Abstract: A scanning mechanism includes a cantilever, an XY movable portion movable in X and Y directions parallel to an X-Y plane, an XY actuator to scan the XY movable portion in the X and Y directions, a Z actuator to scan the cantilever in a Z direction perpendicular to the X-Y plane, and a light condensing portion to cause light for detecting a displacement of the cantilever to enter the cantilever. The Z actuator and the light condensing portion are held by the XY movable portion and arranged side by side in projection to the X-Y plane.

Abstract: A scanning probe microscope to measure a sample set on a sample mount in liquid includes a scanning mechanism to scan a cantilever provided with a probe at a free end along an X-axis, a Y-axis, and a Z-axis perpendicular to each other, and a liquid contact member including an optical transmission portion to transmit detection light for detecting a displacement of the cantilever, and arranged at least partially in contact with the liquid. The liquid contact member is not scanned by the scanning mechanism.

Abstract: A scanning probe microscope includes a vibration unit to vibrate the cantilever on the basis of a vibration signal, a displacement detection unit to output a displacement signal indicating the displacement of the cantilever, a phase adjustment unit to provide a phase offset to a phase difference between the vibration signal and displacement signal, a phase signal generating unit to generate a phase signal including information regarding the phase difference and phase offset, and a control unit to control the distance between the probe and sample on the basis of the phase signal. The phase adjustment unit combines a first phase amount that cancels an initial phase difference exiting in a condition where the probe and sample are out of contact, with a second phase amount equal to or more than (0 [rad]) and less than or equal to (?/2 [rad]) and provides a combined amount to the phase difference.

Abstract: A scanning probe microscope includes a cantilever having a probe at a free end thereof; a scanner to three-dimensionally relatively move the probe and a sample; a vibrator to vibrate the cantilever based on a vibrating signal; a displacement detector to detect a displacement of the cantilever and to output a displacement signal indicating the displacement; and a phase difference information detecting section to generate a phase signal including information of a phase difference between the vibrating signal and the displacement signal. The phase difference information detecting section includes a phase regulating portion to provide, to the phase difference, a phase offset to cancel an initial phase difference present in a state in which the probe is not in contact with the sample.

Abstract: A compound microscope of an optical microscope and a scanning probe microscope includes a stage to support a sample substrate holding a sample, and a cantilever chip having a substrate, a cantilever supported by the substrate, and a probe provided at the free end of the cantilever. The compound microscope further includes a scanner to hold the cantilever chip so that the probe faces the sample substrate and so that the substrate is inclined with respect to the sample substrate and to three-dimensionally scan the cantilever chip with respect to the sample substrate, a displacement sensor to optically detect the displacement of the cantilever, and an illumination light source to apply illumination light for observation by the optical microscope to the sample through the space between the substrate and the sample substrate.

Abstract: A scanning probe microscope includes a cantilever having a probe at a free thereof, a displacement detector to output a displacement signal of the cantilever, a vibrator to vibrate the cantilever, and a scanner to three-dimensionally relatively move the sample and probe. A mixed signal generator includes an amplitude information detecting section to provide a vibrating signal to the vibrator and generate an amplitude signal including information of an amplitude of the displacement signal, and a phase difference information detecting section to generate a phase signal including information of a phase difference between the displacement signal and the synchronous signal, and adds the displacement signal and the synchronous signal to generate a mixed signal. A controller to control the scanner includes a Z control section, which controls the distance between the sample and the probe on the basis of the mixed signal.

Abstract: A scanning probe microscope includes a vibration unit to vibrate the cantilever on the basis of a vibration signal, a displacement detection unit to output a displacement signal indicating the displacement of the cantilever, a phase adjustment unit to provide a phase offset to a phase difference between the vibration signal and displacement signal, a phase signal generating unit to generate a phase signal including information regarding the phase difference and phase offset, and a control unit to control the distance between the probe and sample on the basis of the phase signal. The phase adjustment unit combines a first phase amount that cancels an initial phase difference exiting in a condition where the probe and sample are out of contact, with a second phase amount equal to or more than (0 [rad]) and less than or equal to (?/2 [rad]) and provides a combined amount to the phase difference.

Abstract: A scanning mechanism includes a cantilever, an XY movable portion movable in X and Y directions parallel to an X-Y plane, an XY actuator to scan the XY movable portion in the X and Y directions, a Z actuator to scan the cantilever in a Z direction perpendicular to the X-Y plane, and a light condensing portion to cause light for detecting a displacement of the cantilever to enter the cantilever. The Z actuator and the light condensing portion are held by the XY movable portion and arranged side by side in projection to the X-Y plane.

Abstract: A scanning mechanism includes a cantilever, an XY movable portion movable in X and Y directions parallel to an X-Y plane, an XY actuator to scan the XY movable portion in the X and Y directions, a Z actuator to scan the cantilever in a Z direction perpendicular to the X-Y plane, and a light condensing portion to cause light for detecting a displacement of the cantilever to enter the cantilever. The Z actuator and the light condensing portion are held by the XY movable portion and arranged side by side in projection to the X-Y plane.

Abstract: An electromagnetic shielding tube has a resin inner layer as the innermost layer, a resin outer layer as the outermost layer, and a metal metal-layer between the inner layer and the outer layer. The bonding strength between the outer layer and the metal layer is made weaker with respect to the bonding strength between the inner layer and the metal layer. For example, while an adhesive layer is provided between the inner layer and the metal layer, the outer layer can be directly extrusion coated onto the metal layer without providing an adhesive layer or the like between the outer layer and the metal layer.

