Patents by Inventor Naoyuki Wada

Naoyuki Wada has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 11274371
    Abstract: Provided is a susceptor, capable of preventing occurrence of scratches on the back surface of a wafer attributable to lift pins, and reducing unevenness of the in-surface temperature distribution of the wafer. A susceptor according to one embodiment of this disclosure has a susceptor main body and a plate-shaped member, and when a wafer is conveyed, the front surface of the plate-shaped member ascended by lift pins supports the central part of the back surface of the wafer by surface contact. A separation space between the plate-shaped member and the susceptor main body, in a state in which the plate-shaped member is placed on the recessed part, enters further into the central side of the plate-shaped member, in a direction from the front surface to the back surface of the susceptor.
    Type: Grant
    Filed: April 22, 2016
    Date of Patent: March 15, 2022
    Assignee: SUMCO CORPORATION
    Inventors: Shoji Nogami, Naoyuki Wada, Masaya Sakurai, Takayuki Kihara
  • Publication number: 20220064790
    Abstract: A vapor deposition device is provided that can perform CVD processing without using a carrier. A first robot is provided with a first blade at a tip, the first blade includes a first recess which supports the carrier and a second recess which supports the wafer. A load-lock chamber is provided with a holder which can support the carrier and the wafer.
    Type: Application
    Filed: November 5, 2019
    Publication date: March 3, 2022
    Applicant: SUMCO CORPORATION
    Inventors: Naoyuki WADA, Yu MINAMIDE
  • Publication number: 20220056581
    Abstract: A vapor deposition device is provided that can ameliorate or improve the LPD quality. A vapor deposition device includes a first holder that supports a carrier at a topmost-level and a second holder that supports the carrier under the first holder in a load-lock chamber, and a second robot mounts a before-treatment wafer extracted from a wafer storage container on the carrier standing by at the first holder in the load-lock chamber.
    Type: Application
    Filed: November 5, 2019
    Publication date: February 24, 2022
    Applicant: SUMCO CORPORATION
    Inventors: Naoyuki WADA, Yu MINAMIDE
  • Publication number: 20220056613
    Abstract: A vapor deposition device is provided that can make uniform a CVD film thickness at a circumferential edge of a wafer. A carrier is formed in an endless ring shape having a bottom surface that rests on a top surface of a susceptor, a top surface touching and supporting an outer edge of a reverse face of a wafer, an outer circumferential wall surface, and an inner circumferential wall surface, and the carrier is also configured with a structure or shape in a circumferential direction of the top surface that has a correspondence relationship to a crystal orientation in the circumferential direction of the wafer, and a before-treatment wafer is mounted on the carrier such that the crystal orientation in the circumferential direction of the before-treatment wafer and the structure or shape in the circumferential direction have a correspondence relationship.
    Type: Application
    Filed: November 5, 2019
    Publication date: February 24, 2022
    Applicant: SUMCO CORPORATION
    Inventors: Naoyuki WADA, Yu MINAMIDE
  • Publication number: 20210324536
    Abstract: For correction of a source gas supply time and a dopant gas flow rate, a calculation unit in an epitaxial wafer production system performs not only correction based on a result of comparing measured thickness and resistivity of an epitaxial film respectively with a target thickness range and a target resistivity range, but also correction based on a variation in total output value of upper and lower lamps.
    Type: Application
    Filed: April 1, 2021
    Publication date: October 21, 2021
    Applicant: SUMCO CORPORATION
    Inventor: Naoyuki WADA
  • Publication number: 20210123159
    Abstract: The amount of gas evacuation from a reaction chamber of an apparatus for manufacturing epitaxial wafers is controlled to any one of: a first amount of gas evacuation when an epitaxial film formation process is performed in the reaction chamber; a second amount of gas evacuation smaller than the first amount of gas evacuation when a gate valve is opened to load or unload a wafer between the reaction chamber and a wafer transfer chamber; and a third amount of gas evacuation larger than the first amount of gas evacuation until a purge process for a gas in the reaction chamber is completed after the epitaxial film formation process is completed in the reaction chamber.
