Abstract: There is provided a method of performing an analysis of a defect in a pattern of an imprint material on a substrate that has undergone an imprint process of transferring a pattern of a mold onto the substrate. The method includes obtaining a defect distribution of the pattern on the substrate, obtaining map information indicating an arrangement of the imprint material on the substrate, and determining a type of a defect based on a relationship between a position of the defect in the defect distribution and a position of a gap in the imprint material generated in a process of spreading the imprint material by the imprint process, wherein the position of the gap is predicted based on the map information.

Abstract: An imprint apparatus for forming a pattern of an imprint material on a substrate using a mold, includes a driving unit configured to adjust a distance and a relative tilt between the mold and the substrate, an image capturing unit configured to capture a plurality of times an interference fringe formed by illuminating the substrate via the mold in a process of enlarging a contact area between the mold and the imprint material by reducing the distance between the mold and the substrate by the driving unit, and a control unit configured to control the driving unit so as to correct the relative tilt between the mold and the substrate a plurality of times in the process based on images captured by the image capturing unit a plurality of times.

Abstract: An exposure apparatus advantageous for reducing the driving time of a stage is provided. In the apparatus, an input of an arrangement of exposure shots and an exposure order are received. An input of an upper limit acceleration value and an upper limit velocity value of the stage are received. A target locus of the stage is created using constrained-quadratic-linear programming such that the driving time of the stage from the end of an exposure to the start of the next exposure is within an acceptable value range, based on the input arrangement of exposure shots and exposure order, and the input upper limit acceleration value and upper limit velocity value. A driving unit that drives the stage is controlled based on the created target locus.

Abstract: An exposure apparatus advantageous for reducing the driving time of a stage is provided. In the apparatus, an input of an arrangement of exposure shots and an exposure order are received. An input of an upper limit acceleration value and an upper limit velocity value of the stage are received. A target locus of the stage is created using constrained-quadratic-linear programming such that the driving time of the stage from the end of an exposure to the start of the next exposure is within an acceptable value range, based on the input arrangement of exposure shots and exposure order, and the input upper limit acceleration value and upper limit velocity value. A driving unit that drives the stage is controlled based on the created target locus.

Abstract: A fastener driving tool is capable of not only linearly driving but also rotationally fastening a fastener into a workpiece P. The fastener driving tool includes a housing 2, a nose portion 40 formed with an injection passage 40a through which a fastener 41 is driven, a magazine 4 accommodating fasteners 41 and supplying a fastener 41 to the nose portion 40, a push lever 5 movable relative to the housing 2 upon depression against the workpiece P, combustion chamber frames 12, 22 movable in the housing 2 in accordance with the movement of the push lever 5, and first and second cylinders 7, 8 fixed to the housing 2. First and second pistons 71, 81 are movably disposed in the first and second cylinders 7,8, respectively, and a bit 9 extends from the first piston 71. A rod 14 formed with a rack 14A extends from the second piston 72. The rack 14A is engageable with a motion conversion mechanism 6 for converting a linear motion of the rod 14 into rotational motion of the bit 9.

Abstract: A screw driving machine includes a bit that is movable to strike a screw against a workpiece and rotatable to rotate the screw to the workpiece, a combustion-type power mechanism including a spark plug that ignites combustible gas filled in a combustion chamber to apply striking force to cause the bit to strike the screw, a motor that generates a rotative force when supplied with electric force, and a power transmission mechanism that transmits the rotative force generated at the motor to the bit to cause the bit to rotate.

Abstract: A fastener driving tool is capable of not only linearly driving but also rotationally fastening a fastener into a workpiece P. The fastener driving tool includes a housing 2, a nose portion 40 formed with an injection passage 40a through which a fastener 41 is driven, a magazine 4 accommodating fasteners 41 and supplying a fastener 41 to the nose portion 40, a push lever 5 movable relative to the housing 2 upon depression against the workpiece P, combustion chamber frames 12, 22 movable in the housing 2 in accordance with the movement of the push lever 5, and first and second cylinders 7, 8 fixed to the housing 2. First and second pistons 71, 81 are movably disposed in the first and second cylinders 7,8, respectively, and a bit 9 extends from the first piston 71. A rod 14 formed with a rack 14A extends from the second piston 72. The rack 14A is engageable with a motion conversion mechanism 6 for converting a linear motion of the rod 14 into rotational motion of the bit 9.

Abstract: A screw driver capable of stably stopping a bit to stabilize fastening depth of a screw. The screw driver includes a rotary portion, a housing, and a clutch mechanism. The rotary portion is rotated by a power source and has a bit engageable with a screw. The rotary portion also has a moving portion holding the bit and movable between a top dead center and a bottom dead center in an axial direction of the rotary portion. The housing rotatably supports the rotary portion. The clutch mechanism includes a first clutch plate unrotatable relative to the housing, and a second clutch plate movable in the axial direction and rotatable integrally with the rotation of the rotary portion. The first and second clutch plates are positioned to be urged by the moving portion and pressed together when the moving portion reaches the bottom dead center.

Abstract: When a push lever is brought in contact with a member to be driven, a second trigger stopper slides and a first trigger stopper slides via a second spring. After a third trigger stopper turns ON a push switch 18 according to sliding of the first trigger stopper, the first trigger stopper further slides and a projecting portion and a projecting portion of a trigger are disengaged from each other, so that the trigger is made rotatable. A trigger switch is turned ON according to rotation of the trigger.

Abstract: A screw driving machine includes a bit that is movable to strike a screw against a workpiece and rotatable to rotate the screw to the workpiece, a combustion-type power mechanism including a spark plug that ignites combustible gas filled in a combustion chamber to apply striking force to cause the bit to strike the screw, a motor that generates a rotative force when supplied with electric force, and a power transmission mechanism that transmits the rotative force generated at the motor to the bit to cause the bit to rotate.

Abstract: When a push lever is brought in contact with a member to be driven, a second trigger stopper slides and a first trigger stopper slides via a second spring. After a third trigger stopper turns ON a push switch 18 according to sliding of the first trigger stopper, the first trigger stopper further slides and a projecting portion and a projecting portion of a trigger are disengaged from each other, so that the trigger is made rotatable. A trigger switch is turned ON according to rotation of the trigger.

Abstract: The combustion type power tool includes a housing accommodating a combustion chamber and an ignition plug for igniting a combustion gas supplied into the combustion chamber. In the housing is defined a lithium ion battery accommodating part for causing the ignition plug to generate ignition energy. The housing includes a handle part. The lithium ion battery accommodating part is arranged at the free end of the handle part.