Abstract: A resin composition contains a thermosetting resin (A) and an inorganic filler (B). The inorganic filler (B) includes: a first filler (B1); and a second filler (B2) of a nanometer scale having a smaller particle size than the first filler (B1). The first filler (B1) includes an anhydrous magnesium carbonate filler (b1) and an alumina filler (b2). The proportion of the first filler (B1) relative to a total solid content in the resin composition is equal to or greater than 50% by volume and equal to or less than 90% by volume. The proportion of the second filler (B2) relative to the total solid content in the resin composition is equal to or greater than 0.1% by volume and equal to or less than 2.0% by volume.

Abstract: A target object detecting device including first and second transmission signal generators, a wave transmitting array, first and second switches, and a controller is disclosed. The first and second transmission signal generators generate first and second transmission signals, respectively. The wave transmitting array has a plurality of wave transmitting elements which convert the first and second transmission signals into transmission waves. The first switch supplies the first transmission signal to one of the wave transmitting elements. The second switch supplies the second transmission signal to one of the wave transmitting elements. The controller performs a control in which the first switch switches the wave transmitting element to which the first transmission signal is supplied, from an element n to an element n+1, and the second switch switches the wave transmitting element to which the second transmission signal is supplied, from an element m to an element m+1.

Abstract: A resin composition contains a thermosetting resin (A) and an inorganic filler (B). The inorganic filler (B) includes: a first filler (B1); and a second filler (B2) of a nanometer scale having a smaller particle size than the first filler (B1). The first filler (B1) includes an anhydrous magnesium carbonate filler (b1) and an alumina filler (b2). The proportion of the first filler (B1) relative to a total solid content in the resin composition is equal to or greater than 50% by volume and equal to or less than 90% by volume. The proportion of the second filler (B2) relative to the total solid content in the resin composition is equal to or greater than 0.1% by volume and equal to or less than 2.0% by volume.

Abstract: To realize a sample lifting and lowering device capable of easily responding to increase of a diameter of a sample with light weight and high rigidity as well as with less directional dependence of rigidity as the sample lifting lowering device arranged above a horizontal movement mechanism.

Abstract: To realize a sample lifting and lowering device capable of easily responding to increase of a diameter of a sample with weight and high rigidity as well as with less directional dependence of rigidity as the sample lifting lowering device arranged above a horizontal movement mechanism.

Abstract: Provided is a sample positioning technology wherein micro-vibrations of a top table on which a sample is placed are suppressed such that the quality of an image to be observed or the precision of a measured dimension value can be improved. A sample positioning apparatus according to the present invention is provided with an active brake for stopping the top table, an inner frame which surrounds the active brake, an outer frame which surrounds the inner frame, and actuators for driving the active brake. The actuators, after driving the active brake to stop the top table with respect to a stage, press the outer frame to adjust the position of the top table.

Abstract: Provided is a sample positioning technology wherein micro-vibrations of a top table on which a sample is placed are suppressed such that the quality of an image to be observed or the precision of a measured dimension value can be improved. A sample positioning apparatus according to the present invention is provided with an active brake for stopping the top table, an inner frame which surrounds the active brake, an outer frame which surrounds the inner frame, and actuators for driving the active brake. The actuators, after driving the active brake to stop the top table with respect to a stage, press the outer frame to adjust the position of the top table.

Abstract: Disclosed is a smaller and lighter stage device which can be applied to a device such as a length measurement SEM for inspecting and/or evaluating a semiconductor, and in which the effect of a magnetic field on an electron beam can be reduced. Linear motors 110, 111, 112, 113 are disposed on four sides of a base 104 to be distanced from an electron beam projection position (the center of the stage device), respectively. The base 104 has dimensions substantially equivalent to minimum dimensions determined by the size of a top table 101 and a movable stroke. Linear motor stators 110, 112 are configured to have a “C-shaped” structure whose opening faces outside of the stage device, respectively. Further, a movable table is coupled to the top table via linear guides 107, 109 composed of a nonmagnetic material or roller mechanisms composed of a nonmagnetic material.

Abstract: A stage apparatus includes a column for irradiating a sample with a charged particle beam, a vacuum sample chamber to which the column is attached, moving tables disposed in the vacuum sample chamber to move the sample relatively to the column, and position detectors for detecting positions of the moving tables. The stage apparatus includes an attachment member disposed between the column and the vacuum sample chamber. The attachment member has an opening which restricts movement of the column in a same direction as directions of the moving tables. Reference mirrors in the position detectors for detecting the positions of the tables are attached to the attachment member. Each of the reference mirrors has an adjustment apparatus to adjust a relative angle between the reference mirror and the laser beam.

Abstract: Disclosed is a smaller and lighter stage device which can be applied to a device such as a length measurement SEM for inspecting and/or evaluating a semiconductor, and in which the effect of a magnetic field on an electron beam can be reduced. Linear motors 110, 111, 112, 113 are disposed on four sides of a base 104 to be distanced from an electron beam projection position (the center of the stage device), respectively. The base 104 has dimensions substantially equivalent to minimum dimensions determined by the size of a top table 101 and a movable stroke. Linear motor stators 110, 112 are configured to have a “C-shaped” structure whose opening faces outside of the stage device, respectively. Further, a movable table is coupled to the top table via linear guides 107, 109 composed of a nonmagnetic material or roller mechanisms composed of a nonmagnetic material.

