Patents by Inventor Niklas Svedin

Niklas Svedin has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 9718674
    Abstract: A device includes a base substrate (700) with a micro component (702) attached thereto. Suitably it is provided with routing elements (704) for conducting signals to and from the component (702). It also includes spacer members (706) which also can act as conducting structures for routing signals vertically. There is a capping structure (708) of a glass material, provided above the base substrate (700), bonded via the spacer members (706), preferably by eutectic bonding, wherein the capping structure (708) includes vias (710) including metal for providing electrical connection through the capping structure. The vias can be made by a stamping/pressing method entailing pressing needles under heating to soften the glass and applying pressure, to a predetermined depth in the glass. However, other methods are possible, e-g- drilling, etching, blasting.
    Type: Grant
    Filed: August 26, 2014
    Date of Patent: August 1, 2017
    Assignee: SILEX MICROSYSTEMS AB
    Inventors: Edvard Kalvesten, Thorbjorn Ebefors, Niklas Svedin
  • Patent number: 9511999
    Abstract: A method for sealing cavities in micro-electronic/-mechanical system (MEMS) devices to provide a controlled atmosphere within the sealed cavity includes providing a semiconductor substrate on which a template is provided on a localized area of the substrate. The template defines the interior shape of the cavity. Holes are made so as to enable venting of the cavity to provide a desired atmosphere to enter into the cavity through the hole. Finally, a sealing material is provided in the hole to seal the cavity. The sealing can be made by compression and/or melting of the sealing material.
    Type: Grant
    Filed: December 17, 2012
    Date of Patent: December 6, 2016
    Assignee: SILEX MICROSYSTEMS AB
    Inventors: Thorbjorn Ebefors, Niklas Svedin
  • Patent number: 9448401
    Abstract: A layered micro-electronic and/or micro-mechanic structure comprises at least three alternating electrically conductive layers with insulating layers between the conductive layers. There is also provided a via in a first outer layer, said via comprising an insulated conductive connection made of wafer native material through the layer, an electrically conductive plug extending through the other layers and into said via in the first outer layer in order to provide conductivity through the layers, and an insulating enclosure surrounding said conductive plug in at least one selected layer of said other layers for insulating said plug from the material in said selected layer. It also relates to micro-electronic and/or micro-mechanic device comprising a movable member provided above a cavity such that it is movable in at least one direction. The device has a layered structure according to the invention. Methods of making such a layered MEMS structure is also provided.
    Type: Grant
    Filed: November 6, 2013
    Date of Patent: September 20, 2016
    Assignee: Silex Microsystems AB
    Inventors: Thorbjorn Ebefors, Edvard Kalvesten, Peter Agren, Niklas Svedin
  • Publication number: 20160207758
    Abstract: A device includes a base substrate (700) with a micro component (702) attached thereto. Suitably it is provided with routing elements (704) for conducting signals to and from the component (702). It also includes spacer members (706) which also can act as conducting structures for routing signals vertically. There is a capping structure (708) of a glass material, provided above the base substrate (700), bonded via the spacer members (706), preferably by eutectic bonding, wherein the capping structure (708) includes vias (710) including metal for providing electrical connection through the capping structure. The vias can be made by a stamping/pressing method entailing pressing needles under heating to soften the glass and applying pressure, to a predetermined depth in the glass. However, other methods are possible, e-g- drilling, etching, blasting.
    Type: Application
    Filed: August 26, 2014
    Publication date: July 21, 2016
    Inventors: Edvard KALVESTEN, Thorbjorn EBEFORS, Niklas SVEDIN
  • Publication number: 20140346657
    Abstract: A method for sealing cavities in micro-electronic/-mechanical system (MEMS) devices to provide a controlled atmosphere within the sealed cavity includes providing a semiconductor substrate on which a template is provided on a localized area of the substrate. The template defines the interior shape of the cavity. Holes are made so as to enable venting of the cavity to provide a desired atmosphere to enter into the cavity through the hole. Finally, a sealing material is provided in the hole to seal the cavity. The sealing can be made by compression and/or melting of the sealing material.
    Type: Application
    Filed: December 17, 2012
    Publication date: November 27, 2014
    Applicant: SILEX MICROSYSTEMS AB
    Inventors: Thorbjorn Ebefors, Niklas Svedin
  • Patent number: 8866289
    Abstract: A sealing and bonding material structure for joining semiconductor wafers having monolithically integrated components. The sealing and bonding material are provided in strips forming closed loops. There are provided at least two concentric sealing strips on one wafer. The strips are laid out so as to surround the component(s) on the wafers to be sealed off when wafers are bonded together. The material in the strips is a material bonding the semiconductor wafers together and sealing off the monolithically integrated components when subjected to force and optionally heating. A monolithically integrated electrical and/or mechanical and/or fluidic and/or optical device including a first substrate and a second substrate, bonded together with the sealing and bonding structure, and a method of providing a sealing and bonding material structure on at least one of two wafers and applying a force and optionally heat to the wafers to join them are described.