    Type: Application
    Filed: November 5, 2018
    Publication date: April 29, 2021
    Applicant: SUMCO CORPORATION
    Inventors: Yu MINAMIDE, Naoyuki WADA, Yasutaka TAKEMURA
  • Patent number: 10964970
    Abstract: A flat-plate portion of a negative electrode composite material layer includes a first end portion at one end portion in a direction of axis of winding of a flat electrode winding assembly, a second end portion located opposite to the first end portion, and a central portion lying between the first end portion and the second end portion. The flat-plate portion of the negative electrode composite material layer is provided with a plurality of communication grooves. The communication groove includes a first terminal end portion at the first end portion, includes a second terminal end portion at the second end portion, includes in the central portion, a starting portion located closer to a bottom portion of a prismatic case relative to the first terminal end portion and the second terminal end portion, and extends from the starting portion toward the first terminal end portion and the second terminal end portion.
    Type: Grant
    Filed: August 31, 2015
    Date of Patent: March 30, 2021
    Assignee: TOYOTA JIDOSHA KABUSHIKI KAISHA
    Inventors: Hiroya Umeyama, Tatsuya Hashimoto, Naoyuki Wada, Yusuke Fukumoto, Yuji Yokoyama
  • Publication number: 20200350545
    Abstract: The present invention provides an optimal non-aqueous electrolyte secondary battery having high durability against high rate charging and discharging and excellent safety. The non-aqueous electrolyte secondary battery 100 according to the present invention comprises a positive electrode 10, a negative electrode 20 and a separator 30 which is interposed between the positive electrode 10 and the negative electrode 20. The separator 30 has a two-layer structure which is composed of a porous polyethylene layer 34 mainly composed of polyethylene, and a porous polymer layer 32 mainly composed of a polymer having higher oxidation resistance than that of the polyethylene, and an inorganic filler layer 40 including an inorganic filler and a binder is formed on the surface of the polyethylene layer 34 on which the porous polymer layer 32 is not formed.
    Type: Application
    Filed: July 22, 2020
    Publication date: November 5, 2020
    Applicant: TOYOTA JIDOSHA KABUSHIKI KAISHA
    Inventors: Tomoyoshi UEKI, Naoyuki WADA, Yoshiyuki OZAKI
  • Publication number: 20200313192
    Abstract: A negative electrode constituting a non-aqueous electrolyte secondary battery, which is an example of an embodiment, comprises a negative-electrode mixture layer including a negative-electrode active material and a binder agent. The negative electrode includes, as the binder agent, at least a polymer constituted by a constituent unit A represented by formula (1), a constituent unit B represented by formula (2), and a constituent unit C represented by formula (3). The molar ratio (l/m) of the constituent unit A to the constituent unit B is from 0.2 to 1.8.
    Type: Application
    Filed: December 7, 2018
    Publication date: October 1, 2020
    Applicants: Panasonic Corporation, Kao Corporation
    Inventors: Naoyuki Wada, Atsushi Hiraishi, Kei Takahashi
  • Patent number: 10777799
    Abstract: The present invention provides an optimal non-aqueous electrolyte secondary battery having high durability against high rate charging and discharging and excellent safety. The non-aqueous electrolyte secondary battery 100 according to the present invention comprises a positive electrode 10, a negative electrode 20 and a separator 30 which is interposed between the positive electrode 10 and the negative electrode 20. The separator 30 has a two-layer structure which is composed of a porous polyethylene layer 34 mainly composed of polyethylene, and a porous polymer layer 32 mainly composed of a polymer having higher oxidation resistance than that of the polyethylene, and an inorganic filler layer 40 including an inorganic filler and a binder is formed on the surface of the polyethylene layer 34 on which the porous polymer layer 32 is not formed.
    Type: Grant
    Filed: November 26, 2010
    Date of Patent: September 15, 2020
    Assignee: Toyota Jidosha Kabushiki Kaisha
    Inventors: Tomoyoshi Ueki, Naoyuki Wada, Yoshiyuki Ozaki
  • Patent number: 10749167
    Abstract: A lithium ion secondary battery includes at least a positive electrode, a negative electrode, and an electrolyte. The positive electrode contains at least a first positive electrode active material and a second positive electrode active material. The first positive electrode active material is expressed with a formula (I) LiNiaCobMncO2 and the second positive electrode active material is expressed with a formula (II) LiNidCoeMnfO2, where a, b, c, d, e, and f satisfy conditions of a>d, 0.4?a?0.6, 0.2?b?0.5, 0.1?c?0.2, a+b+c=1.0, 0.2?d?0.5, 0.1?e?0.2, 0.4?f?0.6, and d+e+f=1.
