection coefficient approaches zero, and fine-tunes VC2.Type: GrantFiled: February 8, 2016Date of Patent: May 14, 2019Assignee: HITACHI KOKUSAI ELECTRIC INC.Inventors: Naoya Fujimoto, Yoshiyuki Oshida, Norikazu Kato
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Publication number: 20190036507Abstract: A matching device includes a directional coupler, a matching circuit including a first variable capacitance capacitor and a second variable capacitance capacitor, and a control unit. The control unit calculates a reflection coefficient on the basis of a forward power and a reflected power that are detected by the directional coupler, changes the capacitance value of the first variable capacitance capacitor and the capacitance value of the second variable capacitance capacitor such that the calculated reflection coefficient becomes smaller, and makes the cycle of calculation of the set values of the capacitance value of the first variable capacitance capacitor and the capacitance value of the second variable capacitance capacitor shorter than the cycle of acquisition of the capacitance value of the first variable capacitance capacitor and the capacitance value of the second variable capacitance capacitor.Type: ApplicationFiled: February 10, 2017Publication date: January 31, 2019Inventors: YOSHIYUKI OSHIDA, NAOYA FUJIMOTO, NORIKAZU KATO
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Publication number: 20180191324Abstract: A matching box comprises a directional coupler that detects forward waves and reflected waves; a matching circuit having a first variable capacitance capacitor, a second variable capacitance capacitor, and inductance; and a control unit that calculates a reflection coefficient on the basis of the forward waves and the reflected waves, and controls a capacitance value VC1 of the first variable capacitance capacitor and a capacitance value VC2 of the second variable capacitance capacitor, wherein the control unit changes VC2 if the distance between a matching circle drawn by the trajectory of the reflection coefficient passing through a matching point on a Smith chart, and the calculated reflection coefficient is greater than a prescribed value, and changes VC1 if such distance is set to be no greater than the prescribed value and when the value of such distance becomes no greater than the prescribed value, thereby reducing the reflection coefficient.Type: ApplicationFiled: June 30, 2015Publication date: July 5, 2018Inventors: Naoya FUJIMOTO, Norikazu KATO, Yoshiyuki OSHIDA
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Publication number: 20180115298Abstract: A matching device includes: a directional coupler that detects a traveling wave and a reflected wave; a matching circuit that has a first variable capacitance capacitor, a second variable capacitance capacitor and an inductance; and a control unit that calculates a reflection coefficient based on the traveling wave and the reflected wave and controls a capacitance value VC1 of the first variable capacitance capacitor and a capacitance value VC2 of the second variable capacitance capacitor. The control unit changes VC2 such that VC2 moves toward a circle drawn by the trajectory of the reflection coefficient passing through a matching point on a Smith chart, fine-tunes VC1 on the basis of a predicted intersection point with the circle, and when the distance between the calculated reflection coefficient and the circle becomes a predetermined value or less, changes VC1 such that the calculated reflection coefficient approaches zero, and fine-tunes VC2.Type: ApplicationFiled: February 8, 2016Publication date: April 26, 2018Applicant: HITACHI KOKUSAI ELECTRIC INC.Inventors: Naoya FUJIMOTO, Yoshiyuki OSHIDA, Norikazu KATO
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Patent number: 9876482Abstract: A matching unit includes a directional coupler for detecting a travelling wave and a reflected wave; a matching circuit including a first variable capacitance capacitor, a second variable capacitance capacitor and an inductance; and a control unit for controlling VC1 and VC2 of the first and the second variable capacitance capacitor by calculating a reflection coefficient based on the travelling wave and the reflected wave. When a distance between the calculated reflection coefficient and a circle described by a trace of the reflection coefficient which passes through a matching point on a Smith chart is greater than a predetermined value, the control unit changes VC2 of the second variable capacitance capacitor and the calculated reflection coefficient to make the distance within the predetermined value. When the distance becomes within the predetermined value, the control unit changes VC1 of the first variable capacitance capacitor and makes the calculated reflection coefficient smaller.Type: GrantFiled: February 24, 2015Date of Patent: January 23, 2018Assignee: HITACHI KOKUSAI ELECTRIC INC.Inventors: Manabu Nakamura, Naoya Fujimoto, Norikazu Kato, Yoshiyuki Oshida, Naoto Takahashi
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Publication number: 20160352302Abstract: A matching unit includes a directional coupler for detecting a travelling wave and a reflected wave; a matching circuit including a first variable capacitance capacitor, a second variable capacitance capacitor and an inductance; and a control unit for controlling VC1 and VC2 of the first and the second variable capacitance capacitor by calculating a reflection coefficient based on the travelling wave and the reflected wave. When a distance between the calculated reflection coefficient and a circle described by a trace of the reflection coefficient which passes through a matching point on a Smith chart is greater than a predetermined value, the control unit changes VC2 of the second variable capacitance capacitor and the calculated reflection coefficient to make the distance within the predetermined value. When the distance becomes within the predetermined value, the control unit changes VC1 of the first variable capacitance capacitor and makes the calculated reflection coefficient smaller.Type: ApplicationFiled: February 24, 2015Publication date: December 1, 2016Inventors: Manabu NAKAMURA, Naoya FUJIMOTO, Norikazu KATO, Yoshiyuki OSHIDA, Naoto TAKAHASHI
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Patent number: 6842530Abstract: The present invention relates to an electric acoustic converter used as a speaker or a receiver of a mobile communication device such as a portable telephone or the like. In the electric acoustic converter according to the present invention, the size reduction and thinning of the thickness of the electric acoustic converter can be promoted by providing surface-like rear surface terminals 81 and 82 on the exposed surface 33 which is a rear surface of the yoke 3.Type: GrantFiled: June 6, 2001Date of Patent: January 11, 2005Assignees: NEC Corporation, Hosiden CorporationInventors: Kenji Fukazawa, Tomohiko Kamimura, Satoru Fujiwara, Naoya Fujimoto