Abstract: Embodiments of the present disclosure generally provide apparatus and methods for cooling a substrate support. In one embodiment the present disclosure provides a cooling system for a substrate support. The cooling system includes a substrate support with cooling channels located within the substrate support, a heat exchanger fluidly coupled to the cooling channels, a compressor fluidly coupled to the heat exchanger, a cooling fluid supply source fluidly coupled to the cooling fluid system and a vacuum pump.

Abstract: Embodiments of the present disclosure generally provide apparatus and methods for cooling a substrate support. In one embodiment the present disclosure provides an electrostatic chuck for a processing system. The electrostatic chuck includes a cylindrical body having a heater element, a clamping electrode and spiral fluid channel in the cylindrical body, the spiral fluid channel fluidly connected to a compressor.

Abstract: A substrate illumination and inspection system provides for illuminating and inspecting a substrate particularly the substrate edge. The system uses a light diffuser with a plurality of lights disposed at its exterior or interior for providing uniform diffuse illumination of a substrate. An optic and imaging system exterior of the light diffuser are used to inspect the plurality of surfaces of the substrate including specular surfaces. An automatic defect characterization processor is provided.

Abstract: A substrate illumination and inspection system provides for illuminating and inspecting a substrate particularly the substrate edge. The system a image processor to automatically detect and characterize defects on the wafer's edge.

Abstract: A substrate illumination and inspection system provides for illuminating and inspecting a substrate particularly the substrate edge. The system uses a light diffuser with a plurality of lights disposed at its exterior or interior for providing uniform diffuse illumination of a substrate. An optic and imaging system exterior of the light diffuser are used to inspect the plurality of surfaces of the substrate including specular surfaces. The optic can be rotated radially relative to a center point of the substrate edge to allow for focused inspection of all surfaces of the substrate edge.

Abstract: An edge area of the substrate processing device is disclosed. The edge area being processed is isolated from the remainder of the substrate by directing a flow of an inert gas through a plenum near the area to be processed thus forming a barrier while directing a flow of reactive species at an angle relative to the top surface of the substrate towards the substrate edge area thus processing the substrate edge area. A flow of oxygen containing gas into the processing chamber together with a negative exhaust pressure may contribute to the biasing of reactive species and other gases away from the non-processing areas of the substrate.

Abstract: An auxiliary power system for a bicycle having a motor (10) attached to the bicycle flame (22) by thin clamps (30), which can be arranged in a variety of positions to avoid disturbing the control cables. Power is delivered on demand via a sprocket driving a single freewheel (180) attached to a modified left crank (200). The gearbox (20) may be attached to the frame by means of a quick-release system. A bushing (600), (700), (820) may be used instead of a modified as a means of mounting the freewheel to the crank axle. (720), (610), (850b). To prevent accidental simultaneous braking and triggering, triggering the system is accomplished by placing the trigger switch (430) so that the rider's fingers must disengage the brake in order to engage the motor. Accidental triggering may be prevented by placing a trigger switch on each handle and wiring them in series so that both switches must be engaged to obtain power.

Abstract: A laser-sinterable powder product has been prepared having unique properties which allow the powder to be sintered in a selective laser sintering machine to form a sintered part which is near-fully dense. For most purposes, the sintered part is indistinguishable from another part having the same dimensions made by isotropically molding the powder. In addition to being freely flowable at a temperature near its softening temperature, a useful powder is disclosed that has a two-tier distribution in which substantially no primary particles have an average diameter greater than 180 .mu.m, provided further that the number average ratio of particles smaller than 53 .mu.m is greater than 80%, the remaining larger particles being in the size range from 53 .mu.m to 180 .mu.m. A powder with slow recrystallization rates, as evidenced by non-overlapping or slightly overlapping endothermic and exothermic peaks in their differential scanning calorimetry characteristics for scan rates of on the order of 10.degree. C. to 20.