    Type: Grant
    Filed: June 18, 2018
    Date of Patent: August 18, 2020
    Assignee: TOYOTA JIDOSHA KABUSHIKI KAISHA
    Inventors: Ryo Hanazaki, Keiichi Takahashi, Naoyuki Wada, Yukihiro Okada
  • Patent number: 10718722
    Abstract: Provided is a method of inspecting the back surface of an epitaxial wafer, capable of detecting pin mark defects in the back surface of the epitaxial wafer and quantitatively evaluating the defect size of individual point defects of the pin mark defects. The method of inspecting the back surface of an epitaxial wafer includes an imaging step of consecutively taking partial images of the back surface while moving the optical system using the scanning unit; an acquisition step of acquiring a full image of the back surface from the partial images; a detection step of detecting, in the full image, pin mark defects constituted by a set of a plurality of point defects present in the back surface of the silicon wafer 1; and a digitalization step of digitalizing the individual point defects to calculate the defect area of the individual point defects of the detected pin mark defects.
    Type: Grant
    Filed: February 22, 2018
    Date of Patent: July 21, 2020
    Assignee: SUMCO CORPORATION
    Inventors: Keiko Matsuo, Naoyuki Wada, Masahiko Egashira
  • Publication number: 20200119361
    Abstract: A positive electrode includes at least a positive electrode current collector and a positive electrode active material layer. The positive electrode active material layer is disposed on a surface of the positive electrode current collector. The positive electrode current collector includes an aluminum foil and an aluminum hydrated oxide film. The aluminum hydrated oxide film covers a surface of the aluminum foil. The aluminum hydrated oxide film has a thickness not smaller than 50 nm and not greater than 500 nm. The aluminum hydrated oxide film contains a plurality of types of aluminum hydrated oxides. The ratio of boehmite to the plurality of types of aluminum hydrated oxides is not lower than 20 mol % and not higher than 80 mol %.
    Type: Application
    Filed: October 1, 2019
    Publication date: April 16, 2020
    Inventors: Koji TORITA, Takuya ASARI, Akihiro OCHIAI, Yusuke FUKUMOTO, Naoyuki WADA
  • Publication number: 20200072762
    Abstract: Provided is a method of inspecting the back surface of an epitaxial wafer, capable of detecting pin mark defects in the back surface of the epitaxial wafer and quantitatively evaluating the defect size of individual point defects of the pin mark defects. The method of inspecting the back surface of an epitaxial wafer includes an imaging step of consecutively taking partial images of the back surface while moving the optical system using the scanning unit; an acquisition step of acquiring a full image of the back surface from the partial images; a detection step of detecting, in the full image, pin mark defects constituted by a set of a plurality of point defects present in the back surface of the silicon wafer 1; and a digitalization step of digitalizing the individual point defects to calculate the defect area of the individual point defects of the detected pin mark defects.
    Type: Application
    Filed: February 22, 2018
    Publication date: March 5, 2020
    Applicant: SUMCO CORPORATION
    Inventors: Keiko MATSUO, Naoyuki WADA, Masahiko EGASHIRA
  • Patent number: 10511024
    Abstract: An electrode for a nonaqueous electrolyte secondary battery includes an electrode mixture layer. The electrode mixture layer contains a hollow active material particle and a needle-shaped filler having a through-hole that extends through the needle-shaped filler in a longitudinal direction. The needle-shaped filler is arranged on surfaces of the hollow active material particle.
    Type: Grant
    Filed: January 7, 2016
    Date of Patent: December 17, 2019
    Assignee: TOYOTA JIDOSHA KABUSHIKI KAISHA
    Inventors: Hiroya Umeyama, Tatsuya Hashimoto, Naoyuki Wada, Keiichi Takahashi, Koichi Toriyama
  • Patent number: 10490859
    Abstract: A positive electrode of a lithium-ion secondary battery contains first positive electrode active material particles and second positive electrode active material particles. The first positive electrode active material particles have a first composition represented by a compositional formula LiNix1Coy1Mnz1O2 (here, x1, y1, and z1 are numerical values satisfying 0<x1<1, 0<y1<1, 0.3<z1<0.5, and x1+y1+z1=1). The second positive electrode active material particles have a second composition represented by a compositional formula LiNix2Coy2Mnz2O2 (here, x2, y2, and z2 are numerical values satisfying 0<x2<1, 0<y2<1, 0<z2<0.2, and x2+y2+z2=1). The surface of at least one of the first positive electrode active material particles and the second positive electrode active material particles is coated with a transition metal oxide.
