Patents by Inventor Niranjan R. KHASGIWALE

Niranjan R. KHASGIWALE has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Optical stack deposition and on-board metrology
    Patent number: 10886155
    Abstract: A method and apparatus for forming an optical stack having uniform and accurate layers is provided. A processing tool used to form the optical stack comprises, within an enclosed environment, a first transfer chamber, an on-board metrology unit, and a second transfer chamber. A first plurality of processing chambers is coupled to the first transfer chamber or the second transfer chamber. The on-board metrology unit is disposed between the first transfer chamber and the second transfer chamber. The on-board metrology unit is configured to measure one or more optical properties of the individual layers of the optical stack without exposing the layers to an ambient environment.
    Type: Grant
    Filed: January 16, 2019
    Date of Patent: January 5, 2021
    Assignee: Applied Materials, Inc.
    Inventors: Mingwei Zhu, Zihao Yang, Nag B. Patibandla, Daniel Lee Diehl, Yong Cao, Weimin Zeng, Renjing Zheng, Edward Budiarto, Surender Kumar Gurusamy, Todd Egan, Niranjan R. Khasgiwale
  • OPTICAL STACK DEPOSITION AND ON-BOARD METROLOGY
    Publication number: 20200227294
    Abstract: A method and apparatus for forming an optical stack having uniform and accurate layers is provided. A processing tool used to form the optical stack comprises, within an enclosed environment, a first transfer chamber, an on-board metrology unit, and a second transfer chamber. A first plurality of processing chambers is coupled to the first transfer chamber or the second transfer chamber. The on-board metrology unit is disposed between the first transfer chamber and the second transfer chamber. The on-board metrology unit is configured to measure one or more optical properties of the individual layers of the optical stack without exposing the layers to an ambient environment.
    Type: Application
    Filed: January 16, 2019
    Publication date: July 16, 2020
    Inventors: Mingwei ZHU, Zihao YANG, Nag B. PATIBANDLA, Daniel DIEHL, Yong CAO, Weimin ZENG, Renjing ZHENG, Edward BUDIARTO, Surender Kumar GURUSAMY, Todd EGAN, Niranjan R. KHASGIWALE