Abstract: A scanning mechanism includes a movable portion to which a scanning target object is attached, and an X-Y actuator to scan the movable portion in an X direction and a Y direction perpendicular to the X direction. The X-Y actuator is symmetrical with respect to a straight line parallel to the Y direction and asymmetrical with respect to a straight line parallel to the X direction.

Abstract: A scanning probe microscope to measure a sample set on a sample mount in liquid includes a scanning mechanism to scan a cantilever provided with a probe at a free end along an X-axis, a Y-axis, and a Z-axis perpendicular to each other, and a liquid contact member including an optical transmission portion to transmit detection light for detecting a displacement of the cantilever, and arranged at least partially in contact with the liquid. The liquid contact member is not scanned by the scanning mechanism.

Abstract: A compound microscope includes an optical microscope to acquire time-series successive optical observation images of an observation target, a scanning probe microscope to acquire time-series successive probe-derived observation images of the observation target, and a control device to simultaneously give a common control command to the optical microscope and the scanning probe microscope.

Abstract: A compound microscope of an optical microscope and a scanning probe microscope includes a stage to support a sample substrate holding a sample, and a cantilever chip having a substrate, a cantilever supported by the substrate, and a probe provided at the free end of the cantilever. The compound microscope further includes a scanner to hold the cantilever chip so that the probe faces the sample substrate and so that the substrate is inclined with respect to the sample substrate and to three-dimensionally scan the cantilever chip with respect to the sample substrate, a displacement sensor to optically detect the displacement of the cantilever, and an illumination light source to apply illumination light for observation by the optical microscope to the sample through the space between the substrate and the sample substrate.

Abstract: A scanning mechanism includes a cantilever, an XY movable portion movable in X and Y directions parallel to an X-Y plane, an XY actuator to scan the XY movable portion in the X and Y directions, a Z actuator to scan the cantilever in a Z direction perpendicular to the X-Y plane, and a light condensing portion to cause light for detecting a displacement of the cantilever to enter the cantilever. The Z actuator and the light condensing portion are held by the XY movable portion and arranged side by side in projection to the X-Y plane.

Abstract: A scanning probe microscope includes a cantilever having a probe at a free thereof, a displacement detector to output a displacement signal of the cantilever, a vibrator to vibrate the cantilever, and a scanner to three-dimensionally relatively move the sample and probe. A mixed signal generator includes an amplitude information detecting section to provide a vibrating signal to the vibrator and generate an amplitude signal including information of an amplitude of the displacement signal, and a phase difference information detecting section to generate a phase signal including information of a phase difference between the displacement signal and the synchronous signal, and adds the displacement signal and the synchronous signal to generate a mixed signal. A controller to control the scanner includes a Z control section, which controls the distance between the sample and the probe on the basis of the mixed signal.

Abstract: A cutting device includes: a first guide portion that supports a sheet as a target to be cut; and a pair of cutting blades that cuts the sheet by performing a shearing operation on the sheet when the pair of cutting blades is in a state of pinching a cutting-target part of the sheet supported by the first guide portion from both sides thereof. The pair of cutting blades is configured of a fixed blade and a movable blade. The first guide portion supports the sheet in a manner in which the sheet is moved along a main transport surface that is so set as to pass through between the fixed blade and the movable blade when the fixed blade and the movable blade are not being engaged, and also supports the sheets so that the sheet can move from the main transport surface.

Abstract: An optical scanner driving apparatus comprises a moving plate having a reflection plane and a driving coil, a magnetic field generating section arranged in a vicinity of the moving plate, a driving circuit to supply a driving signal to the driving coil, a first output acquiring section to acquire an output containing an electromotive force generated in the driving coil by an electromagnetic induction, a second output acquiring section comprising an impedance element having a corresponding impedance to an impedance of the driving coil, to acquire an output generated by the impedance element by supplying the driving signal to the impedance element, and a control circuit to control a state of the torsional vibration of the moving plate according to the electromotive force generated in the driving coil on the basis of the outputs acquired by the first output acquiring section and the second output acquiring section.

Abstract: In a microscope system in which at least one of a stage on which a sample 4 is mounted and an objective lens 6 can move relatively in a direction of an optical axis, a contact judgment section 12 judges the possibility of contact between the sample 4 and the objective lens 6 based on a result of comparison between a detection output from a contact sensor 11 which detects contact between the sample 4 and the objective lens 6 and a preset threshold value, excessive contact between the sample 4 and the objective lens 6 is avoided based on a result of this judgment, and a threshold value in the contact judgment section 12 is updated based on the output from the contact sensor 11 every predetermined time.

Abstract: In a microscope system in which at least one of a stage on which a sample 4 is mounted and an objective lens 6 can move relatively in a direction of an optical axis, a contact judgment section 12 judges the possibility of contact between the sample 4 and the objective lens 6 based on a result of comparison between a detection output from a contact sensor 11 which detects contact between the sample 4 and the objective lens 6 and a preset threshold value, excessive contact between the sample 4 and the objective lens 6 is avoided based on a result of this judgment, and a threshold value in the contact judgment section 12 is updated based on the output from the contact sensor 11 every predetermined time.