    Type: Grant
    Filed: December 11, 2017
    Date of Patent: November 26, 2019
    Assignee: TOYOTA JIDOSHA KABUSHIKI KAISHA
    Inventors: Hiroshi Tsubouchi, Keiichi Takahashi, Naoyuki Wada, Yukihiro Okada
  • Patent number: 10461310
    Abstract: A manufacturing method for a non-aqueous electrolyte secondary battery includes: forming a powder; forming a sheet-like green compact; and forming a heat-resistant layer. The powder contains composite particles and a solvent. The composite particles contain inorganic filler particles and a binder. The green compact is formed by pressing the powder in a state in which the solvent remains. The heat-resistant layer is formed by disposing the green compact on a surface of at least any of a positive electrode mixture layer and a negative electrode mixture layer after the green compact is formed.
    Type: Grant
    Filed: February 9, 2016
    Date of Patent: October 29, 2019
    Assignee: TOYOTA JIDOSHA KABUSHIKI KAISHA
    Inventors: Hiroya Umeyama, Yusuke Fukumoto, Naoyuki Wada, Yuji Yokoyama, Tatsuya Hashimoto, Naoto Onodera
  • Publication number: 20190280303
    Abstract: A positive electrode includes at least a positive electrode current collector and a positive electrode active material layer. The positive electrode active material layer is formed on a surface of the positive electrode current collector. The positive electrode current collector includes an aluminum foil and a porous film. The porous film covers a surface of the aluminum foil. The porous film contains at least aluminum oxide. The porous film has a thickness not smaller than 10 nm and not greater than 800 nm. The porous film has a dynamic hardness not lower than 5 and not higher than 200.
    Type: Application
    Filed: March 8, 2019
    Publication date: September 12, 2019
    Applicant: TOYOTA JIDOSHA KABUSHIKI KAISHA
    Inventors: Koji TORITA, Takuya ASARI, Akihiro OCHIAI, Yusuke FUKUMOTO, Naoyuki WADA
  • Patent number: 10297814
    Abstract: A positive electrode includes first positive electrode active material particles and second positive electrode active material particles. The first positive electrode active material particles include 0.1% by mass or more and 1% by mass or less of lithium carbonate and a first lithium transition metal oxide as a remainder. The first lithium transition metal oxide is represented by LiM1(1-z1)Mnz1O2 (0.05?z1?0.20). The second positive electrode active material particles include 0.01% by mass or more and 0.05% by mass or less of lithium carbonate and a second lithium transition metal oxide as a remainder. The second lithium transition metal oxide is represented by LiM2(1-z2)Mnz2O2 (0.40?z2?0.60). An electrolytic solution includes 1% by mass or more and 5% by mass or less of an overcharging additive and a solvent and a lithium salt as a remainder.
    Type: Grant
    Filed: November 21, 2017
    Date of Patent: May 21, 2019
    Assignee: TOYOTA JIDOSHA KABUSHIKI KAISHA
    Inventors: Hiroshi Tsubouchi, Motoshi Isono, Masaki Kato, Naoyuki Wada, Keiichi Takahashi, Yukihiro Okada, Tatsuya Hashimoto
  • Patent number: 10263239
    Abstract: A method for manufacturing an electrode sheet includes the steps of forming a granulated material by mixing an electrode active material, a cellulose derivative, a binder, and an aqueous solvent, and placing the granulated material in the form of a sheet on electrode current collector foil. The cellulose derivative is at least one selected from the group consisting of hydroxyethyl cellulose, hydroxypropyl cellulose, hydroxyethyl methylcellulose, and hydroxypropyl methylcellulose, and has 3.0 or more moles of substitution, which is an average number of hydroxy groups substituted per glucose unit.
    Type: Grant
    Filed: June 13, 2016
    Date of Patent: April 16, 2019
    Assignee: TOYOTA JIDOSHA KABUSHIKI KAISHA
    Inventors: Hiroya Umeyama, Naoyuki Wada