Patents by Inventor Patrick WARNNAR

Patrick WARNNAR has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • METROLOGY METHOD AND ASSOCIATED COMPUTER PRODUCT
    Publication number: 20220252990
    Abstract: Disclosed is a method comprising measuring radiation reflected from a metrology target and decomposing the measured radiation in components, for example Fourier components or spatial components. Further, there is disclosed a recipe selection method which provides an algorithm to select a parameter of the metrology apparatus based on re-calculated dependencies of 5 the measured radiation based on single components.
    Type: Application
    Filed: July 7, 2020
    Publication date: August 11, 2022
    Applicant: ASML Netherlands B,V.
    Inventors: Narjes JAVAHERI, Maurits VAN DER SCHAAR, Tieh-Ming CHANG, Hilko Dirk BOS, Patrick WARNNAR, Samira BAHRAMI, Mohammadreza HAJIAHMADI, Sergey TARABRIN, Mykhailo SEMKIV