Patents by Inventor Naoya Kida

Naoya Kida has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20220157579
    Abstract: Disclosed is a stage including a shaft, a first supporting plate over the shaft, a heater arranged in a trench formed in the first supporting plate, and a gas-supplying tube arranged in the shaft and configured to blow a gas to the first supporting plate. The first supporting plate may have a disk shape, and a cross section of the gas-supplying tube parallel to a surface of the first supporting plate may overlap a center of the disk shape. The first supporting plate may be configured to block the gas so that the gas is not released to a chamber in which the stage is arranged.
    Type: Application
    Filed: February 4, 2022
    Publication date: May 19, 2022
    Inventors: Naoya Kida, Arata Tatsumi, Kenji Sekiya, Naoya Aikawa, Masaya Takanashi
  • Publication number: 20220155156
    Abstract: A temperature sensor includes a block body, a first thermocouple, and a second thermocouple. The first thermocouple includes a first strand, a second strand, a first insulator surrounding the first strand and the second strand, and a first metal sheath surrounding the first insulator. The second thermocouple includes a third strand, a fourth strand, a second insulator surrounding the third strand and the fourth strand, and a second metal sheath surrounding the second insulator. An end portion of each of the first thermocouple and the second thermocouple is buried in the block body.
    Type: Application
    Filed: February 1, 2022
    Publication date: May 19, 2022
    Inventors: Naoya KIDA, Arata TATSUMI, Kenji SEKIYA, Naoya AIKAWA, Masaya TAKANASHI
  • Publication number: 20220151031
    Abstract: A heater includes a folded heater wire, a first insulator provided on the heater wire, a metal sheath provided so as to be in contact with the first insulator, a first insulating member arranged parallel to a first end part of the heater wire taken out from a first end part of the metal sheath, a second insulating member arranged parallel to the first insulating member and parallel to a second end part of the heater wire taken out from the first end part of the metal sheath, a second insulator in contact with the first and the second insulating members and the metal sheath, and a lid member covering the first insulating member, the lid member being in contact with the metal sheath, the first and the second insulating members via the second insulator, and arranged parallel to the first and the second insulating members and the metal sheath.
    Type: Application
    Filed: January 24, 2022
    Publication date: May 12, 2022
    Inventors: Naoya KIDA, Arata TATSUMI, Kenji SEKIYA, Naoya AIKAWA, Masaya TAKANASHI
  • Patent number: 7503980
    Abstract: A substrate supporting apparatus includes a plate member of an aluminum alloy having a flat upper surface, bottomed pits formed in the plate member, and spacer members held in the pits, individually. The spacer members are sapphire spheres. The diameter of each spacer member is a little smaller than that of each pit. The upper end of each spacer member projects from the upper surface of the plate member. A spot facing is formed in a region that includes the open edge portion of the pit. A bending portion which is obtained by plastically deforming the open edge portion of the pit toward the spacer member is formed on a bottom surface of the spot facing. A V-shaped groove is formed behind the bending portion.
    Type: Grant
    Filed: December 20, 2006
    Date of Patent: March 17, 2009
    Assignee: NHK Spring Co., Ltd.
    Inventors: Naoya Kida, Toshihiro Tachikawa, Jun Futakuchiya
  • Publication number: 20070157466
    Abstract: A substrate supporting apparatus includes a plate member of an aluminum alloy having a flat upper surface, bottomed pits formed in the plate member, and spacer members held in the pits, individually. The spacer members are sapphire spheres. The diameter of each spacer member is a little smaller than that of each pit. The upper end of each spacer member projects from the upper surface of the plate member. A spot facing is formed in a region that includes the open edge portion of the pit. A bending portion which is obtained by plastically deforming the open edge portion of the pit toward the spacer member is formed on a bottom surface of the spot facing. A V-shaped groove is formed behind the bending portion.
    Type: Application
    Filed: December 20, 2006
    Publication date: July 12, 2007
    Applicant: NHK Spring Co., Ltd.
    Inventors: Naoya Kida, Toshihiro Tachikawa, Jun Futakuchiya
  • Patent number: RE43837
    Abstract: A substrate supporting apparatus includes a plate member of an aluminum alloy having a flat upper surface, bottomed pits formed in the plate member, and spacer members held in the pits, individually. The spacer members are sapphire spheres. The diameter of each spacer member is a little smaller than that of each pit. The upper end of each spacer member projects from the upper surface of the plate member. A spot facing is formed in a region that includes the open edge portion of the pit. A bending portion which is obtained by plastically deforming the open edge portion of the pit toward the spacer member is formed on a bottom surface of the spot facing. A V-shaped groove is formed behind the bending portion.
    Type: Grant
    Filed: March 16, 2011
    Date of Patent: December 4, 2012
    Assignee: NHK Spring Co., Ltd.
    Inventors: Naoya Kida, Toshihiro Tachikawa, Jun Futakuchiya