Abstract: A method of manufacturing an integrated circuit (IC) utilizes a shallow trench isolation (STI) technique. The shallow trench isolation technique is used in strained silicon (SMOS) process. The liner for the trench is formed to in a low temperature process which reduces germanium outgassing. The low temperature process can be a UVO, ALD, CVD, PECVD, or HDP process.

Abstract: A method for forming an interconnect structure includes forming a dielectric layer above a first layer having a conductive region defined therein. An opening is defined in the dielectric layer to expose at least a portion of the conductive region. A metal silicide is formed in the opening to define the interconnect structure. A semiconductor device includes a first layer having a conductive region defined therein, a dielectric layer formed above the first layer, and a metal silicide interconnect structure extending through the dielectric layer to communicate with the conductive region.

Abstract: MOS transistors and methods for fabricating MOS transistors are provided. One exemplary method comprises providing a substrate having a silicon-comprising surface region. A first metal silicide layer is formed overlying the silicon-comprising surface region. Ion implantation is used to implant rare earth metal ions at an interface between the first metal silicide layer and the silicon-comprising surface region. The substrate is heated to form a second rare earth metal silicide layer disposed below the first metal silicide layer.

Abstract: Low contact resistance semiconductor devices and methods for fabricating such semiconductor devices are provided. In accordance with one exemplary embodiment, a method comprises depositing an insulating material overlying a metal silicide region and etching a contact opening within the insulating material and exposing the metal silicide region. The contact opening is at least partially bottom-filled with substantially pure cobalt. A conductor is deposited in the contact opening if, after the step of at least partially bottom-filling, the contact opening is not filled with the substantially pure cobalt.

Abstract: A semiconductor device is disclosed having a conductive gate structure overlying a semiconductor layer having a major surface. An isolation material is recessed within a trench region below the major surface of the semiconductor layer. An epitaxial layer is formed overlying a portion of the major surface and on an active region forming a sidewall of the trench.

Abstract: A semiconductor device is disclosed having a conductive gate structure overlying a semiconductor layer having a major surface. An isolation material is recessed within a trench region below the major surface of the semiconductor layer. An epitaxial layer is formed overlying a portion of the major surface and on an active region forming a sidewall of the trench.

Abstract: A method for forming an integrated circuit system includes providing an integrated circuit device; and forming an integrated contact over the integrated circuit device including: providing a via over the integrated circuit device; forming a selective metal in the via; forming at least one nanotube over the selective metal; and forming a cap over the nanotubes.

Abstract: MOS transistors and methods for fabricating MOS transistors are provided. One exemplary method comprises providing a silicon substrate having an impurity-doped region disposed at a surface of the silicon substrate. A first layer is sputter-deposited onto the impurity-doped region using a first sputtering target comprising nickel and a first concentration of platinum. A second layer is sputter-deposited onto the first layer using a second sputtering target comprising nickel and a second concentration of platinum, wherein the second concentration of platinum is less than the first.

Abstract: A method of manufacturing an integrated circuit (IC) utilizes a shallow trench isolation (STI) technique. The shallow trench isolation technique is used in strained silicon (SMOS) process. The liner for the trench is formed from a semiconductor or metal layer which is deposited in a low temperature process which reduces germanium outgassing. The low temperature process can be a ALD process.

Abstract: A sidewall spacer structure is formed adjacent to a gate structure whereby a material forming an outer surface of the sidewall spacer structure contains nitrogen. Subsequent to its formation the sidewall spacer structure is annealed to harden the sidewall spacer structure from a subsequent cleaning process. An epitaxial layer is formed subsequent to the cleaning process.

Abstract: A sidewall spacer structure is formed adjacent to a gate structure whereby a material forming an outer surface of the sidewall spacer structure contains nitrogen. Subsequent to its formation the sidewall spacer structure is annealed to harden the sidewall spacer structure from a subsequent cleaning process. An epitaxial layer is formed subsequent to the cleaning process.