Abstract: A specimen stage apparatus has a braking structure which can generate a braking force enough to stop a specimen stage while keeping a movable table from increasing in its weight. The specimen stage apparatus has an X guide fixed on an X base and representing a guide structure in X direction, an X table constrained by the X guide to be movable in X direction, an X actuator having its movable part fixed to the X table and an X brake fixed to the X base and representing a braking structure for the X table. A controller carries out positioning control in which it generates a braking force by pushing the X brake against the bottom surface of the X table to stop a specimen stage and turning off the servo-control of the X actuator after stoppage of the specimen stage.

Abstract: A specimen stage apparatus has a braking structure which can generate a braking force enough to stop a specimen stage while keeping a movable table from increasing in its weight. The specimen stage apparatus has an X guide fixed on an X base and representing a guide structure in X direction, an X table constrained by the X guide to be movable in X direction, an X actuator having its movable part fixed to the X table and an X brake fixed to the X base and representing a braking structure for the X table. A controller carries out positioning control in which it generates a braking force by pushing the X brake against the bottom surface of the X table to stop a specimen stage and turning off the servo-control of the X actuator after stoppage of the specimen stage.

Abstract: In a paper-leaves separating/supplying apparatus comprising a rotary separating/supplying belt, a vacuum suction device and a separating/supplying device, the vacuum suction device takes up one by one a plurality of paper leaves set together and conveyed as far as a position at which they come into contact with a belt surface of the separating/supplying belt so that the paper leaf is attached onto the belt surface and is fed toward the downstream side in accordance with the rotary motion of the separating/supplying belt. The belt surface of the separating/supplying belt is placed in a state perpendicular to a traveling plane of the paper leaves or in a state inclined toward the paper leaves.

Abstract: In a paper-leaves conveying means for conveying a plurality of paper leaves, set together in a bundle in a depositing section, toward a paper-leaves feeding position where a separating/supplying belt exists, an arm is provided which is designed to be moved toward the paper-leaves feeding position in a protruding condition into the interior of the depositing section for supporting side surfaces of the paper leaves, and further to be retreated instantaneously from the interior of the depositing section immediately before the last paper leaf existing between the arm and the separating/supplying belt is handed over to the separating/supplying belt side. Thus, the arm can support the paper leaves until immediately before they are handed over to the separating/supplying belt, which eliminates the occurrence of the falling-down of the paper leaves at the paper-leaves feeding position.

Abstract: In a paper-leaves conveying means for conveying a plurality of paper leaves, set together in a bundle in a depositing section, toward a paper-leaves feeding position where a separating/supplying belt exists, an arm is provided which is designed to be moved toward the paper-leaves feeding position in a protruding condition into the interior of the depositing section for supporting side surfaces of the paper leaves, and further to be retreated instantaneously from the interior of the depositing section immediately before the last paper leaf existing between the arm and the separating/supplying belt is handed over to the separating/supplying belt side. Thus, the arm can support the paper leaves until immediately before they are handed over to the separating/supplying belt, which eliminates the occurrence of the falling-down of the paper leaves at the paper-leaves feeding position.

Abstract: In a paper-leaves separating/supplying apparatus comprising a rotary separating/supplying belt, a vacuum suction device and a separating/supplying device, the vacuum suction device takes up one by one a plurality of paper leaves set together and conveyed as far as a position at which they come into contact with a belt surface of the separating/supplying belt so that the paper leaf is attached onto the belt surface and is fed toward the downstream side in accordance with the rotary motion of the separating/supplying belt. The belt surface of the separating/supplying belt is placed in a state perpendicular to a traveling plane of the paper leaves or in a state inclined toward the paper leaves.

Abstract: The present invention relates to a spring-constant variable type stabilizer device for a vehicle, the device comprising a stabilizer provided between left and right wheels of the vehicle and a control cylinder arranged between the stabilizer and a lower arm, wherein spring constant of the stabilizer is variably adjusted by controlling the control cylinder. An oil port of an oil passage in communication with a reservoir chamber in a position assuming a neutral position of a piston stroke region is formed in a cylinder body of the control cylinder, a piston within the cylinder body is always biased from both directions thereof by means of a pair of springs, and a locked state of the control cylinder is promptly attained always in a complete neutral position.

Abstract: The welding position detecting apparatus incorporates a detecting portion including light emitter for emitting a light stripe onto a beveling surface of a work to be welded and a camera for receiving a reflected light from the beveling surface, a support member to which the detecting portion is mounted, which is disposed for rotation about an axis of the welding torch, and a motor for rotating the support member, whereby the detecting portion is rotated to a desired angular position about the axis of the welding torch.

Abstract: A welding position detecting apparatus provided on a welding torch which forms an arc between a welding wire and a groove face on a work piece. The apparatus has an optical system for irradiating the groove face with a converging ray at a point in advance of the point of the arc so as to form a groove face crossing image, and an observing optical system which introduces this groove face crossing image and an arc image into its field of view and by which the groove face crossing image and the arc image are detected at the same time.