Abstract: A powder for use in selective laser sintering, from which prototype articles and masters for molds may be formed, is disclosed. The powder is formed by spray drying a polymer emulsion to yield a distribution of particles of substantially spherical shape. The powder is then air classified to remove excessively small particles from the distribution; the powder may also be screened to remove large particles therefrom, as well. The resulting distribution of particle sizes, by volume, preferably has a mean particle size of between about 20.mu. and about 50.mu., with preferably less than about 5% (by volume) of its particles with a size of less than about 15.mu. and less than about 2% (by volume) of its particles with a size of greater than about 75.mu.. The powder is subjected to selective laser sintering to produce an article of approximately 55% to 75% of theoretical density. The article may be used as a prototype article or part, or as a pattern or master for a mold.

Abstract: A composite powder specially adapted for use in selective laser sintering is disclosed. The composite powder includes a polymer powder dry mixed with a reinforcement powder, where the polymer powder has a melting temperature substantially lower than that of the reinforcement powder. In the case where nearfully dense parts are to be formed, the first constituent powder is preferably a semi-crystalline powder, for example nylon 11, of a composition suitable for forming near-fully dense parts when used unblended in selective laser sintering; if porous parts are desired, the polymer powder is an amorphous powder, such as polycarbonate, polystyrene, acrylates, and styrene/acrylate copolymers. The reinforcement powder is preferably microspheres of glass, preferably coated to enhance wetting and adhesion with the polymer powder when selective laser sintering is performed.

Abstract: A laser-sinterable powder product has been prepared having unique properties which allow the powder to be sintered in a selective laser sintering machine to form a sintered part which is near-fully dense. For most purposes, the sintered part is indistinguishable from another part having the same dimensions made by isotropically molding the powder. In addition to being freely flowable at a temperature near its softening temperature, a useful powder is disclosed that has a two-tier distribution in which substantially no primary particles have an average diameter greater than 180 .mu.m, provided further that the number average ratio of particles smaller than 53 .mu.m is greater than 80%, the remaining larger particles being in the size range from 53 .mu.m to 180 .mu.m. A powder with slow recrystallization rates, as evidenced by non-overlapping or slightly overlapping endothermic and exothermic peaks in their differential scanning calorimetry characteristics for scan rates of on the order of 10.degree. C. to 20.

Abstract: A laser-sinterable powder product has been prepared having unique properties which allow the powder to be sintered in a selective laser sintering machine to form a sintered part which is near-fully dense. For most purposes, the sintered part is indistinguishable from another part having the same dimensions made by isotropically molding the powder. In addition to being freely flowable at a temperature near its softening temperature, a useful powder is disclosed that has a two-tier distribution in which substantially no primary particles have an average diameter greater than 180 .mu.m, provided further that the number average ratio of particles smaller than 53 .mu.m is greater than 80%, the remaining larger particles being in the size range from 53 .mu.m to 180 .mu.m. A powder with slow recrystallization rates, as evidenced by non-overlapping endothermic and exothermic peaks in their differential scanning calorimetry characteristics for scan rates of on the order of 10.degree. C. to 20.degree. C.

Abstract: An apparatus and method for producing parts by fusing selected portions of a layer of powder at a target area, including the systems for delivering the powder to the target area, is disclosed. Multiple powder pistons are included in the apparatus, each of which lift a volume of powder above a surface in an alternating manner relative to one another. Powder delivery begins by the lifting of a volume of powder at a first location on one side of the target area. A counter-rotating roller moves across the lifted powder, distributes it over the target area, and rests beyond a second powder lifting location on the other side of the target area. Portions of the powder layer are then fused at the target area according to a cross-section of the part to be produced, and is followed by lowering a part cylinder at the target area in order to accept the next layer of powder.

Abstract: A laser-sinterable powder product has been prepared having unique properties which allow the powder to be sintered in a selective laser sintering machine to form a sintered part which is near-fully dense. For most purposes, the sintered part is indistinguishable from another part having the same dimensions made by isotropically molding the powder. In addition to being freely flowable at a temperature near its softening temperature, a useful powder is disclosed that has a two-tier distribution in which substantially no primary particles have an average diameter greater than 180 ?m, provided further that the number average ratio of particles smaller than 53 ?m is greater than 80%, the remaining larger particles being in the size range from 53 ?m to 180 ?m. A powder with slow recrystallization rates, as evidenced by non-overlapping or slightly overlapping endothermic and exothermic peaks in their differential scanning calorimetry characteristics for scan rates of on the order of 10° C. to 20° C.