Abstract: A low contact resistance CMOS integrated circuit and method for its fabrication are provided. The CMOS integrated circuit comprises a first transition metal electrically coupled to the N-type circuit regions and a second transition metal different than the first transition metal electrically coupled to the P-type circuit regions. A conductive barrier layer overlies each of the first transition metal and the second transition metal and a plug metal overlies the conductive barrier layer.

Abstract: A method of manufacturing an integrated circuit (IC) utilizes a shallow trench isolation (STI) technique. The shallow trench isolation technique is used in strained silicon (SMOS) process. The liner for the trench is formed from a semiconductor or metal layer which is deposited in a low temperature process which reduces germanium outgassing. The low temperature process can be a CVD process.

Abstract: A semiconductor component having a titanium silicide contact structure and a method for manufacturing the semiconductor component. A layer of dielectric material is formed over a semiconductor substrate. An opening having sidewalls is formed in the dielectric layer and exposes a portion of the semiconductor substrate. Titanium silicide is disposed on the dielectric layer, sidewalls, and the exposed portion of the semiconductor substrate. The titanium silicide may be formed by disposing titanium on the dielectric layer, sidewalls, and exposed portion of the semiconductor substrate and reacting the titanium with silane. Alternatively, the titanium silicide may be sputter deposited. A layer of titanium nitride is formed on the titanium silicide. A layer of tungsten is formed on the titanium nitride. The tungsten, titanium nitride, and titanium silicide are polished to form the contact structures.

Abstract: Methods for fabricating low contact resistance CMOS integrated circuits are provided. In accordance with an embodiment, a method for fabricating a CMOS integrated circuit including an NMOS transistor and a PMOS transistor disposed in and on a silicon-comprising substrate includes depositing a first silicide-forming metal on the NMOS and PMOS transistors. The first silicide-forming metal forms a silicide at a first temperature. At least a portion of the first silicide-forming metal is removed from the NMOS or PMOS transistor and a second silicide-forming metal is deposited. The second silicide-forming metal forms a silicide at a second temperature that is different from the first temperature. The first silicide-forming metal and the second silicide-forming metal are heated at a temperature that is no less than the higher of the first temperature and the second temperature.

Abstract: A via is formed in contact with a conductive line, whereby the via is offset from the conductive line so that the via extends beyond the conductive line. In accordance with a specific embodiment, a portion of the via contacts a sidewall of the conductive line.

Abstract: A low contact resistance CMOS integrated circuit and method for its fabrication are provided. The CMOS integrated circuit comprises a first transition metal electrically coupled to the N-type circuit regions and a second transition metal different than the first transition metal electrically coupled to the P-type circuit regions. A conductive barrier layer overlies each of the first transition metal and the second transition metal and a plug metal overlies the conductive barrier layer.

Abstract: Methods and systems for permitting thickness control of the selective epitaxial growth (SEG) layer in a semiconductor manufacturing process, for example raised source/drain applications in CMOS technologies, are presented. These methods and systems provide the capability to measure the thickness of an SEG film in-situ utilizing optical ellipsometry equipment during or after SEG layer growth, prior to removing the wafer from the SEG growth tool. Optical ellipsometry equipment can be integrated into the SEG platform and control software, thus providing automated process control (APC) capability for SEG thickness. The integration of the ellipsometry equipment may be varied, dependent upon the needs of the fabrication facility, e.g., integration to provide ellipsometer monitoring of a single process tool, or multiple tool monitoring, among other configurations.

Abstract: A memory system includes a substrate, forming an insulator over the substrate, forming a gate layer over the insulator, forming a stability layer over the gate layer, and forming a conductive layer over the stability layer.

Abstract: A method for forming an integrated circuit system is provided including forming a substrate having a core region and a periphery region, forming a charge storage stack over the substrate in the core region, forming a gate stack with a stack header having a metal portion over the substrate in the periphery region, and forming a memory system with the stack header over the charge storage stack.