Patents by Inventor Natalia Kroupnova

Natalia Kroupnova has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Method and apparatus to automatically create virtual sensors with templates
    Patent number: 10409272
    Abstract: A method and apparatus for automatically providing a virtual sensor have been described. In one embodiment, a method for automatically providing a virtual sensor includes receiving a plurality of virtual sensor templates from a server. The method further includes selecting a virtual sensor template from the plurality of virtual sensor templates. The selected virtual sensor template has an algorithm to provide a desired functionality. The method further includes selecting at least one parameter to configure the selected virtual sensor template. The method further includes automatically creating a virtual sensor associated with the selected virtual sensor template.
    Type: Grant
    Filed: July 22, 2014
    Date of Patent: September 10, 2019
    Assignee: APPLIED MATERIALS, INC.
    Inventors: Natalia Kroupnova, Aleksey Yanovich, Thorsten Kril, Mikhail B. Kozine
  • METHOD AND APPARATUS TO AUTOMATICALLY CREATE VIRTUAL SENSORS WITH TEMPLATES
    Publication number: 20140336966
    Abstract: A method and apparatus for automatically providing a virtual sensor have been described. In one embodiment, a method for automatically providing a virtual sensor includes receiving a plurality of virtual sensor templates from a server. The method further includes selecting a virtual sensor template from the plurality of virtual sensor templates. The selected virtual sensor template has an algorithm to provide a desired functionality. The method further includes selecting at least one parameter to configure the selected virtual sensor template. The method further includes automatically creating a virtual sensor associated with the selected virtual sensor template.
    Type: Application
    Filed: July 22, 2014
    Publication date: November 13, 2014
    Inventors: Natalia Kroupnova, Aleksey Yanovich, Thorsten Kril, Mikhail B. Kozine
  • Method and apparatus to automatically create virtual sensors with templates
    Patent number: 8812261
    Abstract: A method and apparatus for automatically providing a virtual sensor have been described. In one embodiment, a method for automatically providing a virtual sensor includes receiving a plurality of virtual sensor templates from a server. The method further includes selecting a virtual sensor template from the plurality of virtual sensor templates. The selected virtual sensor template has an algorithm to provide a desired functionality. The method further includes selecting at least one parameter to configure the selected virtual sensor template. The method further includes automatically creating a virtual sensor associated with the selected virtual sensor template.
    Type: Grant
    Filed: February 12, 2008
    Date of Patent: August 19, 2014
    Assignee: Applied Materials, Inc.
    Inventors: Natalia Kroupnova, Aleksey Yanovich, Thorsten Kril, Mikhail B. Kozine
  • Virtual sensors
    Patent number: 8572155
    Abstract: A method and apparatus for providing a virtual sensor in real-time have been described. In one embodiment, a method to provide a virtual sensor in real-time includes identifying data indicating desired functionality. The method further includes executing the virtual sensor in real-time based on the identified data to generate an output of the virtual sensor with the output being used by at least one data analysis module in real-time for statistical process monitoring.
    Type: Grant
    Filed: February 12, 2008
    Date of Patent: October 29, 2013
    Assignee: Applied Materials, Inc.
    Inventors: Aleksey Yanovich, Thorsten Kril, Natalia Kroupnova
  • Method and apparatus to automatically create virtual sensors with templates
    Publication number: 20090055692
    Abstract: A method and apparatus for automatically providing a virtual sensor have been described. In one embodiment, a method for automatically providing a virtual sensor includes receiving a plurality of virtual sensor templates from a server. The method further includes selecting a virtual sensor template from the plurality of virtual sensor templates. The selected virtual sensor template has an algorithm to provide a desired functionality. The method further includes selecting at least one parameter to configure the selected virtual sensor template. The method further includes automatically creating a virtual sensor associated with the selected virtual sensor template.
    Type: Application
    Filed: February 12, 2008
    Publication date: February 26, 2009
    Inventors: Natalia Kroupnova, Aleksey Yanovich, Thorsten Kril, Mikhail B. Kozine
  • Wafer fabrication data acquisition and management systems
    Patent number: 6952656
    Abstract: The present invention provides a semiconductor processing device (800) including a tool (802) having one or more sensors, a primary data communication port (804) and a secondary data communication port (806). A sensor data acquisition subsystem (808) acquires sensor data from the tool via the secondary port (806). The data acquisition subsystem (808) acquires MES operation messages via the primary port (804). Sensor data are communicated to a sensor processing unit (828) of a sensor data processing subsystem (810). The sensor processing unit (828) processes and analyzes the sensor data. Additionally, the processing unit (828) can be adapted for making product or processing related decisions, for example activating an alarm if the process is not operating within control limits.
    Type: Grant
    Filed: April 28, 2000
    Date of Patent: October 4, 2005
    Assignee: Applied Materials, Inc.
    Inventors: Sherry Cordova, Terry L. Doyle, Natalia Kroupnova, Evgueni Lobovski, Inna Louneva, Richard C. Lyon, Yukari Nishimura, Clari Nolet, Terry Reiss, Woon Young Toh, Michael E. Wilmer