    Type: Grant
    Filed: January 5, 2012
    Date of Patent: October 21, 2014
    Assignee: Silex Microsystems AB
    Inventors: Thorbjorn Ebefors, Edward Kalvesten, Niklas Svedin, Anders Eriksson
  • Patent number: 8729685
    Abstract: A sealing and bonding material structure for joining semiconductor wafers having monolithically integrated components. The sealing and bonding material are provided in strips forming closed loops. There are provided at least two concentric sealing strips on one wafer. The strips are laid out so as to surround the component(s) on the wafers to be sealed off when wafers are bonded together. The material in the strips is a material bonding the semiconductor wafers together and sealing off the monolithically integrated components when subjected to force and optionally heating. A monolithically integrated electrical and/or mechanical and/or fluidic and/or optical device including a first substrate and a second substrate, bonded together with the sealing and bonding structure, and a method of providing a sealing and bonding material structure on at least one of two wafers and applying a force and optionally heat to the wafers to join them are described.
    Type: Grant
    Filed: April 30, 2010
    Date of Patent: May 20, 2014
    Assignee: Silex Microsystems AB
    Inventors: Thorbjörn Ebefors, Edward Kälvesten, Niklas Svedin, Anders Eriksson
  • Patent number: 8729713
    Abstract: A vent hole precursor structure (26) in an intermediate product for a semi-conductor device has delicate structures (27, 28), and said intermediate product has a cavity (21) with a pressure therein differing from the pressure of the surroundings. The intermediate product comprises a first wafer (20) in which there is formed a depression (21). The first wafer is bonded to a second wafer (22) comprising a device layer (23) from which the structures (27, 28) are to be made by etching. A hole or groove (26) having a predefined depth extends downwards into the device layer, such that the cavity (21) during etching is opened up before the etching procedure breaks through the device layer (23) to form the structures (27, 28).
    Type: Grant
    Filed: July 28, 2011
    Date of Patent: May 20, 2014
    Assignee: Silex Microsystems AB
    Inventors: Thorbjörn Ebefors, Edvard Kälvesten, Peter Agren, Niklas Svedin
  • Publication number: 20140063580
    Abstract: A layered micro-electronic and/or micro-mechanic structure comprises at least three alternating electrically conductive layers with insulating layers between the conductive layers. There is also provided a via in a first outer layer, said via comprising an insulated conductive connection made of wafer native material through the layer, an electrically conductive plug extending through the other layers and into said via in the first outer layer in order to provide conductivity through the layers, and an insulating enclosure surrounding said conductive plug in at least one selected layer of said other layers for insulating said plug from the material in said selected layer. It also relates to micro-electronic and/or micro- mechanic device comprising a movable member provided above a cavity such that it is movable in at least one direction. The device has a layered structure according to the invention. Methods of making such a layered MEMS structure is also provided.
    Type: Application
    Filed: November 6, 2013
    Publication date: March 6, 2014
    Applicant: SILEX Microsystems AB
    Inventors: Thorbjorn Ebefors, Edvard Kalvesten, Peter Agren, Niklas Svedin
  • Patent number: 8630033
    Abstract: A layered micro-electronic and/or micro-mechanic structure comprises at least three alternating electrically conductive layers with insulating layers between the conductive layers. There is also provided a via in a first outer layer, said via comprising an insulated conductive connection made of wafer native material through the layer, an electrically conductive plug extending through the other layers and into said via in the first outer layer in order to provide conductivity through the layers, and an insulating enclosure surrounding said conductive plug in at least one selected layer of said other layers for insulating said plug from the material in said selected layer. It also relates to micro-electronic and/or micro-mechanic device comprising a movable member provided above a cavity such that it is movable in at least one direction. The device has a layered structure according to the invention. Methods of making such a layered MEMS structure is also provided.
    Type: Grant
    Filed: June 22, 2011
    Date of Patent: January 14, 2014
    Assignee: Silex Microsystems AB
    Inventors: Thorbjörn Ebefors, Edvard Kälvesten, Peter Agren, Niklas Svedin, Thomas Ericson
  • Patent number: 8592981
    Abstract: The invention relates to a layered micro-electronic and/or micro-mechanic structure, comprising at least three alternating electrically conductive layers with insulating layers between the conductive layers. There is also provided a via in a first outer layer, said via comprising an insulated conductive connection made of wafer native material through the layer, an electrically conductive plug extending through the other layers and into said via in the first outer layer in order to provide conductivity through the layers, and an insulating enclosure surrounding said conductive plug in at least one selected layer of said other layers for insulating said plug from the material in said selected layer. It also relates to micro-electronic and/or micro-mechanic device comprising a movable member provided above a cavity such that it is movable in at least one direction. The device has a layered structure according to the invention. Methods of making such a layered MEMS structure is also provided.
