Publication number: 20200287017
Abstract: A gate stack is described that uses anti-ferroelectric material (e.g., Si, La, N, Al, Zr, Ge, Y doped HfO2) or ferroelectric material (e.g., Si, La, N, Al, Zr, Ge, Y doped HfO2, perovskite ferroelectric such as NH4H2PO4, KH2PO4, LiNb03, LiTaO3, BaTiO3, PbTiO3, Pb (Zr,Ti) O3, (Pb,La)TiO3, and (Pb,La)(Zr,Ti)O3) which reduces write voltage, improves endurance, and increases retention. The gate stack of comprises strained anti-FE or FE material and depolarized anti-FE or FE. The endurance of the FE transistor is further improved by using a higher K (constant) dielectric (e.g., SiO2, Al2O3, HfO2, Ta2O3, La2O3) in the gate stack. High K effects may also be achieved by depolarizing the FE or FE oxide in the transistor gate stack.
Type:
Application
Filed:
March 6, 2019
Publication date:
September 10, 2020
Applicant:
Intel Corporation
Inventors:
Sou-Chi CHANG, Chia-Chang LIN, Seung Hoon SUNG, Ashish Verma PENUMATCHA, Nazila HARATIPOURA, Owen LOH, Jack KAVALIEROS, Uygar AVCI, Ian YOUNG