Patents by Inventor Paul Andrew Spence

Paul Andrew Spence has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Electrode configuration for extreme-UV electrical discharge source
    Patent number: 6498832
    Abstract: It has been demonstrated that debris generation within an electric capillary discharge source, for generating extreme ultraviolet and soft x-ray, is dependent on the magnitude and profile of the electric field that is established along the surfaces of the electrodes. An electrode shape that results in uniform electric field strength along its surface has been developed to minimize sputtering and debris generation.
    Type: Grant
    Filed: March 13, 2001
    Date of Patent: December 24, 2002
    Assignee: EUV LLC
    Inventors: Paul Andrew Spence, Neal Robert Fornaciari, Jim Jihchyun Chang
  • ELECTRODE CONFIGURATION FOR EXTREME-UV ELECTRICAL DISCHARGE SOURCE
    Publication number: 20020159568
    Abstract: It has been demonstrated that debris generation within an electric capillary discharge source, for generating extreme ultraviolet and soft x-ray, is dependent on the magnitude and profile of the electric field that is established along the surfaces of the electrodes. An electrode shape that results in uniform electric field strength along its surface has been developed to minimize sputtering and debris generation.
    Type: Application
    Filed: March 13, 2001
    Publication date: October 31, 2002
    Inventors: Paul Andrew Spence, Neal Robert Fornaciari, Jim Jihchyun Chang