    Type: Grant
    Filed: December 23, 2009
    Date of Patent: November 26, 2013
    Assignee: Silex Microsystems AB
    Inventors: Thorbjörn Ebefors, Edvard Kälvesten, Peter Ågren, Niklas Svedin
  • Patent number: 8485416
    Abstract: A sealing and bonding material structure for joining semiconductor wafers having monolithically integrated components. The sealing and bonding material are provided in strips forming closed loops. There are provided at least two concentric sealing strips on one wafer. The strips are laid out so as to surround the component(s) on the wafers to be sealed off when wafers are bonded together. The material in the strips is a material bonding the semiconductor wafers together and sealing off the monolithically integrated components when subjected to force and optionally heating. A monolithically integrated electrical and/or mechanical and/or fluidic and/or optical device including a first substrate and a second substrate, bonded together with the sealing and bonding structure, and a method of providing a sealing and bonding material structure on at least one of two wafers and applying a force and optionally heat to the wafers to join them are described.
    Type: Grant
    Filed: January 5, 2012
    Date of Patent: July 16, 2013
    Assignee: Silex Microsystems AB
    Inventors: Thorbjorn Ebefors, Edward Kalvesten, Niklas Svedin, Anders Eriksson
  • Publication number: 20120112335
    Abstract: A sealing and bonding material structure for joining semiconductor wafers having monolithically integrated components. The sealing and bonding material are provided in strips forming closed loops. There are provided at least two concentric sealing strips on one wafer. The strips are laid out so as to surround the component(s) on the wafers to be sealed off when wafers are bonded together. The material in the strips is a material bonding the semiconductor wafers together and sealing off the monolithically integrated components when subjected to force and optionally heating. A monolithically integrated electrical and/or mechanical and/or fluidic and/or optical device including a first substrate and a second substrate, bonded together with the sealing and bonding structure, and a method of providing a sealing and bonding material structure on at least one of two wafers and applying a force and optionally heat to the wafers to join them are described.
    Type: Application
    Filed: January 5, 2012
    Publication date: May 10, 2012
    Applicant: SILEX MICROSYSTEMS AB
    Inventors: Thorbjörn EBEFORS, Edward KÄLVESTEN, Niklas SVEDIN, Anders ERIKSSON
  • Publication number: 20120097733
    Abstract: A sealing and bonding material structure for joining semiconductor wafers having monolithically integrated components. The sealing and bonding material are provided in strips forming closed loops. There are provided at least two concentric sealing strips on one wafer. The strips are laid out so as to surround the component(s) on the wafers to be sealed off when wafers are bonded together. The material in the strips is a material bonding the semiconductor wafers together and sealing off the monolithically integrated components when subjected to force and optionally heating. A monolithically integrated electrical and/or mechanical and/or fluidic and/or optical device including a first substrate and a second substrate, bonded together with the sealing and bonding structure, and a method of providing a sealing and bonding material structure on at least one of two wafers and applying a force and optionally heat to the wafers to join them are described.
    Type: Application
    Filed: January 5, 2012
    Publication date: April 26, 2012
    Applicant: SILEX MICROSYSTEMS AB
    Inventors: Thorbjörn EBEFORS, Edvard KÄLVESTEN, Niklas SVEDIN, Anders ERIKSSON
  • Publication number: 20120076715
    Abstract: A sealing and bonding material structure for joining semiconductor wafers having monolithically integrated components. The sealing and bonding material are provided in strips forming closed loops. There are provided at least two concentric sealing strips on one wafer. The strips are laid out so as to surround the component(s) on the wafers to be sealed off when wafers are bonded together. The material in the strips is a material bonding the semiconductor wafers together and sealing off the monolithically integrated components when subjected to force and optionally heating. A monolithically integrated electrical and/or mechanical and/or fluidic and/or optical device including a first substrate and a second substrate, bonded together with the sealing and bonding structure, and a method of providing a sealing and bonding material structure on at least one of two wafers and applying a force and optionally heat to the wafers to join them are described.
    Type: Application
    Filed: April 30, 2010
    Publication date: March 29, 2012
    Applicant: SILEX MICROSYSTEMS AB
    Inventors: Thorbjörn Ebefors, Edward Kalvesten, Niklas Svedin, Anders Eriksson
  • Publication number: 20120018852
    Abstract: A vent hole precursor structure (26) in an intermediate product for a semi-conductor device has delicate structures (27, 28), and said intermediate product has a cavity (21) with a pressure therein differing from the pressure of the surroundings. The intermediate product comprises a first wafer (20) in which there is formed a depression (21). The first wafer is bonded to a second wafer (22) comprising a device layer (23) from which the structures (27, 28) are to be made by etching. A hole or groove (26) having a predefined depth extends downwards into the device layer, such that the cavity (21) during etching is opened up before the etching procedure breaks through the device layer (23) to form the structures (27, 28).
    Type: Application
    Filed: July 28, 2011
    Publication date: January 26, 2012
    Applicant: SILEX MICROSYSTEMS AB
    Inventors: Thorbjörn Ebefors, Edvard Kälvesten, Peter Agren, Niklas Svedin
  • Publication number: 20120018898
    Abstract: The invention relates to a layered micro-electronic and/or micro-mechanic structure, comprising at least three alternating electrically conductive layers with insulating layers between the conductive layers. There is also provided a via in a first outer layer, said via comprising an insulated conductive connection made of wafer native material through the layer, an electrically conductive plug extending through the other layers and into said via in the first outer layer in order to provide conductivity through the layers, and an insulating enclosure surrounding said conductive plug in at least one selected layer of said other layers for insulating said plug from the material in said selected layer. It also relates to micro-electronic and/or micro-mechanic device comprising a movable member provided above a cavity such that it is movable in at least one direction. The device has a layered structure according to the invention. Methods of making such a layered MEMS structure is also provided.
    Type: Application
    Filed: December 23, 2009
    Publication date: January 26, 2012
    Applicant: SILEX MICROSYSTEMS AB
    Inventors: Thorbjörn Ebefors, Edvard Kälvesten, Peter Agren, Niklas Svedin
  • Publication number: 20120019886
    Abstract: A layered micro-electronic and/or micro-mechanic structure comprises at least three alternating electrically conductive layers with insulating layers between the conductive layers. There is also provided a via in a first outer layer, said via comprising an insulated conductive connection made of wafer native material through the layer, an electrically conductive plug extending through the other layers and into said via in the first outer layer in order to provide conductivity through the layers, and an insulating enclosure surrounding said conductive plug in at least one selected layer of said other layers for insulating said plug from the material in said selected layer. It also relates to micro-electronic and/or micro-mechanic device comprising a movable member provided above a cavity such that it is movable in at least one direction. The device has a layered structure according to the invention. Methods of making such a layered MEMS structure is also provided.
    Type: Application
    Filed: June 22, 2011
    Publication date: January 26, 2012
    Applicant: SILEX MICROSYSTEMS AB
    Inventors: Thorbjörn Ebefors, Edvard Kälvesten, Peter Agren, Niklas Svedin, Thomas Ericson
  • Patent number: 7560802
    Abstract: A method of making an electrical connection between a first (top) and a second (bottom) surface of a conducting or semi-conducting substrate includes creating a trench in the first surface, and establishing an insulating enclosure entirely separating a portion of the substrate, defined by the trench. Also described is a product usable as a starting substrate for the manufacture of micro-electronic and/or micro-mechanic devices, including a flat substrate of a semi-conducting or conducting material, and having a first and a second surface and at least one electrically conducting member extending through the substrate. The electrically conducting member is insulated from surrounding material of the flat substrate by a finite layer of an insulating material, and includes the same material as the substrate, i.e. it is made from the wafer material.
    Type: Grant
    Filed: March 22, 2004
    Date of Patent: July 14, 2009
    Assignee: Silex Microsystems AG
    Inventors: Edvard Kälvesten, Thorbjörn Ebefors, Niklas Svedin, Pelle Rangsten, Tommy Schönberg
  • Patent number: 7172911
    Abstract: A method of making a deflectable, free hanging micro structure having at least one hinge member, the method includes the steps of providing a first sacrificial wafer having a single crystalline material constituting material forming the micro structure. A second semiconductor wafer including necessary components for forming the structure in cooperation with the first wafer is provided. Finite areas of a structured bonding material is provided, on one or both of the wafers at selected locations, the finite areas defining points of connection for joining the wafers. The wafers are bonded using heat and optionally pressure. Sacrificial material is etched away from the sacrificial wafer, patterning the top wafer by lithography is performed to define the desired deflectable microstructures having hinges, and subsequently silicon etch to make the structures.
    Type: Grant
    Filed: February 14, 2003
    Date of Patent: February 6, 2007
    Assignee: Silex Microsystems AB
    Inventors: Edvard Kälvesten, Thorbjörn Ebefors, Niklas Svedin, H{dot over (a)}kan Westin